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    • 1. 发明授权
    • Metrology method and apparatus, and device manufacturing method
    • 计量方法和装置以及装置制造方法
    • US09069264B2
    • 2015-06-30
    • US13542319
    • 2012-07-05
    • Patrick WarnaarMark Van SchijndelMichael Kubis
    • Patrick WarnaarMark Van SchijndelMichael Kubis
    • G06K9/46G03F1/44G03F7/20G03B27/54
    • G03F7/70633G03F1/44G03F7/70683
    • A target structure including a periodic structure is formed on a substrate. An image of the target structure is detected while illuminating the target structure with a beam of radiation, the image being formed using a first part of non-zero order diffracted radiation while excluding zero order diffracted radiation. Intensity values extracted from a region of interest within the image are used to determine a property of the periodic structure. A processing unit recognizes locations of a plurality of boundary features in the image of the target structure to identify regions of interest. The number of boundary features in each direction is at least twice a number of boundaries of periodic structures within the target structure. The accuracy of locating the region is greater than by recognizing only the boundaries of the periodic structure(s).
    • 包括周期性结构的靶结构形成在基板上。 在用辐射束照射目标结构的同时检测目标结构的图像,该图像使用非零次衍射辐射的第一部分形成,同时排除零级衍射辐射。 使用从图像内的感兴趣区域提取的强度值来确定周期性结构的性质。 处理单元识别目标结构的图像中的多个边界特征的位置以识别感兴趣的区域。 每个方向上边界特征的数量至少是目标结构内周期性结构边界数量的两倍。 定位区域的精度大于仅识别周期性结构的边界。
    • 2. 发明申请
    • Metrology Method and Apparatus, and Device Manufacturing Method
    • 计量方法与装置及装置制造方法
    • US20130050501A1
    • 2013-02-28
    • US13542319
    • 2012-07-05
    • Patrick WARNAARMark Van SchijndelMichael Kubis
    • Patrick WARNAARMark Van SchijndelMichael Kubis
    • G06K9/46H04N5/225G03B27/32G06K9/00
    • G03F7/70633G03F1/44G03F7/70683
    • A target structure including a periodic structure is formed on a substrate. An image of the target structure is detected while illuminating the target structure with a beam of radiation, the image being formed using a first part of non-zero order diffracted radiation while excluding zero order diffracted radiation. Intensity values extracted from a region of interest within the image are used to determine a property of the periodic structure. A processing unit recognizes locations of a plurality of boundary features in the image of the target structure to identify regions of interest. The number of boundary features in each direction is at least twice a number of boundaries of periodic structures within the target structure. The accuracy of locating the region is greater than by recognizing only the boundaries of the periodic structure(s).
    • 包括周期性结构的靶结构形成在基板上。 在用辐射束照射目标结构的同时检测目标结构的图像,该图像使用非零次衍射辐射的第一部分形成,同时排除零级衍射辐射。 使用从图像内的感兴趣区域提取的强度值来确定周期性结构的性质。 处理单元识别目标结构的图像中的多个边界特征的位置以识别感兴趣的区域。 每个方向上边界特征的数量至少是目标结构内周期性结构边界数量的两倍。 定位区域的精度大于仅识别周期性结构的边界。
    • 6. 发明申请
    • Multi-stack optical data storage medium and use of such medium
    • 多层光学数据存储介质和这种介质的使用
    • US20060063108A1
    • 2006-03-23
    • US10533713
    • 2003-10-22
    • Mark Van SchijndelHubert MartensBenno TiekeGuofu Zhou
    • Mark Van SchijndelHubert MartensBenno TiekeGuofu Zhou
    • G11B7/24G11B15/64
    • G11B7/258G11B7/24038G11B7/246G11B7/2585
    • The present invention relates to a multi-stack optical data storage medium (10). The medium comprises a first substrate (1a) with present on a side thereof a first recording stack (13) named L0, a second substrate (1b) with present on a side thereof a second recording stack (12) named L1 comprising a recordable type L1 recording layer (4) having a thickness tRL1 and a complex refractive index nλ−i*kλ at a wavelength λ. A second reflective layer (6) is present adjacent the L1 recording layer (4) at a side most remote from a radiation beam (20) entrance face (11) of the medium. The second recording stack L1 (12) is present at a position closer to the entrance face (11) than the L0 recording stack (13). A radiation beam transparent spacer layer (9) is sandwiched between the recording stacks (12, 13). In order to achieve compatibility with the DVD-9 ROM standard as far as reflection levels are concerned, the second reflective layer (6) mainly comprises the metal Cu and has a thickness tMLn selected from the range of 8-20 nm and the thickness tRL1 and kλ of the recordable L1 recording layer (4) fulfils the formula tRL1*kλ≦8 nm.
    • 本发明涉及一种多层光学数据存储介质(10)。 介质包括第一衬底(1a),其一侧上具有名为L 0 O的第一记录叠层(13),第二衬底(1b),其一侧存在第二记录 包括具有厚度t L RL1的可记录类型L 1记录层(4)的复合折射率n(n)的叠层(12),名称为L 1 <1, λ波长λ-λ*λλλ/λ。 第二反射层(6)在距离介质的辐射束(20)入射面(11)最远的一侧存在于L 1记录层(4)附近。 第二记录堆叠L 1(12)存在于比L 0记录堆叠(13)更靠近入口面(11)的位置。 辐射束透明间隔层(9)夹在记录叠层(12,13)之间。 为了实现与DVD-9 ROM标准的兼容性,就反射水平而言,第二反射层(6)主要包括金属Cu,并且具有选自以下范围的厚度t MLn < 8-20nm的记录层,记录层L 1记录层(4)的厚度t RL1和kλλ/ SUB>满足公式t < RL1 * kλλ<= 8nm。