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    • 7. 发明授权
    • High capacity monitor crystal exchanger utilizing an organized 3-D storage structure
    • 高容量监测晶体交换器采用有组织的三维存储结构
    • US09182378B2
    • 2015-11-10
    • US13841014
    • 2013-03-15
    • Inficon, Inc.
    • Carl A. Gogol, Jr.
    • G01N29/04B05C11/00G01N29/12G01N29/24
    • G01N29/12G01N29/2443G01N2291/106
    • An apparatus for monitoring and detecting material deposited onto a substrate during a deposition process in a processing chamber includes a storage structure having a primary axis extending between respective first and second ends and an exterior lateral surface between the first and second ends extending about the primary axis. A plurality of monitor crystals are supported by the storage structure at spaced positions along said exterior lateral surface and in which a drive mechanism advances the storage structure rotatably and axially relative to the primary axis such that at least one monitor crystal is advanced or retracted relative to at least one measuring position. A retained crystal that is advanced to the measuring position can be electrically connected, using a brush contact or other mechanism, in order to excite the crystal using a resonance circuit.
    • 一种用于在处理室中的沉积工艺期间监测和检测沉积在基板上的材料的装置包括:存储结构,其具有在相应的第一和第二端之间延伸的主轴,以及在第一和第二端之间的外侧面, 。 多个监视器晶体由所述存储结构在沿所述外侧表面的间隔位置处支撑,并且驱动机构相对于所述主轴线可旋转地和轴向地移动所述存储结构,使得至少一个监视器晶体相对于 至少一个测量位置。 前进到测量位置的保留晶体可以使用电刷接触或其他机构电连接,以便使用谐振电路激发晶体。