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1. 发明申请

US20070159639A1 Light source apparatus and optical tomography imaging apparatus 有权
标题翻译：光源装置和光学层析成像装置
公开(公告)号：US20070159639A1
公开(公告)日：2007-07-12
申请号：US11651959
申请日：2007-01-11
申请人： Yuichi Teramura , Kiichi Kato
发明人： Yuichi Teramura , Kiichi Kato
IPC分类号： A61B5/05 , G01B9/02
CPC分类号： G01B9/02091 , G01B9/02044 , G01B2290/70
摘要： A light source apparatus is equipped with at least three light sources each having a predetermined wavelength interval and different central wavelengths. At least one multiplexing means having wavelength selectivity, for multiplexing light emitted from each of a first group and a second group of the light sources is provided, the first group of light sources including odd ordered light sources and the second group of light sources including even ordered light sources when counted in order of lengths of the central wavelengths thereof. Multiplexing means not having wavelength selectivity, for multiplexing light emitted from the first group of light sources and the second group of light sources is also provided.
摘要翻译：光源装置配备有至少三个光源，每个光源具有预定的波长间隔和不同的中心波长。至少一个具有波长选择性的多路复用装置被提供用于复用从第一组和第二组光源中发射的光，第一组光源包括奇数有序光源和第二组光源，包括均匀当按照其中心波长的长度的顺序计数有序的光源。复用意味着不具有波长选择性，用于复用从第一组光源发射的光和第二组光源。

2. 发明授权

US07423761B2 Light source apparatus and optical tomography imaging apparatus 有权
标题翻译：光源装置和光学层析成像装置
公开(公告)号：US07423761B2
公开(公告)日：2008-09-09
申请号：US11651959
申请日：2007-01-11
申请人： Yuichi Teramura , Kiichi Kato
发明人： Yuichi Teramura , Kiichi Kato
IPC分类号： G01B9/02
CPC分类号： G01B9/02091 , G01B9/02044 , G01B2290/70
摘要： A light source apparatus is equipped with at least three light sources each having a predetermined wavelength interval and different central wavelengths. At least one multiplexing means having wavelength selectivity, for multiplexing light emitted from each of a first group and a second group of the light sources is provided, the first group of light sources including odd ordered light sources and the second group of light sources including even ordered light sources when counted in order of lengths of the central wavelengths thereof. Multiplexing means not having wavelength selectivity, for multiplexing light emitted from the first group of light sources and the second group of light sources is also provided.
摘要翻译：光源装置配备有至少三个光源，每个光源具有预定的波长间隔和不同的中心波长。至少一个多路复用装置具有波长选择性，用于多路复用从第一组和第二组光源发出的光，第一组光源包括奇数有序光源，第二组光源包括均匀的当按照其中心波长的长度的顺序计数有序的光源。复用意味着不具有波长选择性，用于复用从第一组光源发射的光和第二组光源。

3. 发明授权

US07944568B2 Method and system for producing tomographic image by optical tomography with processing of interference light signals 有权
标题翻译：用干涉光信号处理通过光学层析成像生成断层图像的方法和系统
公开(公告)号：US07944568B2
公开(公告)日：2011-05-17
申请号：US12342618
申请日：2008-12-23
申请人： Yuichi Teramura , Satoshi Ozawa
发明人： Yuichi Teramura , Satoshi Ozawa
IPC分类号： G01B9/02
CPC分类号： G01B9/02069 , G01B9/02004 , G01B9/02083 , G01B9/02091 , G01B2290/70
摘要： When reflection light, reflected from a measurement target that has been irradiated with measurement light in such a manner to scan the measurement target, and reference light are combined in each wavelength sweep, interference light is detected as interference signals. When a thinning region in which the interference signals obtained by detecting the interference light in each wavelength sweep are thinned so that the interference signals that are used to produce the tomographic image remain is set, thinning is performed on the plurality of interference signals in the thinning region. Light intensity information about the measurement target in the thinning region is obtained, based on the interference signals for the respective wavelength sweeps, the interference signals remaining after thinning. The tomographic image in the thinning region is produced based on the obtained light intensity information.
摘要翻译：当以每个波长扫描的方式组合在每次波长扫描中组合从被测量光照射的测量对象物以扫描测量对象的方式反射的反射光和参考光时，将干涉光检测为干扰信号。当通过检测每个波长扫描中的干涉光获得的干扰信号的稀疏区域被减薄，使得用于产生断层图像的干扰信号保持不变时，对稀疏中的多个干扰信号进行稀疏化地区。基于各波长扫描的干涉信号，获得稀疏区域中的测量对象的光强度信息，减薄后剩余的干扰信号。基于获得的光强度信息来生成稀疏区域中的断层图像。

4. 发明授权

US07724790B2 Method and apparatus for driving semiconductor lasers, and method and apparatus for deriving drive current patterns for semiconductor lasers 有权
标题翻译：用于驱动半导体激光器的方法和装置，以及用于导出半导体激光器的驱动电流图案的方法和装置
公开(公告)号：US07724790B2
公开(公告)日：2010-05-25
申请号：US11994396
申请日：2006-07-03
申请人： Yuichi Teramura
发明人： Yuichi Teramura
IPC分类号： H01S3/13 , H01S3/00
CPC分类号： H01S5/32341 , H01L2224/48091 , H01S5/02248 , H01S5/02284 , H01S5/0617 , H01S5/06808 , H01S5/0683 , H01S5/4012 , H01S5/4031 , H01S5/4075 , H01L2924/00014
摘要： Semiconductor lasers are driven such that high output laser beams are stably obtained without a long start up time. A method for driving semiconductor lasers by automatic current control or automatic power control with a constant current source involves the steps of: generating a pattern of drive current values for the semiconductor lasers, which is defined according to the amount of time which has elapsed since initiating driving thereof, that enables obtainment of substantially the same light output as a target light output by the automatic current control or the automatic power control; and varying the drive current of the semiconductor lasers in stepwise increments according to the pattern for a predetermined period of time from initiation of drive thereof. A single pattern is used in common to drive the plurality of semiconductor lasers.
摘要翻译：驱动半导体激光器，使得在没有长启动时间的情况下稳定地获得高输出激光束。通过自动电流控制或通过恒定电流源进行的自动功率控制来驱动半导体激光器的方法包括以下步骤：产生半导体激光器的驱动电流值的模式，其根据从启动起经过的时间量来定义其能够通过自动电流控制或自动电力控制获得与目标光输出大致相同的光输出; 以及根据所述图案逐步增加所述半导体激光器的驱动电流从其驱动开始起预定的一段时间。共同使用单个图案来驱动多个半导体激光器。

5. 发明申请

US20070147750A1 Laser device and exposure device using the same 审中-公开
公开(公告)号：US20070147750A1
公开(公告)日：2007-06-28
申请号：US11708020
申请日：2007-02-20
申请人： Yuichi Teramura , Fusao Yamanaka , Yoji Okazaki
发明人： Yuichi Teramura , Fusao Yamanaka , Yoji Okazaki
IPC分类号： G02B6/04 , G02B6/06 , H01S3/30 , H01S3/10 , G02B6/32
CPC分类号： G03F7/70216 , G02B6/08 , G02B19/0014 , G02B19/0057 , G02B27/0994 , G03F7/70025 , H01S5/005 , H01S5/02216 , H01S5/02284 , H01S5/02292 , H01S5/4012 , H01S5/4025
摘要： In a laser module, a laser beam which is emitted from a laser element is focused by a condensing optical system and caused to enter an incidence end of an optical fiber. A laser device is provided with a plurality of these laser modules. Emission end portions of the optical fibers are bundled to form a laser emission portion. A thickness of cladding h of each optical fiber is set to a value calculated in accordance with the following equation: cladding thickness ⁢ ⁢ h ≤ ( emission ⁢ ⁢ light ⁢ ⁢ amount of ⁢ ⁢ one ⁢ ⁢ laser ⁢ ⁢ module ⁢ ⁢ W required intensity ⁢ ⁢ C × packing ratio ⁢ ⁢ P - core diameter ⁢ ⁢ t ) ÷ 2 As a result, it is possible to emit a laser-beam with a high intensity that is required for functionality as a laser light source, for the purpose of raising resolution of an exposure apparatus.

6. 发明申请

US20060222042A1 Lens holder and laser array unit using the same 失效
公开(公告)号：US20060222042A1
公开(公告)日：2006-10-05
申请号：US11392537
申请日：2006-03-30
申请人： Yuichi Teramura , Kazuhiko Nagano
发明人： Yuichi Teramura , Kazuhiko Nagano
IPC分类号： H01S3/08
CPC分类号： H01S5/02248 , G02B3/0006 , G02B7/025 , G02B27/0961 , H01S5/005 , H01S5/02208 , H01S5/02272 , H01S5/02284 , H01S5/02292 , H01S5/02469 , H01S5/32341 , H01S5/4012 , H01S5/4031
摘要： In a laser array unit in which a plurality of laser beams emitted from a laser array is received by a lens array, the lens holder for fixedly bonding the lens array is formed such that the length of the surface on which the lens array is bonded in the direction orthogonal to the optical axis direction of the lens is longer than the length of the surface to be bonded to a certain other fixing member in the same direction.

7. 发明申请

US20120010494A1 OPTICAL THREE-DIMENSIONAL STRUCTURE MEASURING DEVICE AND STRUCTURE INFORMATION PROCESSING METHOD THEREFOR 有权
标题翻译：光学三维结构测量装置及其结构信息处理方法
公开(公告)号：US20120010494A1
公开(公告)日：2012-01-12
申请号：US13257573
申请日：2010-03-03
申请人： Yuichi Teramura
发明人： Yuichi Teramura
IPC分类号： A61B6/00 , G06T15/00 , G01B11/24
CPC分类号： G01B9/02069 , A61B3/00 , A61B3/1005 , A61B3/102 , A61B5/0059 , A61B5/0066 , A61B5/0084 , A61B5/7203 , A61B5/7264 , G01B9/02004 , G01B9/02085 , G01B9/02088 , G01B9/02091 , G01B2290/65 , G01N21/4795
摘要： An optical three-dimensional structure measuring device including: optical three-dimensional structure information storing device (91) for storing optical three-dimensional structure information; specific layer extracting device (121) for comparing information values of the optical three-dimensional structure information stored in the optical three-dimensional structure information storing device with a predetermined threshold and extracting, as a specific layer area of the measurement target, an area equal to or greater than a predetermined range where the information values of the optical three-dimensional structure information equal to or greater than the predetermined threshold continue; missing area extracting device (122) for extracting, as missing areas, areas where the information values of the optical three-dimensional structure information are smaller than the predetermined threshold in the specific layer area; missing area range calculating device (123) for calculating sizes of ranges of the missing areas; and region-of-interest classifying device (124) for comparing the sizes of the ranges of the missing areas with a plurality of predetermined range determination reference values and classifying the missing areas into a plurality of types of regions of interest.
摘要翻译：一种光学三维结构测量装置，包括：用于存储光学三维结构信息的光学三维结构信息存储装置（91）; 特征层提取装置（121），用于将存储在光学三维结构信息存储装置中的光学三维结构信息的信息值与预定阈值进行比较，并提取作为测量对象的特定层面积的区域相等达到或大于光学三维结构信息的信息值等于或大于预定阈值的预定范围; 丢失区域提取装置（122），用于将特定层区域中的光学三维结构信息的信息值小于预定阈值的区域提取为缺失区域; 缺少区域范围计算装置（123），用于计算缺失区域的范围的大小; 和区域感兴趣分类装置（124），用于将缺失区域的范围的大小与多个预定范围确定参考值进行比较，并将缺失区域分类为多种类型的感兴趣区域。

8. 发明申请

US20090261240A1 CALIBRATION JIG FOR OPTICAL TOMOGRAPHIC IMAGING APPARATUS AND METHOD FOR GENERATING A CALIBRATION CONVERSION TABLE 有权
标题翻译：用于光学图像成像装置的校准夹和用于产生校准转换表的方法
公开(公告)号：US20090261240A1
公开(公告)日：2009-10-22
申请号：US12496273
申请日：2009-07-01
申请人： Daisuke WATANABE , Yuichi Teramura
发明人： Daisuke WATANABE , Yuichi Teramura
IPC分类号： G01D18/00 , G01B9/02
CPC分类号： G01B9/02072 , G01B9/02004 , G01B9/0205 , G01B9/02074 , G01B9/02083 , G01B9/02091 , G01D18/00 , G06F17/17
摘要： A calibration jig allowing simple and repeatable calibration of a probe optical tomographic apparatus is disclosed. The jig includes a holding member removably attachable to an attachment section of the apparatus and a reflective surface held by the holding member. The reflective surface reflects measurement light emitted from an emitting section of the attachment section and directs reflected light back to the emitting section. If a probe of the apparatus is covered with a sheath, the jig may include a light transmitting member, which generates the same dispersion as dispersion at the sheath, between the emitting section and the reflective surface. The reflective surface may be a single reflective surface disposed within an area corresponding to twice a coherence length of the laser light with a zero path position of the reflective surface being the center of the area.
摘要翻译：公开了一种允许探针光学断层摄影装置的简单且可重复校准的校准夹具。夹具包括可移除地附接到装置的附接部分的保持构件和由保持构件保持的反射表面。反射表面反射从附接部分的发射部分发射的测量光并将反射光引导回发射部分。如果装置的探针被护套覆盖，则夹具可以包括透光构件，其在发射部分和反射表面之间产生与护套处的分散体相同的色散。反射表面可以是设置在对应于激光的相干长度的两倍的区域内的单个反射表面，反射表面的零路径位置是该区域的中心。

9. 发明授权

US07538884B2 Optical tomographic imaging apparatus 有权
标题翻译：光学层析成像装置
公开(公告)号：US07538884B2
公开(公告)日：2009-05-26
申请号：US11951689
申请日：2007-12-06
申请人： Yuichi Teramura , Karin Kuroiwa
发明人： Yuichi Teramura , Karin Kuroiwa
IPC分类号： G01B9/02
CPC分类号： G01B9/02057 , G01B9/02004 , G01B9/02007 , G01B9/02027 , G01B9/02069 , G01B9/02091 , G01B2290/45
摘要： An optical tomographic imaging apparatus capable of obtaining a high resolution tomographic image rapidly. Light beams swept in wavelength intermittently and repeatedly within first and second wavelength ranges respectively are outputted simultaneously from a light source unit. If the wavelength of either one of the light beams is within a fifth wavelength range, the other light beam is not outputted. The first or second wavelength range includes at least a portion of the fifth wavelength range. Each light beam is split into measuring and reference beams by a coupler. Wavelengths of reflected beams from a measuring object when the measuring beams are irradiated on the object and the reference beams are divided by a WDM coupler. The reflected beams and reference beams are combined by an optical coupler, and each interference beam produced thereby is detected with respect to each light beam as an interference signal.
摘要翻译：一种能够快速获得高分辨率断层图像的光学层析成像装置。从光源单元同时输出在第一和第二波长范围内间歇地和反复扫描的波长的光束。如果光束中的任一个的波长在第五波长范围内，则不输出另一个光束。第一或第二波长范围包括第五波长范围的至少一部分。每个光束被耦合器分成测量和参考光束。当测量光束照射在物体上时，来自测量对象的反射光束的波长和参考光束被WDM耦合器划分。反射光束和参考光束通过光耦合器组合，并且由此产生的每个干涉光束相对于每个光束被检测为干扰信号。

10. 发明申请

US20060215966A1 Laser apparatus and methods for assembling and installing the same 失效
标题翻译：激光装置及其组装和安装方法
公开(公告)号：US20060215966A1
公开(公告)日：2006-09-28
申请号：US11384504
申请日：2006-03-21
申请人： Kazuhiko Nagano , Yuichi Teramura , Akihiro Hashiguchi
发明人： Kazuhiko Nagano , Yuichi Teramura , Akihiro Hashiguchi
IPC分类号： G02B6/36
CPC分类号： G02B6/4206
摘要： A method for assembling a laser apparatus which condenses a laser beam and couples the laser beam to an optical fiber. After the optical fiber is fixed to a package, the whole or a part of an optical condensing system is fixed to the package through a fixing structure having at least one guide surface extending in at least one of first and second directions respectively parallel and perpendicular to the core axis of the optical fiber, by moving the whole or the part of the optical condensing system along the at least one guide surface to a predetermined position with respect to the core axis, and fixing the whole or the part of the optical condensing system to the fixing structure at the predetermined position.
摘要翻译：一种组合激光装置的方法，该激光装置冷凝激光束并将激光束耦合到光纤。在将光纤固定到封装之后，光学聚光系统的全部或一部分通过固定结构固定在封装上，所述固定结构具有至少一个引导表面，所述至少一个引导表面在第一和第二方向中的至少一个方向上分别平行和垂直于通过将光学聚光系统的整个或部分沿着至少一个引导表面移动到相对于芯轴的预定位置，并且固定光学冷凝系统的整个或部分，到预定位置处的固定结构。

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