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    • 7. 发明授权
    • Method for fabricating junction lasers having lateral current confinement
    • 具有横向电流限制的结型激光器的制造方法
    • US4194933A
    • 1980-03-25
    • US39862
    • 1979-05-17
    • Ralph A. LoganWon-Tien Tsang
    • Ralph A. LoganWon-Tien Tsang
    • H01L21/208H01L21/306H01L33/04H01S5/22H01S5/223
    • H01S5/223H01L21/02395H01L21/02546H01L21/02625H01L21/02628H01L21/30612H01L33/04H01S5/2205H01S5/2231H01S5/2235
    • Described is a method for fabricating a stripe geometry double heterostructure (DH) junction laser in which lateral current confinement is acheived by pairs of laterally spaced, reverse-biased p-n junctions. A mesa is formed on an n-GaAs substrate, for example, and a layer of p-AlGaAs is then grown by LPE so that nucleation does not occur on the top of the mesa. Laterally spaced zones of p-AlGaAs are thus formed on either side of the mesa. An n-p-p or n-n-p DH is then grown so that the interface between the p-AlGaAs layers and the first n-layer of the DH forms a pair of laterally spaced p-n junctions separated by the mesa. When the light-emitting p-n junction in the DH active region is forward biased, the air of spaced junctions are reverse biased so that pumping current is constrained to flow through the active region in a narrow channel to the mesa. Further lateral current confinement is achieved by forming on the upper DH surface a second air of reverse biased p-n junctions separated by a window in alignment with the mesa.
    • 描述了一种用于制造条纹几何形状双异质结(DH)结激光器的方法,其中横向间隔的,反向偏置的p-n结对被横向电流限制所吸收。 例如,在n-GaAs衬底上形成台面,然后通过LPE生长p-AlGaAs层,使得在台面的顶部不发生成核。 因此,在台面的任一侧上形成间隔开的p-AlGaAs区域。 然后生长n-p-p或n-n-p DH,使得p-AlGaAs层和DH的第一n层之间的界面形成由台面分开的一对横向间隔开的p-n结。 当DH有源区域中的发光p-n结正向偏置时,间隔的结的空气被反向偏置,使得泵浦电流被限制在窄通道中的有源区域流到台面。 通过在上DH表面上形成由与台面对准的窗口隔开的反向偏置p-n结的第二空气来实现进一步的横向电流限制。