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1. 发明授权

US09235413B1 Automated control of semiconductor wafer manufacturing based on electrical test results 有权
标题翻译：基于电气测试结果自动控制半导体晶圆制造
公开(公告)号：US09235413B1
公开(公告)日：2016-01-12
申请号：US11196364
申请日：2005-08-03
申请人： William MacDonald , George Logsdon , Matthew Lascom , Steven Craig Gessler
发明人： William MacDonald , George Logsdon , Matthew Lascom , Steven Craig Gessler
IPC分类号： G06F9/00 , G05B23/00 , G05B23/02
CPC分类号： G06F9/00 , G05B19/41875 , G05B23/00 , G05B23/02 , G05B2219/32209 , G05B2219/32222 , Y02P90/22
摘要： In semiconductor wafer manufacturing, processes such as analyzing test data associated with semiconductor wafers, interpreting the test data analysis, and acting on the test data interpretation and analysis are automated. Such automation can eliminate delays that were previously imposed by the action of test analysis engineers and wafer fabrication personnel, thereby reducing the amount of useless material that is produced before a process defect can be detected.
摘要翻译：在半导体晶片制造中，自动化诸如分析与半导体晶片相关的测试数据，解释测试数据分析以及对测试数据解释和分析的处理的过程。这样的自动化可以消除先前由测试分析工程师和晶片制造人员的作用施加的延迟，从而减少在检测到工艺缺陷之前产生的无用材料的量。

2. 发明授权

US07826915B1 System and method for providing automatic qualification intervention in a manufacturing process 有权
标题翻译：在制造过程中提供自动资格干预的系统和方法
公开(公告)号：US07826915B1
公开(公告)日：2010-11-02
申请号：US11337928
申请日：2006-01-23
申请人： George Logsdon , Gale Moericke , William MacDonald , Edward J. Francis
发明人： George Logsdon , Gale Moericke , William MacDonald , Edward J. Francis
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： A system and method is disclosed for providing automatic qualification intervention in a manufacturing process that is performed by a plurality of components. At least one qualification process is associated with each of the components. The qualification processes are stored in a component/qualification matrix in a computerized database management system. The automatic qualification intervention system requires that all qualification processes for a component must be performed in conformity with the qualification processes for the component that have been stored in the component/qualification matrix. The automatic qualification intervention system significantly reduces the delays that are inherent in prior art methods.
摘要翻译：公开了一种用于在由多个部件执行的制造过程中提供自动限定干预的系统和方法。至少一个鉴定过程与每个组件相关联。鉴定过程存储在计算机化数据库管理系统中的组件/资格矩阵中。自动资格认证干预系统要求组件的所有资格认证过程必须符合已经存储在组件/资格矩阵中的组件的资格认证流程。自动鉴定干预系统显着减少了现有技术方法中固有的延迟。

3. 发明授权

US07065424B1 Systems and methods that monitor re-qualification indicia associated with durable items to ensure physical process quality 有权
标题翻译：监测与耐用物品相关的重新认证标志的系统和方法，以确保物理过程质量
公开(公告)号：US07065424B1
公开(公告)日：2006-06-20
申请号：US10794796
申请日：2004-03-04
申请人： William MacDonald , George Logsdon , Darren Lee Rust
发明人： William MacDonald , George Logsdon , Darren Lee Rust
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： This invention introduces systems and methods that control production process quality, wherein the production process has a plurality of durable items, each durable item is associated with a re-qualification process initiated as a function of a life expectancy associated therewith. The life expectancy associated with each durable item is reset upon completion of the associated re-qualification process. An exemplary method comprises (I) monitoring re-qualification indicia associated with each associated re-qualification process, and (ii) controlling availability of re-qualified durable items of the production process as a function of the re-qualification indicia to thereby control production process quality.
摘要翻译：本发明引入了控制生产过程质量的系统和方法，其中生产过程具有多个耐用物品，每个耐用物品与作为与其相关联的预期寿命的函数启动的重新认证过程相关联。在相关联的重新认证过程完成后，与每个持久项目相关联的预期寿命将重置。示例性方法包括（I）监测与每个相关联的重新认证过程相关联的重新认证标记，以及（ii）根据重新认证标记来控制生产过程的重新认证的耐久项目的可用性，从而控制生产工艺质量

4. 发明授权

US07784423B1 System and method for dispensing material onto a semiconductor wafer 有权
标题翻译：用于将材料分配到半导体晶片上的系统和方法
公开(公告)号：US07784423B1
公开(公告)日：2010-08-31
申请号：US10833778
申请日：2004-04-28
申请人： George Logsdon
发明人： George Logsdon
IPC分类号： B05C5/00 , B05C11/02 , B65D35/22
CPC分类号： H01L21/6715
摘要： A delivery system for dispensing material onto a semiconductor wafer is provided that includes an opening device and a dispensing device. The opening device is operable to open a packet of material. The dispensing device is operable to dispense the material from the packet onto the semiconductor wafer.
摘要翻译：提供了一种用于将材料分配到半导体晶片上的输送系统，其包括打开装置和分配装置。打开装置可操作以打开一包材料。分配装置可操作以将材料从包装分配到半导体晶片上。

5. 发明授权

US08417367B1 Manufacturing exception handling system 有权
标题翻译：制造异常处理系统
公开(公告)号：US08417367B1
公开(公告)日：2013-04-09
申请号：US10920834
申请日：2004-08-18
申请人： George Logsdon , Ramesh Rao , Teresa Colpaert , Michael A. Hart
发明人： George Logsdon , Ramesh Rao , Teresa Colpaert , Michael A. Hart
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： A manufacturing exception handling system is described for use with a manufacturing execution system that controls a semiconductor manufacturing process. The present invention provides real time information to the user that identifies restrictions that have been placed on the use of entities and inventories in the semiconductor manufacturing process. The present invention also provides real time information to the user that identifies the persons who are authorized to remove the restrictions. The present invention saves the time and effort that would otherwise be required to find out why a restriction existed and who could remove the restriction during the semiconductor manufacturing process.
摘要翻译：描述了与控制半导体制造过程的制造执行系统一起使用的制造异常处理系统。本发明向用户提供识别在半导体制造过程中对实体和库存的使用的限制的实时信息。本发明还向用户提供识别被授权去除限制的人的实时信息。本发明节省了为了找出限制的原因而需要的时间和精力，以及谁可以在半导体制造过程中消除限制。

6. 发明授权

US07043319B1 System and method for visualizing the use of resources in a process system 有权
标题翻译：用于在流程系统中可视化资源使用的系统和方法
公开(公告)号：US07043319B1
公开(公告)日：2006-05-09
申请号：US10674873
申请日：2003-09-30
申请人： George Logsdon , Gary Elmore , Avelito Hernal
发明人： George Logsdon , Gary Elmore , Avelito Hernal
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B2219/32244 , G05B2219/45031 , G06Q10/06 , G06Q10/0631 , Y02P90/20
摘要： A resource allocator allocates a plurality of resources among a plurality of tasks within a process system. The resource allocator includes a monitoring controller for monitoring one or more characteristics associated with at least one application process, the resources, and the tasks. The resource allocator also includes a model of the process system representing mathematically the resources and the tasks and defining relationships among related resources and tasks. The resource allocator further includes a resource allocation controller for operating the model in response to the monitored characteristics and allocating the resources among the tasks. In addition, the resource allocator includes a graphical user interface for identifying the resources and flows between at least some of the resources. The graphical user interface includes at least one virtual queue associated with at least one of the resources and identifying one or more items to be processed by the at least one resource.
摘要翻译：资源分配器在进程系统内的多个任务中分配多个资源。资源分配器包括用于监视与至少一个应用进程，资源和任务相关联的一个或多个特性的监视控制器。资源分配器还包括流程系统的模型，用数学方式表示资源和任务，并定义相关资源和任务之间的关系。资源分配器还包括资源分配控制器，用于响应于所监视的特性来操作模型并在任务之间分配资源。另外，资源分配器包括用于识别至少一些资源之间的资源和流的图形用户界面。所述图形用户界面包括与所述资源中的至少一个相关联的至少一个虚拟队列，并且识别要被所述至少一个资源处理的一个或多个项目。

7. 发明授权

US06961634B1 System and method for allocating multi-function resources for a wetdeck process in semiconductor wafer fabrication 有权
标题翻译：用于在半导体晶片制造中为湿法工艺分配多功能资源的系统和方法
公开(公告)号：US06961634B1
公开(公告)日：2005-11-01
申请号：US10447324
申请日：2003-05-28
申请人： George Logsdon , Gary Elmore , John Devlin
发明人： George Logsdon , Gary Elmore , John Devlin
IPC分类号： G05B19/00 , G05B19/418 , G06F19/00
CPC分类号： G05B19/41865 , G05B2219/31264 , G05B2219/31379 , G05B2219/45031 , G06Q10/0631 , G06Q10/06311 , Y02P90/20
摘要： A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a wetdeck process in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system and a resource allocation controller. The monitoring controller monitors measurable characteristics associated with the executing application process, multi-function resources and tasks. The model represents the multi-function resources and the tasks, and defines relationships among them. The resource allocation controller operates the model in response to the monitored measurable characteristics and allocates ones of the multi-function resources among ones of the tasks to efficiently execute the wetdeck process of the semiconductor wafer fabrication process.
摘要翻译：公开了一种用于在半导体晶片制造中的湿地工艺中的多个任务之间分配多功能资源的系统和方法。资源分配器在执行至少一个应用进程的进程系统内的任务之间分配多功能资源。资源分配器包括监视控制器，过程系统的模型和资源分配控制器。监视控制器监视与执行的应用进程相关的可测量特征，多功能资源和任务。该模型代表多功能资源和任务，并定义了它们之间的关系。资源分配控制器响应于可监测的可测量特性来操作模型，并且在任务之一中分配多个功能资源中的一个以有效地执行半导体晶片制造过程的湿法处理。

8. 发明授权

US06959225B1 Graphical user interface for allocating multi-function resources in semiconductor wafer fabrication and method of operation 有权
标题翻译：用于在半导体晶片制造中分配多功能资源的图形用户界面和操作方法
公开(公告)号：US06959225B1
公开(公告)日：2005-10-25
申请号：US10447211
申请日：2003-05-28
申请人： George Logsdon , Gary Elmore , Loretta Mangram-Dupree
发明人： George Logsdon , Gary Elmore , Loretta Mangram-Dupree
IPC分类号： G05B19/00 , G05B19/418 , G06F19/00
CPC分类号： G05B19/41865 , G05B2219/31264 , G05B2219/31379 , G05B2219/45031 , G06Q10/0631 , G06Q10/06311 , Y02P90/20
摘要： A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a process system in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system, a resource allocation controller, and a graphical user interface. The graphical user interface transforms process system information of the resource allocator into an audio-visual format to enable supervisory interaction. In one embodiment the graphical user interface provides information to reduce load conflict among multiple furnaces in semiconductor wafer fabrication.
摘要翻译：公开了一种用于在半导体晶片制造中的处理系统内的多个任务之间分配多功能资源的系统和方法。资源分配器在执行至少一个应用进程的进程系统内的任务之间分配多功能资源。资源分配器包括监视控制器，过程系统的模型，资源分配控制器和图形用户界面。图形用户界面将资源分配器的处理系统信息转换成视听格式，以实现监督交互。在一个实施例中，图形用户界面提供信息以减少半导体晶片制造中的多个炉之间的负载冲突。

9. 发明授权

US06957113B1 Systems for allocating multi-function resources in a process system and methods of operating the same 有权
标题翻译：用于在过程系统中分配多功能资源的系统及其操作方法
公开(公告)号：US06957113B1
公开(公告)日：2005-10-18
申请号：US10299949
申请日：2002-11-19
申请人： George Logsdon , Gary Elmore
发明人： George Logsdon , Gary Elmore
IPC分类号： G05B19/00 , G05B19/418 , G06F19/00
CPC分类号： G05B19/41865 , G05B2219/31264 , G05B2219/31379 , G05B2219/45031 , G06Q10/0631 , G06Q10/06311 , Y02P90/20
摘要： There are disclosed systems, as well as methods of operation, for allocating multi-function resources among a plurality of tasks within a process system. An exemplary resource allocator is introduced that allocates multi-function resources among tasks within a process system capable of executing at least one application process. The resource allocator comprises a monitoring controller, model of the process system and a resource allocation controller. The monitoring controller monitors measurable characteristics associated with the executing application process, multi-function resources and tasks, each of the measurable characteristics being one of a status characteristic and a logistical characteristic. The model represents mathematically the multi-function resources and the tasks, and defines relationships among related ones thereof as a function of the application process. The resource allocation controller operates the model in response to the monitored measurable characteristics and allocates ones of the multi-function resources among ones of the tasks within the process system to efficiently execute the at least one application process.
摘要翻译：公开了用于在处理系统内的多个任务之间分配多功能资源的系统以及操作方法。引入了一种示例性资源分配器，其在能够执行至少一个应用进程的进程系统内的任务之间分配多功能资源。资源分配器包括监视控制器，过程系统的模型和资源分配控制器。监视控制器监视与执行的应用进程，多功能资源和任务相关联的可测量特性，每个可测量特性是状态特性和后勤特性之一。该模型在数学上表示多功能资源和任务，并根据应用过程定义其相关的关系。资源分配控制器响应于所监视的可测量特征操作模型，并且在处理系统内的任务之一中分配多功能资源中的一个以有效地执行至少一个应用进程。

10. 发明授权

US07725207B1 Systems for allocating multi-function resources in a process system and methods of operating the same 有权
标题翻译：用于在过程系统中分配多功能资源的系统及其操作方法
公开(公告)号：US07725207B1
公开(公告)日：2010-05-25
申请号：US11252234
申请日：2005-10-17
申请人： George Logsdon , Gary Elmore
发明人： George Logsdon , Gary Elmore
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B2219/31264 , G05B2219/31379 , G05B2219/45031 , G06Q10/0631 , G06Q10/06311 , Y02P90/20
摘要： There are disclosed systems, as well as methods of operation, for allocating multi-function resources among a plurality of tasks within a process system. An exemplary resource allocator is introduced that allocates multi-function resources among tasks within a process system capable of executing at least one application process. The resource allocator comprises a monitoring controller, model of the process system and a resource allocation controller. The monitoring controller monitors measurable characteristics associated with the executing application process, multi-function resources and tasks, each of the measurable characteristics being one of a status characteristic and a logistical characteristic. The model represents mathematically the multi-function resources and the tasks, and defines relationships among related ones thereof as a function of the application process. The resource allocation controller operates the model in response to the monitored measurable characteristics and allocates ones of the multi-function resources among ones of the tasks within the process system to efficiently execute the at least one application process.
摘要翻译：公开了用于在处理系统内的多个任务之间分配多功能资源的系统以及操作方法。引入了一种示例性资源分配器，其在能够执行至少一个应用进程的进程系统内的任务之间分配多功能资源。资源分配器包括监视控制器，过程系统的模型和资源分配控制器。监视控制器监视与执行的应用进程，多功能资源和任务相关联的可测量特性，每个可测量特性是状态特性和后勤特性之一。该模型在数学上表示多功能资源和任务，并根据应用过程定义其相关的关系。资源分配控制器响应于所监视的可测量特征操作模型，并且在处理系统内的任务之一中分配多功能资源中的一个以有效地执行至少一个应用进程。

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