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1. 发明授权

US09279179B2 Multi coil target design 有权
标题翻译：多线圈目标设计
公开(公告)号：US09279179B2
公开(公告)日：2016-03-08
申请号：US13366805
申请日：2012-02-06
申请人： Ming-Chin Tsai , Bo-Hung Lin , Chung-En Kao , Chin-Hsiang Lin
发明人： Ming-Chin Tsai , Bo-Hung Lin , Chung-En Kao , Chin-Hsiang Lin
IPC分类号： C23C14/35 , H05H1/46 , H01J37/32 , H01J37/34
CPC分类号： C23C14/351 , H01J37/3211 , H01J37/34 , H05H1/46 , H05H2001/4667
摘要： In some embodiments, the present disclosure relates to a plasma processing system configured to form a symmetric plasma distribution around a workpiece. In some embodiments, the plasma processing system comprises a plurality of coils symmetrically positioned around a processing chamber. When a current is provided to the coils, separate magnetic fields, which operate to ionize the target atoms, emanate from the separate coils. The separate magnetic fields operate upon ions within the coils to form a plasma on the interior of the coils. Furthermore, the separate magnetic fields are superimposed upon one another between coils to form a plasma on the exterior of the coils. Therefore, the disclosed plasma processing system can form a plasma that continuously extends along a perimeter of the workpiece with a high degree of uniformity (i.e., without dead spaces).
摘要翻译：在一些实施例中，本公开涉及一种被配置为在工件周围形成对称等离子体分布的等离子体处理系统。在一些实施例中，等离子体处理系统包括围绕处理室对称定位的多个线圈。当向线圈提供电流时，从分离的线圈发出分离的用于电离目标原子的磁场。单独的磁场对线圈内的离子起作用以在线圈的内部形成等离子体。此外，单独的磁场在线圈之间彼此重叠，以在线圈的外部形成等离子体。因此，所公开的等离子体处理系统可以形成等离子体，该等离子体以高度均匀性（即，没有死空间）沿着工件的周边连续地延伸。

2. 发明授权

US08916480B2 Chemical vapor deposition film profile uniformity control 有权
标题翻译：化学气相沉积膜轮廓均匀性控制
公开(公告)号：US08916480B2
公开(公告)日：2014-12-23
申请号：US13313106
申请日：2011-12-07
申请人： Ming-Shiou Kuo , Chih-Tsung Lee , You-Hua Chou , Ming-Chin Tsai , Chia-Ho Chen , Chin-Hsiang Lin
发明人： Ming-Shiou Kuo , Chih-Tsung Lee , You-Hua Chou , Ming-Chin Tsai , Chia-Ho Chen , Chin-Hsiang Lin
IPC分类号： H01L21/31
CPC分类号： C23C16/44 , C23C16/45565
摘要： The present disclosure provides for methods and systems for controlling profile uniformity of a chemical vapor deposition (CVD) film. A method includes depositing a first layer on a substrate by CVD with a first shower head, the first layer having a first profile, and depositing a second layer over the first layer by CVD with a second shower head, the second layer having a second profile. The combined first layer and second layer have a third profile, and the first profile, the second profile, and the third profile are different from one another.
摘要翻译：本公开提供了用于控制化学气相沉积（CVD）膜的轮廓均匀性的方法和系统。一种方法包括通过CVD用第一喷淋头沉积第一层在CVD衬底上，第一层具有第一轮廓，并且通过CVD与第二喷淋头在第一层上沉积第二层，第二层具有第二轮廓。组合的第一层和第二层具有第三轮廓，并且第一轮廓，第二轮廓和第三轮廓彼此不同。

3. 发明授权

US07663279B2 Motor module 有权
标题翻译：电机模块
公开(公告)号：US07663279B2
公开(公告)日：2010-02-16
申请号：US11899041
申请日：2007-08-31
申请人： Ming-Chin Tsai , Guang-Miao Huang , Chien-Chin Huang , Liang-Yi Hsu , Mi-Ching Tsai
发明人： Ming-Chin Tsai , Guang-Miao Huang , Chien-Chin Huang , Liang-Yi Hsu , Mi-Ching Tsai
IPC分类号： H02K5/16
CPC分类号： H02K5/1677 , H02K3/26 , H02K5/1737 , H02K7/06 , H02K7/061 , H02K7/14 , H02K11/33 , H02K21/24 , H02K29/08 , H02K2211/03 , Y10T29/49009
摘要： A motor module includes a bearing housing having a loading base, an electric unit, a bearing, and a magnetic rotor unit disposed on the bearing. In addition, a protruding portion is extending from the loading base, and the electric unit includes a printed circuit board (PCB) and sensing elements, wherein the PCB is utilized for disposing the loading base thereon. Moreover, signal circuits and motor windings are formed on the PCB around the loading base, the sensing elements are disposed around the motor windings, and the bearing is disposed at the protruding portion. Besides, the magnetic rotor unit is disposed on the motor windings, keeping a gap with the PCB; therefore, when electric current passes the motor windings, the magnetic rotor unit and the motor windings generate a flux linkage induction, so as to drive the magnetic rotor unit to rotate relative to the PCB.
摘要翻译：电机模块包括具有装载基座，电单元，轴承和设置在轴承上的磁转子单元的轴承壳体。此外，突出部分从装载基座延伸，并且电气单元包括印刷电路板（PCB）和感测元件，其中PCB用于在其上布置负载基座。此外，信号电路和电动机绕组在负载基座周围的PCB上形成，感测元件围绕电动机绕组设置，并且轴承设置在突出部分。此外，磁转子单元设置在电动机绕组上，与PCB保持间隙; 因此，当电流通过电动机绕组时，磁转子单元和电动机绕组产生磁链感应，从而驱动磁转子单元相对于PCB旋转。

4. 发明授权

US07541709B2 Ultra-thin motor structure 有权
标题翻译：超薄电机结构
公开(公告)号：US07541709B2
公开(公告)日：2009-06-02
申请号：US11320655
申请日：2005-12-30
申请人： Ming-Chin Tsai , Chien-Jen Chen , Liang-Yi Hsu , Mi-Ching Tsai
发明人： Ming-Chin Tsai , Chien-Jen Chen , Liang-Yi Hsu , Mi-Ching Tsai
IPC分类号： H02K3/26 , H02K5/173
CPC分类号： H02K21/24 , H02K3/26 , H02K5/1735 , Y10S310/06
摘要： An ultra-thin motor structure including a stator assembly and a rotator assembly is provided. The stator assembly includes at least one bearing with a bore, a base, and a winding plate. The base has a protruding portion and a deck disposed in the protruding portion. The winding plate is stacked on the deck, and includes a plurality of coils formed by an electroforming process or etching process. Furthermore, the rotator assembly is disposed on the stator assembly, and includes a spindle, a top cover, and a permanent magnet ring. The spindle is fixed in the bore of the bearing, and the permanent magnet ring is disposed on the winding plate and supports the top cover thereon. Thereby, the ultra-thin motor structure can enhance the assembly and mass-production of the motor, and satisfy demands for thinning and performance of the motor.
摘要翻译：提供了包括定子组件和转子组件的超薄电动机结构。定子组件包括至少一个具有孔，轴承座和绕组板的轴承。底座具有设置在突出部分中的突出部分和甲板。绕组板堆叠在甲板上，并且包括通过电铸工艺或蚀刻工艺形成的多个线圈。此外，转子组件设置在定子组件上，并且包括主轴，顶盖和永磁体环。主轴固定在轴承的孔中，永久磁环设置在卷板上，并在其上支撑顶盖。因此，超薄电动机结构可以增强电动机的组装和批量生产，并满足对电动机的减薄和性能的要求。

5. 发明授权

US08926806B2 Shielding design for metal gap fill 有权
标题翻译：金属间隙填充屏蔽设计
公开(公告)号：US08926806B2
公开(公告)日：2015-01-06
申请号：US13355770
申请日：2012-01-23
申请人： Ming-Chin Tsai , Bo-Hung Lin , You-Hua Chou , Chung-En Kao
发明人： Ming-Chin Tsai , Bo-Hung Lin , You-Hua Chou , Chung-En Kao
IPC分类号： C23C14/22 , C23C14/58
CPC分类号： H01L21/324 , C23C14/50 , C23C14/541 , C23C14/5806 , H01L21/67115 , H01L21/76838
摘要： The present disclosure is directed to a physical vapor deposition system configured to heat a semiconductor substrate or wafer. In some embodiments the disclosed physical vapor deposition system comprises at least one heat source having one or more lamp modules for heating of the substrate. The lamp modules may be separated from the substrate by a shielding device. In some embodiments, the shielding device comprises a one-piece device or a two piece device. The disclosed physical vapor deposition system can heat the semiconductor substrate, reflowing a metal film deposited thereon without the necessity for separate chambers, thereby decreasing process time, requiring less thermal budget, and decreasing substrate damage.
摘要翻译：本公开涉及被配置为加热半导体衬底或晶片的物理气相沉积系统。在一些实施例中，所公开的物理气相沉积系统包括至少一个热源，其具有用于加热基底的一个或多个灯模块。灯模块可以通过屏蔽装置与衬底分离。在一些实施例中，屏蔽装置包括一件式装置或两件式装置。所公开的物理气相沉积系统可以加热半导体衬底，回流沉积在其上的金属膜，而不需要单独的室，从而减少处理时间，需要较少的热量预算和减少衬底损伤。

6. 发明授权

US07870527B2 Method for stacked pattern design of printed circuit board and system thereof 有权
标题翻译：印刷电路板的堆叠图案设计方法及其系统
公开(公告)号：US07870527B2
公开(公告)日：2011-01-11
申请号：US11970744
申请日：2008-01-08
申请人： Ming-Chin Tsai
发明人： Ming-Chin Tsai
IPC分类号： G06F17/50
CPC分类号： G06N3/126 , G06F17/5068 , H05K3/0005 , H05K3/4611 , H05K2201/0352 , H05K2201/09736
摘要： A method for designing stacked pattern of PCB utilizing genetic algorithm and the system thereof are disclosed. The method comprises the following steps: First of all, information data of stacked pattern is inputted into operational interface of the software; Next, initial solution sets of stacked pattern are generated; Then, duplications of the initial solution sets of stacked pattern are generated according to a fitness function; Afterward, crossover of the duplications of stacked pattern are performed at random; Then, mutations are executed by a probability at random; Finally, identification is performed to check if the solution approaches the standard of demand and the result of stacked pattern is shown; otherwise, operational step jumps to duplicate step and repeats above steps until satisfying solution is obtained. The most suitable way for package can be arranged out through making especially mathematical calculations by the system efficiently.
摘要翻译：公开了一种利用遗传算法设计PCB堆叠图案的方法及其系统。该方法包括以下步骤：首先将堆叠模式的信息数据输入软件的操作界面; 接下来，生成堆叠图案的初始解集; 然后，根据适应度函数生成堆叠模式的初始解集的重复; 之后，堆叠图案的重复的交叉随机进行; 然后，以概率随机地执行突变; 最后，进行识别以检查解决方案是否接近需求标准，并显示堆叠模式的结果; 否则，操作步骤跳转到重复步骤，重复上述步骤，直到获得满足的解。最合适的包装方式可以通过系统进行特别的数学计算来排除。

7. 发明申请

US20070152526A1 Ultra-thin motor structure 有权
标题翻译：超薄电机结构
公开(公告)号：US20070152526A1
公开(公告)日：2007-07-05
申请号：US11320655
申请日：2005-12-30
申请人： Ming-Chin Tsai , Chien-Jen Chen , Liang-Yi Hsu , Mi-Ching Tsai
发明人： Ming-Chin Tsai , Chien-Jen Chen , Liang-Yi Hsu , Mi-Ching Tsai
IPC分类号： H02K21/12 , H02K1/22
CPC分类号： H02K21/24 , H02K3/26 , H02K5/1735 , Y10S310/06
摘要： An ultra-thin motor structure including a stator assembly and a rotator assembly is provided. The stator assembly includes at least one bearing with a bore, a base, and a winding plate. The base has a protruding portion and a deck disposed in the protruding portion. The winding plate is stacked on the deck, and includes a plurality of coils formed by an electroforming process or etching process. Furthermore, the rotator assembly is disposed on the stator assembly, and includes a spindle, a top cover, and a permanent magnet ring. The spindle is fixed in the bore of the bearing, and the permanent magnet ring is disposed on the winding plate and supports the top cover thereon. Thereby, the ultra-thin motor structure can enhance the assembly and mass-production of the motor, and satisfy demands for thinning and performance of the motor.
摘要翻译：提供了包括定子组件和转子组件的超薄电动机结构。定子组件包括至少一个具有孔，轴承座和绕组板的轴承。底座具有设置在突出部分中的突出部分和甲板。绕组板堆叠在甲板上，并且包括通过电铸工艺或蚀刻工艺形成的多个线圈。此外，转子组件设置在定子组件上，并且包括主轴，顶盖和永磁体环。主轴固定在轴承的孔中，永久磁环设置在卷板上，并在其上支撑顶盖。因此，超薄电动机结构可以增强电动机的组装和批量生产，并满足对电动机的减薄和性能的要求。

8. 发明授权

US09708706B2 PVD apparatus and method with deposition chamber having multiple targets and magnets 有权
公开(公告)号：US09708706B2
公开(公告)日：2017-07-18
申请号：US13307242
申请日：2011-11-30
申请人： Chung-En Kao , Ming-Chin Tsai , You-Hua Chou , Chen-Chia Chiang , Chih-Tsung Lee , Ming-Shiou Kuo
发明人： Chung-En Kao , Ming-Chin Tsai , You-Hua Chou , Chen-Chia Chiang , Chih-Tsung Lee , Ming-Shiou Kuo
IPC分类号： C23C14/35 , H01J37/34
CPC分类号： C23C14/352 , H01J37/3405 , H01J37/3417
摘要： A thin film deposition system and method provide for multiple target assemblies that may be separately powered. Each target assembly includes a target and associated magnet or set of magnets. The disclosure provides a tunable film profile produced by multiple power sources that separately power the target arrangements. The relative amounts of power supplied to the target arrangements may be customized to provide a desired film and may be varied in time to produce a film with varied characteristics.

9. 发明授权

US08751178B2 Method and apparatus for determining disposition of via hole on printed circuit board 有权
标题翻译：用于确定印刷电路板上的通孔的布置的方法和装置
公开(公告)号：US08751178B2
公开(公告)日：2014-06-10
申请号：US13233121
申请日：2011-09-15
申请人： Ming-Chin Tsai
发明人： Ming-Chin Tsai
IPC分类号： G01N37/00
CPC分类号： H05K3/0005 , H05K1/0262 , H05K1/115 , H05K2201/093 , H05K2201/09663
摘要： A method for determining disposition of via hole on printed circuit board (PCB) includes the steps of: providing a PCB on which is disposed with a geometric layout and a via hole; providing a line on the PCB for intersecting the geometric layout to form a plurality of points of intersection; defining line segments by segmenting the line at each of the points of intersection to form a plurality of line segments; deleting some of the line segments having one end not being point of intersection for the geometric layout to form a plurality of segmented regions; searching a closed region by repeatedly searching region from any one of the points in the plurality of segmented regions; determining whether a closed region is a smallest closed region; determining whether a via hole is located within the smallest closed region.
摘要翻译：一种用于确定印刷电路板（PCB）上的通孔布置的方法包括以下步骤：提供PCB，其上布置有几何布局和通孔; 在PCB上提供与几何布局相交的线以形成多个交点; 通过在每个相交点处分割线来定义线段以形成多个线段; 删除一些线段，其一端不是几何布局的交点，以形成多个分段区域; 通过从所述多个分割区域中的任一点反复搜索区域来搜索封闭区域; 确定封闭区域是否是最小的封闭区域; 确定通孔是否位于最小封闭区域内。

10. 发明申请

US20130149871A1 CHEMICAL VAPOR DEPOSITION FILM PROFILE UNIFORMITY CONTROL 有权
标题翻译：化学蒸气沉积膜型材均匀性控制
公开(公告)号：US20130149871A1
公开(公告)日：2013-06-13
申请号：US13313106
申请日：2011-12-07
申请人： Ming-Shiou Kuo , Chih-Tsung Lee , You-Hua Chou , Ming-Chin Tsai , Chia-Ho Chen , Chin-Hsiang Lin
发明人： Ming-Shiou Kuo , Chih-Tsung Lee , You-Hua Chou , Ming-Chin Tsai , Chia-Ho Chen , Chin-Hsiang Lin
IPC分类号： H01L21/02 , C23C16/455
CPC分类号： C23C16/44 , C23C16/45565
摘要： The present disclosure provides for methods and systems for controlling profile uniformity of a chemical vapor deposition (CVD) film. A method includes depositing a first layer on a substrate by CVD with a first shower head, the first layer having a first profile, and depositing a second layer over the first layer by CVD with a second shower head, the second layer having a second profile. The combined first layer and second layer have a third profile, and the first profile, the second profile, and the third profile are different from one another.
摘要翻译：本公开提供了用于控制化学气相沉积（CVD）膜的轮廓均匀性的方法和系统。一种方法包括通过CVD用第一喷淋头沉积第一层在CVD衬底上，第一层具有第一轮廓，并且通过CVD与第二喷淋头在第一层上沉积第二层，第二层具有第二轮廓。组合的第一层和第二层具有第三轮廓，并且第一轮廓，第二轮廓和第三轮廓彼此不同。

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