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1. 发明申请

US20180067083A1 DIELECTRIC BARRIER DISCHARGE IONIZATION DETECTOR 审中-公开
公开(公告)号：US20180067083A1
公开(公告)日：2018-03-08
申请号：US15698351
申请日：2017-09-07
申请人： Shimadzu Corporation
发明人： Kei SHINADA
IPC分类号： G01N27/70 , G01N30/64 , G01N27/60 , G01N33/00 , H05H1/00
CPC分类号： G01N27/70 , G01N27/60 , G01N30/64 , G01N33/0027 , G01N2030/025 , G01R19/0061 , H05H1/0006 , H05H1/0081 , H05H1/2406 , H05H2001/2443
摘要： A dielectric barrier discharge ionization detector (BID) capable of achieving a high level of signal-to-noise ratio in a stable manner is provided. In a BID having a high-voltage electrode, upstream-side ground electrode and downstream-side ground electrode circumferentially formed on the outer circumferential surface of a cylindrical dielectric tube, a heater for heating the cylindrical dielectric tube or tube-line tip member attached to the upper end of the same tube is provided. Increasing the temperature of the cylindrical dielectric tube by this heater improves the stability of the electric discharge, whereby the amount of noise is reduced and a high level of signal-to-noise is achieved.

2. 发明申请

US20180067080A1 DIELECTRIC BARRIER DISCHARGE IONIZATION DETECTOR 审中-公开
公开(公告)号：US20180067080A1
公开(公告)日：2018-03-08
申请号：US15698368
申请日：2017-09-07
申请人： Shimadzu Corporation
发明人： Kei SHINADA
IPC分类号： G01N27/68 , G01N27/70 , G01N30/64 , G01N27/60 , G01N33/00
CPC分类号： G01N27/68 , G01N27/60 , G01N27/70 , G01N30/64 , G01N33/0027 , G01N2030/025 , G01N2030/647 , G01R19/0061
摘要： A dielectric barrier discharge ionization detector Includes: a dielectric tube; a high-voltage electrode connected to an AC power source and circumferentially formed on the outer wall of the dielectric tube; upstream-side and downstream-side ground electrodes and circumferentially formed above and below the high-voltage electrode; a discharging section for generating electric discharge to create plasma, from a gas containing argon; and a charge-collecting section for ionizing sample-gas components by the plasma and detecting an ion current formed by the ionized components. The detector also satisfies one or both of the following conditions: the upstream-side ground electrode is longer than a creeping discharge initiation distance between a tube-line tip member at the upper end of the dielectric tube and the high-voltage electrode; or the downstream-side ground electrode is longer than a creeping discharge initiation distance between the high-voltage electrode and the charge-collecting section.

3. 发明授权

US09810728B2 Voltage measuring device 有权
公开(公告)号：US09810728B2
公开(公告)日：2017-11-07
申请号：US14894038
申请日：2014-05-28
申请人： KAPTEOS , ELECTRICITE DE FRANCE
发明人： Lionel Duvillaret , Gwenaël Gaborit , Frédéric Lecoche , Gilbert Schmitt , Anne Grau
IPC分类号： G01R29/12 , G01R19/00 , G01R15/16
CPC分类号： G01R29/12 , G01R15/16 , G01R15/165 , G01R19/0061 , G01R19/0084 , G01R19/0092
摘要： Methods and apparatus for measuring the voltage of at least one conductor (121, 122, 123) of an electrical power cable (10) comprise providing a container (22) made from a conductive material around a portion of the cable and at least one electric field sensor (301, 302, 303, 304) between the container and the cable and bringing the container to a constant potential and measuring the electric field with a sensor. The voltage is determined by comparing the measured electric field with electric fields simulated for a plurality of configurations of punctual electric charges.

4. 发明授权

US09784500B2 Measurement of electrical variables on a DC furnace 有权
公开(公告)号：US09784500B2
公开(公告)日：2017-10-10
申请号：US15024972
申请日：2014-09-18
申请人： MINTEK
发明人： Ian James Barker , Quinn Gareth Reynolds , Christopher James Hockaday , Dominic Timothy Jordan
IPC分类号： H05B7/00 , F27B3/28 , F27D17/00 , F27B3/08 , G01R19/00 , H05B7/18 , F27D21/00 , H05B7/20 , F27D19/00
CPC分类号： F27B3/28 , F27B3/085 , F27D17/004 , F27D21/00 , F27D2019/0037 , G01R19/0061 , H05B7/18 , H05B7/20
摘要： A method of detecting an open arc in a DC plasma arc furnace which is based on detecting a linear decrease in the log of the magnitude of the frequency spectrum of the voltage between the anode and cathode.

5. 发明申请

US20170254837A1 CURRENT-MEASUREMENT DEVICE 有权
公开(公告)号：US20170254837A1
公开(公告)日：2017-09-07
申请号：US15509988
申请日：2015-09-03
申请人： COMMISSARIAT Á L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
发明人： Robert BODEN
IPC分类号： G01R19/00 , G01R29/24 , G01R15/14 , H03F3/45
CPC分类号： G01R19/0061 , G01R15/14 , G01R19/0092 , G01R29/24 , H03F3/45475 , H03F2200/261 , H03F2200/462 , H03F2203/45138 , H03F2203/45528
摘要： A device for measuring current by means of integration, includes a first operational amplifier connected as an integrator, and a second operational amplifier connected as an original current generator which can compensate for leakage current in the circuit measurement state and reset the Q0 charge of the integration capacitor in the reset state.

6. 发明授权

US09741534B2 Monitoring device, ion implantation device, and monitoring method 有权
公开(公告)号：US09741534B2
公开(公告)日：2017-08-22
申请号：US15003311
申请日：2016-01-21
申请人： LAPIS Semiconductor Co., Ltd.
发明人： Makoto Ishida
IPC分类号： H01J37/304 , H01J37/36 , H01J37/317 , H01J37/244 , G01R19/00
CPC分类号： H01J37/304 , G01R19/0061 , H01J37/244 , H01J37/3171 , H01J2237/24495 , H01J2237/30472 , H01J2237/31703
摘要： A monitoring device includes a filtering section that extracts and outputs at least one of a high frequency component or a low frequency component of a beam current received from a detection output section of an ion implantation device; and a computation section that computes at least one of a value corresponding to a content ratio of the high frequency component in the beam current, or a value corresponding to a content ratio of the low frequency component in the beam current.

7. 发明申请

US20170032945A1 USING MODELING TO DETERMINE WAFER BIAS ASSOCIATED WITH A PLASMA SYSTEM 审中-公开
标题翻译：使用建模来确定与等离子体系统相关的波浪偏移
公开(公告)号：US20170032945A1
公开(公告)日：2017-02-02
申请号：US15291192
申请日：2016-10-12
申请人： Lam Research Corporation
发明人： John C. Valcore, JR. , Bradford J. Lyndaker
IPC分类号： H01J37/32 , G01R19/00
CPC分类号： H01J37/32926 , G01R19/0061 , H01J37/32174 , H01J37/32183 , H01J37/32697 , H01J37/32706 , H01J2237/327
摘要： Systems and methods for determining wafer bias are described. One of the methods includes detecting output of a generator to identify a generator output complex voltage and current (V&I). The generator is coupled to an impedance matching circuit and the impedance matching circuit is coupled to an electrostatic chuck (ESC). The method further includes determining from the generator output complex V&I a projected complex V&I at a point along a path between an output of a model of the impedance matching circuit and a model of the ESC. The operation of determining of the projected complex V&I is performed using a model for at least part of the path. The method includes applying the projected complex V&I as an input to a function to map the projected complex V&I to a wafer bias value at the ESC model.
摘要翻译：描述了用于确定晶片偏置的系统和方法。其中一种方法包括检测发电机的输出以识别发电机输出复合电压和电流（V＆I）。发电机耦合到阻抗匹配电路，并且阻抗匹配电路耦合到静电卡盘（ESC）。该方法还包括从发生器输出复合体V和I在沿阻抗匹配电路的模型的输出与ESC的模型之间的路径上的点处的投影复合体V＆I。使用至少部分路径的模型来执行确定投影复合V＆I的操作。该方法包括将投影的复合物V和I应用于将投影的复合物V和I映射到ESC模型上的晶片偏置值的函数作为输入。

8. 发明授权

US09404945B2 Ionization monitoring device 有权
标题翻译：电离监测装置
公开(公告)号：US09404945B2
公开(公告)日：2016-08-02
申请号：US14360705
申请日：2012-12-05
申请人： Desco Industries, Inc.
发明人： Siarhei V. Savich
IPC分类号： G01R19/00 , G01R27/26 , H01T23/00
CPC分类号： G01R19/0061 , G01R27/2605 , H01T23/00
摘要： An air ionization monitoring device 200 and method is disclosed herein. In a described embodiment, the air ionization monitoring device 200 comprises an ion source 202 adapted to emit ions 204 and a capacitor 208 including a first conductor 210 arranged to be exposed to the ions 204 emitted by the ion source 202, and a second conductor 212 arranged to be shielded from the ions 204 emitted by the ion source 202. The monitoring device 200 further includes a commutation circuit 234 operable between a first configuration for charging the capacitor 208 to a first predefined voltage, and a second configuration for using the ions 204 emitted by the ion source 202 to discharge the capacitor 208 for a predefined time resulting in the capacitor 208 having a second voltage. The device 200 is configured to use the first and second voltages to determine an ionic current of the emitted ions.
摘要翻译：本文公开了一种空气电离监测装置200及方法。在所描述的实施例中，空气电离监测装置200包括适于发射离子204的离子源202和包括布置成暴露于由离子源202发射的离子204的第一导体210的电容器208，以及第二导体212 被布置成与由离子源202发射的离子204屏蔽。监测装置200还包括可在用于将电容器208充电到第一预定电压的第一配置和用于使用离子204的第二配置之间操作的换向电路234 由离子源202发射以将电容器208放电预定时间，导致电容器208具有第二电压。器件200被配置为使用第一和第二电压来确定所发射的离子的离子电流。

9. 发明申请

US20160217973A1 MONITORING DEVICE, ION IMPLANTATION DEVICE, AND MONITORING METHOD 有权
标题翻译：监测装置，离子植入装置和监测方法
公开(公告)号：US20160217973A1
公开(公告)日：2016-07-28
申请号：US15003311
申请日：2016-01-21
申请人： LAPIS Semiconductor Co., Ltd.
发明人： Makoto Ishida
IPC分类号： H01J37/304 , G01R19/00 , H01J37/317
CPC分类号： H01J37/304 , G01R19/0061 , H01J37/244 , H01J37/3171 , H01J2237/24495 , H01J2237/30472 , H01J2237/31703
摘要： The present disclosure provides a monitoring device including: a filtering section that extracts and outputs at least one of a high frequency component or a low frequency component of a beam current received from a detection output section of an ion implantation device; and a computation section that computes at least one of a value corresponding to a content ratio of the high frequency component in the beam current, or a value corresponding to a content ratio of the low frequency component in the beam current.
摘要翻译：本公开提供一种监视装置，包括：滤波部，其提取并输出从离子注入装置的检测输出部接收的束电流的高频分量或低频分量中的至少一个; 以及计算部，其计算与束电流中的高频分量的内容比相对应的值中的至少一个，或者与束电流中的低频分量的内容比相对应的值。

10. 发明申请

US20160116517A1 VOLTAGE MEASURING DEVICE 有权
标题翻译：电压测量装置
公开(公告)号：US20160116517A1
公开(公告)日：2016-04-28
申请号：US14894038
申请日：2014-05-28
申请人： ELECTRICITE DE FRANCE , KAPTEOS
发明人： Lionel DUVILLARET , Gwenaël GABORIT , Frédéric LECOCHE , Gilbert SCHMITT , Anne GRAU
IPC分类号： G01R29/12 , G01R19/00
CPC分类号： G01R29/12 , G01R15/16 , G01R15/165 , G01R19/0061 , G01R19/0084 , G01R19/0092
摘要： The invention concerns a method for measuring the voltage of at least one conductor (121, 122, 123) of an electrical power cable (10) comprising the following steps: providing a container (22) made from a conductive material around a portion of the cable and at least one electric field sensor (301, 302, 303, 304) between the container and the cable; bringing the container to a constant potential and measuring the electric field by means of the sensor; and determining said voltage by comparing the measured electric field with electric fields simulated for a plurality of configurations of punctual electric charges.
摘要翻译：本发明涉及一种用于测量电力电缆（10）的至少一个导体（121,122,123）的电压的方法，包括以下步骤：提供由导电材料制成的容器（22），所述导体电缆和在容器和电缆之间的至少一个电场传感器（301,302,303,304）; 使容器达到恒定电位并通过传感器测量电场; 以及通过将所测量的电场与针对多个准时电荷配置模拟的电场进行比较来确定所述电压。

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