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1. 发明授权

US10191111B2 Synchronized pulsed LADA for the simultaneous acquisition of timing diagrams and laser-induced upsets 有权
公开(公告)号：US10191111B2
公开(公告)日：2019-01-29
申请号：US14222556
申请日：2014-03-21
申请人： DCG Systems, Inc. , Freescale Semiconductor, Inc.
发明人： Kent Erington , Daniel J. Bodoh , Keith Serrels , Theodore Lundquist
IPC分类号： G01R31/311
摘要： Method to extract timing diagrams from synchronized single- or two-photon pulsed LADA by spatially positioning the incident laser beam on circuit feature of interest, temporally scanning the arrival time of the laser pulse with respect to the tester clock or the loop length trigger signal, then recording the magnitude and sign of the resulting fail rate signature per laser pulse arrival time. A Single-Photon Laser-Assisted Device Alteration apparatus applies picosecond laser pulses of wavelength having photon energy equal to or greater than the silicon band-gap. A Two-Photon Laser-Assisted Device Alteration apparatus applies femtosecond laser pulses of wavelength having photon energy equal to or greater than half the silicon band-gap at the area of interest. The laser pulses are synchronized with test vectors so that pass/fail ratios can be altered using either the single-photon or the two-photon absorption effect. A sequence of synthetic images with error data illustrates timing sensitive locations.

2. 发明授权

US09551743B2 Apparatus and method for combined micro-scale and nano-scale C-V, Q-V, and I-V testing of semiconductor materials 有权
标题翻译：用于半导体材料组合微尺度和纳米级C-V，Q-V和I-V测试的装置和方法
公开(公告)号：US09551743B2
公开(公告)日：2017-01-24
申请号：US13398681
申请日：2012-02-16
申请人： Andrew N. Erickson
发明人： Andrew N. Erickson
IPC分类号： G01R27/26 , G01R1/067 , G01R31/26 , G01R31/312 , G01Q60/38 , G01Q60/30
CPC分类号： G01R31/2648 , G01Q60/30 , G01Q60/38 , G01R27/2605 , G01R31/2601 , G01R31/312
摘要： Current Voltage and Capacitance Voltage (IV and CV) measurements are critical in measurement of properties of electronic materials especially semiconductors. A semiconductor testing device to accomplish IV and CV measurement supports a semiconductor wafer and provides a probe for contacting a surface on the wafer under control of an atomic Force Microscope or similar probing device for positioning the probe to a desired measurement point on the wafer surface. Detection of contact by the probe on the surface is accomplished and test voltage is supplied to the semiconductor wafer. A first circuit for measuring capacitance sensed by the probe based on the test voltage and a complimentary circuit for measuring Fowler Nordheim current sensed by the probe based on the test voltage are employed with the probe allowing the calculation of characteristics of the semiconductor wafer based on the measured capacitance and Fowler Nordheim current.
摘要翻译：电流电压和电容电压（IV和CV）测量对电子材料特别是半导体的性能的测量至关重要。用于实现IV和CV测量的半导体测试装置支持半导体晶片，并且提供用于在原子力显微镜或类似探测装置的控制下接触晶片上的表面的探针，用于将探针定位在晶片表面上的期望测量点。检测表面上探针的接触，并向半导体晶片提供测试电压。基于测试电压测量由探头感测的电容的第一电路和用于基于测试电压测量由探头感测的福勒诺德海姆电流的互补电路被采用，该探针允许基于该测量电压计算半导体晶片的特性测量电容和Fowler Nordheim电流。

3. 发明申请

US20160370425A1 Particle Beam Heating to Identify Defects 审中-公开
标题翻译：粒子束加热识别缺陷
公开(公告)号：US20160370425A1
公开(公告)日：2016-12-22
申请号：US15075145
申请日：2016-03-19
申请人： DCG Systems, Inc.
发明人： Richard Stallcup , Vladimir Ukraintsev , Mike Berkmyre , Theodore Lundquist
IPC分类号： G01R31/307 , G01R31/303 , G01R1/30
CPC分类号： G01R31/307 , G01R1/30 , G01R31/303
摘要： A charged particle beam, such as an electron beam or an ion beam, scans a device while a signal is applied to the device. As the particle beam scans, it locally heats the device, altering the local electrical characteristics of the device. The change in electrical characteristic is detected to and correlated to the position of the electron beam to localize a defect.
摘要翻译：带电粒子束，例如电子束或离子束，当信号被施加到器件时扫描器件。当粒子束扫描时，它局部加热器件，改变器件的局部电气特性。电特性的变化被检测到并且与电子束的位置相关联以定位缺陷。

4. 发明授权

US09361533B2 Apparatus and method for polarization diversity imaging and alignment 有权
标题翻译：用于偏振分集成像和对准的装置和方法
公开(公告)号：US09361533B2
公开(公告)日：2016-06-07
申请号：US13679938
申请日：2012-11-16
申请人： DCG Systems, Inc.
发明人： Keith Serrels , Prasad Sabbineni , James S. Vickers
IPC分类号： G06K9/36 , G06K9/32 , G02B21/00 , G02B27/58
CPC分类号： G06K9/3233 , G02B21/002 , G02B21/0092 , G02B27/58
摘要： A method of obtaining two orthogonally polarized super-resolution images is provided. A first diffraction-limited image is obtained using horizontally polarized light; a second diffraction-limited image is obtained using vertically polarized light; and, the first and second images are processed so as to yield a convoluted image having super diffraction-limited performance in both dimensions. Enhanced alignment of CAD image to acquired image is facilitated using the horizontally and vertically polarized images.
摘要翻译：提供了一种获得两个正交极化超分辨率图像的方法。使用水平偏振光获得第一衍射受限图像; 使用垂直偏振光获得第二衍射受限图像; 并且处理第一和第二图像以便产生在两个维度上具有超级衍射极限性能的卷积图像。使用水平和垂直偏振图像便于CAD图像与采集图像的增强对准。

5. 发明授权

US09322715B2 Three-dimensional hot spot localization 有权
标题翻译：三维热点定位
公开(公告)号：US09322715B2
公开(公告)日：2016-04-26
申请号：US14294016
申请日：2014-06-02
申请人： DCG Systems, Inc. , Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
发明人： Frank Altmann , Christian Schmidt , Rudolf Schlangen , Herve Deslandes
IPC分类号： G01J5/00 , G01R31/311 , G01N1/00 , G01N25/00 , G01N21/88 , G01N21/35 , G01N21/84
CPC分类号： G01J5/0066 , G01J2005/0077 , G01J2005/0085 , G01N1/00 , G01N21/35 , G01N21/88 , G01N25/00 , G01N2021/8461 , G01R31/311
摘要： A non-destructive approach for the 3D localization of buried hot spots in electronic device architectures by use of Lock-in Thermography (LIT). The 3D analysis is based on the principles of thermal wave propagation through different material layers and the resulting phase shift/thermal time delay. With more complex multi level stacked die architectures it is necessary to acquire multiple LIT results at different excitation frequencies for precise hot spot depth localization. Additionally, the use of multiple time-resolved thermal waveforms, measured in a minimized field of view on top of the hot spot location, can be used to speed up the data acquisition. The shape of the resulting waveforms can be analyzed to further increase the detection accuracy and confidence level.
摘要翻译：通过使用锁定热成像（LIT）在电子设备架构中对埋藏热点的3D定位的非破坏性方法。 3D分析基于通过不同材料层的热波传播的原理以及由此产生的相移/热时间延迟。使用更复杂的多级堆叠管芯结构，需要在不同的激发频率下获取多个LIT结果，以实现精确的热点深度定位。此外，可以使用在热点位置顶部的最小视场内测量的多个时间分辨热波形来加速数据采集。可以分析所得波形的形状，以进一步提高检测精度和置信度。

6. 发明授权

US08983232B2 Method for evaluating the centerline of an arbitrarily shaped object 有权
标题翻译：评估任意形状物体中心线的方法
公开(公告)号：US08983232B2
公开(公告)日：2015-03-17
申请号：US13439778
申请日：2012-04-04
申请人： Roman Louban
发明人： Roman Louban
IPC分类号： G06K9/36 , G06T7/60
CPC分类号： G06T7/606 , G06T7/66 , G06T2207/10004 , G06T2207/20021 , G06T2207/30152 , G06T2207/30172
摘要： A method for calculating a centreline of an object is disclosed. An image of the object is divided into test areas. For each test area, detection direction and scanning direction are assigned from a list of limited directions. For each test area, at each scanning point a local point of the centreline is determined along the detection direction. An assigned smoothing function is applied to the collection of local points to determine the collection of pixels which define the centreline. The collection of pixels can be used to calculate the length of the centreline. Also, the coordinates of the pixels of the centreline can be used to average the intensity of the image along the centreline.
摘要翻译：公开了一种用于计算物体的中心线的方法。对象的图像分为测试区域。对于每个测试区域，从有限方向的列表中分配检测方向和扫描方向。对于每个测试区域，在每个扫描点，沿着检测方向确定中心线的局部点。分配的平滑函数被应用于局部点的集合以确定定义中心线的像素的集合。可以使用像素的集合来计算中心线的长度。此外，中心线的像素的坐标可以用于平均沿着中心线的图像的强度。

7. 发明授权

US08860447B2 Laser assisted device alteration using two-photon absorption 有权
标题翻译：激光辅助设备改造使用双光子吸收
公开(公告)号：US08860447B2
公开(公告)日：2014-10-14
申请号：US13228369
申请日：2011-09-08
申请人： Praveen Vedagarbha , Derryck Reid
发明人： Praveen Vedagarbha , Derryck Reid
IPC分类号： G01R31/311 , G01R31/303
CPC分类号： G01R31/311 , G01N21/636 , G01R31/303
摘要： A Two-Photon Laser Assisted Device Alteration technique is presented. Fault localization is investigated by exploiting the non-linear two-photon absorption mechanism to induce LADA effects. Femtosecond laser pulses of wavelength having photon energy lower than the silicon bandgap are directed at the area of interest, while the DUT is stimulated with test vectors. The laser pulses are synchronized to the DUT stimulation, so that switching timing can be altered using the two-photon absorption effect.
摘要翻译：提出了一种双光子激光辅助设备改造技术。通过利用非线性双光子吸收机制诱导LADA效应来研究故障定位。具有低于硅带隙的光子能量的波长的飞秒激光脉冲被引导到感兴趣的区域，而用测试矢量刺激DUT。激光脉冲与DUT刺激同步，从而可以使用双光子吸收效应来改变切换定时。

8. 发明申请

US20130121617A1 APPARATUS AND METHOD FOR POLARIZATION DIVERSITY IMAGING AND ALIGNMENT 有权
标题翻译：用于极化成像和对准的装置和方法
公开(公告)号：US20130121617A1
公开(公告)日：2013-05-16
申请号：US13679938
申请日：2012-11-16
申请人： DCG SYSTEMS, INC.
发明人： Keith Serrels , Prasad Sabbineni , James S. Vickers
IPC分类号： G06K9/32
CPC分类号： G06K9/3233 , G02B21/002 , G02B21/0092 , G02B27/58
摘要： A method of obtaining two orthogonally polarized super-resolution images is provided. A first diffraction-limited image is obtained using horizontally polarized light; a second diffraction-limited image is obtained using vertically polarized light; and, the first and second images are processed so as to yield a convoluted image having super diffraction-limited performance in both dimensions. Enhanced alignment of CAD image to acquired image is facilitated using the horizontally and vertically polarized images.
摘要翻译：提供了一种获得两个正交极化超分辨率图像的方法。使用水平偏振光获得第一衍射受限图像; 使用垂直偏振光获得第二衍射限制图像; 并且处理第一和第二图像以便产生在两个维度上具有超级衍射极限性能的卷积图像。使用水平和垂直偏振图像便于CAD图像与采集图像的增强对准。

9. 发明申请

US20130113510A1 SYSTEM AND METHOD FOR MODULATION MAPPING 有权
标题翻译：用于调制映射的系统和方法
公开(公告)号：US20130113510A1
公开(公告)日：2013-05-09
申请号：US13657666
申请日：2012-10-22
申请人： DCG SYSTEMS, INC.
发明人： Steven Kasapi
IPC分类号： G01R31/311
CPC分类号： G01R31/311 , G01R31/2851 , G01R31/308
摘要： An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.
摘要翻译：公开了一种用于提供调制映射的设备。该装置包括激光源，提供激光束和DUT之间的相对运动的运动机构，信号收集机构，其包括光电检测器和用于采集从DUT反射的调制激光的适当电子器件，以及显示机构，用于显示空间调制图由选定时间段内收集的调制激光和IC的选定区域组成。

10. 发明授权

US07733100B2 System and method for modulation mapping 有权
标题翻译：调制映射的系统和方法
公开(公告)号：US07733100B2
公开(公告)日：2010-06-08
申请号：US11438121
申请日：2006-05-18
申请人： Steven Kasapi
发明人： Steven Kasapi
IPC分类号： G01R31/302
CPC分类号： G01R31/311 , G01R31/2851 , G01R31/308
摘要： An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.
摘要翻译：公开了一种用于提供调制映射的设备。该装置包括激光源，提供激光束和DUT之间的相对运动的运动机构，信号收集机构，其包括光电检测器和用于采集从DUT反射的调制激光的适当电子器件，以及显示机构，用于显示空间调制图由选定时间段内收集的调制激光和IC的选定区域组成。

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