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1. 发明授权

US09602026B2 Temperature compensation for MEMS devices 有权
公开(公告)号：US09602026B2
公开(公告)日：2017-03-21
申请号：US14029927
申请日：2013-09-18
申请人： Silicon Laboratories Inc.
发明人： Emmanuel P. Quevy , Daniel N. Koury, Jr.
IPC分类号： H02N1/00 , H03B5/30 , H03L1/02 , H03H3/013 , H03H9/02 , B81B3/00 , H03L1/04 , H03H7/00 , H03H9/24
CPC分类号： H02N1/00 , B81B3/0081 , H03B5/30 , H03H3/013 , H03H9/02259 , H03H2007/006 , H03H2009/02291 , H03H2009/02385 , H03H2009/0248 , H03H2009/2442 , H03L1/02 , H03L1/04 , Y10T29/49005 , Y10T29/49117
摘要： A microelectromechanical system (MEMS) device includes a temperature compensating structure including a first beam suspended from a substrate and a second beam suspended from the substrate. The first beam is formed from a first material having a first Young's modulus temperature coefficient. The second beam is formed from a second material having a second Young's modulus temperature coefficient. The body may include a routing spring suspended from the substrate. The routing spring may be coupled to the first beam and the second beam. The routing spring may be formed from the second material. The first beam and the second beam may have lower spring compliance than the routing spring. The MEMS device may be a resonator and the temperature compensating structure may have dimensions and a location such that the temperature compensation structure modifies a temperature coefficient of frequency of the resonator independent of a mode shape of the resonator.

2. 发明申请

US20140361661A1 TEMPERATURE COMPENSATION FOR MEMS DEVICES 有权
标题翻译： MEMS器件温度补偿
公开(公告)号：US20140361661A1
公开(公告)日：2014-12-11
申请号：US14029927
申请日：2013-09-18
申请人： Silicon Laboratories Inc.
发明人： Emmanuel P. Quevy , Daniel N. Koury, JR.
IPC分类号： H02N1/00
CPC分类号： H02N1/00 , B81B3/0081 , H03B5/30 , H03H3/013 , H03H9/02259 , H03H2007/006 , H03H2009/02291 , H03H2009/02385 , H03H2009/0248 , H03H2009/2442 , H03L1/02 , H03L1/04 , Y10T29/49005 , Y10T29/49117
摘要： A microelectromechanical system (MEMS) device includes a temperature compensating structure including a first beam suspended from a substrate and a second beam suspended from the substrate. The first beam is formed from a first material having a first Young's modulus temperature coefficient. The second beam is formed from a second material having a second Young's modulus temperature coefficient. The body may include a routing spring suspended from the substrate. The routing spring may be coupled to the first beam and the second beam. The routing spring may be formed from the second material. The first beam and the second beam may have lower spring compliance than the routing spring. The MEMS device may be a resonator and the temperature compensating structure may have dimensions and a location such that the temperature compensation structure modifies a temperature coefficient of frequency of the resonator independent of a mode shape of the resonator.
摘要翻译：微机电系统（MEMS）装置包括温度补偿结构，其包括从衬底悬挂的第一光束和从衬底悬挂的第二光束。第一梁由具有第一杨氏模量温度系数的第一材料形成。第二梁由具有第二杨氏模量温度系数的第二材料形成。主体可以包括从基板悬挂的布线弹簧。路由弹簧可以耦合到第一波束和第二波束。路由弹簧可以由第二材料形成。第一光束和第二光束可能具有比布线弹簧更低的弹性柔顺度。 MEMS器件可以是谐振器，并且温度补偿结构可以具有尺寸和位置，使得温度补偿结构独立于谐振器的模式形状来修改谐振器的频率的温度系数。

3. 发明申请

US20040150057A1 Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby 有权
标题翻译：用于制造具有至少一个横向的小间隙的微机械结构的方法和由此产生的微机械装置
公开(公告)号：US20040150057A1
公开(公告)日：2004-08-05
申请号：US10625992
申请日：2003-07-24
申请人： The Regents of The University Of Michigan
发明人： Wan-Thai Hsu , John R. Clark , Clark T.C. Nguyen
IPC分类号： H01L021/00
CPC分类号： B81C1/0019 , B81B2201/0235 , B81B2201/0242 , B81B2201/0271 , B81B2203/0307 , B81C1/00626 , B81C2201/0109 , H03H3/007 , H03H3/0072 , H03H3/013 , H03H9/02362 , H03H9/2436 , H03H9/46 , H03H9/462 , H03H9/505 , H03H2009/02496
摘要： A method and resulting formed device are disclosed wherein the method combines polysilicon surface-micromachining with metal electroplating technology to achieve a capacitively-driven, lateral micromechanical resonator with submicron electrode-to-resonator capacitor gaps. Briefly, surface-micromachining is used to achieve the structural material for a resonator, while conformal metal-plating is used to implement capacitive transducer electrodes. This technology makes possible a variety of new resonator configurations, including disk resonators and lateral clamped-clamped and free-free flexural resonators, all with significant frequency and Q advantages over vertical resonators. In addition, this technology introduces metal electrodes, which greatly reduces the series resistance in electrode interconnects, thus, minimizing Q-loading effects while increasing the power handling ability of micromechanical resonators.
摘要翻译：公开了一种方法和产生的形成的器件，其中该方法将多晶硅表面微机械加工与金属电镀技术相结合，以实现具有亚微米电极到谐振器的电容器间隙的电容驱动的横向微机械谐振器。简而言之，使用表面微加工来实现谐振器的结构材料，而使用保形金属镀来实现电容式换能器电极。该技术使得各种新的谐振器配置成为可能，包括磁盘谐振器和横向夹紧和自由弯曲谐振器，与垂直谐振器相比具有显着的频率和Q优点。此外，该技术引入了金属电极，这大大降低了电极互连中的串联电阻，从而在增加微机械谐振器的功率处理能力的同时最大限度地减小了Q负载效应。

4. 发明申请

US20020158716A1 METHOD OF TUNING BAW RESONATORS 有权
标题翻译：调谐BAW谐振器的方法
公开(公告)号：US20020158716A1
公开(公告)日：2002-10-31
申请号：US09845089
申请日：2001-04-27
申请人： Nokia Mobile Phones Ltd.
发明人： Tuomas Pensala
IPC分类号： H01L041/08
CPC分类号： H03H3/013
摘要： A method of tuning a bulk acoustic wave device having a piezoelectric layer formed between a top electrode and a bottom electrode, wherein the top electrode has a frame-like structure at an edge portion for reducing spurious resonance in the electrical response of the device. The frame-like structure surrounds a center zone of the top electrode. In order to down-shift the resonance frequency of the device, a tuning layer is provided on the top electrode. In particular, the tuning layer is designed such that it covers at least the entire center zone in order to reduce the spurious resonance introduced by the tuning layer itself. Preferably, the tuning layer covers the center zone as well as the frame-like structure to further reduce the spurious resonance.
摘要翻译：一种调谐具有形成在顶部电极和底部电极之间的压电层的体声波器件的方法，其中顶部电极在边缘部分具有框架结构，用于减少器件的电响应中的寄生谐振。框架状结构围绕顶部电极的中心区域。为了降低器件的谐振频率，在顶部电极上设置调谐层。特别地，调谐层被设计成使得其至少覆盖整个中心区域，以便减少由调谐层本身引入的寄生谐振。优选地，调谐层覆盖中心区域和框架状结构，以进一步减少杂散共振。

5. 发明申请

US20020069701A1 Micromechanical resonator device 有权
标题翻译：微机械谐振器装置
公开(公告)号：US20020069701A1
公开(公告)日：2002-06-13
申请号：US09938412
申请日：2001-08-23
发明人： Wan-Thai Hsu , Clark T.-C. Nguyen
IPC分类号： H03H009/24 , G01P015/125
CPC分类号： H03H9/505 , H03H3/0072 , H03H3/013 , H03H9/02362 , H03H9/02448 , H03H9/2436 , H03H9/462 , H03H2009/02496
摘要： A micromechanical resonator device is disclosed that utilizes competition between the thermal dependencies of geometrically tailored stresses and Young's modulus to (1) reduce the temperature coefficient (TCf) of the resonance frequencies of the micromechanical resonator device without any additional power consumption; and (2) introduce a zero TCf temperature at which subsequent oven-controlled resonators may be biased. A key feature in this resonator design involves the strategic sizing of the geometries of the resonator and its support structure to harness thermal expansion temperature coefficients that oppose and cancel those of Young's modulus variation. This transforms the original monotonically decreasing resonance frequency versus temperature curve to an S-shaped curve (or a linear one with a much smaller slope), with a smaller overall frequency excursion over a given temperature range, and with points at which the resonance frequency TCf is zero. This design strategy is a key to attaining the needed temperature stability for reference oscillator applications in portable wireless communications and for RF channel-select filter banks. In addition, for cases where the thermal response of a resonator need not be nulled, but rather must satisfy a given shape, this technique can also be used to tailor a specific resonance frequency versus temperature curve.
摘要翻译：公开了一种微机械谐振器装置，利用几何量化应力和杨氏模量的热依赖性之间的竞争，（1）降低微机械谐振器装置的谐振频率的温度系数（TCf），而不需要任何额外的功率消耗; 和（2）引入零TCf温度，随后的控温谐振器可能被偏置。该共振器设计中的一个关键特征涉及谐振器及其支撑结构的几何形状的策略尺寸，以利用对抗和消除杨氏模量变化的热膨胀温度系数。这将原始单调降低的共振频率对温度曲线转换为S形曲线（或具有小得多的斜率的线性曲线），在给定温度范围内具有较小的总频率偏移，以及谐振频率TCf 是零。该设计策略是实现便携式无线通信和RF通道选择滤波器组中参考振荡器应用所需的温度稳定性的关键。此外，对于谐振器的热响应不需要为零而是必须满足给定形状的情况，该技术也可用于定制特定谐振频率对温度曲线。

6. 发明授权

US5945899A Permanent magnet twister 失效
标题翻译：永磁扭矩机
公开(公告)号：US5945899A
公开(公告)日：1999-08-31
申请号：US920237
申请日：1997-08-25
申请人： Herbert A. Leupold
发明人： Herbert A. Leupold
IPC分类号： G01R23/10 , H01F7/02 , H01P1/20 , H03H3/013 , H03H7/12 , H03H11/04 , H05H7/04 , H01F7/00
CPC分类号： H01F7/0278 , H03H11/04 , H03H3/013 , H03H7/12 , H05H7/04
摘要： A permanent magnet rectangular bar shaped to form a helix having a centralore and a longitudinal axis. The magnetic orientation of the helical permanent magnet bar is along the longitudinal axis forming a transverse helical magnetic field. An electron beam or charged particle passing near the longitudinal axis experiences acceleration causing the charged particles to radiate creating a high energy radiation source. In another embodiment, first and second permanent magnet helical bars are intertwined together, forming a cylindrical tube, with each of the intertwined helical bars having a magnetic orientation along the longitudinal axis in opposing directions. In another embodiment of the present invention, an iron ribbon or other high permeability magnetic material is interposed between cut-out portions between first and second intertwined helical permanent magnet bars. This effectively augments the transverse magnetic field. A relatively compact permanent magnetic structure that is relatively simple having a desired transverse helical magnetic field is made possible for such applications as free electron lasers or millimeter/microwave radar devices.
摘要翻译：永久磁铁矩形条，形状形成具有中心孔和纵向轴线的螺旋。螺旋形永久磁铁棒的磁性取向沿纵向轴线形成横向螺旋磁场。通过靠近纵向轴线的电子束或带电粒子经受加速，导致带电粒子辐射，产生高能辐射源。在另一个实施例中，第一和第二永磁螺旋杆相互缠绕在一起，形成圆柱形管，其中每个相互缠绕的螺旋杆在沿相反方向的纵向轴线上具有磁性取向。在本发明的另一个实施例中，铁带或其它高磁导率磁性材料介于第一和第二交织的螺旋永久磁铁棒之间的切口部分之间。这有效地增强了横向磁场。对于诸如自由电子激光器或毫米/微波雷达装置的应用，使具有所需横向螺旋磁场的相对简单的相对紧凑的永磁结构成为可能。

7. 发明授权

US4385473A Method for frequency regulation of tuning-fork vibrator 失效
标题翻译：音叉振动器频率调节方法
公开(公告)号：US4385473A
公开(公告)日：1983-05-31
申请号：US237163
申请日：1981-02-12
申请人： Shigeo Aoki , Shuzo Isogami , Junichi Tamamura , Tatsuo Nagayoshi , Masaru Yasui , Susumu Hirao
发明人： Shigeo Aoki , Shuzo Isogami , Junichi Tamamura , Tatsuo Nagayoshi , Masaru Yasui , Susumu Hirao
IPC分类号： H03H3/013 , H03H3/04 , B24B1/00
CPC分类号： H03H3/013 , H03H3/04 , Y10T29/42
摘要： For regulating the vibration frequency of a tuning-fork vibrator to a desired frequency, the tuning-fork vibrator is regulated so that its vibration frequency may become a frequency lower than the desired frequency by a predetermined value, and then the tuning-fork vibrator is regulated so that a difference between proper vibration frequencies of both legs of the vibrator may become smaller than a predetermined value, and further, the vibrator is regulated so that the desired frequency may be reached, while maintaining the difference in the proper vibration frequency smaller than the predetermined value. In this way, the desired frequency can rapidly be attained.
摘要翻译： PCT No.PCT / JP80 / 00136 Sec。 371日期1981年2月12日 102（e）日期1981年2月12日PCT归档1980年6月18日PCT公布。出版物WO80 / 02896 1980年12月24日，为了将音叉振动器的振动频率调节到期望的频率，音叉振动器被调整为使其振动频率可能变得低于期望频率的频率达预定值，并且音叉式振动器被调整为使得振动器的两个腿的适当的振动频率之间的差异可能变得小于预定值，并且进一步调节振动器以使得可以达到期望的频率，同时保持该差异在适当的振动频率小于预定值。以这种方式，可以快速获得期望的频率。

8. 发明授权

US3833999A Method of adjusting frequency of vibrator structure 失效
标题翻译：调节振动频率结构的方法
公开(公告)号：US3833999A
公开(公告)日：1974-09-10
申请号：US36332473
申请日：1973-05-24
申请人： BUNKER RAMO
发明人： BUDYCH I , LA VERNE FREY , REEFMAN W
IPC分类号： B23K26/00 , G04C3/10 , G04C3/12 , G04D3/00 , G04F5/06 , H03H3/013 , B23Q17/00
CPC分类号： H03H3/013 , B23K26/351 , G04C3/107 , G04D3/0069 , G04F5/06 , Y10T29/42 , Y10T29/49009 , Y10T29/49774
摘要： A method and apparatus for tuning and adjusting the frequency of a vibrator structure such as a tuning fork of the type formed from a single strip of low molecular loss material. Tuning is effected by bending one or more of the tines of the fork or preferably by bending an ear formed for this purpose on a tine. In the alternative, the frequency may be controlled by selectively removing material from an ear. In order to maintain the balance of the structure it is desirable that tuning be performed on both tines of a fork. A preferred method for performing the tuning involves forming the structure in a manner such that its frequency is always lower than required. This frequency is then measured and half the difference in frequency is corrected by bending ears formed on an outer tine. Material is then removed from an inner tine by, for example, burning the material off with a laser, to raise the frequency to the desired value.
摘要翻译：一种用于调谐和调节振动器结构的频率的方法和装置，例如由单条低分子损失材料条形成的类型的音叉。通过弯曲叉子的一个或多个尖齿或优选地通过将形成的用于该目的的耳弯曲在齿上来实现调节。在替代方案中，频率可以通过从耳朵中选择性地去除材料来控制。

9. 发明授权

US3759133A Vibrator structure and method and apparatus for adjusting the frequency thereof 失效
标题翻译：振动器结构及其调整方法及装置
公开(公告)号：US3759133A
公开(公告)日：1973-09-18
申请号：US3759133D
申请日：1972-01-24
申请人： BUNKER RAMO
发明人： REEFMAN W , BUDYCH I , FREY LA VERNE
IPC分类号： B23K26/00 , G04C3/10 , G04C3/12 , G04D3/00 , G04F5/06 , H03H3/013 , G04C3/00
CPC分类号： H03H3/013 , B23K26/351 , G04C3/107 , G04D3/0069 , G04F5/06 , Y10T29/42 , Y10T29/49009 , Y10T29/49774
摘要： A method and apparatus for tuning and adjusting the frequency of a vibrator structure such as a tuning fork of the type formed from a single thin strip of low molecular loss material. Tuning is effected by bending one or more of the tines of the fork or preferably by bending an ear formed for this purpose on a tine. In the alternative, the frequency may be controlled by selectively removing material from an ear. In order to maintain the balance of the structure it is desirable that tuning be performed on both tines of a fork. A preferred method for performing the tuning involves forming the structure in a manner such that its frequency is always lower than required. This frequency is then measured and half the difference in frequency is corrected by bending ears formed on an outer tine. Material is then removed from an inner tine by, for example, burning the material off with a laser, to raise the frequency to the desired value.
摘要翻译：用于调谐和调节振动器结构的频率的方法和装置，例如由低分子量损失材料的单条薄带形成的类型的音叉。通过弯曲叉子的一个或多个尖齿或优选地通过将形成的用于该目的的耳弯曲在齿上来实现调节。在替代方案中，频率可以通过从耳朵中选择性地去除材料来控制。

10. 发明授权

US3445791A Reed type audio filter 失效
标题翻译： REED型音频滤波器
公开(公告)号：US3445791A
公开(公告)日：1969-05-20
申请号：US3445791D
申请日：1965-06-14
申请人： THOMAS W HOLDEN
发明人： HOLDEN THOMAS W
IPC分类号： H03H3/013 , H03H9/48 , H03H9/00
CPC分类号： H03H3/013 , H03H9/48

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