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1. 发明申请

US20220252858A1 Reflective Two-Dimensional Spatial Light Modulators 有权
公开(公告)号：US20220252858A1
公开(公告)日：2022-08-11
申请号：US17591858
申请日：2022-02-03
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Alexander Payne , James Hunter , Tianbo Liu
IPC分类号： G02B26/00 , G02B26/08
摘要： A high-contrast two-dimensional Micro-Electromechanical System light modulator and methods of fabricating and operating the same in various applications is provided. Generally, the light modulator includes a single, deformable membrane suspended over a surface of a substrate by posts at corners thereof, the deformable membrane including an electrostatically deflectable patterned central portion (CP) and a number of flexures through which the CP is coupled to the posts. A membrane reflector is formed on a surface of the CP, and a substrate reflector over a surface of the substrate, and the substrate reflector exposed through void spaces between the posts, flexures and CP. The light modulator is operable so that when the membrane reflector is deformed into a non-planar surface by electrostatic deflection of the CP, and light reflected from the membrane reflector is brought into phase interference with light reflected from the substrate reflector.

2. 发明授权

US11333894B2 Anamorphic illumination optics for a MEMS spatial light modulator 有权
公开(公告)号：US11333894B2
公开(公告)日：2022-05-17
申请号：US16380898
申请日：2019-04-10
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Yoshimi Hashimoto
IPC分类号： G02B27/09 , H01S5/00 , G02B26/08 , G02B27/42 , B33Y30/00 , G03F7/00
摘要： A system including two dimensional, microelectromechanical system (MEMS) based spatial light modulators and anamorphic optics for improved contrast is provided. Generally, the system comprises an array of modulators having a plurality of pixels along a longitudinal axis, each pixel comprising a plurality of modulators along a transverse axis of the array. An illumination source including a laser and anamorphic optics for focuses light from the laser onto the array, and imaging optics focus modulated light from the array onto an image plane. The anamorphic optics are configured to provide a transverse numerical aperture (NA) along the transverse axis of the array that is smaller than a diffraction angle of the modulated light reflected from the array along a transverse axis of the image plane, and a longitudinal NA along the longitudinal axis of the array that is greater than the transverse NA. Other embodiments are also provided.

3. 发明授权

US11036030B2 MEMS posting for increased thermal dissipation 有权
公开(公告)号：US11036030B2
公开(公告)日：2021-06-15
申请号：US16430964
申请日：2019-06-04
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Sae Won Lee
IPC分类号： G02B26/08 , G02B7/18
摘要： A Micro-Electromechanical System (MEMS) device having improved thermal management, and methods of fabricating the same are described. Generally, the device includes a piston layer suspended over a surface of a substrate by posts at four corners thereof, the piston layer including an electrostatically deflectable piston and a number of flexures through which the piston is coupled to the posts. A faceplate including an aperture through which the piston is exposed is suspended over the piston layer. Thermal sinking structures project from the surface of the substrate and extend through void spaces between the posts, the flexures and the piston of the piston layer to provide thermal management of the piston layer. The thermal posts substantially fill the void spaces without contacting either the flexures or the piston, and without altering a deflection gap between the piston and the surface of the substrate. Other embodiments are also described.

4. 发明申请

US20210072532A1 Spatial Light Modulators for Phased-Array Applications 有权
公开(公告)号：US20210072532A1
公开(公告)日：2021-03-11
申请号：US16996346
申请日：2020-08-18
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Alexander Payne , James Hunter , Lars Eng
IPC分类号： G02B26/08 , G01S7/481 , G02B26/10
摘要： A capacitive micro-electromechanical system (MEMS) structure or device and methods of making and operating the same are described. Generally, the MEMS device provides a large stroke while maintaining good damping, enabling fast beam steering and large scan angles. In one embodiment, the capacitive MEMS device includes a bottom electrode formed over a substrate; an electrically permeable damping structure formed over the bottom electrode, the electrically permeable damping structure including a first air-gap and a dielectric layer suspended above and separated from the bottom electrode by the first air-gap; and a plurality of movable members suspended above the damping structure and separated therefrom by a second air-gap, each of the plurality of movable members including a top electrode and being configured to deflect towards the bottom electrode by electrostatic force. Other embodiments are also described.

5. 发明授权

US10574954B2 Compensation method for a scanning system with spatial light modulator 有权
公开(公告)号：US10574954B2
公开(公告)日：2020-02-25
申请号：US16209376
申请日：2018-12-04
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Yoshimi Hashimoto
IPC分类号： H04N9/31 , G02B26/10 , G02B13/00 , G02B27/00 , G02B26/08
摘要： A multi-beam scanning system and methods of operating the same to compensate for distortion are provided. Generally, the method involves illuminating a spatial light modulator including SLM pixels arranged in parallel, each pixel including a multiple address pixels. Drive signals including image data are provided to the pixels to generate beams of modulated light reflected therefrom, which is scanned to a linear swath of a two-dimensional imaging plane using a collimate lens, a scan mirror moved about a first axis, and an imaging lens. The swath is scanned across the imaging plane in a direction orthogonal to a long axis of the swath by moving the scan mirror about a second axis. To compensate for distortion along the long axis of the swath compensated image data is provided to at least some of the address pixels generating beams of modulated light distal from an optical axis of the imaging lens.

6. 发明授权

US08957564B1 Microelectromechanical system megasonic transducer 有权
标题翻译：微机电系统兆声传感器
公开(公告)号：US08957564B1
公开(公告)日：2015-02-17
申请号：US13172514
申请日：2011-06-29
申请人： Toshio Hiroe , Zarem Harold , Alexander Payne , James Hunter
发明人： Toshio Hiroe , Zarem Harold , Alexander Payne , James Hunter
IPC分类号： H02N2/00 , B08B3/12
CPC分类号： B08B3/12 , B06B1/0292
摘要： Megasonic cleaning systems and methods of fabricating and using the same are provided. In one embodiment, the system comprises a plurality of Micro-Electromechanical System (MEMS) transducers, each transducer including a movable membrane with a membrane electrode coupled to a first potential disposed above and spaced apart from an upper surface of a die including a cavity electrode coupled to a second potential, the membrane including multiple layers including a polysilicon layer between a top silicon nitride layer and a bottom silicon nitride layer, and the membrane electrode includes the polysilicon layer; a chuck on which a target workpiece is positioned; and a fluid to couple sonic energy from the plurality of MEMS transducers to the target workpiece. Other embodiments are also provided.
摘要翻译：提供了超声波清洗系统及其制造和使用方法。在一个实施例中，系统包括多个微机电系统（MEMS）换能器，每个换能器包括具有耦合到第一电位的膜电极的可移动膜，所述膜电极设置在模具的上表面上方并与模具的上表面间隔开，所述模具的上表面包括腔电极耦合到第二电位，所述膜包括多层，包括顶部氮化硅层和底部氮化硅层之间的多晶硅层，并且所述膜电极包括所述多晶硅层; 目标工件所在的卡盘; 以及将来自多个MEMS换能器的声能耦合到目标工件的流体。还提供了其他实施例。

7. 发明授权

US08639101B1 Apparatus and method for recording an image on photographic film 有权
标题翻译：在摄影胶片上记录图像的装置和方法
公开(公告)号：US08639101B1
公开(公告)日：2014-01-28
申请号：US13633376
申请日：2012-10-02
申请人： Silicon Light Machines Corporation
发明人： Gregory A. Myatt , Alexander P. Payne , Jahja I. Trisnadi , Harold A. Zarem
IPC分类号： G03B37/02
CPC分类号： G02B26/0808 , G03B21/2033 , G03B27/528 , G03B27/73 , G03B33/06 , H04N5/846
摘要： A film recorder including a linear diffractive spatial light modulator (LDSLM) and methods of using the same to record a digital image on a strip of photographic film are provided. In one embodiment, the recorder includes: an illuminator including at least one monochromatic light source generating a light beam; a spatial light modulator assembly including at least one linear diffractive spatial light modulator (LDSLM) to receive the light beam from the illuminator and modulate the light beam from the illuminator; a film transport for transporting a photographic film on an imaging plane; and imaging optics disposed in a light path between the LDSLM and the imaging plane to image the light beam simultaneously on a substantially linear portion of the photographic film to record an image on the photographic film. Other embodiments are also provided.
摘要翻译：提供了一种包括线性衍射空间光调制器（LDSLM）的胶卷记录器及其使用方法，用于在照相胶片条上记录数字图像。在一个实施例中，记录器包括：照明器，包括产生光束的至少一个单色光源; 空间光调制器组件，其包括至少一个线性衍射空间光调制器（LDSLM），以接收来自照明器的光束并调制来自照明器的光束; 用于在成像平面上传送照相胶片的胶片传送装置; 以及设置在LDSLM和成像平面之间的光路中的成像光学器件，以将光束同时成像在照相胶片的基本上线性的部分上，以在照相胶片上记录图像。还提供了其他实施例。

8. 发明授权

US08638490B1 Sub-lithographic diffractive MEMS 有权
$Sub-lithographic diffractive MEMS$
标题翻译：亚光刻衍射MEMS
公开(公告)号：US08638490B1
公开(公告)日：2014-01-28
申请号：US12905352
申请日：2010-10-15
申请人： Alexander P. Payne
发明人： Alexander P. Payne
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B26/0808
摘要： A diffractive MicroElectroMechanical systems and a method of fabricating the same are provided. In one embodiment, the method comprises: depositing a sacrificial layer onto a substrate; depositing a first structural layer on the sacrificial layer and patterning the structural layer to form a patterned structural layer including plurality of actuators; conformably depositing a sacrificial film on the patterned structural layer; depositing a second structural layer on the sacrificial film; planarizing the second structural layer to expose the sacrificial film and the plurality of actuators; and removing the sacrificial layer and sacrificial film to release the plurality of actuators, each of the plurality of actuators separated from the second structural layer by a thickness of the conformal sacrificial film. Other embodiments are also provided.
摘要翻译：提供了一种衍射微电子机械系统及其制造方法。在一个实施例中，该方法包括：在衬底上沉积牺牲层; 在牺牲层上沉积第一结构层并图案化结构层以形成包括多个致动器的图案化结构层; 在图案化的结构层上顺应地沉积牺牲膜; 在所述牺牲膜上沉积第二结构层; 平面化第二结构层以暴露牺牲膜和多个致动器; 并且去除所述牺牲层和牺牲膜以释放所述多个致动器，所述多个致动器中的每一个致动器与所述第二结构层分离所述共形牺牲膜的厚度。还提供了其他实施例。

9. 发明授权

US08570638B2 Method of fabricating an integrated device 有权
标题翻译：制造集成装置的方法
公开(公告)号：US08570638B2
公开(公告)日：2013-10-29
申请号：US13648932
申请日：2012-10-10
申请人： Silicon Light Machines Corporation
发明人： Joshua Lu , Gregory Beach , Alexander P. Payne , James Hunter
IPC分类号： G02B26/00
CPC分类号： G02B26/0808 , B81B2201/047 , B81C1/00238 , B81C1/00246 , G02B26/0833
摘要： A method of fabricating an integrated device including a MicroElectroMechanical system (MEMS) and an associated microcircuit is provided. In one embodiment, the method comprises: forming a high temperature contact through a dielectric layer to an underlying element of a microcircuit formed adjacent to a MicroElectroMechanical System (MEMS) structure on a substrate; and depositing a layer of conducting material over the dielectric layer, and patterning the layer of conducting material to form a local interconnect (LI) for the microcircuit overlying and electrically coupled to the contact and a bottom electrode for the adjacent MEMS structure. Other embodiments are also provided.
摘要翻译：提供了一种制造包括微电子机械系统（MEMS）和相关微电路的集成装置的方法。在一个实施例中，该方法包括：通过电介质层形成高温接触到邻近微电子机械系统（MEMS）结构的衬底上形成的微电路的下层元件; 以及在所述电介质层上沉积导电材料层，以及图案化所述导电材料层以形成用于所述微电路的局部互连（L1），所述微电路覆盖并电耦合到所述触点和所述相邻MEMS结构的底部电极。还提供了其他实施例。

10. 发明授权

US08285131B1 Apparatus and method for recording an image on photographic film 有权
标题翻译：在摄影胶片上记录图像的装置和方法
公开(公告)号：US08285131B1
公开(公告)日：2012-10-09
申请号：US12949618
申请日：2010-11-18
申请人： Gregory A. Myatt , Alexander P. Payne , Jahja I. Trisnadi , Harold A. Zarem
发明人： Gregory A. Myatt , Alexander P. Payne , Jahja I. Trisnadi , Harold A. Zarem
IPC分类号： G03B37/02
CPC分类号： G02B26/0808 , G03B21/2033 , G03B27/528 , G03B27/73 , G03B33/06 , H04N5/846
摘要： A film recorder including a linear diffractive spatial light modulator (LDSLM) and methods of using the same to record a digital image on a strip of photographic film are provided. In one embodiment, the recorder includes: an illuminator including at least one monochromatic light source generating a light beam; a spatial light modulator assembly including at least one linear diffractive spatial light modulator (LDSLM) to receive the light beam from the illuminator and modulate the light beam from the illuminator; a film transport for transporting a photographic film on an imaging plane; and imaging optics disposed in a light path between the LDSLM and the imaging plane to image the light beam simultaneously on a substantially linear portion of the photographic film to record an image on the photographic film. Other embodiments are also provided.
摘要翻译：提供了一种包括线性衍射空间光调制器（LDSLM）的胶卷记录器及其使用方法，用于在照相胶片条上记录数字图像。在一个实施例中，记录器包括：照明器，包括产生光束的至少一个单色光源; 空间光调制器组件，其包括至少一个线性衍射空间光调制器（LDSLM），以接收来自照明器的光束并调制来自照明器的光束; 用于在成像平面上传送照相胶片的胶片传送装置; 以及设置在LDSLM和成像平面之间的光路中的成像光学器件，以将光束同时成像在照相胶片的基本上线性的部分上，以在照相胶片上记录图像。还提供了其他实施例。

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