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1. 发明授权

US09903378B2 Method of operating a pumping system 有权
公开(公告)号：US09903378B2
公开(公告)日：2018-02-27
申请号：US14569170
申请日：2014-12-12
申请人： Edwards Limited
发明人： Simon Harold Bruce
IPC分类号： F04D27/00 , F04B49/20 , F04B49/06 , F04C23/02 , F04C25/02 , F04C28/06 , F04C18/12 , F04C18/16
CPC分类号： F04D27/00 , F04B49/06 , F04B49/20 , F04B2203/0201 , F04B2203/0204 , F04C18/12 , F04C18/16 , F04C23/02 , F04C25/02 , F04C28/06 , F04C2220/10 , F04C2220/12 , F04C2240/403 , F04C2270/08 , F04C2270/09 , F04C2270/18 , F04C2270/19 , F04D27/004
摘要： A pumping system for evacuating an enclosure comprises a pumping mechanism (30), a motor (32) for driving the pumping mechanism, and a controller (36) for controlling the motor. The controller sets a maximum value for a rotational frequency of the motor and a maximum value for a current in the motor, and, to optimise the performance of the pumping system, independently adjusts the maximum values during evacuation of the enclosure.

2. 发明申请

US20170298935A1 VACUUM-GENERATING PUMPING SYSTEM AND PUMPING METHOD USING THIS PUMPING SYSTEM 审中-公开
公开(公告)号：US20170298935A1
公开(公告)日：2017-10-19
申请号：US15512883
申请日：2014-09-26
申请人： ATELIERS BUSCH SA
发明人： Didier MÜLLER , Jean-Eric LARCHER , Théodore ILTCHEV
IPC分类号： F04C11/00 , F04C2/16 , F04C15/06
CPC分类号： F04C11/003 , F04C2/16 , F04C15/06 , F04C18/16 , F04C23/001 , F04C23/005 , F04C25/02 , F04C28/02 , F04C28/06 , F04C2220/12
摘要： The present invention relates to a pumping system to generate a vacuum (SP), comprising a main vacuum pump which is a dry screw pump (3) having a gas suction inlet (2) connected to a vacuum chamber (1) and a gas discharge outlet (4) leading into a gas evacuation conduit (5) in the direction of a gas exhaust outlet (8) outside the pumping system. The pumping system comprises a non-return valve (6) positioned between the gas discharge outlet (4) and the gas exhaust outlet (8), and an auxiliary vacuum pump (7) connected in parallel to the non-return valve. In a pumping method by means of this pumping system (SP), the main vacuum pump (3) is started up in order to pump the gases contained in the vacuum chamber (1) and to discharge these gases through its gas discharge outlet (4), simultaneously to which the auxiliary vacuum pump (7) is started up. Moreover the auxiliary vacuum pump (7) continues to pump all the while that the main vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the while that the main vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).

3. 发明申请

US20120171068A1 Displacement Pump with Internal Compression 有权
标题翻译：具有内部压缩的排量泵
公开(公告)号：US20120171068A1
公开(公告)日：2012-07-05
申请号：US13408191
申请日：2012-02-29
申请人： Ralf Steffens
发明人： Ralf Steffens
IPC分类号： F04C18/16 , F04C29/04
CPC分类号： F04C18/16 , F04C18/084 , F04C29/04 , F04C2220/12
摘要： The invention relates to a dry-compressing dual-shaft rotary displacement screw spindle pump machine for delivering and compressing gases. The spindle rotor pair therein includes multiple stages, having a primary delivery thread, a secondary delivery thread and a gas outlet collector chamber therebetween. The primary delivery thread head circle diameter decreases in the gas outlet direction, while the foot circle diameter thereof increases correspondingly for an application-specific matching inner “integral” compression ratio. The secondary delivery thread nominal delivery direction is opposite to the primary delivery thread nominal delivery direction. The secondary delivery thread is implemented such that the actual gas flow direction is opposite to the nominal delivery direction thereof, and is always directed away from the gas outlet plenum, having a gas permeation under ambient pressure just as the space in the gearbox. A control gas delivery stage is additionally provided for very high operating pressures.
摘要翻译：本发明涉及一种用于输送和压缩气体的干压缩双轴旋转移位螺杆主轴泵机。其中的主轴转子对包括多个级，其中具有主输出螺纹，二次输送螺纹和气体出口收集器室。主输送螺纹头圆直径在气体出口方向上减小，而对于特定于应用的匹配内“积分”压缩比，其脚圆直径相应增加。二次输送螺纹标称输送方向与主输送螺纹标称输送方向相反。次级输送螺纹被实施为使得实际的气体流动方向与其标称输送方向相反，并且总是指向远离气体出口气室，其在环境压力下具有与齿轮箱中的空间一样的气体渗透。另外为非常高的操作压力提供控制气体输送级。

4. 发明申请

US20110243781A1 OILLESS SCREW COMPRESSOR AND COMPRESSED AIR COOLING UNIT 审中-公开
标题翻译：无油螺杆压缩机和压缩空气冷却单元
公开(公告)号：US20110243781A1
公开(公告)日：2011-10-06
申请号：US13164320
申请日：2011-06-20
申请人： Hideki FUJIMOTO , Hitoshi Nishimura , Natsuki Kawabata
发明人： Hideki FUJIMOTO , Hitoshi Nishimura , Natsuki Kawabata
IPC分类号： F01C1/16
CPC分类号： F04C18/16 , F04C23/001 , F04C28/06 , F04C29/04 , F04C29/06 , F04C2220/12 , F04C2240/30 , F04C2270/19 , F04C2270/80
摘要： An oilless screw compressor incorporating water-cooled cooling units for cooling compressed air discharged from compressor bodies having a pair of male and female screw rotors which can be rotated in a contactless and oilless manner, the cooling units comprising a plate type heat-exchanger, and the amount of cooling water for the plate type heat-exchanger being adjustable. With this configuration, a difference between a temperature during load operation and a temperature upon automatic stopping and during unload operation of the compressor can be reduced, so that the cooling unit can be restrained from being damaged or broken within a short period, thereby it is possible to provide a highly reliable oilless screw compressor.
摘要翻译：一种无油螺旋压缩机，其包括用于冷却从压缩机主体排出的压缩空气的水冷式冷却单元，所述压缩机具有可以非接触和无油的方式旋转的一对公螺纹转子和内螺纹转子，所述冷却单元包括板式热交换器，以及板式热交换器的冷却水量可调。通过这样的结构，能够减少负荷运转时的温度与自动停止时的温度，压缩机的卸载运转时的温度的差异，能够在短时间内抑制冷却装置的损坏或破损，可能提供高可靠性的无油螺杆压缩机。

5. 发明授权

US07814922B2 Apparatus for controlling the pressure in a process chamber and method of operating same 有权
标题翻译：用于控制处理室中的压力的装置及其操作方法
公开(公告)号：US07814922B2
公开(公告)日：2010-10-19
申请号：US10503280
申请日：2003-06-20
申请人： Martin Ernst Tollner
发明人： Martin Ernst Tollner
IPC分类号： F04B37/14 , F04B37/00 , F04B23/08
CPC分类号： G05D16/2073 , F04C18/0207 , F04C23/005 , F04C25/02 , F04C2220/12 , F04C2220/30 , F04D19/04 , F04D27/0253 , Y10T137/0379 , Y10T137/0396 , Y10T137/86083 , Y10T137/86139
摘要： A method of operating apparatus for controlling the pressure in a process chamber (10), the apparatus comprising a first pump unit (14) having an inlet in fluid connection with an outlet of said process chamber, and a second pump unit (16) having an inlet in fluid connection with an outlet of the first pump unit via a flow control unit (18) comprising a variable flow control device (20; 28) having variable conductance for controlling outlet fluid pressure at the outlet of the first pump unit, the method comprises controlling speed of the first pump unit to increase the range of chamber pressures over which control of the outlet fluid pressure produces changes in said chamber pressure without exceeding the thermal limit and/or motor stall limit of the first pump unit.
摘要翻译：一种用于控制处理室（10）中的压力的操作装置的方法，所述装置包括具有与所述处理室的出口流体连通的入口的第一泵单元（14）和具有与所述处理室的出口流体连接的第一泵单元（16）经由流量控制单元（18）与第一泵单元的出口流体连接的入口包括具有可变电导的可变流量控制装置（20; 28），用于控制第一泵单元出口处的出口流体压力，方法包括控制第一泵单元的速度以增加室压力的范围，在该范围内，出口流体压力的控制产生所述室压力的变化，而不超过第一泵单元的热限制和/或电动机失速极限。

6. 发明申请

US20100178187A1 VACUUM PUMP 审中-公开
标题翻译：真空泵
公开(公告)号：US20100178187A1
公开(公告)日：2010-07-15
申请号：US12530601
申请日：2008-02-26
申请人： Emmanuel Uzoma Okoroafor
发明人： Emmanuel Uzoma Okoroafor
IPC分类号： F04C25/02 , F04C18/12 , F04C18/02 , F04C18/16
CPC分类号： F04C25/02 , F04C18/0215 , F04C18/123 , F04C18/126 , F04C18/16 , F04C2220/12 , F05C2201/0433 , F05C2201/0442 , F05C2201/90
摘要： A dry vacuum pump comprises a stator component and at least one rotor component. To improve the tolerance of the pump to corrosive gases passing through the pump, the stator component and/or said at least one rotor component are formed from silicon-molybdenum (SiMo) ductile iron.
摘要翻译：干式真空泵包括定子部件和至少一个转子部件。为了提高泵对通过泵的腐蚀性气体的公差，定子部件和/或所述至少一个转子部件由硅 - 钼（SiMo）球墨铸铁形成。

7. 发明授权

US07713040B2 Rotor shaft sealing method and structure of oil-free rotary compressor 有权
标题翻译：无油旋转压缩机转子轴密封方法及结构
公开(公告)号：US07713040B2
公开(公告)日：2010-05-11
申请号：US12058831
申请日：2008-03-31
申请人： Hideyuki Kimura , Masami Muto
发明人： Hideyuki Kimura , Masami Muto
IPC分类号： F01C19/00 , F03C2/00
CPC分类号： F04C23/001 , F04C18/123 , F04C27/009 , F04C2220/12
摘要： A rotor shaft sealing method for an oil-free rotary compressor is provided, with which occurrence of lubrication oil intrusion into the compression chamber of the compressor which is liable to occur when negative pressure is produced in the compression chamber, is prevented. With a rotor shaft sealing structure composed such that two shaft seal means are provided in the rotor casing between the oil lubricated bearing and the compression chamber such that an annular airspace is formed between the two shaft seal means, at least one communicating hole is provided to communicate the annular airspace to the outside of the rotor casing, and the annular airspace of the male rotor shaft sealing part and the annular airspace of the female rotor shaft sealing part are connected by a between-rotor shaft communication passage, pressurized air is supplied to the annular airspaces by which lubrication oil intrusion into the compression chamber is prevented.
摘要翻译：提供一种无油旋转式压缩机的转子轴密封方法，防止了在压缩室中产生负压时容易发生压缩机压缩室的润滑油的发生。利用转子轴密封结构，使得在油润滑轴承和压缩室之间的转子壳体中设置两个轴密封装置，使得在两个轴密封装置之间形成环形空间，至少一个连通孔被设置成将环形空域连通到转子壳体的外部，阳转子轴密封部分的环形空间和阴转子轴密封部分的环形空间通过转子间轴连通通道连接，加压空气供应到防止润滑油侵入压缩室的环形空间。

8. 发明授权

US07611340B2 Composite dry vacuum pump having roots and screw rotor 有权
标题翻译：具有根和螺杆转子的复合干式真空泵
公开(公告)号：US07611340B2
公开(公告)日：2009-11-03
申请号：US11878665
申请日：2007-07-26
申请人： Tae-Kyong Hwang , Myung Keun Noh , Heaung Shig Oh
发明人： Tae-Kyong Hwang , Myung Keun Noh , Heaung Shig Oh
IPC分类号： F04C18/18 , F04C25/02
CPC分类号： F04C18/16 , F04C18/084 , F04C18/086 , F04C18/126 , F04C23/005 , F04C29/0085 , F04C2220/12 , F04C2220/30 , F04C2280/02 , F05C2253/20
摘要： A complex dry vacuum pump including a root rotor and a screw rotor is disclosed for manufacturing semiconductors and/or displays in a vacuum state in a process chamber, and discharging gaseous material and/or by-products generated during manufacturing to the exterior of the process chamber. The pump can provide high gas compression transfer efficiency so as to form a vacuum in the process chamber and/or keep high gas compression transfer efficiency when the gaseous material and/or by-products are discharged. Balance between the root rotor and the screw rotor can prevent vibration and noise generated in the vacuum pump, and molding material associated with the pump may allow a stator coil to be separated and prevent various by-products from flowing from the vacuum pump.
摘要翻译：公开了一种包括根转子和螺杆转子的复式干式真空泵，用于在处理室中以真空状态制造半导体和/或显示器，并且将在制造过程中产生的气态材料和/或副产物排放到工艺外部房间。泵可以提供高的气体压缩传递效率，以便在气体材料和/或副产物排放时在处理室中形成真空和/或保持高的气体压缩传递效率。根转子和螺杆转子之间的平衡可以防止在真空泵中产生的振动和噪声，并且与泵相关联的模制材料可以允许定子线圈被分离并且防止各种副产物从真空泵流出。

9. 发明授权

US07537440B2 Scroll compressor with multiple isolated inlet ports 有权
标题翻译：带多个隔离入口的涡旋压缩机
公开(公告)号：US07537440B2
公开(公告)日：2009-05-26
申请号：US10567806
申请日：2004-08-10
申请人： David John Goodwin , Alan John Saunders , Philip Lawrence May , Graeme Huntley
发明人： David John Goodwin , Alan John Saunders , Philip Lawrence May , Graeme Huntley
IPC分类号： F03C2/00 , F04C2/00
CPC分类号： F04C23/006 , F04C18/0215 , F04C18/0223 , F04C18/0269 , F04C2220/12 , F04C2250/101
摘要： A scroll compressor having a scroll wall arrangement with a fixed scroll having fixed scroll walls and an orbiting scroll having orbiting scroll wall, an inlet at a radially outer portion and an outlet at a radially central portion, a first flow path defined by the orbiting and fixed scroll walls and extending from the inlet to the outlet, gas entering through inlet at a pressure and exhausting through outlet at a second pressure higher than the first pressure. Scroll wall arrangement having a second inlet through which gas enters at a third pressure and follows a second fluid path where it is exhausted through the outlet at the second pressure to form two flow paths having respective inlets. The third pressure at which gas enters through inlet is different from the first pressure, and lower than the second pressure.
摘要翻译：一种涡旋压缩机，其具有涡旋壁布置，其具有固定涡旋盘，其具有固定的涡旋壁和具有绕动涡旋壁的绕动涡旋盘，在径向外部的入口和在径向中心部分处的出口，由轨道和固定的涡旋壁并且从入口延伸到出口，气体在压力下进入入口并以比第一压力高的第二压力通过出口排出。涡旋壁布置具有第二入口，气体通过该第二入口以第三压力进入并且遵循第二流体路径，在第二入口处，第二入口在第二压力下通过出口排出，形成具有相应入口的两个流动路径。气体通过入口进入的第三压力不同于第一压力，并且低于第二压力。

10. 发明申请

US20080240965A1 ROTOR SHAFT SEALING METHOD AND STRUCTURE OF OIL-FREE ROTARY COMPRESSOR 有权
标题翻译：无油旋转压缩机的转子轴封密封方法和结构
公开(公告)号：US20080240965A1
公开(公告)日：2008-10-02
申请号：US12058831
申请日：2008-03-31
申请人： Hideyuki KIMURA , Masami MUTO
发明人： Hideyuki KIMURA , Masami MUTO
IPC分类号： F04C27/00 , F01D11/04 , F16J15/16
CPC分类号： F04C23/001 , F04C18/123 , F04C27/009 , F04C2220/12
摘要： A rotor shaft sealing method for an oil-free rotary compressor is provided, with which occurrence of lubrication oil intrusion into the compression chamber of the compressor which is liable to occur when negative pressure is produced in the compression chamber, is prevented. With a rotor shaft sealing structure composed such that two shaft seal means (20,31) are provided in the rotor casing (1) between the oil lubricated bearing (10, 10′) and the compression chamber (9) such that an annular airspace (24) is formed between the two shaft seal means (20,31), at least one communicating hole (34,34′) is provided to communicate the annular airspace (24) to the outside of the rotor casing (1), and the annular airspace (24) of the male rotor shaft (6) sealing part and the annular airspace (24) of the female rotor shaft (7) sealing part are connected by a between-rotor shaft communication passage (35), pressurized air is supplied to the annular airspaces (24) by which lubrication oil intrusion into the compression chamber (9) is prevented.
摘要翻译：提供一种无油旋转式压缩机的转子轴密封方法，防止了在压缩室中产生负压时容易发生压缩机压缩室的润滑油的发生。利用转子轴密封结构，使得在油润滑的轴承（10,10'）和压缩室（9）之间的转子壳体（1）中设置两个轴密封装置（20,31），使得环形空间（24）形成在两个轴密封装置（20,31）之间，提供至少一个连通孔（34,34'）以将环形空间（24）连通到转子壳体（1）的外部，以及阳转子轴（6）密封部分的环形空间（24）和阴转子轴（7）密封部分的环形空间（24）通过转子间轴连通通道（35）连接，加压空气供应到环形空间（24），通过该环空间（24）防止润滑油侵入压缩室（9）。

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