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2. 发明授权

US6052057A System for checking gas pressure and gas leakage 失效
标题翻译：用于检查气体压力和气体泄漏的系统
公开(公告)号：US6052057A
公开(公告)日：2000-04-18
申请号：US889436
申请日：1997-07-08
申请人： Young-soo Yang , Kap-hyun Cha
发明人： Young-soo Yang , Kap-hyun Cha
IPC分类号： G01M3/26 , G01M3/32 , G08B21/00 , G08B21/16 , G08B25/08
CPC分类号： G01M3/32
摘要： A system is disclosed for checking gas pressure and gas leakage in one or more gas cylinders. The system particularly detects the state of gas pressure in a gas cylinder during ion-implantation, monitors for the existence of any gas leaks in the gas cylinders, and informs the manufacture process manager of the results of checking and monitoring using a communications device. This minimizes any loss of time due to equipment stoppage and protecting workers from any poisonous gas leaks. This improved system includes one or more gas checking units for checking gas pressure in one or more gas cylinders and detecting gas leaks from the one or more gas cylinders; a signal processor for processing information received from the one or more gas checking units and converting the information into a signal format suitable for transmission; a transmitting unit for transmitting the converted signal received from the signal processor along a communications line; and a display for displaying information based on the transmitted signal.
摘要翻译：公开了一种用于检查一个或多个气瓶中的气体压力和气体泄漏的系统。该系统特别检测离子注入期间气瓶中的气体压力状态，监测气瓶中是否存在任何气体泄漏，并通知使用通信装置的检查和监测结果。这样可以减少由于设备停机而导致的任何时间损失，并且保护工人免遭有毒气体泄漏。该改进的系统包括一个或多个气体检查单元，用于检查一个或多个气瓶中的气体压力并检测来自一个或多个气瓶的气体泄漏; 信号处理器，用于处理从一个或多个气体检查单元接收的信息并将该信息转换成适于传输的信号格式; 发送单元，用于沿着通信线路发送从信号处理器接收的转换信号; 以及用于基于所发送的信号显示信息的显示器。

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