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    • 3. 发明授权
    • Charged-particle-beam projection-exposure apparatus with focus and tilt
adjustments
    • 具有聚焦和倾斜调整的带电粒子束投影曝光设备
    • US5894132A
    • 1999-04-13
    • US822857
    • 1997-03-24
    • Mamoru NakasujiShohei Suzuki
    • Mamoru NakasujiShohei Suzuki
    • G03F7/20G03F7/207H01J37/304H01J37/317H01L21/027H01L21/30
    • B82Y10/00B82Y40/00H01J37/304H01J37/3174H01J2237/20285
    • Charged-particle-beam projection-exposure apparatus are disclosed for transferring patterns from a mask to a sensitized substrate. By measuring the height and tilt of regions of the sensitized substrate relative to the location of the projected image of the mask before the regions are exposed to the charged particle beam, the charged-particle-beam optical system and the wafer tilt and position can be corrected, maintaining a high-quality image of the mask on the sensitized substrate. Measuring the height and tilt of a region of the sensitized substrate before exposure of that region begins has several advantages. The measurements permit adjustments so that high-resolution images of the mask are transferred to the sensitized substrate even if wafer height and tilt vary rapidly. In addition, because the measurements of tilt and height occur away from the exposure region, height and tilt measuring devices do not restrict the placement or size of charged-particle-beam optical elements.
    • 公开了带电粒子束投影曝光装置,用于将图案从掩模转印到敏化基板上。 通过在区域暴露于带电粒子束之前相对于掩模的投影图像的位置测量感光基板的区域的高度和倾斜度,带电粒子束光学系统和晶片倾斜和位置可以是 校正,在感光基板上保持掩模的高质量图像。 在该区域曝光之前测量敏化基底的区域的高度和倾斜具有几个优点。 测量允许调整,使得即使晶片高度和倾斜快速变化,掩模的高分辨率图像也转移到敏化基板。 此外,由于倾斜和高度的测量远离曝光区域发生,所以高度和倾斜测量装置不限制带电粒子束光学元件的放置或尺寸。
    • 6. 发明授权
    • Magnetic field gradient coil system
    • 磁场梯度线圈系统
    • US5113166A
    • 1992-05-12
    • US447863
    • 1989-12-08
    • Goh MiyajimaTakao TakahashiTuyosi ShudoShohei Suzuki
    • Goh MiyajimaTakao TakahashiTuyosi ShudoShohei Suzuki
    • G01R33/20A61B5/026A61B5/055G01R33/385H01F7/20
    • G01R33/385
    • A magnetic field gradient coil system for use in a magnetic resonance imaging apparatus forming a magnetic field gradient in a direction of a Z-axis of an X, Y, Z orthogonal coordinate system having its origin at a selected position in the imaging apparatus comprises one pair of first coils and one pair of second coils having their centers on the Z-axis and having the same radius, the coils of each coil pair disposed symmetrically with respect to an XY plane including the origin, the coils of the second coil pair disposed more distant from the origin than the coils of the first coil pair, the coils of the first and second coil pairs disposed on one side of the origin supplied with current in the same direction, the coils disposed on the other side of the origin supplied with current opposite to the direction of current in the coils on the one side of the origin, each of the coils of the first coil pair disposed where the value of the Z-axis magnetic field component of first order at a selected position on the Z-axis becomes substantially maximum, and the ampere-turn and position of each of the coils of the second coil pair selected so that, at the selected position, the Z-axis magnetic field components of third and fifth orders provided by the second coil pair have values which can substantially cancel the Z-axis magnetic field components of third and fifth orders provided by the first coil pair.
    • 一种磁场梯度线圈系统,用于在成像装置的选定位置处形成其原点位于X,Y,Z正交坐标系的Z轴方向上的磁场梯度的磁共振成像装置包括一个 一对第一线圈和一对第二线圈,其中心在Z轴上并且具有相同的半径,每个线圈对的线圈相对于包括原点的XY平面对称设置,第二线圈对的线圈被设置 离原点远离第一线圈对的线圈,设置在原点一侧的第一和第二线圈对的线圈沿相同方向提供电流,设置在原点另一侧的线圈被提供 与原点一侧的线圈中的电流方向相反的电流,第一线圈对的每个线圈设置在第一级的Z轴磁场分量的值 Z轴上的选择位置变得基本上最大,并且选择第二线圈对的每个线圈的安匝和位置,使得在选定位置处提供第三和第五阶的Z轴磁场分量 通过第二线圈对具有可以基本上消除由第一线圈对提供的第三和第五阶的Z轴磁场分量的值。
    • 7. 发明授权
    • Combustion chamber for side-valve type internal-combustion engine
    • 侧阀式内燃机燃烧室
    • US4246882A
    • 1981-01-27
    • US31527
    • 1979-04-19
    • Kojiro KikutaKatsumi KuriharaShohei SuzukiTeruaki Sasaki
    • Kojiro KikutaKatsumi KuriharaShohei SuzukiTeruaki Sasaki
    • F02B23/00F02B23/08
    • F02B23/00F02B2275/22Y02T10/125
    • A side-valve type internal-combustion engine has a cylinder head formed with a recess or recesses each of which forms a combustion chamber with the associated cylinder and which is large enough to permit the alternate flow of suction or exhaust gas between the suction (inlet) or exhaust valve and the cylinder. In plan, the configuration of the recess is generally L-shaped and covers the both valves and part of the cylinder. One leg of the L-shaped recess provides a straight line passage between the suction or inlet valve and the cylinder, while the exhaust valve and the cylinder are connected in series by the one leg of the recess from the cylinder to the suction valve and then by the other leg from the suction valve to the exhaust valve. The height of the recess is reduced in the region directly above the exhaust valve to a level considerably lower than the rest of the recess so that the upper wall surface of the recess is very close to the exhaust valve when it is in its uppermost position.
    • 侧阀式内燃机具有形成有凹部或凹部的气缸盖,每个凹部或凹部与相关联的气缸形成燃烧室,并且足够大以允许吸入或排出气体(吸入口 )或排气阀和气缸。 在平面图中,凹槽的形状通常为L形并且覆盖了两个阀和气缸的一部分。 L形凹槽的一条腿在抽吸阀或进气阀和气缸之间提供直线通道,而排气阀和气缸通过凹部的一个支腿从气缸到吸入阀串联连接,然后 通过另一条腿从吸入阀到排气阀。 凹槽的高度在排气阀正上方的区域减小到比其余的凹槽明显低的水平,使得当凹槽的上壁表面处于其最高位置时非常靠近排气阀。