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1. 发明申请

US20230046236A1 METHOD FOR OBTAINING CHARACTERISTICS OF SURFACE TO BE MEASURED, BY USING INCLINED TIP, ATOMIC FORCE MICROSCOPE FOR PERFORMING METHOD, AND COMPUTER PROGRAM STORED IN STORAGE MEDIUM IN ORDER TO PERFORM METHOD 有权
公开(公告)号：US20230046236A1
公开(公告)日：2023-02-16
申请号：US17792731
申请日：2020-12-18
申请人： PARK SYSTEMS CORP.
发明人： Ahjin JO , Sang-il PARK , Byoung-Woon AHN , Seung Hun BAIK
IPC分类号： G01Q70/02 , G01Q70/10
摘要： The present invention relates to a method for acquiring a surface characteristic of a measuring object using a tilted tip, an atomic force microscope for carrying out the method, and a computer program stored on a storage medium for carrying out the method, capable of acquiring an image deeply to the inside of an undercut structure and easily separating a tip from the inside of the undercut structure. The method according to an exemplary embodiment of the present invention is a method for acquiring a surface characteristic of a measuring object using a measuring device including a tip interacting with the surface of the measuring object. The method includes a normal measuring step of acquiring a surface characteristic of the measuring object while relatively moving the tip in a first direction with respect to the surface of the measuring object using a first control method, a separating step of controlling the tip to deviate from an abnormal state by a second control method set based on a predefined shape of the surface of the measuring object when it is determined as the abnormal state in which at least one characteristic value obtained by the tip is out of a specific range during the normal measuring step, and a step of performing the normal measuring step again after the separating step.

2. 发明申请

US20220206039A1 METHOD AND APPARATUS FOR IDENTIFYING SAMPLE POSITION IN ATOMIC FORCE MICROSCOPE 有权
公开(公告)号：US20220206039A1
公开(公告)日：2022-06-30
申请号：US17561920
申请日：2021-12-24
申请人： PARK SYSTEMS CORP.
发明人： JeongHun AN , YongSung CHO , Sang-il PARK
IPC分类号： G01Q30/02 , G01Q60/24 , G05B13/02 , G01Q30/20
摘要： An apparatus and a method for identifying a sample position in an atomic force microscope according to an exemplary embodiment of the present disclosure are provided. The method for identifying a sample position in an atomic force microscope includes receiving a vision image including a subject sample through a vision unit; determining a subject sample region in the vision image using a prediction model which is configured to output the subject sample region by receiving the vision image as an input; and determining a position of the subject sample based on the subject sample region.

3. 发明申请

US20160356808A1 MEASUREMENT APPARATUS AND METHOD WITH ADAPTIVE SCAN RATE 有权
标题翻译：具有自适应扫描速率的测量装置和方法
公开(公告)号：US20160356808A1
公开(公告)日：2016-12-08
申请号：US14841650
申请日：2015-08-31
申请人： Park Systems Corp.
发明人： Ah Jin JO , Ju Suk LEE , Yong Sung CHO , Sang Han CHUNG , Sang-il PARK
IPC分类号： G01Q10/04 , G01Q60/24
CPC分类号： G01Q30/06 , G01Q10/04 , G01Q10/06 , G01Q10/065
摘要： A measurement method in which a sensing unit acquires surface data of a measurement target while scanning the surface of the measurement target and at least one of the sensing unit and the measurement target is moved in order for the sensing unit to scan the surface along a plurality of fast scan lines on the surface of the measurement target, includes: a first step in which the sensing unit scans a surface along any one fast scan line of the plurality of fast scan lines to acquire the surface data along the any one fast scan line; and a second step in which the sensing unit acquires a surface data along a fast scan line most adjacent to the any one fast scan line while at least one of the sensing unit and the measurement target is moved along the most adjacent fast scan line, after the first step.
摘要翻译：一种测量方法，其中感测单元在扫描测量对象的表面的同时获取测量对象的表面数据，并且感测单元和测量对象中的至少一个被移动以便感测单元沿着多个扫描表面扫描包括：第一步骤，其中感测单元沿着多条快速扫描线的任何一条快速扫描线扫描表面，以获取沿着任何一条快速扫描线的表面数据 ; 以及第二步骤，其中，当感测单元和测量对象中的至少一个沿着最邻近的快速扫描线移动时，感测单元获取沿着与任何一条快速扫描线最相邻的快速扫描线的表面数据，之后第一步。

4. 发明申请

US20210373046A1 MEASURING METHOD FOR MEASURING HEAT DISTRIBUTION OF SPECIFIC SPACE USING STHM PROBE, METHOD AND DEVICE FOR DETECTING BEAM SPOT OF LIGHT SOURCE 有权
公开(公告)号：US20210373046A1
公开(公告)日：2021-12-02
申请号：US17335094
申请日：2021-06-01
申请人： PARK SYSTEMS CORP.
发明人： Sang-il PARK , Byoung-Woon AHN , Ahjin JO , Soobong Choi
IPC分类号： G01Q60/58 , G01K13/00 , G01K3/00
摘要： The present disclosure provides a measuring method for measuring heat distribution of a specific space using an SThM probe, and a method and device for detecting a beam spot of a light source.
The method according to an embodiment of the present disclosure is the measuring method for measuring heat distribution of a specific space, the measuring method includes: linearly moving a SThM probe that may measure a temperature change in the specific space; and calculating heat distribution of the specific space using continuous temperature change values obtained from the SThM probe during the moving step.
According to the measuring method, and the method and device for detecting a beam spot of a light source, it is possible to map temperature distribution in a small space using a SThM probe and it is possible to accurately detect a beam spot using the temperature distribution.

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