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    • 5. 发明授权
    • Organic/inorganic thin film deposition method
    • 有机/无机薄膜沉积法
    • US07799377B2
    • 2010-09-21
    • US11950606
    • 2007-12-05
    • Seong Deok AhnSeung Youl KangChul Am KimJi Young OhIn Kyu YouGi Heon KimKyu Ha BaekKyung Soo Suh
    • Seong Deok AhnSeung Youl KangChul Am KimJi Young OhIn Kyu YouGi Heon KimKyu Ha BaekKyung Soo Suh
    • C23C16/455
    • C23C16/45523B05D1/60C23C16/4408
    • Provided is a method for depositing an organic/inorganic thin film. The method includes: i) heating a source vessel containing an organic material and an inorganic material; ii) transferring a deposition gas to a process chamber; iii) distributing the deposition gas onto a substrate disposed in the process chamber; iv) purging the process chamber; v) heating an activating agent source vessel; vi) transferring a heat initiator gas phase to the process chamber; vii) distributing the heat initiator gas phase onto the organic or inorganic material monomer deposited on the substrate through the process chamber, and forming an organic/inorganic thin film; and viii) exhausting the heat initiator gas phase and purging the process chamber. Depositing the organic/inorganic thin film in a time-division manner, the thickness of the thin film can be accurately adjusted and the deposition can be uniformly performed when the thin film is deposited on a large-scale substrate.
    • 提供一种沉积有机/无机薄膜的方法。 该方法包括:i)加热含有机材料和无机材料的源容器; ii)将沉积气体转移到处理室; iii)将沉积气体分配到设置在处理室中的基板上; iv)清洗处理室; v)加热活化剂源容器; vi)将热引发剂气相转移到所述处理室; vii)通过处理室将热引发剂气相分配到沉积在基材上的有机或无机材料单体上,形成有机/无机薄膜; 和viii)排出热引发剂气相并清洗处理室。 以时分方式沉积有机/无机薄膜,可以精确地调节薄膜的厚度,并且当薄膜沉积在大型基底上时能够均匀地进行沉积。