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    • 6. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US08063445B2
    • 2011-11-22
    • US12462909
    • 2009-08-11
    • Shinjiro KatoNaoto Saito
    • Shinjiro KatoNaoto Saito
    • H01L29/76H01L29/788
    • H01L29/0847H01L29/42368H01L29/66659H01L29/7835
    • Provided is a semiconductor device which includes a metal oxide semiconductor (MOS) transistor having high driving performance and high withstanding voltage with a thick gate oxide film. In the local oxidation-of-silicon (LOCOS) offset MOS transistor having high withstanding voltage, in order to prevent a gate oxide film (6) formed on a channel formation region (7) from being etched at a time of removing the gate oxide film (6) with a polycrystalline silicon gate electrode (8) being used as a mask to form a second conductivity type high concentration source region (4) and a second conductivity type high concentration drain region (5), a source field oxide film (14) is formed also on a source side of the channel formation region (7), and in addition, a length of a second conductivity type high concentration source field region (13) is optimized. Accordingly, it is possible to obtain a MOS transistor having high driving performance and high withstanding voltage with a thick gate oxide film.
    • 提供一种半导体器件,其包括具有高驱动性能的金属氧化物半导体(MOS)晶体管和具有较厚栅极氧化膜的高耐压。 在具有高耐受电压的局部氧化硅(LOCOS)偏移MOS晶体管中,为了防止形成在沟道形成区域(7)上的栅极氧化膜(6)在去除栅极氧化物时被蚀刻 使用多晶硅栅电极(8)作为掩模的膜(6)形成第二导电型高浓度源区(4)和第二导电型高浓度漏区(5),源场氧化膜 14)也形成在沟道形成区域(7)的源极侧,此外,第二导电型高浓度源极场区域(13)的长度被优化。 因此,可以通过厚栅极氧化膜获得具有高驱动性能和高耐受电压的MOS晶体管。
    • 7. 发明申请
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US20090152558A1
    • 2009-06-18
    • US12315634
    • 2008-12-04
    • Naoto Saito
    • Naoto Saito
    • H01L29/78H01L21/336
    • H01L29/66636H01L29/4236H01L29/66621H01L29/66787H01L29/7834
    • Provided is a lateral semiconductor device with a trench structure for improving driving capability. A trench portion is formed in a well to give concave and convex portions in a gate width direction. A gate electrode is formed inside and above the trench portion with an insulating film therebetween. A source region is formed on one side of the gate electrode in a gate length direction, and a drain region is formed on the other side, both formed by impurity diffusion from polycrystalline silicon containing an impurity and filling the inside of the trench portion, deep enough to reach vicinity of the bottom of the gate electrode (vicinity of bottom of trench portion). By thus forming a deep source region and a deep drain region, current flow that would otherwise concentrate on a shallow part in the gate electrode becomes uniform throughout the trench portion and widening of an effective gate width owing to the concave and convex portions formed in the well lowers ON resistance, improving the driving capability.
    • 提供一种具有用于提高驱动能力的沟槽结构的横向半导体器件。 在阱中形成沟槽部,以在栅极宽度方向上形成凹部和凸部。 在沟槽部分的内部和上方形成栅电极,其间具有绝缘膜。 源极区域在栅极长度方向的一侧形成,另一侧形成漏极区域,二者均由含有杂质的多晶硅的杂质扩散形成,并填充沟槽部分的内部,深度 足以到达栅电极的底部附近(沟槽部分的底部附近)。 由此形成深源极区域和深漏极区域,否则将集中在栅极电极的浅部上的电流在整个沟槽部分变得均匀,并且由于在 良好的降低ON电阻,提高驾驶能力。
    • 9. 发明授权
    • Impurity doping method with diffusion source of boron-silicide film
    • 掺杂掺杂硼硅化物膜扩散源的方法
    • US5753530A
    • 1998-05-19
    • US449655
    • 1995-05-24
    • Tadao AkamineNaoto SaitoKenji AokiYoshikazu Kojima
    • Tadao AkamineNaoto SaitoKenji AokiYoshikazu Kojima
    • H01L21/225H01L21/285H01L21/306H01L21/331H01L21/336H01L21/385
    • H01L21/02046H01L21/2257H01L21/28512H01L29/66272H01L29/66545H01L29/66575Y10S438/906
    • A solid phase diffusion process using boron silicide film as diffusion source to improve controllability of diffusion of boron impurity into a silicon substrate in order to achieve a shallow junction. The process includes: cleaning the surface of a Si substrate by removing the native oxide film thereof to expose an active surface; treating the active surface to form thereon a boron silicide film as an impurity source; and introducing boron impurity from the boron silicide film into the Si substrate to form a boron diffusion layer. In this manner, a boron diffusion layer having a high surface concentration and a shallow junction can be formed because the boron silicide film is formed directly on the surface of the Si substrate. Because the boron silicide film is chemically and physically stable, an improved diffusion controllability is obtained. The diffusion controllability is further improved by accurately evaluating the impurity film optically during the fabrication process. A structure composed of a boron diffusion layer and a boron silicide region provides a high speed, highly integrated, and highly reliable semiconductor device, particularly when the boron silicide region is disposed between an impurity region and an electrode metal.
    • 使用硅化硅膜作为扩散源的固相扩散工艺,以提高硼杂质扩散到硅衬底中的可控性,以便实现浅结。 该方法包括:通过去除其自然氧化膜以暴露活性表面来清洁Si衬底的表面; 处理活性表面以形成作为杂质源的硼化硅膜; 并将硼杂质从硅化硅膜引入Si衬底中以形成硼扩散层。 以这种方式,可以形成具有高表面浓度和浅结的硼扩散层,因为硅化硅膜直接形成在Si衬底的表面上。 因为硼化硅膜在化学和物理上是稳定的,所以获得改进的扩散控制性。 通过在制造过程中光学地精确评估杂质膜,进一步提高了扩散控制性。 由硼扩散层和硼硅化物区组成的结构提供高速,高度集成且高度可靠的半导体器件,特别是当硅化硼区域设置在杂质区域和电极金属之间时。