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1. 发明申请

US20130077850A1 METHOD FOR OPTIMIZING OBSERVED IMAGE CLASSIFICATION CRITERION AND IMAGE CLASSIFICATION APPARATUS 有权
标题翻译：用于优化观察图像分类标准和图像分类设备的方法
公开(公告)号：US20130077850A1
公开(公告)日：2013-03-28
申请号：US13702674
申请日：2011-05-13
申请人： Takehiro Hirai , Kozo Miyake , Junko Konishi
发明人： Takehiro Hirai , Kozo Miyake , Junko Konishi
IPC分类号： G06T7/00
CPC分类号： G06T7/0004 , G06T2200/24 , G06T2207/10061 , G06T2207/30148
摘要： A first object is to use both ADC (automatic defect classification) and MDC (manual defect classification) and reduce the amount of MDC operation. A second object is to prevent a DOI (defect of interest) from being missed.The first object is achieved by displaying judgment information on a screen. The judgment information is necessary when part of the classification is performed by ADC and part of the classification is performed by MDC and used to judge which classification is used, ADC or MDC. In the display operation, ADC classification results and MDC classification results are also displayed in the form of matrix. Further, a missed DOI rate is calculated for each classification threshold used in the defect classification and displayed on the screen.
摘要翻译：第一个目的是使用ADC（自动缺陷分类）和MDC（手动缺陷分类），并减少MDC操作的数量。第二个目的是防止DOI（感兴趣的缺陷）被遗漏。通过在屏幕上显示判断信息来实现第一个目的。当部分分类由ADC执行时，判断信息是必需的，部分分类由MDC执行，用于判断使用哪种分类，ADC或MDC。在显示操作中，ADC分类结果和MDC分类结果也以矩阵的形式显示。此外，针对在缺陷分类中使用并显示在屏幕上的每个分类阈值计算错失的DOI率。

2. 发明授权

US08779360B2 Charged particle beam device, defect observation device, and management server 有权
标题翻译：带电粒子束装置，缺陷观察装置和管理服务器
公开(公告)号：US08779360B2
公开(公告)日：2014-07-15
申请号：US13809923
申请日：2011-06-22
申请人： Kozo Miyake , Junko Konishi , Takehiro Hirai , Kenji Obara
发明人： Kozo Miyake , Junko Konishi , Takehiro Hirai , Kenji Obara
IPC分类号： H01J37/153
CPC分类号： H01J37/153 , G01N23/00 , H01J37/28 , H01J2237/24592 , H01J2237/2817
摘要： Provided is a charged particle beam device that prevents the increase in processing trouble caused by deterioration in the reviewing performance (e.g., overlooking of defects) by detecting an operation abnormality affecting the performance of the device or a possibility of such an abnormality in the middle of a processing sequence of a sample and giving a feedback in real time. In each processing step of the charged particle beam device, monitoring items representing the operating status of the device (control status of the electron beam, an offset amount at the time of wafer positioning, a defect coordinate error offset amount, etc.) are monitored during the processing sequence of a sample and stored as history information. In the middle of the processing sequence, a comparative judgment between the value of each monitoring item and the past history information corresponding to the monitoring item is made according to preset judgment criteria. When the width of fluctuation from the past history information deviates from a reference range, an alert is issued.
摘要翻译：提供了一种带电粒子束装置，其通过检测影响装置的性能的操作异常或在中间的这种异常的可能性来防止由于检查性能的劣化（例如，忽视缺陷）引起的加工故障的增加样品的处理顺序并实时提供反馈。在带电粒子束装置的每个处理步骤中，监视表示装置的运行状态（电子束的控制状态，晶片定位时的偏移量，缺陷坐标误差偏移量等）的监视项目在样品的处理顺序期间并存储为历史信息。在处理顺序的中间，根据预先设定的判断基准，进行各监视项目的值与对应于监视项目的过去历史信息的比较判断。当过去历史信息的波动宽度偏离参考范围时，发出警报。

3. 发明申请

US20130112893A1 CHARGED PARTICLE BEAM DEVICE, DEFECT OBSERVATION DEVICE, AND MANAGEMENT SERVER 有权
标题翻译：充电颗粒光束装置，缺陷观察装置和管理服务器
公开(公告)号：US20130112893A1
公开(公告)日：2013-05-09
申请号：US13809923
申请日：2011-06-22
申请人： Kozo Miyake , Junko Konishi , Takehiro Hirai , Kenji Obara
发明人： Kozo Miyake , Junko Konishi , Takehiro Hirai , Kenji Obara
IPC分类号： G01N23/00
CPC分类号： H01J37/153 , G01N23/00 , H01J37/28 , H01J2237/24592 , H01J2237/2817
摘要： Provided is a charged particle beam device that prevents the increase in processing trouble caused by deterioration in the reviewing performance (e.g., overlooking of defects) by detecting an operation abnormality affecting the performance of the device or a possibility of such an abnormality in the middle of a processing sequence of a sample and giving a feedback in real time. In each processing step of the charged particle beam device, monitoring items representing the operating status of the device (control status of the electron beam, an offset amount at the time of wafer positioning, a defect coordinate error offset amount, etc.) are monitored during the processing sequence of a sample and stored as history information. In the middle of the processing sequence, a comparative judgment between the value of each monitoring item and the past history information corresponding to the monitoring item is made according to preset judgment criteria. When the width of fluctuation from the past history information deviates from a reference range, an alert is issued.
摘要翻译：提供了一种带电粒子束装置，其通过检测影响装置的性能的操作异常或在中间的这种异常的可能性来防止由于检查性能的劣化（例如，忽视缺陷）引起的加工故障的增加样品的处理顺序并实时提供反馈。在带电粒子束装置的每个处理步骤中，监视表示装置的运行状态（电子束的控制状态，晶片定位时的偏移量，缺陷坐标误差偏移量等）的监视项目在样品的处理顺序期间并存储为历史信息。在处理顺序的中间，根据预先设定的判断基准，进行各监视项目的值与对应于监视项目的过去历史信息的比较判断。当过去历史信息的波动宽度偏离参考范围时，发出警报。

4. 发明授权

US09020237B2 Method for optimizing observed image classification criterion and image classification apparatus 有权
标题翻译：优化观察图像分类标准和图像分类装置的方法
公开(公告)号：US09020237B2
公开(公告)日：2015-04-28
申请号：US13702674
申请日：2011-05-13
申请人： Takehiro Hirai , Kozo Miyake , Junko Konishi
发明人： Takehiro Hirai , Kozo Miyake , Junko Konishi
IPC分类号： G06K9/00 , G06T7/00
CPC分类号： G06T7/0004 , G06T2200/24 , G06T2207/10061 , G06T2207/30148
摘要： A first object is to use both ADC (automatic defect classification) and MDC (manual defect classification) and reduce the amount of MDC operation. A second object is to prevent a DOI (defect of interest) from being missed.The first object is achieved by displaying judgment information on a screen. The judgment information is necessary when part of the classification is performed by ADC and part of the classification is performed by MDC and used to judge which classification is used, ADC or MDC. In the display operation, ADC classification results and MDC classification results are also displayed in the form of matrix. Further, a missed DOI rate is calculated for each classification threshold used in the defect classification and displayed on the screen.
摘要翻译：第一个目的是使用ADC（自动缺陷分类）和MDC（手动缺陷分类），并减少MDC操作的数量。第二个目的是防止DOI（感兴趣的缺陷）被遗漏。通过在屏幕上显示判断信息来实现第一个目的。当部分分类由ADC执行时，判断信息是必需的，部分分类由MDC执行，用于判断使用哪种分类，ADC或MDC。在显示操作中，ADC分类结果和MDC分类结果也以矩阵的形式显示。此外，针对在缺陷分类中使用并显示在屏幕上的每个分类阈值计算错失的DOI率。

5. 发明授权

US09280814B2 Charged particle beam apparatus that performs image classification assistance 有权
标题翻译：执行图像分类辅助的带电粒子束装置
公开(公告)号：US09280814B2
公开(公告)日：2016-03-08
申请号：US14238561
申请日：2012-07-04
申请人： Takehiro Hirai , Kenji Obara , Kozo Miyake
发明人： Takehiro Hirai , Kenji Obara , Kozo Miyake
IPC分类号： G06K9/00 , G06T7/00 , H01L21/66
CPC分类号： G06T7/0004 , H01J2237/2817 , H01L22/12 , H01L22/20
摘要： The charged particle beam apparatus automatically judges the good or bad of an observation object on the basis of information obtained from an image of the observation object on a wafer; displays a judgment result on a screen; displays the observation object, extracted from the judgment result, that requires to be corrected on the basis of the good or bad of the observation object from a user; and corrects the judgment result to the extracted and displayed observation object on the basis of an instruction from the user.
摘要翻译：带电粒子束装置基于从晶片上的观察对象的图像获得的信息自动判断观察对象的好坏; 在屏幕上显示判断结果; 根据用户的观察对象的好坏显示需要根据判断结果提取的观察对象的需要进行校正的观察对象; 并且根据来自用户的指示将判断结果校正到所提取和显示的观察对象。

6. 发明申请

US20140185918A1 CHARGED PARTICLE BEAM APPARATUS THAT PERFORMS IMAGE CLASSIFICATION ASSISTANCE 有权
标题翻译：执行图像分类协助的充电颗粒光束装置
公开(公告)号：US20140185918A1
公开(公告)日：2014-07-03
申请号：US14238561
申请日：2012-07-04
申请人： Takehiro Hirai , Kenji Obara , Kozo Miyake
发明人： Takehiro Hirai , Kenji Obara , Kozo Miyake
IPC分类号： G06T7/00
CPC分类号： G06T7/0004 , H01J2237/2817 , H01L22/12 , H01L22/20
摘要： An increase in the number of evaluation points of a semiconductor wafer is effective in improving evaluation accuracy of a manufacturing process. However, a method of automatically evaluating and classifying of these evaluation points by a defect review apparatus is lower in accuracy as compared with a manual work, and it is difficult to perfectly automate the method by these apparatuses. Therefore, the judgment as to whether the evaluation point is actually a defect is entrusted to manual evaluation, limiting the number of evaluable points. The present invention aims at lightening a burden of the manual work in process margin evaluation in a semiconductor manufacturing process.The present invention automatically judges the good or bad of an observation object on the basis of information obtained from an image of the observation object on a wafer; displays a judgment result on a screen; displays the observation object, extracted from the judgment result, that requires to be corrected on the basis of the good or bad of the observation object from a user; and corrects the judgment result to the extracted and displayed observation object on the basis of an instruction from the user.
摘要翻译：半导体晶片的评价点的数量的增加对提高制造工序的评价精度是有效的。然而，与手动工作相比，通过缺陷检查装置自动评估和分类这些评估点的方法的准确度较低，并且难以通过这些装置完美地自动化该方法。因此，评估点是否实际上是缺陷的判断被委托给手动评估，限制了可评价点的数量。本发明旨在减轻半导体制造过程中的工艺边缘评估中的手工工作的负担。本发明基于从晶片上的观察对象的图像获得的信息自动判断观察对象的好坏; 在屏幕上显示判断结果; 根据用户的观察对象的好坏显示需要根据判断结果提取的观察对象的需要进行校正的观察对象; 并且根据来自用户的指示将判断结果校正到所提取和显示的观察对象。

7. 发明授权

US4447734A Radiation-shielding transparent material and method of producing the same 失效
标题翻译：辐射屏蔽透明材料及其制造方法
公开(公告)号：US4447734A
公开(公告)日：1984-05-08
申请号：US304885
申请日：1981-09-23
申请人： Asao Kusumegi , Kenjiro Kondo , Yoshiyuki Watase , Yoshio Yoshimura , Kozo Miyake
发明人： Asao Kusumegi , Kenjiro Kondo , Yoshiyuki Watase , Yoshio Yoshimura , Kozo Miyake
IPC分类号： G21F1/10 , G21F1/02 , G21F7/03 , G21F1/00
CPC分类号： G21F7/03 , G21F1/023
摘要： Radiation-shielding transparent material comprising an aqueous solution of thallium formate with or without thallium malonate, the solution having a density of 2.5 to 4.3 g/cm.sup.3, a radiation length of 3.8 to 1.9 cm, and a transmission of not less than 93% for light of 400 nm wavelength. The material is produced by deoxidizing thallium formate and dissolving the deoxidized thallium formate in deoxidized distilled water.
摘要翻译：辐射屏蔽透明材料，其包含具有或不具有丙二酸铊的甲酸铊水溶液，所述溶液的密度为2.5至4.3g / cm 3，辐射长度为3.8至1.9cm，透射率不小于93％，对于 400nm波长的光。该材料通过将甲酸铊脱氧并将脱氧的甲酸铊溶解在脱氧蒸馏水中而制备。

8. 发明授权

US06044312A Method and apparatus for preparing running course data for an unmanned dump truck 失效
标题翻译：为无人驾驶的自卸车准备运行过程数据的方法和装置
公开(公告)号：US06044312A
公开(公告)日：2000-03-28
申请号：US913807
申请日：1997-09-23
申请人： Tsugio Sudo , Takao Nagai , Kozo Miyake
发明人： Tsugio Sudo , Takao Nagai , Kozo Miyake
IPC分类号： B60P1/04 , B60W30/00 , E02F3/84 , E02F9/20 , G05D1/02 , G08G1/00 , G06F165/00
CPC分类号： E02F9/205 , E02F3/842 , E02F9/2045 , G05D1/024 , G05D1/0295 , G05D1/0257 , G05D1/027 , G05D1/0272 , G05D1/0278 , G05D2201/0202
摘要： The present invention relates to a method of and an apparatus for preparing travel-course data for an unmanned dump truck which can automatically prepare travel-course data with ease and improve the operability and operating efficiency. To this end, the preparing apparatus comprises a position measuring means (11), for measuring a current position of a loader; a loader controller (13), for transmitting by radio the current position, an automatic guiding mode switch (25), for selecting a mode of automatically traveling the unmanned dump truck to a new loading position; and a course preparing means (24), for preparing new travel-course data based on a new loading position and stored travel-course data by regarding the current position as a new loading position when a mode selection signal is inputted, wherein an automatic travel controller (6) rewrites the stored data as new travel-course data.
摘要翻译： PCT No.PCT / JP96 / 00750 Sec。 371日期1997年9月23日 102（e）1997年9月23日PCT 1996年3月22日PCT公布。出版物WO96 / 日期：1996年10月3日本发明涉及一种能够轻松自动准备旅行过程数据的无人自卸车的行驶路线数据准备方法和装置，提高了操作性和操作效率。为此，制备装置包括用于测量装载机的当前位置的位置测量装置（11）一种用于通过无线电发送当前位置的装载机控制器（13），用于选择自动驾驶无人自卸车辆到新的装载位置的模式的自动引导模式开关（25）以及课程准备装置（24），用于当输入模式选择信号时，通过将当前位置视为新的装载位置，基于新的装载位置和存储的行驶路线数据来准备新的行驶路线数据，其中自动行驶控制器（6）将存储的数据重写为新的旅行路线数据。

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