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1. 发明授权

US10061307B2 Production adjustment system using disaster information 有权
公开(公告)号：US10061307B2
公开(公告)日：2018-08-28
申请号：US15421394
申请日：2017-01-31
申请人： FANUC CORPORATION
发明人： Yoshifumi Shimura
IPC分类号： G05B19/418
CPC分类号： G05B19/4184 , G05B2219/32209 , G05B2219/33315 , Y02P90/02 , Y02P90/14 , Y02P90/30
摘要： A production adjustment system includes a cell including a plurality of machines, a cell control device which is communicably connected to the cell, to control the cell, and a higher-level management controller which is communicably connected to the cell control device, to acquire disaster information. The cell control device includes a command unit for issuing commands to the plurality of machines based on state information of the cell, which is acquired from the at least one sensor of the cell, and disaster information acquired from the higher-level management controller.

2. 发明申请

US20170248939A1 PRODUCTION ADJUSTMENT SYSTEM USING DISASTER INFORMATION 审中-公开
公开(公告)号：US20170248939A1
公开(公告)日：2017-08-31
申请号：US15421394
申请日：2017-01-31
申请人： FANUC CORPORATION
发明人： Yoshifumi SHIMURA
IPC分类号： G05B19/418
CPC分类号： G05B19/4184 , G05B2219/32209 , G05B2219/33315 , Y02P90/02 , Y02P90/14 , Y02P90/30
摘要： A production adjustment system includes a cell including a plurality of machines, a cell control device which is communicably connected to the cell, to control the cell, and a higher-level management controller which is communicably connected to the cell control device, to acquire disaster information. The cell control device includes a command unit for issuing commands to the plurality of machines based on state information of the cell, which is acquired from the at least one sensor of the cell, and disaster information acquired from the higher-level management controller.

3. 发明申请

US20100332012A1 ARRANGEMENT FOR IDENTIFYING UNCONTROLLED EVENTS AT THE PROCESS MODULE LEVEL AND METHODS THEREOF 有权
标题翻译：在过程模块级别识别非受控事件的安排及其方法
公开(公告)号：US20100332012A1
公开(公告)日：2010-12-30
申请号：US12555674
申请日：2009-09-08
申请人： Chung-Ho Huang , Vijayakumar C. Venugopal , Connie Lam , Dragan Podlesnik
发明人： Chung-Ho Huang , Vijayakumar C. Venugopal , Connie Lam , Dragan Podlesnik
IPC分类号： G05B9/02 , G06F9/50 , G06F11/20
CPC分类号： G06F9/5027 , G05B19/4184 , G05B2219/31202 , G05B2219/31293 , G05B2219/31318 , G05B2219/31481 , G05B2219/32209 , G05B2219/45031 , G06F11/2035 , G06F11/2043 , Y02P90/14 , Y02P90/18
摘要： A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor of the plurality of sensors communicates with the process module controller to collect sensed data about one or more process parameters. The architecture further includes a process-module-level analysis server, wherein the process-module-level analysis server communicates directly with the plurality of sensors and the process module controller. The process-module-level analysis server is configured for receiving data, wherein the data include at least one of the sensed data from the plurality of sensors and process module and chamber data from the process module controller. The process-module-level analysis server is also configured for analyzing the data and sending interdiction data directly to the process module controller when a problem is identified during the substrate processing.
摘要翻译：提供了一种配置为促进等离子体处理系统中的基板处理的过程级故障排除架构（PLTA）。该架构包括一个进程模块控制器。该架构还包括多个传感器，其中多个传感器中的每个传感器与过程模块控制器通信以收集关于一个或多个过程参数的感测数据。该体系结构还包括一个过程模块级分析服务器，其中过程模块级分析服务器与多个传感器和过程模块控制器直接通信。过程模块级分析服务器被配置为用于接收数据，其中数据包括来自多个传感器的感测数据中的至少一个以及来自处理模块控制器的处理模块和室数据。过程模块级分析服务器还被配置为当在衬底处理期间识别出问题时，分析数据并将拦截数据直接发送到过程模块控制器。

4. 发明授权

US06314385B1 Method for controlling maintenance of semiconductor fabricating equipment arranged in a processing line 失效
标题翻译：用于控制处理线中布置的半导体制造设备的维护的方法
公开(公告)号：US06314385B1
公开(公告)日：2001-11-06
申请号：US09168094
申请日：1998-10-08
申请人： Sung-geun Kim , Byung-wan Kim
发明人： Sung-geun Kim , Byung-wan Kim
IPC分类号： G05B902
CPC分类号： G05B19/41875 , G05B2219/32209 , Y02P90/10 , Y02P90/14 , Y02P90/22
摘要： A method for controlling semiconductor fabricating equipment includes receiving at a maintenance module in a host computer first maintenance data generated from semiconductor fabricating equipment. A value of the first data is compared with a predesignated first reference threshold at the maintenance module. A warning message is displayed on a display device, if the value of the first data is not less than the first reference threshold. If the value of the first data is not less than the first reference threshold, second maintenance data is received, and it is determined whether maintenance of the fabricating equipment occurred. If not, the value of the second data is compared with a predesignated second reference threshold at the maintenance module. If the value of the second data is not less than the second reference threshold, the fabricating equipment is interlocked by the maintenance module, and the fabricating equipment is stopped.
摘要翻译：一种用于控制半导体制造设备的方法包括在主机中的维护模块处接收由半导体制造设备产生的第一维护数据。在维护模块处将第一数据的值与预先指定的第一参考阈值进行比较。如果第一数据的值不小于第一参考阈值，则在显示装置上显示警告消息。如果第一数据的值不小于第一参考阈值，则接收第二维护数据，并且确定是否发生制造设备的维护。如果不是，则在维护模块处将第二数据的值与预先指定的第二参考阈值进行比较。如果第二数据的值不小于第二参考阈值，则制造设备由维护模块互锁，制造设备停止。

5. 发明授权

US09235413B1 Automated control of semiconductor wafer manufacturing based on electrical test results 有权
标题翻译：基于电气测试结果自动控制半导体晶圆制造
公开(公告)号：US09235413B1
公开(公告)日：2016-01-12
申请号：US11196364
申请日：2005-08-03
申请人： William MacDonald , George Logsdon , Matthew Lascom , Steven Craig Gessler
发明人： William MacDonald , George Logsdon , Matthew Lascom , Steven Craig Gessler
IPC分类号： G06F9/00 , G05B23/00 , G05B23/02
CPC分类号： G06F9/00 , G05B19/41875 , G05B23/00 , G05B23/02 , G05B2219/32209 , G05B2219/32222 , Y02P90/22
摘要： In semiconductor wafer manufacturing, processes such as analyzing test data associated with semiconductor wafers, interpreting the test data analysis, and acting on the test data interpretation and analysis are automated. Such automation can eliminate delays that were previously imposed by the action of test analysis engineers and wafer fabrication personnel, thereby reducing the amount of useless material that is produced before a process defect can be detected.
摘要翻译：在半导体晶片制造中，自动化诸如分析与半导体晶片相关的测试数据，解释测试数据分析以及对测试数据解释和分析的处理的过程。这样的自动化可以消除先前由测试分析工程师和晶片制造人员的作用施加的延迟，从而减少在检测到工艺缺陷之前产生的无用材料的量。

6. 发明申请

US20130212668A1 Suspension of Processes in Industrial Control System When an Anomaly Occurs 审中-公开
公开(公告)号：US20130212668A1
公开(公告)日：2013-08-15
申请号：US13371511
申请日：2012-02-13
申请人： Takuya Mishina , John Wilson
发明人： Takuya Mishina , John Wilson
IPC分类号： G06F21/00 , G05B13/00
CPC分类号： G05B9/02 , G05B19/058 , G05B2219/32209
摘要： A method for suspension of processes in an industrial control system includes detecting at least one anomaly in an industrial control system; notifying a controller of the at least one anomaly; accessing a database comprising emergency suspend procedures; sending a stream comprising at least one emergency suspend command through at least one firewall/gateway to at least one downstream zone; and terminating or suspending a process in the at least one zone.

7. 发明申请

US20070004051A1 Processing method and device 审中-公开
标题翻译：处理方法和装置
公开(公告)号：US20070004051A1
公开(公告)日：2007-01-04
申请号：US10539246
申请日：2003-12-17
申请人： Yasuhiro Okumoto , Wataru Karasawa
发明人： Yasuhiro Okumoto , Wataru Karasawa
IPC分类号： H01L21/00
CPC分类号： H01L21/67271 , G05B19/41875 , G05B2219/32209 , H01J37/32935 , H01L21/67253 , Y02P90/22
摘要： A processing system has a processing section for continuously processing a member to be processed; an inspection section for inspecting a processed state of the member processed by the processing section; a processed state determination section for determining whether the processed state is defective/nondefective, on the basis of a result of inspection performed by the inspection section; a continuity determination section for determining whether or not a defective determination is continuously made when the processed state is determined to be defective by the processed state determination section; and a processing control section for controlling processing so as to stop processing of the member continuously performed by the processing section when the continuity determination section determines that the defective determination is continuously made.
摘要翻译：处理系统具有用于连续处理要处理的部件的处理部分; 检查部，检查由处理部处理的部件的处理状态; 处理状态判定部，其根据检查部的检查结果，判断处理状态是否有缺陷/无效; 连续性确定部分，用于当处理状态确定部分确定处理状态有缺陷时，确定是否连续地进行故障判定; 以及处理控制部分，用于当连续性确定部分确定连续进行了缺陷判定时，控制处理以停止处理部件连续执行的部件的处理。

8. 发明授权

US06650958B1 Integrated process tool monitoring system for semiconductor fabrication 有权
标题翻译：用于半导体制造的集成工艺工具监控系统
公开(公告)号：US06650958B1
公开(公告)日：2003-11-18
申请号：US10283688
申请日：2002-10-30
申请人： Attila Balazs , Bruce Whitefield , Hiroshi Mizuno , Russell Whaley , Paul Szasz , Steven Reder
发明人： Attila Balazs , Bruce Whitefield , Hiroshi Mizuno , Russell Whaley , Paul Szasz , Steven Reder
IPC分类号： G06F1900
CPC分类号： G05B19/41875 , G05B2219/31422 , G05B2219/32209 , G05B2219/45031 , Y02P90/22
摘要： An integrated process tool monitoring system for semiconductor fabrication. Specifically, a process tool parameter auditing system, where a process tool user need not run a different verification system for each process tool type used and need not download parameters every time before a semiconductor device or material is to be processed by the process tool.
摘要翻译：一种用于半导体制造的集成工艺工具监控系统。具体地说，一种处理工具参数审核系统，其中处理工具用户不需要为所使用的每个处理工具类型运行不同的验证系统，并且不需要在半导体器件或材料由处理工具处理之前每次下载参数。

9. 发明授权

US09465385B2 Inspecting device monitoring system 有权
标题翻译：检查设备监控系统
公开(公告)号：US09465385B2
公开(公告)日：2016-10-11
申请号：US14109560
申请日：2013-12-17
申请人： CKD Corporation
发明人： Yosuke Kamioka , Manabu Okuda , Shingo Suzuki
IPC分类号： G06F19/00 , G05B19/418 , H05K13/08
CPC分类号： G05B19/41875 , G05B2219/32209 , G05B2219/37217 , H05K13/08 , H05K13/0817 , H05K13/083 , Y02P90/22
摘要： In a monitoring system, when there is an evaluation that a product is defective, in a solder print inspecting device that is subject to monitoring, that information is sent to a mobile terminal possessed by an operator. The operator who views the notification performs, through the mobile terminal, a checking task for evaluating whether or not the evaluation result regarding the printed substrate that has been evaluated as a defective product is correct. Depending on the evaluation result, an operating instruction is sent to the solder print inspecting device, which has temporarily stopped the printed substrate. If correction information instructing that the defective-product evaluation be corrected to a non-defective-product evaluation is sent from a mobile terminal to the solder print inspecting device, the solder print inspecting device corrects the defective-product evaluation to a non-defective-product evaluation, and releases the temporary stop of the printed substrate.
摘要翻译：在监视系统中，当评估产品有缺陷时，在要进行监视的焊料印刷检查装置中，将该信息发送给操作者拥有的移动终端。查看通知的操作者通过移动终端执行用于评估关于已被评估为缺陷产品的打印基板的评估结果是否正确的检查任务。根据评估结果，将操作指令发送到已经暂时停止印刷基板的焊料印刷检查装置。如果从移动终端向焊接印刷检查装置发送指示将缺陷品评价修正为无缺陷品评价的修正信息，则焊料印刷检查装置将缺陷品评价校正为无缺陷品评价，产品评估，并释放印刷基板的临时停止。

10. 发明申请

US20140200700A1 INSPECTING DEVICE MONITORING SYSTEM 有权
标题翻译：检查设备监控系统
公开(公告)号：US20140200700A1
公开(公告)日：2014-07-17
申请号：US14109560
申请日：2013-12-17
申请人： CKD Corporation
发明人： Yosuke Kamioka , Manabu Okuda , Shingo Suzuki
IPC分类号： G05B19/418
CPC分类号： G05B19/41875 , G05B2219/32209 , G05B2219/37217 , H05K13/08 , H05K13/0817 , H05K13/083 , Y02P90/22
摘要： In a monitoring system, when there is an evaluation that a product is defective, in a solder print inspecting device that is subject to monitoring, that information is sent to a mobile terminal possessed by an operator. The operator who views the notification performs, through the mobile terminal, a checking task for evaluating whether or not the evaluation result regarding the printed substrate that has been evaluated as a defective product is correct. Depending on the evaluation result, an operating instruction is sent to the solder print inspecting device, which has temporarily stopped the printed substrate. If correction information instructing that the defective-product evaluation be corrected to a non-defective-product evaluation is sent from a mobile terminal to the solder print inspecting device, the solder print inspecting device corrects the defective-product evaluation to a non-defective-product evaluation, and releases the temporary stop of the printed substrate.
摘要翻译：在监视系统中，当评估产品有缺陷时，在要进行监视的焊料印刷检查装置中，将该信息发送给操作者拥有的移动终端。查看通知的操作者通过移动终端执行用于评估关于已被评估为缺陷产品的打印基板的评估结果是否正确的检查任务。根据评估结果，将操作指令发送到已经暂时停止印刷基板的焊料印刷检查装置。如果从移动终端向焊接印刷检查装置发送指示将缺陷品评价修正为无缺陷品评价的修正信息，则焊料印刷检查装置将缺陷品评价校正为无缺陷品评价，产品评估，并释放印刷基板的临时停止。

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