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1. 发明申请

US20150198511A1 APPARATUS AND METHOD FOR PRODUCING ANALYSIS SAMPLES 审中-公开
标题翻译：用于生产分析样品的装置和方法
公开(公告)号：US20150198511A1
公开(公告)日：2015-07-16
申请号：US14670791
申请日：2015-03-27
申请人： Fluxana GmbH & Co. KG
发明人： RAINER SCHRAMM
IPC分类号： G01N1/44 , G01N23/22 , G01N1/38
CPC分类号： G01N1/44 , F27B14/02 , F27B14/08 , F27B17/02 , F27D2005/0075 , G01N1/38 , G01N23/2202 , G01N23/2204
摘要： Apparatus for producing analysis samples for X-ray fluorescence spectroscopy that includes a crucible holder that supports a crucible with sample material and a casting dish that is provided underneath the crucible. The crucible is tiltably mounted in the crucible holder and the crucible holder along with crucible holder and the casting dish is handled as a single unit for loading and unloading the oven. The oven has a floor on which the crucible holder is positioned upright, and the portion of the floor receiving the crucible holder is designed as a turntable which imparts oscillating rotational motion to the crucible holder and crucible holder. The method entails placing the crucible with the sample material in the crucible holder while they are outside the oven and then placing entire crucible unit loosely in the oven.
摘要翻译：用于生产用于X射线荧光光谱分析样品的装置，其包括支撑具有样品材料的坩埚的坩埚保持器和设置在坩埚下方的铸造皿。坩埚可倾斜地安装在坩埚保持器中，并且坩埚保持器与坩埚保持器一起被安装，并且铸造盘作为用于装载和卸载烤箱的单个单元来处理。烤箱具有一个地板，坩埚托架直立放置在其上，接收坩埚托架的地板部分被设计成将摆动的旋转运动提供给坩埚托架和坩埚托架的转盘。该方法需要将具有样品材料的坩埚放置在坩埚保持器中，同时它们在炉外，然后将整个坩埚单元松散地放置在烘箱中。

2. 发明申请

US20150060664A1 CROSS-SECTION PROCESSING-AND-OBSERVATION METHOD AND CROSS-SECTION PROCESSING-AND-OBSERVATION APPARATUS 有权
标题翻译：交叉分段处理与观察方法和交叉分段处理与观察装置
公开(公告)号：US20150060664A1
公开(公告)日：2015-03-05
申请号：US14475046
申请日：2014-09-02
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Xin MAN , Tatsuya ASAHATA , Atsushi UEMOTO
IPC分类号： G01N23/22 , G01N23/225 , G01N1/32 , G01N23/203
CPC分类号： H01J37/222 , G01N1/32 , G01N23/20091 , G01N23/2202 , G01N23/2251 , G01N2223/418 , H01J37/28 , H01J37/292 , H01J37/3053 , H01J37/3056 , H01J2237/2811 , H01J2237/31749
摘要： A cross-section processing-and-observation method includes: a cross-section exposure step of irradiating a sample with a focused ion beam to expose a cross-section of the sample; a cross-sectional image acquisition step of irradiating the cross-section with an electron beam to acquire a cross-sectional image of the cross-section; and a step of repeatedly performing the cross-section exposure step and the cross-sectional image acquisition step along a predetermined direction of the sample at a setting interval to acquire a plurality of cross-sectional images of the sample. In the cross-sectional image acquisition step, a cross-sectional image is acquired under different condition settings for a plurality of regions of the cross-section.
摘要翻译：横截面加工和观察方法包括：横截面曝光步骤，用聚焦离子束照射样品以暴露样品的横截面; 横截面图像获取步骤，用电子束照射横截面以获得横截面的横截面图像; 以及以设定间隔沿着样品的规定方向重复进行横截面曝光工序和横截面图像获取工序的步骤，取得样品的多个横截面图像。在横截面图像获取步骤中，在横截面的多个区域的不同条件设置下获取横截面图像。

3. 发明授权

US08853629B2 Cross-section processing and observation method and cross-section processing and observation apparatus 有权
标题翻译：截面加工观察方法及横截面加工观察装置
公开(公告)号：US08853629B2
公开(公告)日：2014-10-07
申请号：US13845608
申请日：2013-03-18
申请人： Hitachi High-Tech Science Corporation
发明人： Xin Man
IPC分类号： H01J37/22 , H01J37/305 , G01N23/22 , G01N1/32
CPC分类号： H01J37/3053 , G01N1/32 , G01N23/2202 , H01J2237/226 , H01J2237/31745
摘要： A cross-section processing and observation method including: acquiring a surface image by scanning and irradiating a surface of a sample with ion beam; setting, on the surface image, a first sliced region and a second sliced region for performing the slice processing, the second sliced region being adjacent to the first sliced region and having a longitudinal length obtained by subtracting a slice width of the second sliced region from a longitudinal length of the first sliced region; forming a cross-section by irradiating the first sliced region and the second sliced region with the ion beam; and acquiring a cross-sectional image by irradiating the cross-section with electron beam.
摘要翻译：一种横截面处理和观察方法，包括：通过用离子束扫描和照射样品的表面来获取表面图像; 在所述表面图像上设置用于执行所述切片处理的第一切片区域和第二切片区域，所述第二切片区域与所述第一切片区域相邻，并且具有通过从所述第二切片区域从所述第二切片区域的切片宽度所述第一切片区域的纵向长度; 通过用离子束照射第一切片区域和第二切片区域来形成横截面; 以及通过用电子束照射横截面来获取横截面图像。

4. 发明申请

US20130221217A1 METHOD FOR SCANNING ELECTRON MICROSCOPE OBSERVATION OF SAMPLE FLOATING ON LIQUID SURFACE 有权
标题翻译：扫描电子显微镜观察液体表面样品浮选的方法
公开(公告)号：US20130221217A1
公开(公告)日：2013-08-29
申请号：US13877710
申请日：2011-09-16
申请人： Masamichi Shiono , Masako Nishimura , Mami Konomi , Susumu Kuwabata
发明人： Masamichi Shiono , Masako Nishimura , Mami Konomi , Susumu Kuwabata
IPC分类号： G01N23/22
CPC分类号： G01N23/2202 , G01N1/2813 , G01N23/2251 , H01J37/20 , H01J37/28 , H01J2237/2002 , H01J2237/2605
摘要： A micro sample floating on the surface of an ionic liquid is observed by scanning electron microscopy without the sample being covered with the ionic liquid. A floating or hydrophobic sample is floated on the surface of a hydrophilic ionic liquid aqueous solution to prevent the micro sample from being covered with the ionic liquid. A hydrophobic ionic liquid is used for hydrophilic samples. With the use of an ionic liquid aqueous solution of low viscosity and large flowability, the micro sample is allowed to freely aggregate, disperse, and align on the surface of the ionic liquid, and to refloat even when settled in the ionic liquid. For easy observation with a scanning electron microscope, the ionic liquid aqueous solution is dried to lower the flowability of the ionic liquid aqueous solution, after the form of the micro sample has stabilized and before electron microscope observation.
摘要翻译：通过扫描电子显微镜观察漂浮在离子液体表面上的微量样品，而样品不被离子液体覆盖。漂浮或疏水的样品漂浮在亲水离子液体水溶液的表面上，以防止微量样品被离子液体覆盖。疏水性离子液体用于亲水样品。通过使用低粘度和大流动性的离子液体水溶液，允许微量样品在离子液体的表面上自由聚集，分散和排列，并且即使在沉降在离子液体中时也进行再混合。为了容易地用扫描电子显微镜观察，离子液体水溶液被干燥以降低离子液体水溶液的流动性，在微量样品的形式稳定之后并且在电子显微镜观察之前。

5. 发明授权

US07939906B2 Preparation method for an electron tomography sample with embedded markers and a method for reconstructing a three-dimensional image 有权
标题翻译：具有嵌入式标记的电子层析成像样品的制备方法和重建三维图像的方法
公开(公告)号：US07939906B2
公开(公告)日：2011-05-10
申请号：US12471734
申请日：2009-05-26
申请人： Jian-Shing Luo , Chia-Chi Huang
发明人： Jian-Shing Luo , Chia-Chi Huang
IPC分类号： G01N23/04 , H01L23/58 , H01J37/26
CPC分类号： G01N1/28 , G01N23/2202 , H01J2237/31745
摘要： A manufacturing method for an electron tomography specimen with embedded fiducial markers includes the following steps. A chip of wafer is provided. The chip includes at least one inspecting area. At least one trench is produced beside the inspecting area. A liquid with the markers is filled into the trenches. A first protection layer is coated on the chip, and then a second protection layer is deposited on the first protection layer. Therefore, the markers can be embedded into the electron tomography specimen. The embedded markers can improve the alignment process, due to those embedded markers are easily tracked during feature tracking procedure. In addition, our novel invention also successfully provides a modified version of the technique to deposit gold beads onto TEM pillar samples for much improved 3D reconstruction.
摘要翻译：具有嵌入基准标记的电子断层摄影试样的制造方法包括以下步骤。提供晶片芯片。该芯片至少包括一个检查区域。在检查区域旁边至少生产一个沟槽。将具有标记的液体填充到沟槽中。第一保护层涂覆在芯片上，然后第二保护层沉积在第一保护层上。因此，标记物可以嵌入电子断层摄影标本中。嵌入式标记可以改善对齐过程，因为在特征跟踪过程中可以轻松跟踪嵌入的标记。此外，我们的新颖发明还成功地提供了一种技术的修改版本，以将金珠沉积到TEM柱样品上，用于大大改进的3D重建。

6. 发明申请

US20110091012A1 METHOD FOR THE SAMPLE PREPARATION OF LIQUID OR PASTE-LIKE SUBSTANCES FOR MEASUREMENTS WITH X-RAY FLUORESCENCE AND SAMPLE BODIES SUITED THEREFOR 失效
标题翻译：用于测量与其X射线荧光和样品体的液体或类似物质样品的样品的方法
公开(公告)号：US20110091012A1
公开(公告)日：2011-04-21
申请号：US12599687
申请日：2008-05-21
申请人： Fredy Ruettimann
发明人： Fredy Ruettimann
IPC分类号： G01N23/223
CPC分类号： G01N23/2202 , G01N1/2813 , G01N2001/2826 , G01N2223/076
摘要： The invention relates to a process for preparing liquid or pasty substances (3) not consisting exclusively of volatile constituents for X-ray fluorescence analysis, and to a sample body (1) for use in such a process.It is an object of the invention to provide a process which overcomes the disadvantages of the prior art (technically complex, limited applicability with regard to the sample substances usable, inadequate analysis quality).The process has the following steps: 1) The substance (3) to be analyzed is applied to a rigid sample body (1) with at least one flat and smooth analysis surface (2) which consists of absorptive material. 2) The substance (3) is adsorbed and absorbed by this sample body (1). The sample body (1) with at least one flat and smooth analysis surface (2) for the analysis of liquid or pasty substances (3) by X-ray fluorescence analysis consists of absorptive, rigid material.
摘要翻译：本发明涉及一种制备不仅由X射线荧光分析的挥发性成分组成的液体或糊状物质（3）的方法，以及用于这种方法的样品体（1）。本发明的一个目的是提供克服现有技术的缺点（技术上复杂，可用的样品物质的有限适用性，分析质量不足）的方法。该方法具有以下步骤：1）将要分析的物质（3）应用于具有由吸收材料组成的至少一个平坦且光滑的分析表面（2）的刚性样品体（1）。 2）物质（3）被该样品体（1）吸附吸收。具有用于通过X射线荧光分析分析液体或糊状物质（3）的至少一个平坦且平滑的分析表面（2）的样品体（1）由吸收性刚性材料组成。

7. 发明申请

US20100155596A1 METHOD AND SYSTEM FOR HEATING SUBSTRATE IN VACUUM ENVIRONMENT AND METHOD AND SYSTEM FOR IDENTIFYING DEFECTS ON SUBSTRATE 有权
标题翻译：用于加热真空环境中的基板的方法和系统以及用于识别基板上的缺陷的方法和系统
公开(公告)号：US20100155596A1
公开(公告)日：2010-06-24
申请号：US12339558
申请日：2008-12-19
申请人： HONG XIAO , YI-XIANG WANG
发明人： HONG XIAO , YI-XIANG WANG
IPC分类号： G01N23/00 , A21B1/00
CPC分类号： H05B3/0047 , G01N23/2202
摘要： A method for heating a substrate in a vacuum environment and a system therefor is provided. The system includes a chamber capable of holding the substrate located in the vacuum environment and a light source capable of projecting a light beam only on a portion of the substrate. The method includes the following steps. First, the substrate is placed in the vacuumed chamber. Thereafter, the light beam emitted from the light source is projected on the portion of the substrate, such that the portion is significantly heated before whole the substrate is heated. When the light beam is a charged particle beam projected by a charged particle beam assembly and projected on defects located on the substrate, the defects are capable of being identified by an examination result provided by an examination assembly after termination of light beam projection.
摘要翻译：提供一种在真空环境中加热基板的方法及其系统。该系统包括能够保持位于真空环境中的衬底的腔室和能够仅将光束投射到衬底的一部分上的光源。该方法包括以下步骤。首先，将基板放置在真空室中。此后，从光源发射的光束被投射在基板的部分上，使得该部分在整个基板被加热之前被显着地加热。当光束是由带电粒子束组件投射并投影在基板上的缺陷上的带电粒子束时，能够通过在光束投影终止之后由检查组件提供的检查结果来识别缺陷。

8. 发明申请

US20090296073A1 Method to create three-dimensional images of semiconductor structures using a focused ion beam device and a scanning electron microscope 审中-公开
标题翻译：使用聚焦离子束装置和扫描电子显微镜制造半导体结构的三维图像的方法
公开(公告)号：US20090296073A1
公开(公告)日：2009-12-03
申请号：US12128420
申请日：2008-05-28
申请人： Eric Wagganer
发明人： Eric Wagganer
IPC分类号： G01N21/00
CPC分类号： G01N23/2202 , H01J37/28 , H01J37/3056 , H01J2237/2813 , H01J2237/3174 , H01J2237/31745 , H01J2237/31749
摘要： A disclosed method produces an image of one or more fabricated features by iteratively producing a cross-section of the features. The method includes milling a surface proximate to the one or more fabricated features where the surface being milled is substantially parallel to a layer in which the feature is located. At each milling step, top-down imaging of the one or more fabricated features produces a plurality of cross-sectional images. Each of the plurality of cross-sectional images is reconstructed into a representation of the fabricated feature.
摘要翻译：所公开的方法通过迭代地产生特征的横截面来产生一个或多个制造特征的图像。该方法包括铣削靠近一个或多个制造特征的表面，其中被研磨的表面基本上平行于特征所在的层。在每个研磨步骤中，一个或多个制造特征的自顶向下成像产生多个横截面图像。多个横截面图像中的每一个被重建成所制造的特征的表示。

9. 发明申请

US20090250609A1 Inspection Method and Reagent Solution 有权
标题翻译：检验方法和试剂溶液
公开(公告)号：US20090250609A1
公开(公告)日：2009-10-08
申请号：US12335143
申请日：2008-12-15
申请人： Hidetoshi Nishiyama , Mitsuo Suga , Mitsuru Koizumi
发明人： Hidetoshi Nishiyama , Mitsuo Suga , Mitsuru Koizumi
IPC分类号： G01N23/00 , C12N5/00
CPC分类号： G01N23/2202 , H01J37/228 , H01J2237/2004 , H01J2237/208 , H01J2237/2608 , H01J2237/2808
摘要： An electron microscope method for inspecting a liquid specimen and a reagent solution therefor. A culture medium and biological cells are put in the sample holder. A plugging agent is mixed into the liquid sample. The cells can be irradiated with a primary beam via a film. An image of the cells or information about the cells is obtained by detecting a resulting secondary signal. If the film is destroyed, the plugging agent plugs up the damaged portion of the film. Consequently, liquid leakage can be minimized.
摘要翻译：用于检查液体试样的电子显微镜方法及其试剂溶液。将培养基和生物细胞放入样品架中。将堵塞剂混合到液体样品中。细胞可以通过膜用初级束照射。通过检测所得到的辅助信号来获得单元的图像或关于单元的信息。如果胶片被破坏，则堵塞剂堵塞胶片的损坏部分。因此，可以使液体泄漏最小化。

10. 发明申请

US20090046832A1 Well Plate 有权
标题翻译：井板
公开(公告)号：US20090046832A1
公开(公告)日：2009-02-19
申请号：US12192762
申请日：2008-08-15
申请人： Eva R. Birnbaum , Benjamin P. Warner , Sharon M. Baldwin , Jennifer A. Berger , Rebecca L.E. Miller
发明人： Eva R. Birnbaum , Benjamin P. Warner , Sharon M. Baldwin , Jennifer A. Berger , Rebecca L.E. Miller
IPC分类号： G01N23/223
CPC分类号： G01N23/2202 , G01N23/2204 , G01N23/223 , G01N2223/074 , G01N2223/076 , G01N2223/309 , G01N2223/64 , G03B42/02
摘要： The present invention includes an apparatus for preparing samples for measurement by x-ray fluorescence spectrometry. The apparatus comprises a plate having one or more holes passing through the plate. The holes are covered by a film on one side of the plate. The holes are less than 500 micrometers across in one dimension where the film covers the holes. The film is translucent to x-rays. The present invention also includes an apparatus for preparing samples for measurement by x-ray fluorescence spectrometry. The apparatus comprises a plate having one or more holes passing through the plate. The holes are covered on one side of the plate by a detachable cover forming a water-tight seal against the plate. The cover is substantially free of the elements osmium, yttrium, iridium, phosphorus, zirconium, platinum, gold, niobium, mercury, thallium, molybdenum, sulfur, lead, bismuth, technetium, ruthenium, chlorine, rhodium, palladium, argon, silver, and thorium. The holes are less than about 500 micrometers across in one dimension where the cover covers the holes. The present invention also includes a method for preparing samples for measurement by x-ray fluorescence spectrometry. The method comprises providing a solution of with less than 10 micromolar solute and a volume of between about 2 microliters and about 2 milliliters. The solution is concentrated and analyzed using x-ray fluorescence spectrometry.
摘要翻译：本发明包括通过X射线荧光光谱法制备用于测量的样品的装置。该装置包括具有穿过板的一个或多个孔的板。孔被板的一侧的薄膜覆盖。在膜覆盖孔的一个维度上，孔小于500微米。这部电影对于x射线是半透明的。本发明还包括通过X射线荧光光谱法制备用于测量的样品的装置。该装置包括具有穿过板的一个或多个孔的板。孔通过可拆卸的盖子覆盖在板的一侧上，该盖子形成对板的防水密封。该盖基本上不含锇，钇，铱，磷，锆，铂，金，铌，汞，铊，钼，硫，铅，铋，锝，钌，氯，铑，钯，氩，和钍。这些孔在一个尺寸上小于约500微米，其中盖覆盖孔。本发明还包括通过X射线荧光光谱法制备用于测量的样品的方法。该方法包括提供小于10微摩尔溶质的溶液和约2微升至约2毫升的体积。使用x射线荧光光谱法浓缩溶液并进行分析。

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