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1. 发明授权

US07933189B2 Focus optical system and optical disc master exposure apparatus 有权
标题翻译：聚焦光学系统和光盘主曝光设备
公开(公告)号：US07933189B2
公开(公告)日：2011-04-26
申请号：US12423911
申请日：2009-04-15
申请人： Takeshi Omori , Takaaki Kassai , Kenji Maebara , Keiji Fujita , Hiroaki Ashiwa
发明人： Takeshi Omori , Takaaki Kassai , Kenji Maebara , Keiji Fujita , Hiroaki Ashiwa
IPC分类号： G11B7/00
CPC分类号： G11B7/0909 , G11B7/261
摘要： In a focus optical system for optical discs or optical disc master exposure apparatuses, a relative positional relation between a cylindrical lens and a 4-division detector in an astigmatic optical system is adjust so that an interference fringe appearing in reflected light derived from an optical disc master is made to be incident on a dead zone of the 4-division detector. Thus, an astigmatic focus servo free from effects of variations in a focus error signal due to the interference fringe is realized. As a result of this, effects of the interference fringe appearing in the reflected light derived from an optical disc or optical disc master can be suppressed.
摘要翻译：在用于光盘或光盘主曝光装置的聚焦光学系统中，调整像散光学系统中的柱面透镜和4分辨率检测器之间的相对位置关系，使得出现在来自光盘的反射光中的干涉条纹主人被发现在四分之一检测器的死区。因此，实现了不受干涉条纹引起的聚焦误差信号变化影响的像散聚焦伺服。结果，可以抑制出现在从光盘或光盘母盘导出的反射光中的干涉条纹的影响。

2. 发明授权

US5355814A Gasifier burner for powdered solid fuels and method for using the same 失效
标题翻译：用于粉末状固体燃料的气化炉燃烧器及其使用方法
公开(公告)号：US5355814A
公开(公告)日：1994-10-18
申请号：US8818
申请日：1993-01-25
申请人： Nobumasa Kemori , Kimiaki Utsunomiya , Hitoshi Takano , Keiji Fujita
发明人： Nobumasa Kemori , Kimiaki Utsunomiya , Hitoshi Takano , Keiji Fujita
IPC分类号： C22B5/10 , C22B13/02 , C22B19/04 , F23D1/00 , F23D1/06
CPC分类号： F23D1/00
摘要： The gasification burner of this invention capable of maintaining a high combustion rate for a long period of time comprises a combustion chamber having a ceiling with a small hole in its center, a pre-mixing pipe fitted into the small hole and having a nozzle at its top, wherein the pre-mixing pipe and the combustion chamber are concentric, and the spread angle of the gas flow sprayed from the end of the pre-mixing pipe is between 10 and 40 degrees, so that the relationship between the bottom of the combustion chamber and the conical gas flow is regulated by keeping a good balance between the gasification rate of the powdered coke and the life of the combustion chamber.
摘要翻译：能够长时间保持高燃烧率的本发明的气化燃烧器包括燃烧室，其中心具有一个具有小孔的天花板，一个装在小孔中的预混合管，并在其中具有一个喷嘴顶部，其中预混合管和燃烧室是同心的，并且从预混合管的端部喷射的气流的扩展角在10和40度之间，使得燃烧的底部之间的关系通过保持粉末状焦炭的气化速率和燃烧室的寿命之间的良好平衡来调节锥形气体流量。

3. 发明授权

US07534717B2 Method of manufacturing semiconductor device 失效
标题翻译：制造半导体器件的方法
公开(公告)号：US07534717B2
公开(公告)日：2009-05-19
申请号：US11094182
申请日：2005-03-31
申请人： Hideshi Miyajima , Keiji Fujita , Hideaki Masuda , Rempei Nakata , Miyoko Shimada
发明人： Hideshi Miyajima , Keiji Fujita , Hideaki Masuda , Rempei Nakata , Miyoko Shimada
IPC分类号： H01L21/31 , H01L21/4763
CPC分类号： H01L21/02118 , H01L21/02126 , H01L21/02164 , H01L21/022 , H01L21/02216 , H01L21/02274 , H01L21/02282 , H01L21/02351 , H01L21/3122 , H01L21/76801 , H01L21/76807 , H01L21/76825 , H01L21/76828 , H01L21/76829 , H01L21/76835
摘要： The formation of an interlayer insulating film above a substrate, the formation of an insulating film of an organic material on the interlayer insulating film thereafter, and the irradiation of the insulating film of an organic material and the interlayer insulating film with electron beams, thereby curing at least the insulating film of an organic material, are proposed.
摘要翻译：在基板上形成层间绝缘膜，此后在层间绝缘膜上形成有机材料的绝缘膜，用电子束照射有机材料的绝缘膜和层间绝缘膜，从而固化至少提出了有机材料的绝缘膜。

4. 发明申请

US20050250311A1 Method of manufacturing semiconductor device 失效
标题翻译：制造半导体器件的方法
公开(公告)号：US20050250311A1
公开(公告)日：2005-11-10
申请号：US11094182
申请日：2005-03-31
申请人： Hideshi Miyajima , Keiji Fujita , Hideaki Masuda , Rempei Nakata , Miyoko Shimada
发明人： Hideshi Miyajima , Keiji Fujita , Hideaki Masuda , Rempei Nakata , Miyoko Shimada
IPC分类号： H01L21/768 , H01L21/20 , H01L21/312
CPC分类号： H01L21/02118 , H01L21/02126 , H01L21/02164 , H01L21/022 , H01L21/02216 , H01L21/02274 , H01L21/02282 , H01L21/02351 , H01L21/3122 , H01L21/76801 , H01L21/76807 , H01L21/76825 , H01L21/76828 , H01L21/76829 , H01L21/76835
摘要： The formation of an interlayer insulating film above a substrate, the formation of an insulating film of an organic material on the interlayer insulating film thereafter, and the irradiation of the insulating film of an organic material and the interlayer insulating film with electron beams, thereby curing at least the insulating film of an organic material, are proposed.
摘要翻译：在基板上形成层间绝缘膜，此后在层间绝缘膜上形成有机材料的绝缘膜，用电子束照射有机材料的绝缘膜和层间绝缘膜，从而固化至少提出了有机材料的绝缘膜。

5. 发明授权

US5420041A Method of acid value determination by infrared absorption 失效
标题翻译：通过红外吸收测定酸值的方法
公开(公告)号：US5420041A
公开(公告)日：1995-05-30
申请号：US125151
申请日：1993-09-23
申请人： Kazuhiko Matsushita , Hiroshi Yokota , Keiji Fujita , Akihiro Tsukamoto
发明人： Kazuhiko Matsushita , Hiroshi Yokota , Keiji Fujita , Akihiro Tsukamoto
IPC分类号： G01N21/35 , G01N21/3577 , G01N33/28 , G01N33/03 , G01N33/26
CPC分类号： G01N33/2835 , G01N21/3577 , G01N33/2888 , G01N21/05 , Y10T436/201666
摘要： A method of determining acid value with high accuracy, using an infrared spectrometer is provided, in which the absorbance is determined attributable to carboxylic group based on an infrared absorption spectrum at wave numbers around 3300 cm.sup.-1.
摘要翻译：提供了使用红外光谱仪以高精度测定酸值的方法，其中基于在3300cm -1附近的波数处的红外吸收光谱，由羧基决定吸光度。

6. 发明授权

US07094681B2 Semiconductor device fabrication method 有权
标题翻译：半导体器件制造方法
公开(公告)号：US07094681B2
公开(公告)日：2006-08-22
申请号：US10701476
申请日：2003-11-06
申请人： Keiji Fujita , Rempei Nakata , Hideshi Miyajima
发明人： Keiji Fujita , Rempei Nakata , Hideshi Miyajima
IPC分类号： H01L21/4763 , H01L21/44
CPC分类号： H01L21/02126 , H01L21/02137 , H01L21/02203 , H01L21/02211 , H01L21/02274 , H01L21/02282 , H01L21/02337 , H01L21/02351 , H01L21/31695 , H01L21/7682 , H01L23/53228 , H01L23/5329 , H01L2221/1047 , H01L2924/0002 , H01L2924/00
摘要： Disclosed is a semiconductor device comprising a semiconductor substrate, a porous insulating film formed above the semiconductor substrate, the porous insulating film having a relative dielectric constant of 2.5 or less and including a first insulating material, at least a portion of pores in the porous insulating film having on the inner wall thereof a layer of a second insulating material which differs in nature from the first insulating material, and a plug and/or a wiring layer buried in the porous insulating film.
摘要翻译：公开了一种半导体器件，包括半导体衬底，形成在半导体衬底上的多孔绝缘膜，多孔绝缘膜的相对介电常数为2.5或更小，并且包括第一绝缘材料，多孔绝缘体中的至少一部分孔在其内壁上具有与第一绝缘材料不同的第二绝缘材料层，以及埋在多孔绝缘膜中的插塞和/或布线层。

7. 发明授权

US06344420B1 Plasma processing method and plasma processing apparatus 失效
标题翻译：等离子体处理方法和等离子体处理装置
公开(公告)号：US06344420B1
公开(公告)日：2002-02-05
申请号：US09525038
申请日：2000-03-14
申请人： Hideshi Miyajima , Keiji Fujita
发明人： Hideshi Miyajima , Keiji Fujita
IPC分类号： H01L2131
CPC分类号： C23C16/45565 , C23C16/455 , C23C16/5096 , H01J37/32431
摘要： In a parallel-plate type plasma processing apparatus including an upper electrode having a plurality of gas introducing inlets and a support table serving as a lower electrode opposed to the upper electrode and having a silicon wafer thereon, the open ends of the inlets are expanded in their diameter directions.
摘要翻译：在平行板型等离子体处理装置中，包括具有多个气体导入口的上部电极和作为与上部电极相对的下部电极的支撑台，其上具有硅晶片，入口的开放端部以它们的直径方向。

8. 发明授权

US6087539A Process for producing an ether compound 失效
标题翻译：醚化合物的制造方法
公开(公告)号：US6087539A
公开(公告)日：2000-07-11
申请号：US930585
申请日：1997-10-20
申请人： Hirotaka Yamasaki , Akihisa Ogawa , Shigeru Kamimori , Yoshikazu Hirao , Keiji Fujita , Tokuyuki Yoshimoto
发明人： Hirotaka Yamasaki , Akihisa Ogawa , Shigeru Kamimori , Yoshikazu Hirao , Keiji Fujita , Tokuyuki Yoshimoto
IPC分类号： C07C41/28 , C08F8/04 , C07C43/11
CPC分类号： C08F8/04 , C07C41/28
摘要： A process for producing an ether compound represented by the general formula (II) or (III): ##STR1## wherein R.sup.1 and R.sup.2 represent each an alkyl group or a cycloalkyl group and n represents an integer of 1 to 50, which comprises bringing an acetal compound represented by the general formula (I): ##STR2## into reaction with hydrogen in the presence of a solid catalyst comprising (A) nickel in an amount corresponding to 10 to 70% by weight of metallic nickel, and (B) at least one compound selected from the group consisting of oxides of silicon, aluminum, magnesium, titanium, and zirconium; and synthetic or natural inorganic oxides containing one or more of these oxides as the constituents thereof. A vinyl ether polymer having a terminal ether group can be obtained with a good yield without causing corrosion of the apparatus used for the reaction.
摘要翻译： PCT No.PCT / JP96 / 01056 Sec。 371日期：1997年10月20日 102（e）1997年10月20日日期PCT 1996年4月18日PCT PCT。出版物WO96 / 33154 日期：1996年10月24日由通式（II）或（III）表示的醚化合物的制造方法：其中，R1和R2各自表示烷基或环烷基，n表示1〜50的整数，将由通式（I）表示的缩醛化合物与氢反应，在固体催化剂存在下反应，所述固体催化剂包含（A）相当于金属镍的10至70重量％的镍，和（B）至少一种选自硅，铝，镁，钛和锆的氧化物的化合物; 和含有这些氧化物中的一种或多种的合成或天然无机氧化物作为其组成。可以以良好的收率获得具有末端醚基的乙烯基醚聚合物，而不会引起用于反应的装置的腐蚀。

9. 发明授权

US5748288A Lighting assembly, exposure apparatus and exposure method employing the lighting assembly 失效
标题翻译：照明组件，曝光装置和采用照明组件的曝光方法
公开(公告)号：US5748288A
公开(公告)日：1998-05-05
申请号：US613027
申请日：1996-03-08
申请人： Hiroyuki Nagano , Takashi Inoue , Hiroshi Yamashita , Takeo Sato , Keiji Fujita
发明人： Hiroyuki Nagano , Takashi Inoue , Hiroshi Yamashita , Takeo Sato , Keiji Fujita
IPC分类号： G03F7/20
CPC分类号： G03F7/70075 , G03F7/7035 , G03F7/70358 , G03F7/70691
摘要： The present invention provides spot-illumination of a specific size having sufficiently homogeneous light intensity distribution, with a small and inexpensive apparatus. A lighting assembly condenses the light from light source 1 with condensing-reflecting member 2. An optical integrator 3 receives at its one end the light via condensing-reflecting member 2 and emits from the other end after making the light intensity distribution homogeneous A projection lens system 4 projects the emitting surface of optical integrator 3 onto an emitted surface. By shifting the relative positioning between the lighting assembly and the substrate 11, and adjusting the distance between the substrate 11 and the mask 12, which stores a pattern to be formed, a specified area of the exposure surface 11a is scanned and exposed to have a mask pattern transcribed on the exposure surface 11a.
摘要翻译：本发明提供具有足够均匀的光强度分布的特定尺寸的点照射，并且具有小而便宜的装置。照明组件将来自光源1的光与会聚反射构件2聚光。光学积分器3在其一端接收经由会聚反射构件2的光，并在使光强分布均匀后从另一端发射。投影透镜系统4将光学积分器3的发射表面投影到发射表面上。通过移动照明组件和基板11之间的相对定位，并且调整存储要形成的图案的基板11和掩模12之间的距离，曝光表面11a的指定区域被扫描并暴露以具有掩模图案在曝光表面11a上转录。

10. 发明授权

US4067827A Process for producing expandable beads of polymethyl methacrylate 失效
标题翻译：聚甲基丙烯酸甲酯发泡珠的制备方法
公开(公告)号：US4067827A
公开(公告)日：1978-01-10
申请号：US743434
申请日：1976-11-19
申请人： Yoshinari Takano , Keiji Fujita , Yasuo Teraoka , Masahiro Nishida , Ryoichi Fujitani , Yaichi Kuratomo
发明人： Yoshinari Takano , Keiji Fujita , Yasuo Teraoka , Masahiro Nishida , Ryoichi Fujitani , Yaichi Kuratomo
IPC分类号： C08J9/00 , C08J9/20
CPC分类号： C08J9/20 , C08J9/0023 , C08J9/0061 , C08J2333/12
摘要： A process for improving the production of polymethyl methacrylate beads or copolymeric methyl methacrylate and vinyl beads wherein the monomer is polymerized in the presence of a foaming agent and foaming agent stabilizer and within an atmosphere of inert gas, such as nitrogen, at a pressure of at least 4 kg/cm.sup.2.G. The polymerizatin is pressurized after the reaction has proceeded to a conversion ratio of from 30 to 70%. The process essentially eliminates aggregation and "sticking together" of the beads produced thereby.
摘要翻译：一种用于改进聚甲基丙烯酸甲酯珠或共聚甲基丙烯酸甲酯和乙烯珠的生产方法，其中单体在发泡剂和发泡剂稳定剂的存在下在惰性气体如氮气的气氛中在压力为至少4公斤/厘米2。在反应进行到30至70％的转化率之后，聚合物加压。该方法基本上消除了由此产生的珠的聚集和“粘在一起”。

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