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    • 9. 发明授权
    • Methods of forming FinFET devices with alternative channel materials
    • 用替代的通道材料形成FinFET器件的方法
    • US08580642B1
    • 2013-11-12
    • US13476645
    • 2012-05-21
    • Witold P. MaszaraAjey P. JacobNicholas V. LiCausiJody A. FronheiserKerem Akarvardar
    • Witold P. MaszaraAjey P. JacobNicholas V. LiCausiJody A. FronheiserKerem Akarvardar
    • H01L21/336H01L21/84H01L21/00
    • H01L29/66795
    • One illustrative method disclosed herein involves performing a first etching process through a patterned hard mask layer to define a plurality of spaced-apart trenches in a substrate that defines a first portion of a fin for the device, forming a layer of insulating material in the trenches and performing a planarization process on the layer of insulating material to expose the patterned hard, performing a second etching process to remove the hard mask layer and to define a cavity within the layer of insulating material, forming a second portion of the fin within the cavity, wherein the second portion of the fin is comprised of a semiconducting material that is different than the substrate, and performing a third etching process on the layer of insulating material such that an upper surface of the insulating material is below an upper surface of the second portion of the fin.
    • 本文公开的一种说明性方法包括通过图案化的硬掩模层执行第一蚀刻工艺,以在衬底中限定多个间隔开的沟槽,其限定用于器件的鳍片的第一部分,在沟槽中形成绝缘材料层 以及对所述绝缘材料层进行平坦化处理以暴露所述图案化的硬化物,执行第二蚀刻工艺以去除所述硬掩模层并且在所述绝缘材料层内限定空腔,在所述空腔内形成所述翅片的第二部分 ,其中所述翅片的第二部分由与所述基板不同的半导体材料构成,并且对所述绝缘材料层进行第三蚀刻工艺,使得所述绝缘材料的上表面在所述第二部分的上表面下方 鳍的一部分。
    • 10. 发明授权
    • Methods of forming FinFET devices with alternative channel materials
    • 用替代的通道材料形成FinFET器件的方法
    • US08673718B2
    • 2014-03-18
    • US13544259
    • 2012-07-09
    • Witold P. MaszaraAjey P. JacobNicholas V. LiCausiJody A. FronheiserKerem Akarvardar
    • Witold P. MaszaraAjey P. JacobNicholas V. LiCausiJody A. FronheiserKerem Akarvardar
    • H01L21/335
    • H01L29/1054H01L29/66795H01L29/785
    • One method involves providing a substrate comprised of first and second semiconductor materials, performing an etching process through a hard mask layer to define a plurality of trenches that define first and second portions of a fin for a FinFET device, wherein the first portion is the first material and the second portion is the second material, forming a layer of insulating material in the trenches, performing a planarization process on the insulating material, performing etching processes to remove the hard mask layer and reduce a thickness of the second portion, thereby defining a cavity, performing a deposition process to form a third portion of the fin on the second portion, wherein the third portion is a third semiconducting material that is different from the second material, and performing a process such that a post-etch upper surface of the insulating material is below an upper surface of the third portion.
    • 一种方法包括提供由第一和第二半导体材料构成的衬底,通过硬掩模层执行蚀刻工艺以限定限定用于FinFET器件的鳍片的第一和第二部分的多个沟槽,其中第一部分是第一部分 并且第二部分是第二材料,在沟槽中形成绝缘材料层,对绝缘材料进行平面化处理,执行蚀刻工艺以去除硬掩模层并减小第二部分的厚度,由此限定 空腔,执行沉积工艺以在第二部分上形成翅片的第三部分,其中第三部分是不同于第二材料的第三半导体材料,并且执行一种工艺,使得蚀刻后的上表面 绝缘材料在第三部分的上表面下方。