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1. 发明申请

US20060138351A1 Laser anneal apparatus 失效
公开(公告)号：US20060138351A1
公开(公告)日：2006-06-29
申请号：US11299789
申请日：2005-12-13
申请人： Masayuki Jyumonji , Yukio Taniguchi , Masakiyo Matsumura , Masato Hiramatsu , Yoshio Takami
发明人： Masayuki Jyumonji , Yukio Taniguchi , Masakiyo Matsumura , Masato Hiramatsu , Yoshio Takami
IPC分类号： A61N5/00 , B23K26/00
CPC分类号： B23K26/066 , B23K26/0006 , B23K26/03 , B23K26/032 , B23K26/034 , B23K26/0838 , B23K26/354 , B23K26/40 , B23K2101/40 , B23K2103/50 , B23K2103/56 , C30B13/24 , C30B29/06 , C30B35/00
摘要： A laser anneal apparatus is provided with a laser source; a homogenizing optical system disposed in an optical path of laser light emitted from the laser source to homogenize an intensity distribution of the laser light in a section which is perpendicular to the optical path; a phase shifter disposed in the optical path of the laser light passed through the homogenizing optical system to produce an intensity distribution pattern of the laser light in the section which is perpendicular to the optical path; a photoreceptor device disposed in the optical path of the laser light passed through the phase shifter to intercept a part of the laser light and to measure a quantity of the intercepted laser light; and an image-forming optical system disposed in the optical path of the laser light passed through the photoreceptor device to focus the laser light on a substrate to be treated.

2. 发明授权

US07550694B2 Laser anneal apparatus 失效
标题翻译：激光退火装置
公开(公告)号：US07550694B2
公开(公告)日：2009-06-23
申请号：US11299789
申请日：2005-12-13
申请人： Masayuki Jyumonji , Yukio Taniguchi , Masakiyo Matsumura , Masato Hiramatsu , Yoshio Takami
发明人： Masayuki Jyumonji , Yukio Taniguchi , Masakiyo Matsumura , Masato Hiramatsu , Yoshio Takami
IPC分类号： B23K26/02 , H01L21/268
CPC分类号： B23K26/066 , B23K26/0006 , B23K26/03 , B23K26/032 , B23K26/034 , B23K26/0838 , B23K26/354 , B23K26/40 , B23K2101/40 , B23K2103/50 , B23K2103/56 , C30B13/24 , C30B29/06 , C30B35/00
摘要： A laser anneal apparatus is provided with a laser source; a homogenizing optical system disposed in an optical path of laser light emitted from the laser source to homogenize an intensity distribution of the laser light in a section which is perpendicular to the optical path; a phase shifter disposed in the optical path of the laser light passed through the homogenizing optical system to produce an intensity distribution pattern of the laser light in the section which is perpendicular to the optical path; a photoreceptor device disposed in the optical path of the laser light passed through the phase shifter to intercept a part of the laser light and to measure a quantity of the intercepted laser light; and an image-forming optical system disposed in the optical path of the laser light passed through the photoreceptor device to focus the laser light on a substrate to be treated.
摘要翻译：激光退火装置设置有激光源; 均匀化光学系统，其设置在从所述激光源发射的激光的光路中，以使所述激光在与所述光路垂直的部分中的强度分布均匀化; 设置在通过均匀化光学系统的激光的光路中的相移器，以在垂直于光路的部分中产生激光的强度分布图案; 设置在通过所述移相器的激光的光路中的感光体装置，以截取激光的一部分并测量被截取的激光的量; 以及设置在穿过感光器件的激光的光路中的成像光学系统，以将激光聚焦在待处理的基底上。

3. 发明授权

US07345746B2 Method of and apparatus for in-situ monitoring of crystallization state 失效
标题翻译：用于现场监测结晶态的方法和装置
公开(公告)号：US07345746B2
公开(公告)日：2008-03-18
申请号：US11515023
申请日：2006-09-01
申请人： Yoshio Takami
发明人： Yoshio Takami
IPC分类号： G01N21/00
CPC分类号： H01L21/02686 , C30B13/28 , G01N21/8422 , G01N2021/8477 , H01L21/2026 , H01L21/67115 , H01L21/67253 , H01L22/26 , H01L2924/0002 , H01L2924/00
摘要： In-situ monitoring of a crystallization state is used for laser anneal processing for applying an energy line irradiation for at least one of crystallization of a thin film and promotion of the crystallization. A method is characterized by simultaneously irradiating at least a plurality of monitoring places in a region having a predetermined area of at least one of the surface and the underside of the thin film by a monitor light for monitoring a crystallization state of the thin film at least during or after of before, during and after the energy line irradiation directly or through a substrate, and measuring a temporal change of the intensity of at least one of a reflected light and a transmitted light, from the surface or the underside of the thin film, of the monitor light as a light intensity distribution related to the positions of the monitoring places. Apparatus according to the invention perform such methods.
摘要翻译：结晶状态的原位监测用于激光退火处理，用于施加能量线照射用于薄膜结晶中的至少一种并促进结晶。一种方法的特征在于，通过监测光同时照射具有至少一个薄膜的表面和底面的预定面积的区域中的至少多个监测位置，用于至少监测薄膜的结晶状态在直接或通过基板的能量线照射之前，之后和之后的过程中或之后，从薄膜的表面或底面测量反射光和透射光中的至少一个的强度的时间变化作为与监视位置的位置相关的光强度分布的监视光。根据本发明的装置执行这种方法。

4. 发明申请

US20070138146A1 LASER CRYSTALLIZATION APPARATUS AND CRYSTALLIZATION METHOD 失效
标题翻译：激光结晶装置和结晶方法
公开(公告)号：US20070138146A1
公开(公告)日：2007-06-21
申请号：US11608947
申请日：2006-12-11
申请人： Yoshio Takami , Tatsuhiro Taguchi
发明人： Yoshio Takami , Tatsuhiro Taguchi
IPC分类号： B23K26/00
CPC分类号： B23K26/043 , B23K26/04 , B23K26/0622 , B23K26/066 , B23K26/0853 , B23K2101/40 , H01L27/1285
摘要： A laser crystallization apparatus and a crystallization method with a high throughput are provided. Laser light having a predetermined light intensity distribution is irradiated to a semiconductor film to melt and crystallize, wherein a irradiation position is positioned very quickly and with a high positional accuracy, thereby forming the semiconductor film having a large crystal grain size. A laser crystallization apparatus according to one aspect of the present invention comprises a laser light source, a phase shifter modulating laser light to give a predetermined light intensity distribution, marks provided on the substrate, a substrate holding stage moving in a predetermined direction, mark measuring means measuring a time at which the mark passes a predetermined position, and signal generating means generating a trigger signal indicating the irradiation of the laser light based on the measured time.
摘要翻译：提供了具有高通量的激光结晶装置和结晶方法。将具有预定的光强度分布的激光照射到半导体膜上以熔融结晶，其中照射位置非常快速且位置精度高，从而形成具有大晶粒尺寸的半导体膜。根据本发明的一个方面的激光结晶装置包括激光光源，调制激光以产生预定光强度分布的移相器，设置在基板上的标记，沿预定方向移动的基板保持台，标记测量意味着测量标记通过预定位置的时间，以及根据测量时间产生指示激光照射的触发信号的信号发生装置。

5. 发明授权

US07130048B2 Method and apparatus for forming substrate for semiconductor or the like 失效
标题翻译：用于形成用于半导体等的衬底的方法和装置
公开(公告)号：US07130048B2
公开(公告)日：2006-10-31
申请号：US10717552
申请日：2003-11-21
申请人： Yoshio Takami
发明人： Yoshio Takami
IPC分类号： G01J4/00
CPC分类号： G01N21/8422 , G01N21/211
摘要： In an apparatus which determines characteristics of a thin film according to the present invention, a temporal change in a refractive index n and an extinction coefficient k of a thin film in a period from start of a change in the thin film as a processing target (e.g., melting) to end of the change (e.g., solidification) can be obtained with a high time resolution of pico-seconds. Based on this, it is possible to know a progress of a change in state of the thin film (e.g., crystallization) or a transition of growth of crystal grains in units of pico-seconds.
摘要翻译：在根据本发明的确定薄膜特性的装置中，在从作为处理目标的薄膜的变化开始的时段内的薄膜的折射率n和消光系数k的时间变化（例如，熔化）到结束变化（例如，凝固）可以以高的时间分辨率获得微微秒。基于此，可以知道薄膜状态的变化（例如结晶）的进展或晶粒生长的转变，以微微秒为单位。

6. 发明授权

US09322786B2 Solar cell inspection apparatus and solar cell processing apparatus 有权
标题翻译：太阳能电池检查装置和太阳能电池处理装置
公开(公告)号：US09322786B2
公开(公告)日：2016-04-26
申请号：US14377725
申请日：2012-02-10
申请人： Yoshio Takami
发明人： Yoshio Takami
IPC分类号： G01N21/88 , G01N21/95 , H02S50/10 , G01M11/00 , H01L31/18 , G01N21/894
CPC分类号： G01N21/8803 , G01M11/00 , G01N21/8806 , G01N21/894 , G01N21/9501 , G01N21/9505 , G01N2201/02 , G01N2201/04 , G01N2201/061 , H01L31/18 , H02S50/10
摘要： An inspection apparatus 1 for solar cells 100 includes: a visible light source 11 adapted to irradiate visible light; a CCD camera 15 adapted to measure a reflection image based on the visible light reflected by an antireflective film of a solar cell 100; an infrared light source 13 adapted to irradiate the solar cell 100 with infrared light; and a CCD camera 16 adapted to measure a transmission image based on the infrared light transmitting through the solar cell 100. In the inspection apparatus 1, as a result of comparing the reflection image and the transmission image with each other, of areas respectively appearing as bright spots in the reflection image, an area appearing as a dark spot in the transmission image is determined as an area including a particle, whereas of the areas respectively appearing as the bright spots in the reflection image, an area other than the area determined as the area including the particle is determined as an area including a pinhole.
摘要翻译：太阳能电池100的检查装置1包括：适于照射可见光的可见光源11; 适于基于由太阳能电池100的抗反射膜反射的可见光测量反射图像的CCD照相机15; 适于用太阳能电池100照射红外光的红外光源13; 以及适于基于通过太阳能电池100透射的红外光来测量透射图像的CCD照相机16.在检查装置1中，作为将反射图像和透射图像彼此进行比较的结果，分别表现为反射图像中的亮点，作为透射图像中的暗点的区域被确定为包括粒子的区域，而在反射图像中分别出现为亮点的区域，除了被确定为将包括粒子的区域确定为包括针孔的区域。

7. 发明授权

US07292320B2 Laser crystallization apparatus and laser crystallization method 失效
标题翻译：激光结晶装置和激光结晶法
公开(公告)号：US07292320B2
公开(公告)日：2007-11-06
申请号：US11074054
申请日：2005-03-08
申请人： Yoshio Takami
发明人： Yoshio Takami
IPC分类号： G01N21/00
CPC分类号： H01L21/268 , B23K26/0006 , B23K26/032 , B23K2103/56 , H01L21/02678 , H01L21/02686 , H01L22/12 , H01L22/26 , H01L2924/0002 , H01L2924/00
摘要： A laser crystallization apparatus, which enables an observation of a high spatial resolution with several μm and a high temporal resolution with several nanoseconds, comprising a crystallization optical system to irradiate a laser light to a thin film provided on a substrate and to melt and crystallize the thin film, the laser crystallization apparatus comprises an illumination light source disposed out of an optical path of the laser light and emitting an illumination light for observation to illuminate the thin film, an illumination optical system comprising an annular optical element which has the optical path of the laser light in the center and which leads the illumination light from the illumination light source to the thin film along the optical path, and an observation optical system which displays a magnified image of the substrate including the thin film.
摘要翻译：一种激光结晶装置，其能够观察到具有几个微米的高空间分辨率和具有几纳秒的高时间分辨率，包括用于将激光照射到设置在基板上的薄膜并且熔化和结晶的结晶光学系统所述激光结晶装置包括设置在所述激光的光路外的照明光源，并且发射用于观察的照明光以照射所述薄膜;照明光学系统，包括环形光学元件，所述环形光学元件具有中心的激光，沿着光路引导从照明光源到薄膜的照明光，以及观察光学系统，其显示包括薄膜的基板的放大图像。

8. 发明申请

US20070002308A1 Method of and apparatus for in-situ monitoring of crystallization state 失效
标题翻译：用于现场监测结晶态的方法和装置
公开(公告)号：US20070002308A1
公开(公告)日：2007-01-04
申请号：US11515023
申请日：2006-09-01
申请人： Yoshio Takami
发明人： Yoshio Takami
IPC分类号： G01N21/00
CPC分类号： H01L21/02686 , C30B13/28 , G01N21/8422 , G01N2021/8477 , H01L21/2026 , H01L21/67115 , H01L21/67253 , H01L22/26 , H01L2924/0002 , H01L2924/00
摘要： In-situ monitoring of a crystallization state is used for laser anneal processing for applying an energy line irradiation for at least one of crystallization of a thin film and promotion of the crystallization. A method is characterized by simultaneously irradiating at least a plurality of monitoring places in a region having a predetermined area of at least one of the surface and the underside of the thin film by a monitor light for monitoring a crystallization state of the thin film at least during or after of before, during and after the energy line irradiation directly or through a substrate, and measuring a temporal change of the intensity of at least one of a reflected light and a transmitted light, from the surface or the underside of the thin film, of the monitor light as a light intensity distribution related to the positions of the monitoring places. Apparatus according to the invention perform such methods.
摘要翻译：结晶状态的原位监测用于激光退火处理，用于施加能量线照射用于薄膜结晶中的至少一种并促进结晶。一种方法的特征在于，通过监测光同时照射具有至少一个薄膜的表面和底面的预定面积的区域中的至少多个监测位置，用于至少监测薄膜的结晶状态在直接或通过基板的能量线照射之前，之后和之后的过程中或之后，从薄膜的表面或底面测量反射光和透射光中的至少一个的强度的时间变化作为与监视位置的位置相关的光强度分布的监视光。根据本发明的装置执行这种方法。

9. 发明申请

US20050199596A1 Laser crystallization apparatus and laser crystallization method 失效
标题翻译：激光结晶装置和激光结晶法
公开(公告)号：US20050199596A1
公开(公告)日：2005-09-15
申请号：US11074054
申请日：2005-03-08
申请人： Yoshio Takami
发明人： Yoshio Takami
IPC分类号： H01L21/20 , B23K26/00 , B23K26/06 , H01L21/268
CPC分类号： H01L21/268 , B23K26/0006 , B23K26/032 , B23K2103/56 , H01L21/02678 , H01L21/02686 , H01L22/12 , H01L22/26 , H01L2924/0002 , H01L2924/00
摘要： A laser crystallization apparatus, which enables an observation of a high spatial resolution with several μm and a high temporal resolution with several nanoseconds, comprising a crystallization optical system to irradiate a laser light to a thin film provided on a substrate and to melt and crystallize the thin film, the laser crystallization apparatus comprises an illumination light source disposed out of an optical path of the laser light and emitting an illumination light for observation to illuminate the thin film, an illumination optical system comprising an annular optical element which has the optical path of the laser light in the center and which leads the illumination light from the illumination light source to the thin film along the optical path, and an observation optical system which displays a magnified image of the substrate including the thin film.
摘要翻译：一种激光结晶装置，其能够观察到具有几个微米的高空间分辨率和具有几纳秒的高时间分辨率，包括用于将激光照射到设置在基板上的薄膜并且熔化和结晶的结晶光学系统所述激光结晶装置包括设置在所述激光的光路外的照明光源，并且发射用于观察的照明光以照射所述薄膜;照明光学系统，包括环形光学元件，所述环形光学元件具有中心的激光，沿着光路引导从照明光源到薄膜的照明光，以及观察光学系统，其显示包括薄膜的基板的放大图像。

10. 发明授权

US5105161A Strong-convergent type charged particle acceleration/deceleration tube 失效
标题翻译：强收敛型粒子加速/减压管
公开(公告)号：US5105161A
公开(公告)日：1992-04-14
申请号：US558320
申请日：1990-07-26
申请人： Yoshio Takami , Shinji Nagamachi , Masakatsu Sakisaka
发明人： Yoshio Takami , Shinji Nagamachi , Masakatsu Sakisaka
IPC分类号： H05H5/06
CPC分类号： H05H5/06
摘要： An acceleration/deceleration tube comprises a plurality of pairs of opposing electrodes alternatively positioned to be orthogonal along the opposing direction and overlapped by each other along the direction of the common axis, and a DC power source provided for applying specific DC voltages with a potential difference of a particular direction to each of the pairs of opposing electrodes according to the arrangement order along the common axis.

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