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    • 3. 发明授权
    • System and method for compressive scanning electron microscopy
    • 压缩扫描电子显微镜的系统和方法
    • US08933401B1
    • 2015-01-13
    • US14063319
    • 2013-10-25
    • Lawrence Livermore National Security, LLC
    • Bryan W. Reed
    • G01N23/00G21K7/00G02B26/10H01J37/28
    • H01J37/28H01J37/222H01J37/265H01J2237/226H01J2237/2802
    • A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over substantially an entire sample, with each scan varying in electron-illumination intensity over a course of the scan. A signal acquisition system may be used for obtaining at least one of an image, a diffraction pattern, or a spectrum from the scans, the image, diffraction pattern, or spectrum representing only information from at least one of a select subplurality or linear combination of all pixel locations comprising the image. A dataset may be produced from the information. A subsystem may be used for mathematically analyzing the dataset to predict actual information that would have been produced by each pixel location of the image.
    • 公开了一种扫描透射电子显微镜(STEM)系统。 该系统可以利用电子束扫描系统,该系统配置成在基本上整个样本上产生多个电子束扫描,每个扫描在扫描过程中以电子照射强度变化。 信号采集系统可用于从扫描,图像,衍射图或频谱中的至少一个图像,衍射图案或光谱中获得至少一个,仅代表来自以下的至少一个的信息:选择子集或线性组合 包括图像的所有像素位置。 数据集可以从信息中产生。 子系统可用于数学分析数据集以预测由图像的每个像素位置产生的实际信息。