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1. 发明授权

US09859099B2 Exposure apparatus and exposure method 有权
公开(公告)号：US09859099B2
公开(公告)日：2018-01-02
申请号：US15052881
申请日：2016-02-25
申请人： ADVANTEST CORPORATION
发明人： Akio Yamada , Masahiro Seyama , Hideki Nasuno
IPC分类号： H01J37/244 , H01J37/20 , H01J37/304 , H01J37/317
CPC分类号： H01J37/3045 , H01J37/20 , H01J37/244 , H01J37/3177 , H01J2237/043 , H01J2237/0435 , H01J2237/15 , H01J2237/2025 , H01J2237/20285 , H01J2237/30455 , H01J2237/31766 , H01J2237/31774
摘要： Complex and fine patterns may be formed by an exposure apparatus that decreases movement error of a stage including a beam generating section that generates a charged particle beam, a stage section that has a sample mounted thereon and moves the sample relative to the beam generating section, a detecting section that detects a position of the stage section, a predicting section that generates a predicted drive amount obtained by predicting a drive amount of the stage section based on a detected position of the stage section, and an irradiation control section that performs irradiation control for irradiating the sample with the charged particle beam, based on the predicted drive amount.

2. 发明授权

US09728373B2 Pattern inspection apparatus and pattern inspection method 有权
公开(公告)号：US09728373B2
公开(公告)日：2017-08-08
申请号：US15338637
申请日：2016-10-31
申请人： NuFlare Technology, Inc.
发明人： Nobutaka Kikuiri , Ikunao Isomura
IPC分类号： H01J37/26 , H01J37/22 , H01J37/20 , H01J37/244 , H01J37/141 , H01J37/04
CPC分类号： H01J37/222 , H01J37/045 , H01J37/141 , H01J37/20 , H01J37/244 , H01J37/3026 , H01J37/3177 , H01J2237/0435 , H01J2237/0453 , H01J2237/20285 , H01J2237/20292 , H01J2237/2448 , H01J2237/2806 , H01J2237/2817 , H01J2237/30422 , H01J2237/30438 , H01J2237/31762 , H01J2237/31764
摘要： A pattern inspection apparatus includes a data processing circuitry to input detection data based on a secondary electron from a substrate for each irradiation unit region, where n1×m1 irradiation unit regions in irradiation unit regions configure one of n2×m2 image reference regions configuring an inspection measurement image, to calculate, for each of the n2×m2 image reference regions, a statistic value acquired from the detection data of all the n1×m1 irradiation unit regions in one of the n2×m2 image reference regions, and to define the statistic value as image reference data for the image reference region, and a comparison processing circuitry to receive transmission of the image reference data for each image reference region, and to compare, using a reference image corresponding to the inspection measurement image composed of the n2×m2 image reference regions, the measurement image with the reference image for each image reference region.

3. 发明申请

US20170169993A1 MULTI CHARGED PARTICLE BEAM APPARATUS, AND SHAPE ADJUSTMENT METHOD OF MULTI CHARGED PARTICLE BEAM IMAGE 有权
公开(公告)号：US20170169993A1
公开(公告)日：2017-06-15
申请号：US15354186
申请日：2016-11-17
申请人： NuFlare Technology, Inc.
发明人： Osamu IIZUKA
IPC分类号： H01J37/30 , H01J37/20 , H01J37/244 , H01J37/317 , H01J37/04
CPC分类号： H01J37/3005 , H01J37/045 , H01J37/20 , H01J37/244 , H01J37/3177 , H01J2237/0435 , H01J2237/20285 , H01J2237/20292 , H01J2237/2448 , H01J2237/30433
摘要： A multi charged particle beam apparatus includes a forming aperture array substrate, where there are formed a plurality of first openings and a plurality of second openings on the periphery of the whole plurality of first openings, each being larger than each of the plurality of first openings, to form multi-beams by the plurality of first openings, and to be able to form a plurality of calibration beams by the plurality of second openings, a shutter to select, one by one, one of the plurality of calibration beams formed by passing through the plurality of second openings, in accordance with a slide position, and a detector to detect a secondary electron including a reflected electron generated by scanning a mark by deflecting the selected calibration beam, in the state of all the multi-beams controlled to be OFF.

4. 发明授权

US09601305B2 Specimen sample holder for workpiece transport apparatus 有权
公开(公告)号：US09601305B2
公开(公告)日：2017-03-21
申请号：US14538332
申请日：2014-11-11
申请人： Howard Hughes Medical Institute
发明人： John H. Price , Dravida Bock
IPC分类号： H01J37/20 , G01N1/28 , H01J37/26 , H01J37/02 , H01J37/18 , G01N35/00 , G01N1/32
CPC分类号： H01J37/20 , G01N1/32 , G01N35/00732 , H01J37/023 , H01J37/185 , H01J37/261 , H01J2237/2007 , H01J2237/201 , H01J2237/20278 , H01J2237/20285 , H01J2237/20292 , H01J2237/204 , H01J2237/26 , H01J2237/2602
摘要： An electron microscope specimen sample holder including a thin sheet base member with a first surface and an opposing second surface, the first surface defining a seat and support surface for a specimen holding film held by the sample holder, the base member including an aperture through the second surface exposing the holding film held by the sample holder, and including a grip engagement zone defined at least on part of the first surface arranged to engage a gripping device, and wherein at least one of the first or second surface has machine readable structures formed thereon arranged in patterns embodying data that defines at least one predetermined characteristic of the sample holder.

5. 发明申请

US20150380213A1 CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM DRAWING METHOD 有权
标题翻译：充电颗粒光束绘图装置和充电颗粒光束绘图方法
公开(公告)号：US20150380213A1
公开(公告)日：2015-12-31
申请号：US14717444
申请日：2015-05-20
申请人： NuFlare Technology, Inc.
发明人： Hideyuki TSURUMAKI
IPC分类号： H01J37/317 , H01J37/20 , H01J37/04 , H01J37/06
CPC分类号： H01J37/3174 , H01J37/3023 , H01J2237/20285 , H01J2237/31766 , H01J2237/31776
摘要： A charged particle beam drawing apparatus has a drawing unit that directs a charged particle beam and draws a pattern on a target and also has a control calculator that controls the drawing unit. The control calculator has a speed calculating unit configured to calculate a first drawing speed in a first area in a drawing area on the target according to a run-up start coordinate, a drawing start coordinate, and a predetermined first acceleration, and calculate the range of the first area according to the run-up start coordinate, the first acceleration, and a second drawing speed, and also has a drawing control unit configured to control the drawing unit so that, in the first area, drawing is performed at the first drawing speed and, in a second area that follows the first area, drawing is performed at the second drawing speed.
摘要翻译：带电粒子束描绘装置具有引导带电粒子束并在目标上绘制图案的绘图单元，并且还具有控制绘图单元的控制计算器。控制计算器具有速度计算单元，其被配置为根据起动起始坐标，绘图开始坐标和预定的第一加速度来计算目标的绘图区域中的第一区域中的第一绘制速度，并且计算该范围根据起动开始坐标，第一加速度和第二牵引速度的第一区域，并且还具有绘图控制单元，其被配置为控制绘图单元，使得在第一区域中，在第一区域执行绘图在第一区域的第二区域中，以第二拉伸速度进行拉伸。

6. 发明授权

US09103769B2 Apparatus and methods for controlling electron microscope stages 有权
标题翻译：用于控制电子显微镜阶段的装置和方法
公开(公告)号：US09103769B2
公开(公告)日：2015-08-11
申请号：US12968024
申请日：2010-12-14
申请人： Thomas Duden
发明人： Thomas Duden
IPC分类号： G01N23/205 , H01J37/20 , G01N23/203
CPC分类号： G01N23/205 , G01N23/203 , H01J37/20 , H01J2237/20285
摘要： Methods and apparatus for generating an image of a specimen with a microscope (e.g., TEM) are disclosed. In one aspect, the microscope may generally include a beam generator, a stage, a detector, and an image generator. A plurality of crystal parameters, which describe a plurality of properties of a crystal sample, are received. In a display associated with the microscope, an interactive control sphere based at least in part on the received crystal parameters and that is rotatable by a user to different sphere orientations is presented. The sphere includes a plurality of stage coordinates that correspond to a plurality of positions of the stage and a plurality of crystallographic pole coordinates that correspond to a plurality of polar orientations of the crystal sample. Movement of the sphere causes movement of the stage, wherein the stage coordinates move in conjunction with the crystallographic coordinates represented by pole positions so as to show a relationship between stage positions and the pole positions.
摘要翻译：公开了用显微镜（例如TEM）产生样本的图像的方法和装置。在一个方面，显微镜通常可以包括光束发生器，台，检测器和图像发生器。接收描述晶体样品的多个性质的多个晶体参数。在与显微镜相关联的显示器中，呈现出至少部分地基于所接收的晶体参数并且可由用户旋转到不同球体取向的交互式控制球。球包括对应于舞台的多个位置的多个舞台坐标以及对应于晶体样本的多个极性取向的多个结晶极坐标。球的运动导致舞台的移动，其中舞台坐标与由杆位置表示的结构坐标相结合，以便显示舞台位置与杆位置之间的关系。

7. 发明申请

US20150144804A1 Charged Particle Beam Apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US20150144804A1
公开(公告)日：2015-05-28
申请号：US14406415
申请日：2013-06-03
申请人： Hitachi High-Technologies Corporation
发明人： Tohru Ando , Kunji Shigeto , Shotaro Tamayama , Yusuke Narita
IPC分类号： H01J37/20 , H01J37/26 , H01J37/22 , H01J37/28
CPC分类号： H01J37/20 , H01J37/22 , H01J37/261 , H01J37/265 , H01J37/28 , H01J2237/2007 , H01J2237/202 , H01J2237/20285 , H01J2237/22 , H01J2237/2801 , H01J2237/2809
摘要： In many cases, the charged particle beam apparatus is used basically for observation at a magnification of 10,000 times or higher. It is thus difficult to recognize how the orientation of a sample seen with the naked eye corresponds to the origination of the sample appearing on an acquired image. This makes it difficult intuitively to grasp the tilt direction and other details of the sample. An object of this invention is to provide a charged particle beam apparatus allowing the orientation and the tilted state of the sample to be grasped intuitively. The apparatus includes: a charged particle beam source that emits a charged particle beam; a charged particle beam optical system that irradiates the sample with the charged particle beam; a platform on which the sample is placed; a stage capable of moving the platform at least in a tilt direction; a display unit that displays a tilted state of the platform by use of a simulated image of the platform; an operation input unit that allows a user to designate the position and direction of the sample for observation; and a control unit that controls the amount of movement of the stage based on a signal input from the operation input unit.
摘要翻译：在许多情况下，带电粒子束装置基本上用于10,000倍或更高倍率的观察。因此难以识别用肉眼看到的样本的取向如何对应于出现在所获取的图像上的样本的始发。这使得难以直观地掌握样品的倾斜方向和其他细节。本发明的目的在于提供一种能够直观地掌握样品的取向和倾斜状态的带电粒子束装置。该装置包括：发射带电粒子束的带电粒子束源; 带电粒子束光学系统，其向带电粒子束照射样品; 放置样品的平台; 能够至少沿倾斜方向移动平台的台阶; 显示单元，其通过使用所述平台的模拟图像来显示所述平台的倾斜状态; 操作输入单元，其允许用户指定用于观察的样本的位置和方向; 以及控制单元，其基于从操作输入单元输入的信号来控制平台的移动量。

8. 发明授权

US09030649B2 Target positioning device, method for driving a target positioning device, and a lithography system comprising such a target positioning device 有权
标题翻译：目标定位装置，用于驱动目标定位装置的方法，以及包括这种目标定位装置的光刻系统
公开(公告)号：US09030649B2
公开(公告)日：2015-05-12
申请号：US13612496
申请日：2012-09-12
申请人： Jerry Johannes Martinus Peijster
发明人： Jerry Johannes Martinus Peijster
IPC分类号： G03B27/58 , H02K41/02 , G03F7/20 , H01J37/20 , H01J37/317 , B82Y10/00 , B82Y40/00
CPC分类号： G03B27/58 , B82Y10/00 , B82Y40/00 , G03F7/70716 , G03F7/70725 , G03F7/70758 , G03F7/70841 , H01J37/20 , H01J37/3177 , H01J2237/0266 , H01J2237/16 , H01J2237/2006 , H01J2237/20221 , H01J2237/20285 , H02K41/02
摘要： A target positioning device, in particular for a lithography system, comprising a carrier for carrying a target, and a stage for carrying and moving the carrier along a first direction (X). The stage comprising two X-stage bases, both arranged on top of a common base plate, each X-stage base carries an X-stage carriage, and a Y-beam comprising a Y-stage for carrying said carrier and moving the carrier said carrier in a second direction (Y). The Y-beam bridges the space between the X-stage carriages and is connected to the X-stage carriages via a flexible coupling. The device further comprises two motors each for driving a corresponding X-stage carriage along its corresponding X-stage base. The two motors are arranged at least substantially below the stage. Each motor of said two motors is coupled to an eccentric cam or crank which is connected to the corresponding X-stage carriage via a crank shaft.
摘要翻译：特别是用于光刻系统的目标定位装置，包括用于承载目标的载体，以及用于沿着第一方向（X）承载和移动载体的载物台。该平台包括两个X平台，两者都布置在公共基板的顶部上，每个X级底座承载X级托架，Y形梁包括Y级，用于承载所述托架并使托架移动载体在第二方向（Y）上。 Y型梁桥接X级滑架之间的空间，并通过柔性联轴器连接到X级滑架。该装置还包括两个电动机，每个电动机用于沿其相应的X级基座驱动相应的X档架。这两个电动机至少在平台的下方布置。所述两个电动机的每个电动机联接到偏心凸轮或曲柄，所述偏心凸轮或曲柄通过曲柄轴连接到相应的X档架上。

9. 发明申请

US20140117251A1 STAGE DEVICE AND CONTROL METHOD FOR STAGE DEVICE 有权
标题翻译：舞台设备和舞台设备的控制方法
公开(公告)号：US20140117251A1
公开(公告)日：2014-05-01
申请号：US14124722
申请日：2012-06-06
申请人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
发明人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20242 , H01J2237/20285 , H01J2237/20292 , H01J2237/28
摘要： In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.
摘要翻译：在本发明中，舞台装置被配置为：在标本，样本保持器或允许测量位置和方向的旋转台上提供标记; 根据预定的操作模式执行舞台的旋转和平移运动; 测量标记的位置和方向; 从该测量结果中确定旋转台的旋转中心位置; 通过计算用于校正旋转误差的旋转角度校正值和用于校正旋转中心位置的位置变化的平移校正值，进一步创建相对于旋转角度的校正值表; 从校正值表获得与输入的旋转角度指令值或实际旋转角度相关联的校正值; 并且通过校正所输入的旋转角度和平移位置指令值或检测到的旋转角度和平移位置来控制舞台装置。

10. 发明申请

US20130098274A1 SAMPLE STAGE DEVICE 有权
标题翻译：样本级设备
公开(公告)号：US20130098274A1
公开(公告)日：2013-04-25
申请号：US13806989
申请日：2011-06-23
申请人： Takashi Kobayashi
发明人： Takashi Kobayashi
IPC分类号： H01J37/20 , H01L21/68
CPC分类号： H01J37/20 , H01J2237/20285 , H01J2237/20292 , H01J2237/2817 , H01L21/68
摘要： A sample stage device (10) is so configured as to calculate ideal position information xtg(i), tg(i) per predetermined period that is unaffected by drive conditions relating to gaps (25, 26), etc., and to determine, per predetermined cycle and in real time, deviations dx(i), dy(i) between real-time measured positions x(i), y(i) by position detectors comprising laser interferometers (33, 34), etc., and ideal position information xtg(i), tg(i). In addition, it calculates, based on deviations dx(i), dy(i) thus determined, such speed command values vx(i), vy(i) for motors (27, 28) that measured values x(i), y(i) would follow ideal position information xtg(i), tg(i), and performs stable and high-speed positioning control for a sample table (11) through feedback control that controls speed in real time. Thus, with respect to a sample stage device, it is possible to provide a stable and high-speed positioning control method for a sample table, which is capable of suppressing noise caused by thermal drift and vibration, without being affected by drive conditions, such as the initial states of gaps, etc.
摘要翻译：样品台装置（10）被配置为计算不受与间隙（25,26）等有关的驱动条件的影响的每预定周期的理想位置信息xtg（i），tg（i）并且实时地通过包括激光干涉仪（33,34）的位置检测器等实时测量位置x（i），y（i）之间的偏差dx（i），dy（i）和理想位置信息xtg（i），tg（i）。另外，根据如此确定的偏差dx（i），dy（i），计算出测量值x（i），y（i）的电动机（27,28）的速度指令值vx（i），vy （i）将遵循理想位置信息xtg（i），tg（i），并且通过实时控制速度的反馈控制对样本表（11）执行稳定和高速定位控制。因此，对于样品台装置，可以提供一种用于样品台的稳定且高速的定位控制方法，其能够抑制由热漂移和振动引起的噪声，而不受驱动条件的影响，例如作为差距的初始状态等

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