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1. 发明授权

US07262941B2 FeTa nano-oxide layer as a capping layer for enhancement of giant magnetoresistance in bottom spin valve structures 失效
标题翻译： FeTa纳米氧化物层作为覆盖层，用于增强底部自旋阀结构中的巨磁阻
公开(公告)号：US07262941B2
公开(公告)日：2007-08-28
申请号：US10856180
申请日：2004-05-28
申请人： Min Li , Simon H. Liao , Masashi Sano , Kiyoshi Noguchi , Kochan Ju , Cheng T. Horng
发明人： Min Li , Simon H. Liao , Masashi Sano , Kiyoshi Noguchi , Kochan Ju , Cheng T. Horng
IPC分类号： G11B5/39
CPC分类号： C22C38/10 , B32B15/01 , B82Y10/00 , B82Y25/00 , B82Y40/00 , C22C38/12 , G01R33/093 , G11B5/3163 , G11B5/3903 , H01F10/3259 , H01F10/3272 , H01F41/302 , H01L43/08 , H01L43/12 , Y10T29/49034 , Y10T29/49044 , Y10T29/49046
摘要： An NiCr seed layer based bottom spin valve sensor element having a synthetic antiferromagnet pinned (SyAP) layer and a capping layer comprising either a single specularly reflecting nano-oxide layer (NOL) or a bi-layer comprising a non-metallic layer and a specularly reflecting nano-oxide layer. As a result of their structure and the method of their fabrication, these elements have higher GMR ratios and lower resistances than elements of the prior art.
摘要翻译：一种具有合成反铁磁性钉扎（SyAP）层的NiCr种子层底部自旋阀传感器元件和包括单个镜面反射纳米氧化物层（NOL）或包含非金属层的双层和镜面反射纳米氧化物层反射纳米氧化层。由于它们的结构及其制造方法的结果，这些元件具有比现有技术的元件更高的GMR比和更低的电阻。

2. 发明授权

US06909583B2 FeTa nano-oxide layer in pinned layer for enhancement of giant magnetoresistance in bottom spin valve structures 失效
标题翻译： FeTa纳米氧化物层，用于增强底部自旋阀结构中的巨磁阻
公开(公告)号：US06909583B2
公开(公告)日：2005-06-21
申请号：US10437090
申请日：2003-05-13
申请人： Min Li , Simon H. Liao , Masashi Sano , Kiyoshi Noguchi , Kochan Ju , Cheng T. Horng
发明人： Min Li , Simon H. Liao , Masashi Sano , Kiyoshi Noguchi , Kochan Ju , Cheng T. Horng
IPC分类号： G01R33/09 , G11B5/39 , G11B5/127
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3903 , Y10T29/49034 , Y10T29/49044 , Y10T29/49046
摘要： A method for forming a bottom spin valve sensor having a synthetic antiferromagnetic pinned (SyAP) layer, antiferromagnetically coupled to a pinning layer, in which one of the layers of the SyAP is formed as a three layer lamination that contains a specularly reflecting oxide layer of FeTaO. The sensor formed according to this method has an extremely high GMR ratio and exhibits good pinning strength.
摘要翻译：一种用于形成底部自旋阀传感器的方法，该底部自旋阀传感器具有反结合磁耦合到钉扎层的合成反铁磁钉扎（SyAP）层，其中SyAP的一个层形成为三层层压，其包含镜面反射氧化物层 FeTaO。根据该方法形成的传感器具有非常高的GMR比，并且具有良好的钉扎强度。

3. 发明授权

US06773515B2 FeTa nano-oxide layer as a capping layer for enhancement of giant magnetoresistance in bottom spin valve structures 失效
标题翻译： FeTa纳米氧化物层作为覆盖层，用于增强底部自旋阀结构中的巨磁阻
公开(公告)号：US06773515B2
公开(公告)日：2004-08-10
申请号：US10050644
申请日：2002-01-16
申请人： Min Li , Simon H. Liao , Masashi Sano , Kiyoshi Noguchi , Kochan Ju , Cheng T. Horng
发明人： Min Li , Simon H. Liao , Masashi Sano , Kiyoshi Noguchi , Kochan Ju , Cheng T. Horng
IPC分类号： C23C800
CPC分类号： C22C38/10 , B32B15/01 , B82Y10/00 , B82Y25/00 , B82Y40/00 , C22C38/12 , G01R33/093 , G11B5/3163 , G11B5/3903 , H01F10/3259 , H01F10/3272 , H01F41/302 , H01L43/08 , H01L43/12 , Y10T29/49034 , Y10T29/49044 , Y10T29/49046
摘要： A method for forming an NiCr seed layer based bottom spin valve sensor element having a synthetic antiferromagnet pinned (SyAP) layer and a capping layer comprising either a single specularly reflecting nano-oxide layer (NOL) or a bi-layer comprising a non-metallic layer and a specularly reflecting nano-oxide layer and the sensor element so formed. The method of producing these sensor elements provides elements having higher GMR ratios and lower resistances than elements of the prior art.
摘要翻译：一种用于形成具有合成反铁磁钉扎（SyAP）层的NiCr种子层底部自旋阀传感器元件的方法和包括单个镜面反射纳米氧化物层（NOL）或包含非金属的双层的双层的覆盖层层和镜面反射纳米氧化物层和如此形成的传感器元件。制造这些传感器元件的方法提供了具有比现有技术的元件更高的GMR比和较低电阻的元件。

4. 发明授权

US06581272B1 Method for forming a bottom spin valve magnetoresistive sensor element 失效
标题翻译：形成底部自旋阀磁阻传感器元件的方法
公开(公告)号：US06581272B1
公开(公告)日：2003-06-24
申请号：US10037812
申请日：2002-01-04
申请人： Min Li , Simon H. Liao , Masashi Sano , Kiyoshi Noguchi , Kochan Ju , Cheng T. Horng
发明人： Min Li , Simon H. Liao , Masashi Sano , Kiyoshi Noguchi , Kochan Ju , Cheng T. Horng
IPC分类号： G11B5127
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3903 , Y10T29/49034 , Y10T29/49044 , Y10T29/49046
摘要： A method for forming a bottom spin valve sensor having a synthetic antiferromagnetic pinned (SyAP) layer, antiferromagnetically coupled to a pinning layer, in which one of the layers of the SyAP is formed as a three layer lamination that contains a specularly reflecting oxide layer of FeTaO. The sensor formed according to this method has an extremely high GMR ratio and exhibits good pinning strength.
摘要翻译：一种用于形成底部自旋阀传感器的方法，该底部自旋阀传感器具有反结合磁耦合到钉扎层的合成反铁磁钉扎（SyAP）层，其中SyAP的一个层形成为三层层压，其包含镜面反射氧化物层 FeTaO。根据该方法形成的传感器具有非常高的GMR比，并且具有良好的钉扎强度。

5. 发明授权

US06620530B1 Synthetic anti-parallel spin valve, having improved robustness, and process to manufacture it 有权
标题翻译：合成的反并联自旋阀，具有改进的鲁棒性，以及制造方法
公开(公告)号：US06620530B1
公开(公告)日：2003-09-16
申请号：US09769813
申请日：2001-01-26
申请人： Min Li , Cheng T. Horng , Ru Ying Tong , Simon H. Liao , Kochan Ju
发明人： Min Li , Cheng T. Horng , Ru Ying Tong , Simon H. Liao , Kochan Ju
IPC分类号： G11B560
CPC分类号： B82Y25/00 , B82Y40/00 , G11B5/3163 , H01F10/3268 , H01F10/3295 , H01F41/302 , Y10S428/90 , Y10T428/11 , Y10T428/1121
摘要： A spin valve structure and a method for manufacturing it are described. The spin valve uses a modified pinned layer that consists of two cobalt iron layers separated by a layer of either ruthenium, iridium, or rhodium. A key feature of the invention is that this spacer layer is significantly thinner (typically 3-4 Angstroms) than similar layers in prior art structures. Normally, when such thin spacer layers are used, annealing fields in excess of 20,000 Oersted are needed to cause the two cobalt iron layers to become antiparallel. The present invention, however, teaches that much lower annealing fields (spanning a limited range) may be used with equal effect. The result is that a very high internal pinning field is created giving devices of this type greater pinned layer stability and reduced pinning reversal. These devices also exhibits a minimum amount of open looping in their hysteresis curves.
摘要翻译：描述了一种自旋阀结构及其制造方法。自旋阀使用由两层钴铁层组成的改性钉扎层，其由钌，铱或铑层分开。本发明的一个关键特征是该间隔层比现有技术结构中相似的层明显更薄（通常为3-4埃）。通常，当使用这种薄的间隔层时，需要超过20,000奥斯特的退火场，以使两个钴铁层变得反平行。然而，本发明教导了可以使用相同效果的低得多的退火场（跨越有限范围）。结果是产生非常高的内部钉扎场，使得这种类型的装置更大的被钉扎层稳定性并减少钉扎反转。这些装置在其滞后曲线中也表现出最小量的开环。

6. 发明授权

US06396671B1 Ruthenium bias compensation layer for spin valve head and process of manufacturing 失效
标题翻译：用于自旋阀头的钌偏置补偿层和制造过程
公开(公告)号：US06396671B1
公开(公告)日：2002-05-28
申请号：US09525670
申请日：2000-03-15
申请人： Cheng T. Horng , Mao-Min Chen , Kochan Ju , Min Li , Simon H. Liao , Ku-Ying Tong
发明人： Cheng T. Horng , Mao-Min Chen , Kochan Ju , Min Li , Simon H. Liao , Ku-Ying Tong
IPC分类号： G11B539
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3143 , G11B5/3903 , H01F10/3268 , H01F10/3295 , H01F41/325 , Y10T29/49044
摘要： A spin valve structure, and method for manufacturing it, are described. The valve is subject to only small bias point shifts by sense current fields while at the same time has good GMR characteristics. This is achieved by introducing a layer of about 15 Angstroms of ruthenium between the seed layer and the free layer. This acts as an effective bias control layer with the added benefit of providing interfaces (to both the seed and the free layer) that are highly favorable to specular reflection of the conduction electrons. The HCP crystal structure of this ruthenium layer also improves the crystalline quality of the free layer thereby improving its performance with respect to the GMR ratio.
摘要翻译：自旋阀结构及其制造方法。阀门只能通过感应电流场进行小的偏移点偏移，同时具有良好的GMR特性。这通过在种子层和自由层之间引入约15埃的钌层来实现。这充当有效的偏置控制层，具有提供对传导电子的镜面反射非常有利的界面（对种子和自由层）的附加益处。该钌层的HCP晶体结构也改善了自由层的结晶质量，从而提高了其相对于GMR比的性能。

7. 发明授权

US07180712B1 Shield structure design to improve the stability of an MR head 有权
标题翻译：盾构结构设计提高MR头的稳定性
公开(公告)号：US07180712B1
公开(公告)日：2007-02-20
申请号：US09513873
申请日：2000-02-28
申请人： Min Li , Simon H. Liao , Cheng T. Horng , Kochan Ju
发明人： Min Li , Simon H. Liao , Cheng T. Horng , Kochan Ju
IPC分类号： G11B5/127 , G11B5/33
CPC分类号： G11B5/112 , G11B5/3912 , H01L43/08
摘要： A method for forming a laminated shield to improve the stability and performance of an MR read head and the MR read head formed using that shield. The shield consists of two layers of ferromagnetic material separated by a layer of ruthenium, allowing the ferromagnetic layers to form an antiferromagnetic configuration by means of a quantum mechanical exchange interaction. The antiferromagnetic configuration has a stable domain structure and a magnetization that forms closed loops around the shield edges thereby reducing noise in the readback signal and reducing disturbances to the magnetic state of the sensor element.
摘要翻译：一种用于形成层叠屏蔽以提高使用该屏蔽形成的MR读取头和MR读取头的稳定性和性能的方法。屏蔽由两层铁磁材料组成，由一层钌分离，允许铁磁层通过量子力学交换相互作用形成反铁磁性结构。反铁磁构造具有稳定的畴结构和磁化，其在屏蔽边缘周围形成闭环，从而降低回读信号中的噪声并减少对传感器元件的磁状态的干扰。

8. 发明授权

US06630248B1 Synthetic anti-parallel/parallel/pinned layer spin valve 失效
标题翻译：合成反并联/并联/固定层自旋阀
公开(公告)号：US06630248B1
公开(公告)日：2003-10-07
申请号：US09764231
申请日：2001-01-19
申请人： Cheng T. Horng , Min Li , Ru-Ying Tong , Simon H. Liao , Kochan Ju
发明人： Cheng T. Horng , Min Li , Ru-Ying Tong , Simon H. Liao , Kochan Ju
IPC分类号： G11B539
CPC分类号： B82Y25/00 , B82Y10/00 , B82Y40/00 , G11B5/3903 , G11B5/3932 , H01F10/3272 , H01F10/3295 , H01F41/302 , Y10T428/1121 , Y10T428/1164 , Y10T428/12646 , Y10T428/12826 , Y10T428/12861 , Y10T428/12868 , Y10T428/12931 , Y10T428/24975
摘要： A spin valve structure is described that has greater pinned layer robustness than is found in spin valves of the existing known art, making it well suited for use in high density recording. This has been achieved by a using a modified pinned layer that is a laminate of five layers—a first layer of cobalt-iron, a layer of ruthenium, a second layer of cobalt-iron, a layer of nickel-chromium, and a third layer of cobalt-iron. The second layer of cobalt-iron should be about twice the thickness of the third cobalt-iron layer. The sum of the second and third cobalt-iron layer thicknesses may be greater or smaller than the thickness of the first cobalt-iron layer. A process for manufacturing the structure is also described.
摘要翻译：描述了一种自旋阀结构，其具有比现有已知技术的自旋阀中发现的更大的固着层坚固性，使得其非常适合用于高密度记录。这已经通过使用作为五层的层叠体的修饰的钉扎层 - 第一层钴 - 铁，钌层，第二层钴 - 铁，一层镍 - 铬和第三层钴铁层。钴 - 铁的第二层应为第三钴 - 铁层厚度的约两倍。第二和第三钴 - 铁层厚度的总和可以大于或小于第一钴 - 铁层的厚度。还描述了用于制造该结构的方法。

9. 发明授权

US06392853B1 Spin valve structure design with laminated free layer 失效
标题翻译：自旋阀结构设计采用层压自由层
公开(公告)号：US06392853B1
公开(公告)日：2002-05-21
申请号：US09489973
申请日：2000-01-24
申请人： Min Li , Simon H. Liao , Cheng T. Horng , Youfeng Zheng , Ru-Ying Tong , Kochan Ju
发明人： Min Li , Simon H. Liao , Cheng T. Horng , Youfeng Zheng , Ru-Ying Tong , Kochan Ju
IPC分类号： G11B539
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G01R33/096 , G11B5/3967 , G11B2005/3996 , H01F10/324 , H01F10/3268 , H01F10/3295 , H01L43/08 , Y10T428/1121 , Y10T428/12465 , Y10T428/26
摘要： The giant magnetoresistance (GMR) effect includes a contribution that is due to anisotropic magnetoresistance (AMR). Unfortunately the AMR effect tends to degrade the peak-to-peak signal asymmetry. Additionally, a high AMR/GMR ratio causes a larger signal asymmetry variation. It is therefor desirable to reduce both the AMR contribution as well as the AMR/GMR ratio. This has been achieved by modifying the free layer through the insertion of an extra layer of a highly resistive or insulating material at approximately mid thickness level. This layer is from 3 to 15 Angstroms thick and serves to reduce the Anisotropic Magneto-resistance contribution to the total magneto-resistance of the device. This reduces the GMR contribution only slightly but cuts the AMR/GMR ratio in half, thereby improving cross-track asymmetry and signal linearity.
摘要翻译：巨磁电阻（GMR）效应包括归因于各向异性磁阻（AMR）。不幸的是，AMR效应趋于降低峰 - 峰信号不对称性。另外，高AMR / GMR比率导致更大的信号不对称变化。因此，减少AMR贡献以及AMR / GMR比值是有希望的。这已经通过在大约中等厚度水平上插入高电阻或绝缘材料的额外层来修饰自由层来实现。该层厚度为3至15埃，用于降低各向异性磁阻对器件的总磁阻的贡献。这仅略微降低了GMR贡献，但将AMR / GMR比率降低了一半，从而提高了交叉磁道不对称性和信号线性度。

10. 发明授权

US06292336B1 Giant magnetoresistive (GMR) sensor element with enhanced magnetoresistive (MR) coefficient 失效
标题翻译：具有增强磁阻（MR）系数的巨磁阻（GMR）传感器元件
公开(公告)号：US06292336B1
公开(公告)日：2001-09-18
申请号：US09408703
申请日：1999-09-30
申请人： Cheng T. Horng , Ru-Ying Tong , Kochan Ju , Mao-Min Chen , Jei-Wei Chang , Simon H. Liao
发明人： Cheng T. Horng , Ru-Ying Tong , Kochan Ju , Mao-Min Chen , Jei-Wei Chang , Simon H. Liao
IPC分类号： G11B5127
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3903 , G11B5/3967 , G11B2005/3996 , H01F10/3268
摘要： A method for forming a giant magnetoresistive (GMR) sensor element, and a giant magnetoresistive (GMR) sensor element formed in accord with the method. In accord with the method, there is first provided a substrate. There is then formed over the substrate a seed layer formed of a magnetoresistive (MR) resistivity sensitivity enhancing material selected from the group consisting or nickel-chromium alloys and nickel-iron-chromium alloys. There is then formed over the seed layer a nickel oxide material layer. Finally, there is then formed over the nickel oxide material layer a free ferromagnetic layer separated from a pinned ferromagnetic layer in turn formed thereover by a non-magnetic conductor spacer layer, where the pinned ferromagnetic layer in turn has a pinning material layer formed thereover. The method contemplates a giant magnetoresistive (GMR) sensor element formed in accord with the method. The nickel oxide material layer provides the giant magnetoresistive (GMR) sensor element with an enhanced magnetoresistive (MR) resistivity sensitivity.
摘要翻译：一种用于形成巨磁阻（GMR）传感器元件的方法，以及根据该方法形成的巨磁阻（GMR）传感元件。根据该方法，首先提供基板。然后在衬底上形成由选自镍铬合金和镍 - 铁 - 铬合金的磁阻（MR）电阻率敏感度增强材料形成的晶种层。然后在种子层上形成氧化镍材料层。最后，然后在氧化镍材料层上形成与被钉扎的铁磁性层分离的自由铁磁层，然后由非磁性导体间隔层形成，其中钉扎的铁磁层又形成有钉扎材料层。该方法考虑了根据该方法形成的巨磁阻（GMR）传感器元件。氧化镍材料层提供具有增强的磁阻（MR）电阻率敏感性的巨磁阻（GMR）传感器元件。

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