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1. 发明授权

US07925367B2 Defect review and classification system 有权
标题翻译：缺陷审查和分类制度
公开(公告)号：US07925367B2
公开(公告)日：2011-04-12
申请号：US12573463
申请日：2009-10-05
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
摘要翻译：本发明提出了一种系统，当ADC处理不能通过一个ADC不能跟踪ADR而不能执行但对具有高优先级的ADR使用ADC时，中断与具有低优先级的ADC相关联的处理的系统。为了优先执行具有高优先级的ADR / ADC，本发明采用一种用于从ADR / ADC中的处理能力较高（按DPH单元的表达式中的较大数值的数量级）的顺序选择ADR / ADC的算法，优先级最低，无论ADR / DC是否在执行中。

2. 发明申请

US20070274609A1 Image Search Apparatus, Image Search System, Image Search Method, and Program for Executing Image Search Method 审中-公开
标题翻译：图像搜索装置，图像搜索系统，图像搜索方法和执行图像搜索方法的程序
公开(公告)号：US20070274609A1
公开(公告)日：2007-11-29
申请号：US11751891
申请日：2007-05-22
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06K9/54 , G06K9/00
CPC分类号： G06T7/001 , G01R31/307 , G06F16/58 , G06T2207/10056 , G06T2207/30148
摘要： An object of this invention is to realize, in a semiconductor defect review apparatus, a function of easily searching for an image similar to a reference image at high speed. To this end, an embodiment of this invention has a function of saving, as text information, pieces of information accompanying an image such as acquisition date and time, an acquisition condition, the result of analyzing a piece of information other than the image, and a user's comment, in association with the image. The embodiment is configured to narrow down similar image candidates by a keyword search using the pieces of accompanying information, calculate similarity of each image to a search reference image on the basis of the features of the image, and output search results in descending order of similarity.
摘要翻译：本发明的一个目的是在半导体缺陷检查装置中实现一种快速地搜索类似于参考图像的图像的功能。为此，本发明的实施例具有作为文本信息保存伴随诸如获取日期和时间的图像的信息，获取条件，分析图像之外的一条信息的结果的功能，以及用户的评论，与图像相关联。该实施例被配置为通过使用附带信息的关键字搜索来缩小相似图像候选，基于图像的特征来计算每个图像与搜索参考图像的相似度，并以相似度的降序输出搜索结果。

3. 发明申请

US20080004742A1 Automatic defect review and classification system 有权
标题翻译：自动缺陷审查和分类系统
公开(公告)号：US20080004742A1
公开(公告)日：2008-01-03
申请号：US11892583
申请日：2007-08-24
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
摘要翻译：本发明提出了一种系统，当ADC处理不能通过一个ADC不能跟踪ADR而不能执行但对具有高优先级的ADR使用ADC时，中断与具有低优先级的ADC相关联的处理的系统。为了优先执行具有高优先级的ADR / ADC，本发明采用一种用于从ADR / ADC中的处理能力较高（按DPH单元的表达式中的较大数值的数量级）的顺序选择ADR / ADC的算法，优先级最低，无论ADR / DC是否在执行中。

4. 发明申请

US20100021047A1 AUTOMATIC DEFECT REVIEW AND CLASSIFICATION SYSTEM 有权
标题翻译：自动缺陷审查和分类系统
公开(公告)号：US20100021047A1
公开(公告)日：2010-01-28
申请号：US12573463
申请日：2009-10-05
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06K9/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
摘要翻译：本发明提出了一种系统，当ADC处理不能通过一个ADC不能跟踪ADR而不能执行但对具有高优先级的ADR使用ADC时，中断与具有低优先级的ADC相关联的处理的系统。为了优先执行具有高优先级的ADR / ADC，本发明采用一种用于从ADR / ADC中的处理能力较高（按DPH单元的表达式中的较大数值的数量级）的顺序选择ADR / ADC的算法，优先级最低，无论ADR / DC是否在执行中。

5. 发明授权

US07584012B2 Automatic defect review and classification system 有权
标题翻译：自动缺陷审查和分类系统
公开(公告)号：US07584012B2
公开(公告)日：2009-09-01
申请号：US11892583
申请日：2007-08-24
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06F19/00 , G06K9/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： An automatic defect review and classification system including at least one automatic defect review apparatus for specifically observing defect portions of a sample and at least one automatic defect classification apparatus for automatically classifying the defects, the system further comprising a device which outputs a status for combination of the automatic review apparatus and the automatic defect classification apparatus.
摘要翻译：一种自动缺陷检查和分类系统，包括至少一个用于特异性地观察样本的缺陷部分的自动缺陷检查装置和用于自动分类缺陷的至少一个自动缺陷分类装置，所述系统还包括输出状态用于组合的装置自动检查装置和自动缺陷分类装置。

6. 发明申请

US20060282190A1 Automatic defect review and classification system 有权
标题翻译：自动缺陷审查和分类系统
公开(公告)号：US20060282190A1
公开(公告)日：2006-12-14
申请号：US11451330
申请日：2006-06-13
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
摘要翻译：本发明提出了一种系统，当ADC处理不能通过一个ADC不能跟踪ADR而不能执行但对具有高优先级的ADR使用ADC时，中断与具有低优先级的ADC相关联的处理的系统。为了优先执行具有高优先级的ADR / ADC，本发明采用一种用于从ADR / ADC中的处理能力较高（按DPH单元的表达式中的较大数值的数量级）的顺序选择ADR / ADC的算法，优先级最低，无论ADR / DC是否在执行中。

7. 发明授权

US07664562B2 Automatic defect review and classification system 有权
标题翻译：自动缺陷审查和分类系统
公开(公告)号：US07664562B2
公开(公告)日：2010-02-16
申请号：US11451330
申请日：2006-06-13
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
摘要翻译：本发明提出了一种系统，当ADC处理不能通过一个ADC不能跟踪ADR而不能执行但对具有高优先级的ADR使用ADC时，中断与具有低优先级的ADC相关联的处理的系统。为了优先执行具有高优先级的ADR / ADC，本发明采用一种用于从ADR / ADC中的处理能力较高（按DPH单元的表达式中的较大数值的数量级）的顺序选择ADR / ADC的算法，优先级最低，无论ADR / DC是否在执行中。

8. 发明授权

US08036845B2 Method of correcting coordinates, and defect review apparatus 有权
标题翻译：校正坐标的方法和缺陷检查装置
公开(公告)号：US08036845B2
公开(公告)日：2011-10-11
申请号：US12792795
申请日：2010-06-03
申请人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
发明人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
IPC分类号： G01C17/38 , G21C17/00
CPC分类号： G01R31/2884
摘要： The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to the present invention, which is a review apparatus for moving a sample stage onto coordinates previously calculated by a checking apparatus to review the sample, has a function of retaining a plurality of coordinate correction tables to correct a deviation between a coordinate value previously calculated by a checking apparatus and an actual sample position detected by the review apparatus. The review apparatus evaluates correction accuracy of the plurality of coordinate correction tables and applies one of the coordinate correction tables with the maximum evaluation value.
摘要翻译：本发明提供了一种校正坐标的方法，以便在用于将样品台移动到特定坐标上以检查样品的检查装置中的视场中快速且适当地布置样品。根据本发明的检查装置，其是用于将样本台移动到由检查装置预先计算的坐标以检查样本的检查装置，具有保留多个坐标校正表以校正坐标的偏差的功能先前由检查装置计算的值和由检查装置检测到的实际样品位置。评估装置评估多个坐标校正表的校正精度，并且应用具有最大评估值的坐标校正表中的一个。

9. 发明申请

US20080263028A1 Report Search Method, Report Search System, and Reviewing Apparatus 审中-公开
标题翻译：报告搜索方法，报告搜索系统和检查设备
公开(公告)号：US20080263028A1
公开(公告)日：2008-10-23
申请号：US11969007
申请日：2008-01-03
申请人： Takehiro Hirai , Kazuo Aoki , Naoma Ban
发明人： Takehiro Hirai , Kazuo Aoki , Naoma Ban
IPC分类号： G06F7/06 , G06F17/30
CPC分类号： G06Q10/00 , Y02P90/14
摘要： An object of the present invention is to provide a report search method, and a reviewing apparatus by which a measure against abnormalities such as a defect of a sample may be quickly obtained by searching desired information in a report recording past information.In order to achieve the above object, the present invention has a configuration in which an image of a defective appearance and supplementary information on the image are memorized as a report file as one unit in a database for an observation result of the defective appearance of a sample in a manufacturing process, the supplementary information is searched as a search target among a plurality of report files memorized in the database by use of a search condition set from among the supplementary information, when a new defective appearance is generated, and the searched supplementary information and an image related with the supplementary information are output.
摘要翻译：本发明的目的在于提供一种报告检索方法和检索装置，通过该检索装置可以通过在记录过去信息的报告中搜索期望的信息来快速获得诸如样本的缺陷等异常的措施。为了实现上述目的，本发明的结构是将缺陷外观的图像和图像上的辅助信息作为一个单元存储在数据库中作为一个单元，用于观察不良外观的结果在制造过程中的样本中，在存储在数据库中的多个报告文件中，通过使用从补充信息中设置的搜索条件，当产生新的有缺陷的外观和搜索的补充来搜索补充信息作为搜索目标输出与补充信息相关的信息和图像。

10. 发明申请

US20070276620A1 METHOD OF CORRECTING COORDINATES, AND DEFECT REVIEW APPARATUS 有权
标题翻译：校正方法和缺陷评估装置
公开(公告)号：US20070276620A1
公开(公告)日：2007-11-29
申请号：US11753966
申请日：2007-05-25
申请人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
发明人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
IPC分类号： G01R35/00
CPC分类号： G01R31/2884
摘要： The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to the present invention, which is a review apparatus for moving a sample stage onto coordinates previously calculated by a checking apparatus to review the sample, has a function of retaining a plurality of coordinate correction tables to correct a deviation between a coordinate value previously calculated by a checking apparatus and an actual sample position detected by the review apparatus. The review apparatus evaluates correction accuracy of the plurality of coordinate correction tables and applies one of the coordinate correction tables with the maximum evaluation value.
摘要翻译：本发明提供了一种校正坐标的方法，以便在用于将样品台移动到特定坐标上以检查样品的检查装置中的视场中快速且适当地布置样品。根据本发明的检查装置，其是用于将样本台移动到由检查装置预先计算的坐标以检查样本的检查装置，具有保留多个坐标校正表以校正坐标的偏差的功能先前由检查装置计算的值和由检查装置检测到的实际样品位置。评估装置评估多个坐标校正表的校正精度，并且应用具有最大评估值的坐标校正表中的一个。

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