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    • 7. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
    • 半导体器件及其制造方法
    • US20100155703A1
    • 2010-06-24
    • US12498402
    • 2009-07-07
    • Myung-Sim JUNMoon-Gyu JANGTae-Gon NOHTae-Moon ROH
    • Myung-Sim JUNMoon-Gyu JANGTae-Gon NOHTae-Moon ROH
    • H01L29/15H01L21/336
    • H01L29/122B82Y10/00H01L31/113Y10S977/937Y10S977/953
    • Provided are a semiconductor device and a method of fabricating the same. The semiconductor device includes: a single electron box including a first quantum dot, a charge storage gate on the first quantum dot, and a first gate electrode on the charge storage gate, the charge storage gate exchanging charges with the first quantum dot, the first gate electrode adjusting electric potential of the first quantum dot; and a single electron transistor including a second quantum dot below the first quantum dot, a source, a drain, and a second gate electrode below the second quantum dot, the second quantum dot being capacitively coupled to the first quantum dot, the source contacting one side of the second quantum dot, the drain contacting the other side facing the one side, the second gate electrode adjusting electric potential of the second quantum dot.
    • 提供半导体器件及其制造方法。 半导体器件包括:包括第一量子点的单个电子盒,第一量子点上的电荷存储栅极和电荷存储栅极上的第一栅电极,电荷存储栅极与第一量子点交换电荷,第一量子点 栅电极调整第一量子点的电位; 以及包括第一量子点下方的第二量子点的单电子晶体管,位于第二量子点下方的源极,漏极和第二栅电极,第二量子点电容耦合到第一量子点,源极与第一量子点接触 所述第二量子点的所述漏极与所述一侧面对的另一侧接触,所述第二栅电极调整所述第二量子点的电位。