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    • 9. 发明授权
    • Micromachine and method of manufacturing the micromachine
    • 微机械和微机械的制造方法
    • US07402877B2
    • 2008-07-22
    • US10522080
    • 2003-07-14
    • Masahiro TadaTakashi KinoshitaTakeshi TaniguchiKoichi Ikeda
    • Masahiro TadaTakashi KinoshitaTakeshi TaniguchiKoichi Ikeda
    • H01L29/82
    • H03H9/2463H03H3/0072
    • To obtain a micromachine for use as a high frequency filter having a high Q value and a higher frequency band.In a micromachine (20) including: an input electrode (7b), an output electrode (7a), and a support electrode (7c) disposed on a substrate (4); and a band-shaped vibrator electrode (15) formed by laying a beam (vibrating part) (16) over the output electrode (7a) with a space part (A) interposed between the output electrode (7a) and the vibrator electrode (15) in a state in which both end parts of the vibrator electrode (15) are supported on the input electrode (7b) and the substrate (4) with the support electrode (7c) interposed between the substrate (4) and the vibrator electrode (15), the entire surface of both end parts of the vibrator electrode (15) from an edge of the end parts to the beam (16) is completely fixed to the input electrode (7b) and the support electrode (7c).
    • 为了获得用作具有高Q值和较高频带的高频滤波器的微机械。 在微机械(20)中,包括:输入电极(7b),输出电极(7a)和设置在基板(4)上的支撑电极; 以及通过将输入电极(7a)上的光束(振动部分)(16)放置在输出电极(7a)和振动器电极(7a)之间的空间部分(A)而形成的带状振动器电极(15) (15)的两个端部被支撑在输入电极(7b)和基板(4)的状态下,支撑电极(7c)插入在基板(4)和 振动电极(15)从振动电极(15)的两端部到端部(16)的边缘的整个表面完全固定到输入电极(7b)和支撑电极 7 c)。