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1. 发明授权

US10081090B2 Method of manufacturing an upper electrode of a plasma processing device 有权
公开(公告)号：US10081090B2
公开(公告)日：2018-09-25
申请号：US15060384
申请日：2016-03-03
申请人： TOKYO ELECTRON LIMITED
发明人： Tsuguo Kitajima , Yasumasa Ishihara
IPC分类号： B24C1/08 , H01J37/32 , C23C16/455 , C23C8/36 , C23C4/134 , B24C11/00 , H01L21/311
CPC分类号： B24C1/08 , B24C11/00 , C23C4/134 , C23C8/36 , C23C16/45565 , C23C16/45568 , H01J37/32009 , H01J37/32018 , H01J37/32091 , H01J37/3244 , H01J37/32532 , H01J37/32559 , H01J37/32605 , H01L21/31116 , Y10T29/49156 , Y10T29/49204
摘要： A method of manufacturing an upper electrode of a plasma processing device includes forming a covering layer having plasma resistance on a surface of a main body portion constituting the upper electrode at a side of the processing space; polishing a surface of the covering layer exposed to the processing space; and after the polishing, blasting the surface of the covering layer polished at the polishing.

2. 发明授权

US09994948B2 Method for producing oxide layers which protect against wear and/or corrosion 有权
公开(公告)号：US09994948B2
公开(公告)日：2018-06-12
申请号：US14497783
申请日：2014-09-26
申请人： AHC Oberflächentechnik GmbH
发明人： Marc Weidenbach , Peter Kurze , Hermann Hans Urlberger
IPC分类号： C23C8/10 , C23C8/12 , C23C8/04 , C23C8/36
CPC分类号： C23C8/12 , C23C8/04 , C23C8/36
摘要： Method for producing oxide layers which protect against wear and/or corrosion on barrier layer-forming metals, preferably aluminum, magnesium and titanium, alloys and mixtures thereof by means of laser treatment, characterized in that on the surface a continuous near-surface oxygen-plasma is produced to form the oxide layer.

3. 发明申请

US20170362696A1 APPARATUS AND METHOD FOR DEPOSITING MULTIPLE COATING MATERIALS IN A COMMON PLASMA COATING ZONE 审中-公开
公开(公告)号：US20170362696A1
公开(公告)日：2017-12-21
申请号：US15697826
申请日：2017-09-07
申请人： SABIC GLOBAL TECHNOLOGIES B.V.
发明人： Steven Marc Gasworth
IPC分类号： C23C8/36 , C23C16/54 , C23C16/513
CPC分类号： C23C8/36 , C23C16/513 , C23C16/54
摘要： In an embodiment a method of coating a substrate comprises moving the substrate along a path of travel through a coating zone; generating a plasma jet directed toward a first side of the substrate; injecting a first reagent into the plasma jet; injecting a second reagent into the plasma jet; and regulating the flow of the first reagent according to a first set of parameters so that the first reagent is injected upstream of the plasma jet relative to the path of travel of the substrate; regulating the flow of the second reagent according to a second set of parameters so that the second reagent is injected downstream of the plasma jet relative to the path of travel of the substrate, such that the first and second reagents are applied to the substrate to form at least one layer of a coating on the substrate.

4. 发明授权

US09797036B2 Method of making corrosion resistant and glossy appearance coating for light metal workpiece 有权
公开(公告)号：US09797036B2
公开(公告)日：2017-10-24
申请号：US14670819
申请日：2015-03-27
申请人： GM Global Technology Operations LLC
发明人： Ming Liu , Lei Gao
IPC分类号： B32B3/00 , C23C8/80 , B60B3/10 , C23C8/04 , C23C8/36 , C23C14/08 , C23C14/34 , C23C28/00 , C25D11/30 , C25D13/14 , C23C8/40 , C25D7/00 , C25D11/02 , C25D11/20 , C25D11/24 , C25D11/26 , C25D17/00 , C25D17/06 , C25D11/00 , C25D13/22
CPC分类号： C23C8/80 , B60B3/10 , B60B2310/616 , B60B2310/618 , B60B2310/621 , B60B2310/654 , B60B2310/656 , B60B2310/661 , B60B2360/106 , B60B2900/141 , C23C8/04 , C23C8/36 , C23C8/40 , C23C14/081 , C23C14/34 , C23C28/32 , C23C28/345 , C25D7/00 , C25D11/005 , C25D11/026 , C25D11/20 , C25D11/246 , C25D11/26 , C25D11/30 , C25D13/14 , C25D13/22 , C25D17/005 , C25D17/06 , Y10T428/21 , Y10T428/24967
摘要： A metal workpiece, such as a wheel, and a method of providing an enhanced corrosion resistant surface coating on an exposed surface of a metal or alloy substrate (such as magnesium). A corrosion resistance basecoat is formed, including generating an oxide layer, and applying a first primer coating onto at least a portion of the oxide layer. The method may further include identifying highest corrosion prone areas on the substrate and designing a support rack that avoids contact with these corrosion prone areas. The method also includes forming a topcoat over at least a portion of the basecoat, by applying a second primer coating onto at least a portion of the first primer coating and depositing a sputtered metallic film onto the second primer coating using a physical vapor deposition technique. A clear coat layer may be applied over the metallic film.

5. 发明申请

US20160184966A1 PLASMA PROCESSING DEVICE 审中-公开
标题翻译：等离子体加工装置
公开(公告)号：US20160184966A1
公开(公告)日：2016-06-30
申请号：US15060384
申请日：2016-03-03
申请人： TOKYO ELECTRON LIMITED
发明人： Tsuguo KITAJIMA , Yasumasa ISHIHARA
IPC分类号： B24C1/08 , B24C11/00 , H01J37/32
CPC分类号： B24C1/08 , B24C11/00 , C23C4/134 , C23C8/36 , C23C16/45565 , C23C16/45568 , H01J37/32009 , H01J37/32018 , H01J37/32091 , H01J37/3244 , H01J37/32532 , H01J37/32559 , H01J37/32605 , H01L21/31116 , Y10T29/49156 , Y10T29/49204
摘要： A plasma processing device according to one embodiment comprises a processing vessel, a gas supply unit, a lower electrode and an upper electrode. The processing vessel defines a processing space. The gas supply unit supplies processing gas into the processing space. The lower electrode is provided below the processing space. The upper electrode is provided above the processing space, and a covering layer having plasma-resistant properties is formed on this upper electrode. The surface of this covering layer is polished.
摘要翻译：根据一个实施例的等离子体处理装置包括处理容器，气体供应单元，下电极和上电极。处理容器限定处理空间。气体供给单元将处理气体供给到处理空间。下电极设置在处理空间的下方。上部电极设置在处理空间的上方，在该上部电极上形成有耐等离子体性质的覆盖层。该覆盖层的表面被抛光。

6. 发明授权

US09334977B2 Engine valve 有权
标题翻译：发动机气门
公开(公告)号：US09334977B2
公开(公告)日：2016-05-10
申请号：US14439149
申请日：2012-10-30
申请人： NITTAN VALVE CO., LTD.
发明人： Hisanaga Yokoyama , Masanami Iio
IPC分类号： C22C19/05 , C23C8/48 , F16K25/00 , F01L3/04 , C23C8/24 , C23C8/28 , C23C8/36 , C23C8/56 , F01L3/02
CPC分类号： F16K25/005 , C22C19/056 , C22C19/07 , C22C27/04 , C22C30/00 , C22C38/08 , C22C38/18 , C23C8/24 , C23C8/28 , C23C8/36 , C23C8/48 , C23C8/56 , F01L3/02 , F01L3/04 , F01L2101/00 , F01L2103/00 , F01L2800/18 , F01L2820/01
摘要： [Problem] To provide an engine valve which satisfies predetermined characteristics with respect to impact resistance, abrasion resistance and high-temperature corrosion resistance all of which meet or exceed predetermined levels required to resist severe use environments, while also minimizing the content ratios of predetermined rare metals.[Means for Solving the Problem] An engine valve is configured to include an engine valve base body having a stem portion and a head portion provided at one end portion of the stem portion, which engine valve comprises: a build-up portion formed by seat welding to encircle the head portion; and a seat obtained by forming a surface-hardened layer on the build-up portion, wherein the build-up portion is formed of a seat weld material constituted of a Ni—Fe—Cr alloy containing W at 8.0 to 40.0 mass %, Mo at a total together with W in a range of 20.0 to 40.0 mass %, Fe at 20.0 to 50.0 mass %, Cr at 12.0 to 36.0 mass %, B at 1.0 to 2.5 mass %, and a balance of Ni and inevitable impurities, and wherein the surface-hardened layer is formed by effecting nitriding treatment on the entire valve to form a nitride layer on a machined surface formed on the seat, thereby ensuring predetermined characteristic while minimizing rare metal content ratio.
摘要翻译： [问题]提供一种满足或超过抵抗严苛使用环境所需的预定水平的耐冲击性，耐磨性和耐高温腐蚀性的预定特性的发动机气门，同时还使预定稀有物的含量比最小化金属。发明专利文献1所述的发明装置，其特征在于，包括具有杆部的发动机气门基体和设置在所述杆部的一端部的头部，所述发动机气门包括：由座部形成的积存部焊接以包围头部; 以及通过在积存部上形成表面硬化层而获得的座，其中，所述积层部由由含有8.0〜40.0质量％的W的Ni-Fe-Cr合金构成的座焊材料形成，Mo 与20.0〜40.0质量％的W，20.0〜50.0质量％的Fe，12.0〜36.0质量％的Cr，1.0〜2.5质量％的B，Ni和不可避免的杂质的余量，以及其特征在于，通过对整个阀进行氮化处理而形成表面硬化层，以在形成在座椅上的机械加工面上形成氮化物层，从而确保预定特性，同时使稀土金属含量比降至最低。

7. 发明申请

US20160097459A1 Nitrided Engine Valve with HVOF Coating 审中-公开
标题翻译：带HVOF涂层的氮化发动机阀门
公开(公告)号：US20160097459A1
公开(公告)日：2016-04-07
申请号：US14507765
申请日：2014-10-06
申请人： Caterpillar Inc.
发明人： Mark Veliz , Daniel Sordelet
IPC分类号： F16K1/34 , F02M35/10 , B05D1/02 , F16K25/00
CPC分类号： F16K1/34 , B05D1/02 , C23C4/02 , C23C4/18 , C23C8/02 , C23C8/24 , C23C8/30 , C23C8/36 , C23C8/48 , C23C8/54 , F01L3/04 , F01L2103/00 , F02M35/10255 , F16K25/005
摘要： A valve for use in an internal combustion engine is disclosed. The valve includes a stem connected to a fillet disposed between the stem and a seat face. A thermal spray technique, such as a high velocity oxy fuel coating spray (HVOF) is applied to the seat face. A nitriding treatment that includes a nitrogen source, which may or may not contain carbon, and heat may be applied after the HVOF spray. The heat allows the nitrogen and/or carbon to penetrate the HVOF layer and the seat face to form a compound zone. The compound zone enhances the wear resistance of the surface during engine operation.
摘要翻译：公开了一种用于内燃机的阀。阀包括连接到设置在杆和座面之间的圆角的杆。将热喷涂技术，例如高速氧燃料喷涂（HVOF）施加到座面上。在HVOF喷涂之后，可以施加包括可能含有或可以不含碳的氮源和热的氮化处理。热量允许氮和/或碳穿透HVOF层和座面以形成复合区。复合区域在发动机运行期间增强了表面的耐磨性。

8. 发明申请

US20160040280A1 Wear Resistant Vapor Deposited Coating, Method of Coating Deposition and Applications Therefor 有权
标题翻译：耐磨性气相沉积涂层，涂层沉积方法及其应用
公开(公告)号：US20160040280A1
公开(公告)日：2016-02-11
申请号：US14839698
申请日：2015-08-28
申请人： G & H Technologies, LLC
发明人： Vladimir Gorokhovsky , Brad B. Heckerman , Yuhang Cheng
IPC分类号： C23C14/06 , C23C16/32 , C23C16/34 , C23C16/38 , C23C16/42 , C23C16/06 , C23C16/24 , C23C16/56 , C23C16/26 , C23C16/28 , C23C14/02 , C23C14/58 , C23C14/14 , C22F1/10 , C22F1/18 , C21D6/00 , C22C19/03 , C22C14/00 , C22C38/44 , C22C38/42 , C22C38/50 , C22C38/22 , C22C38/20 , C22C38/06 , C22C38/04 , C22C38/02 , C22C38/00 , C23C8/36 , C23C8/24 , C23C8/20 , C23C8/02 , C23C16/02
CPC分类号： C23C14/0641 , A61B17/1615 , A61B2017/1602 , A61C3/02 , A61C5/42 , C21D6/004 , C21D6/005 , C21D6/008 , C22C14/00 , C22C19/03 , C22C38/001 , C22C38/002 , C22C38/02 , C22C38/04 , C22C38/06 , C22C38/20 , C22C38/22 , C22C38/42 , C22C38/44 , C22C38/50 , C22F1/10 , C22F1/183 , C23C8/02 , C23C8/20 , C23C8/24 , C23C8/36 , C23C14/021 , C23C14/022 , C23C14/024 , C23C14/025 , C23C14/0605 , C23C14/0611 , C23C14/0635 , C23C14/067 , C23C14/0676 , C23C14/0682 , C23C14/14 , C23C14/5806 , C23C14/5826 , C23C14/586 , C23C14/588 , C23C16/0227 , C23C16/0236 , C23C16/0272 , C23C16/0281 , C23C16/06 , C23C16/24 , C23C16/26 , C23C16/28 , C23C16/32 , C23C16/34 , C23C16/38 , C23C16/42 , C23C16/56 , Y10T428/24975 , Y10T428/252 , Y10T428/265 , Y10T428/30
摘要： A low friction top coat over a multilayer metal/ceramic bondcoat provides a conductive substrate, such as a rotary tool, with wear resistance and corrosion resistance. The top coat further provides low friction and anti-stickiness as well as high compressive stress. The high compressive stress provided by the top coat protects against degradation of the tool due to abrasion and torsional and cyclic fatigue. Substrate temperature is strictly controlled during the coating process to preserve the bulk properties of the substrate and the coating. The described coating process is particularly useful when applied to shape memory alloys.
摘要翻译：在多层金属/陶瓷粘合剂涂层上的低摩擦面涂层提供具有耐磨性和耐腐蚀性的导电基底，例如旋转工具。顶涂层进一步提供低摩擦和抗粘性以及高压缩应力。由顶部涂层提供的高压缩应力防止由于磨损和扭转和循环疲劳导致的刀具劣化。在涂覆过程中严格控制基材温度以保持基材和涂层的本体特性。当应用于形状记忆合金时，所述的涂覆方法特别有用。

9. 发明授权

US09190249B2 Hollow cathode system, device and method for the plasma-assisted treatment of substrates 有权
标题翻译：空心阴极系统，用于等离子体辅助处理衬底的装置和方法
公开(公告)号：US09190249B2
公开(公告)日：2015-11-17
申请号：US14514445
申请日：2014-10-15
申请人： VON ARDENNE GMBH
发明人： Konrad Dybek , Frank Stahr , Klaus Schade
IPC分类号： H01L21/00 , H01J37/32 , H05H1/46 , C23C16/448 , C23C16/50 , H01L31/18 , C23C8/36
CPC分类号： H01J37/32596 , C23C8/36 , C23C16/448 , C23C16/50 , H01J2237/327 , H01L31/186 , H05H1/46
摘要： A hollow cathode system, a device and a method for the plasma-assisted treatment of substrates includes at least one hollow cathode, which can be connected to a power supply. The hollow cathode includes an electrically conducting main body with an opening which is bounded by ribs, follows a spiral or meandering path and allows a gas to pass through in a direction perpendicular to a surface of the main body. Connecting bridge elements are provided on the ribs. The bridge elements serve ensure mechanical stability of the hollow cathode and optimize potential distribution of the hollow cathode. With the hollow cathode system, high treatment rates are achieved for homogeneous treatment of substrates of a large surface area with high plasma stability.
摘要翻译：用于等离子体辅助处理衬底的中空阴极系统，器件和方法包括至少一个可连接到电源的中空阴极。空心阴极包括导电主体，其具有由肋限定的开口，遵循螺旋或曲折的路径，并允许气体沿垂直于主体表面的方向通过。连接桥元件设在肋骨上。桥接元件确保空心阴极的机械稳定性并优化中空阴极的电势分布。对于空心阴极系统，对于具有高等离子体稳定性的大表面积的基板的均匀处理，实现了高处理率。

10. 发明授权

US09015939B2 Method for increasing the strength of components 有权
标题翻译：提高部件强度的方法
公开(公告)号：US09015939B2
公开(公告)日：2015-04-28
申请号：US12642267
申请日：2009-12-18
申请人： Alfons Reeb , Jochen Schmidt
发明人： Alfons Reeb , Jochen Schmidt
IPC分类号： B23P17/00 , C23C8/24 , B21H7/18 , B24B39/04 , C23C8/30 , C23C8/36 , C23C8/80 , F16C3/06
CPC分类号： C23C8/24 , B21H7/185 , B24B39/04 , C23C8/30 , C23C8/36 , C23C8/80 , F16C3/06 , Y10T29/17 , Y10T29/49286 , Y10T29/49726
摘要： In a method for increasing the strength of a component subjected to torsional and flexural stress, in particular of a crankshaft, in a first step essentially the entire component is provided with a nitriding layer. In a second step, the nitriding layer is at least partially removed in at least one highly stressed region of the component by means of cutting machining, and, in a third step, the at least one highly stressed component region freed of the nitriding layer is mechanically strain-hardened.
摘要翻译：在增加扭转和弯曲应力的部件的强度的方法中，特别是曲轴，在第一步骤中，基本上整个部件设置有氮化层。在第二步骤中，通过切削加工，至少部分地在组件的至少一个高应力区域中移除氮化层，并且在第三步骤中，不存在氮化层的至少一个高应力分量区域是机械应变硬化。

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