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1. 发明授权

US09929053B2 Systems and methods for controlling release of transferable semiconductor structures 有权
公开(公告)号：US09929053B2
公开(公告)日：2018-03-27
申请号：US14947596
申请日：2015-11-20
申请人： X-Celeprint Limited
发明人： Christopher Bower , Matthew Meitl
IPC分类号： H01L21/78 , H01L21/683 , B81C99/00 , H01L21/56 , H01L23/00
CPC分类号： H01L21/7806 , B81C99/008 , H01L21/561 , H01L21/568 , H01L21/6835 , H01L21/6836 , H01L24/83 , H01L2221/68368
摘要： The disclosed technology relates generally to methods and systems for controlling the release of micro devices. Prior to transferring micro devices to a destination substrate, a native substrate is formed with micro devices thereon. The micro devices can be distributed over the native substrate and spatially separated from each other by an anchor structure. The anchors are physically connected/secured to the native substrate. Tethers physically secure each micro device to one or more anchors, thereby suspending the micro device above the native substrate. In certain embodiments, single tether designs are used to control the relaxation of built-in stress in releasable structures on a substrate, such as Si (1 0 0). Single tether designs offer, among other things, the added benefit of easier break upon retrieval from native substrate in micro assembly processes. In certain embodiments, narrow tether designs are used to avoid pinning of the undercut etch front.

2. 发明授权

US09770771B2 Method for freeing a micromechanical part and a micromechanical part comprising sacrificial fasteners 有权
公开(公告)号：US09770771B2
公开(公告)日：2017-09-26
申请号：US14366919
申请日：2012-12-21
申请人： Francois Barrot , Remy Fournier , Laurent Giriens , Simon Henein , Sylvain Jeanneret , Johan Kruis
发明人： Francois Barrot , Remy Fournier , Laurent Giriens , Simon Henein , Sylvain Jeanneret , Johan Kruis
IPC分类号： B23D31/00 , B81B3/00 , B81C99/00 , B32B7/06 , E05D1/02
CPC分类号： B23D31/002 , B32B7/06 , B81B3/0051 , B81C99/008 , E05D1/02 , Y10T29/4979 , Y10T403/11
摘要： A method for fabricating a micromechanical part from a substrate in which the part is fabricated by providing a plurality of fasteners between the part and the substrate, the fasteners being sacrificial, characterized in that the fasteners include at least one hinge at the end of each fastener located beside the part, and in that the method includes a step of breaking the sacrificial fasteners. The micromechanical parts employing this type of sacrificial fastener are also described.

3. 发明授权

US09550023B2 Method of making a corrugated deflection diaphragm 有权
标题翻译：制造波纹偏转光阑的方法
公开(公告)号：US09550023B2
公开(公告)日：2017-01-24
申请号：US14317854
申请日：2014-06-27
申请人： Changlin Pang , Jason Shih , Fukang Jiang , Changgeng Liu , Sean Caffey , Andrew Urazaki
发明人： Changlin Pang , Jason Shih , Fukang Jiang , Changgeng Liu , Sean Caffey , Andrew Urazaki
IPC分类号： B29C59/14 , A61M5/145 , B44C1/22 , F04B43/00 , F04B45/04 , B81C99/00 , A61M5/142 , B29K23/00 , F16K99/00
CPC分类号： A61M5/14586 , A61M5/14276 , A61M2005/14204 , B29C59/14 , B29C2791/004 , B29K2023/00 , B81B2203/0127 , B81C99/008 , B81C2201/0108 , F04B43/0054 , F04B45/04 , F16K2099/008
摘要： A removable material is deposited or otherwise applied to a flat substrate surface in a pattern corresponding to desired corrugations in a membrane, e.g., a deflection diaphragm. The applied material serves as a scaffold for a polymeric material, which is applied thereover, and following cure or hardening, the polymeric material is removed to form a finished corrugated membrane.
摘要翻译：将可移除材料沉积或以其它方式施加到平坦的基底表面上，图案对应于膜（例如偏转膜片）中的期望波纹。施加的材料用作聚合材料的支架，其被施加到其上，并且在固化或硬化之后，去除聚合物材料以形成成品波纹膜。

4. 发明申请

US20160179000A1 PROCESS FOR MANUFACTURING A MULTI-LEVEL TIMEPIECE COMPONENT 审中-公开
标题翻译：制造多级时序分量的方法
公开(公告)号：US20160179000A1
公开(公告)日：2016-06-23
申请号：US14967079
申请日：2015-12-11
申请人： ROLEX SA
发明人： Florian Calame
IPC分类号： G03F7/00
CPC分类号： G03F7/0035 , B81C99/008 , G04B13/02 , G04B15/14
摘要： A process for manufacturing a multilayer timepiece component, wherein it comprises the following steps: E1, E2: manufacturing at least one first metal layer (13) of the timepiece component on the upper surface of a substrate (10); E13: separating the substrate (10) from the structure obtained by the preceding step, in order to obtain a sheet; then E4, E5; E14, E15: producing at least one other metal layer (23; 33) of the timepiece component and/or carrying out an operation for machining a metal layer after separation of the substrate (10) on the upper and/or lower surface of the sheet.
摘要翻译：一种制造多层钟表部件的方法，其中包括以下步骤：E1，E2：在基板（10）的上表面上制造钟表部件的至少一个第一金属层（13）; E13：将基板（10）与前述工序得到的结构物分离，得到片材; 那么E4，E5; E14，E15：制造钟表部件的至少一个其他金属层（23; 33），和/或在基板（10）在上下表面上分离之后执行用于加工金属层的操作片。

5. 发明授权

US09308641B2 Process for fabricating a magnetic tweezer 有权
标题翻译：磁镊制造工艺
公开(公告)号：US09308641B2
公开(公告)日：2016-04-12
申请号：US13814024
申请日：2011-08-03
申请人： Bernard Dieny , Philippe Sabon , Hélène Joisten
发明人： Bernard Dieny , Philippe Sabon , Hélène Joisten
IPC分类号： H01F7/06 , B25J7/00 , B81C99/00 , B82Y25/00 , B82Y40/00 , H01F41/30 , B81B7/00
CPC分类号： B25J7/00 , B81B7/00 , B81B2201/06 , B81B2203/06 , B81C99/002 , B81C99/008 , B81C2201/038 , B82Y25/00 , B82Y40/00 , H01F41/30
摘要： Magnetic tweezers have two jaws formed by thin magnetic films connected together via a hinge. The magnetic tweezers include a nanoparticle formed by a stack of thin magnetic films. A process for fabricating the magnetic tweezers by techniques used in the fabrication of microelectronic components is presented.
摘要翻译：磁镊具有通过铰链连接在一起的薄磁膜形成的两个钳口。磁性镊子包括由薄膜堆叠形成的纳米颗粒。提出了一种通过用于制造微电子元件的技术制造磁镊子的方法。

6. 发明申请

US20160086855A1 SYSTEMS AND METHODS FOR CONTROLLING RELEASE OF TRANSFERABLE SEMICONDUCTOR STRUCTURES 有权
标题翻译：用于控制可转移半导体结构释放的系统和方法
公开(公告)号：US20160086855A1
公开(公告)日：2016-03-24
申请号：US14947596
申请日：2015-11-20
申请人： X-Celeprint Limited
发明人： Christopher Bower , Matthew Meitl
IPC分类号： H01L21/78 , H01L21/683
CPC分类号： H01L21/7806 , B81C99/008 , H01L21/561 , H01L21/568 , H01L21/6835 , H01L21/6836 , H01L24/83 , H01L2221/68368
摘要： The disclosed technology relates generally to methods and systems for controlling the release of micro devices. Prior to transferring micro devices to a destination substrate, a native substrate is formed with micro devices thereon. The micro devices can be distributed over the native substrate and spatially separated from each other by an anchor structure. The anchors are physically connected/secured to the native substrate. Tethers physically secure each micro device to one or more anchors, thereby suspending the micro device above the native substrate. In certain embodiments, single tether designs are used to control the relaxation of built-in stress in releasable structures on a substrate, such as Si (1 0 0). Single tether designs offer, among other things, the added benefit of easier break upon retrieval from native substrate in micro assembly processes. In certain embodiments, narrow tether designs are used to avoid pinning of the undercut etch front.
摘要翻译：所公开的技术一般涉及用于控制微器件释放的方法和系统。在将微器件转移到目标衬底之前，在其上形成有微器件的天然衬底。微器件可以分布在天然衬底上并且通过锚结构在空间上彼此分离。锚固体物理地连接/固定到天然基底。系带将每个微型装置物理地固定到一个或多个锚固件上，从而将微型装置悬挂在天然基底之上。在某些实施例中，使用单系链设计来控制衬底上的可释放结构中的内在应力的松弛，例如Si（110）。除了别的以外，单系链设计还提供了在微装配过程中从原生衬底检索更容易断裂的附加益处。在某些实施例中，使用窄的绳索设计来避免底切蚀刻前端的钉扎。

7. 发明授权

US09123363B2 Crystalline magnetic layer to amorphous substrate bonding 有权
标题翻译：结晶磁性层与非晶基体的接合
公开(公告)号：US09123363B2
公开(公告)日：2015-09-01
申请号：US13718863
申请日：2012-12-18
申请人： Seagate Technology LLC
发明人： Mark Anthony Gubbins , Marcus Benedict Mooney
IPC分类号： G11B5/31
CPC分类号： G11B5/3153 , B81C1/00357 , B81C1/00476 , B81C1/0088 , B81C3/001 , B81C99/008 , B81C2201/0194 , C09K13/08 , C23F1/02 , C23F1/28 , C23F1/30 , C30B25/04 , G03F7/0002 , G11B5/3163 , G11B5/3173 , Y10T428/11 , Y10T428/115 , Y10T428/1157 , Y10T428/1171 , Y10T428/1186 , Y10T428/1193
摘要： Various methods for attaching a crystalline write pole onto an amorphous substrate and the resulting structures are described in detail herein. Further, the resulting structure may have a magnetic moment exceeding 2.4 Tesla. Still further, methods for depositing an epitaxial crystalline write pole on a crystalline seed or template material to ensure that the phase of the write pole is consistent with the high moment phase of the template material are also described in detail herein.
摘要翻译：本文详细描述了用于将晶体写极连接到非晶衬底上的各种方法以及所得到的结构。此外，所得到的结构可能具有超过2.4特斯拉的磁矩。此外，本文还详细描述了在结晶晶种或模板材料上沉积外延晶体写极的方法，以确保写极的相位与模板材料的高时间相一致。

8. 发明申请

US20140363217A1 METHOD FOR FREEING A MICROMECHANICAL PART AND A MICROMECHANICAL PART COMPRISING SACRIFICIAL FASTENERS 有权
标题翻译：免费微机械零件的方法和包含紧固件的微型零件
公开(公告)号：US20140363217A1
公开(公告)日：2014-12-11
申请号：US14366919
申请日：2012-12-21
申请人： Francois Barrot , Remy Fournier , Laurent Giriens , Simon Henein , Sylvain Jeanneret , Johan Kruis
发明人： Francois Barrot , Remy Fournier , Laurent Giriens , Simon Henein , Sylvain Jeanneret , Johan Kruis
IPC分类号： B23D31/00 , E05D1/02 , B32B7/06
CPC分类号： B23D31/002 , B32B7/06 , B81B3/0051 , B81C99/008 , E05D1/02 , Y10T29/4979 , Y10T403/11
摘要： A method for fabricating a micromechanical part from a substrate in which the part is fabricated by providing a plurality of fasteners between the part and the substrate, the fasteners being sacrificial, characterized in that the fasteners include at least one hinge at the end of each fastener located beside the part, and in that the method includes a step of breaking the sacrificial fasteners. The micromechanical parts employing this type of sacrificial fastener are also described.
摘要翻译：一种从基板制造微机械部件的方法，其中通过在所述部件和所述基板之间提供多个紧固件来制造所述部件，所述紧固件是牺牲的，其特征在于，所述紧固件包括在每个紧固件的端部处的至少一个铰链位于部件旁边，并且该方法包括破坏牺牲紧固件的步骤。还描述了采用这种牺牲紧固件的微机械部件。

9. 发明申请

US20130169393A1 MICROSCALE OR NANOSCALE MAGNETIC TWEEZERS AND PROCESS FOR FABRICATING SUCH TWEEZERS 有权
标题翻译：显微镜或纳米二极管及其制造方法
公开(公告)号：US20130169393A1
公开(公告)日：2013-07-04
申请号：US13814024
申请日：2011-08-03
申请人： Bernard Dieny , Philippe Sabon , Helene Joisten
发明人： Bernard Dieny , Philippe Sabon , Helene Joisten
IPC分类号： B25J7/00 , B81B7/00
CPC分类号： B25J7/00 , B81B7/00 , B81B2201/06 , B81B2203/06 , B81C99/002 , B81C99/008 , B81C2201/038 , B82Y25/00 , B82Y40/00 , H01F41/30
摘要： Magnetic tweezers have two jaws formed by thin magnetic films connected together via a hinge. The magnetic tweezers include a nanoparticle formed by a stack of thin magnetic films. A process for fabricating the magnetic tweezers by techniques used in the fabrication of microelectronic components is presented.
摘要翻译：磁镊具有通过铰链连接在一起的薄磁膜形成的两个钳口。磁性镊子包括由薄膜堆叠形成的纳米颗粒。提出了一种通过用于制造微电子元件的技术制造磁镊子的方法。

10. 发明申请

US20130143407A1 METHOD FOR PRODUCING A THIN SINGLE CRYSTAL SILICON HAVING LARGE SURFACE AREA 审中-公开
标题翻译：生产具有大面积面积的单晶硅的方法
公开(公告)号：US20130143407A1
公开(公告)日：2013-06-06
申请号：US13414355
申请日：2012-03-07
申请人： CHING-FUH LIN , TZU-CHING LIN , SHU-JIA SYU
发明人： CHING-FUH LIN , TZU-CHING LIN , SHU-JIA SYU
IPC分类号： H01L21/311 , B82Y40/00
CPC分类号： B81C99/008 , B81B2207/056 , B81C1/0038 , B81C2201/0194
摘要： The present invention relates to a method for producing a thin single crystal silicon having large surface area, and particularly relates to a method for producing a silicon micro and nanostructure on a silicon substrate (or wafer) and lifting off the silicon micro and nanostructure from the silicon substrate (or wafer) by metal-assisted etching. In this method, a thin single crystal silicon is produced in the simple processes of lifting off and transferring the silicon micro and nanostructure from the substrate by steps of depositing metal catalyst on the silicon wafer, vertically etching the substrate, laterally etching the substrate. And then, the surface of the substrate is processed, for example planarizing the surface of the substrate, to recycle the substrate for repeatedly producing thin single crystal silicons. Therefore, the substrate can be fully utilized, the purpose of decreasing the cost can be achieved and the application can be increased.
摘要翻译：本发明涉及一种具有大表面积的薄单晶硅的制造方法，特别涉及在硅衬底（或晶片）上制造硅微结构和纳米结构的方法，并将硅微结构和纳米结构从硅衬底（或晶片）。在该方法中，通过在硅晶片上沉积金属催化剂，垂直蚀刻衬底，横向蚀刻衬底的步骤，简单地从衬底中提取和转移硅微结构和纳米结构的薄单晶硅。然后，处理衬底的表面，例如平坦化衬底的表面，以再循环衬底以重复制造薄的单晶硅。因此，可以充分利用基板，可以实现成本降低的目的，并且可以提高应用。

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