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1. 发明授权

US07482776B2 Controlling relative movement between a workpiece and a tool of a machine tool 有权
标题翻译：控制工件与机床的刀具之间的相对运动
公开(公告)号：US07482776B2
公开(公告)日：2009-01-27
申请号：US11346604
申请日：2006-02-02
申请人： Wolfgang Scholich-Tessmann
发明人： Wolfgang Scholich-Tessmann
IPC分类号： G05B19/33
CPC分类号： G05B19/39 , G05B2219/41457 , G05B2219/42225
摘要： Devices and related methods of controlling relative movement between a tool of a machine tool and a work piece including dividing a total desired relative tool to workpiece movement in a direction of an axis into a first movement component and a second movement component; controlling the first movement component with a first closed-loop axis control; determining a resulting movement quantity corresponding to the first movement component; feeding a position error from the first closed-loop axis control to the second closed-loop axis control controlling the second movement component in a closed-loop with the second closed-loop axis control, including adjusting for the position error of the first movement component.
摘要翻译：控制机床的工具与工件之间的相对运动的装置和相关方法，包括将总的期望的相对工具与工件沿轴线方向的运动分成第一运动部件和第二运动部件; 用第一闭环轴控制来控制第一移动部件; 确定对应于所述第一移动部件的结果移动量; 将所述第一闭环轴控制中的位置误差馈送到所述第二闭环轴控制，所述第二闭环轴控制通过所述第二闭环轴控制在闭环中控制所述第二运动分量，包括调整所述第一运动分量的位置误差。

2. 发明授权

US06982536B2 Device and method for apportioning a movement of a machine element along a drive axis of a machine tool or production machine 有权
标题翻译：用于分配机器元件沿着机床或生产机器的驱动轴线的运动的装置和方法
公开(公告)号：US06982536B2
公开(公告)日：2006-01-03
申请号：US10999197
申请日：2004-11-29
申请人： Klaus Geissdörfer , Carsten Hamm , Wolfgang Papiernik
发明人： Klaus Geissdörfer , Carsten Hamm , Wolfgang Papiernik
IPC分类号： G05B19/25
CPC分类号： G05B19/39 , B23K26/0876 , B23Q1/445 , G05B2219/42209 , G05B2219/42219
摘要： A device and method for apportioning a movement of a machine element driven by at least two drives for movement along a drive axis of a machine tool or production machine are described. A low-pass filter filters predetermined desired drive axis values to generate filtered desired drive axis values, with a first controller receiving the filtered desired drive axis values as control input value for controlling a first of the at least two drives. A delay unit with a constant group delay time temporally delays the desired drive axis values and generates delayed desired drive axis values, whereafter a subtracter determines a difference between the filtered desired drive axis values and the delayed desired drive axis values. A second controller receives the determined difference and provides, based on the determined difference, a second control input value for controlling a second of the at least two drives. With these features according to the invention, a movement of a machine element along a drive axis of a machine tool or production machine can be optimally apportioned between two or more drives.
摘要翻译：描述了用于分配由至少两个驱动器驱动的机器元件的运动的装置和方法，用于沿着机床或生产机器的驱动轴线移动。低通滤波器滤除预定的期望的驱动轴值以产生滤波的期望的驱动轴值，第一控制器接收滤波的期望驱动轴值作为用于控制至少两个驱动器中的第一个的控制输入值。具有恒定组延迟时间的延迟单元在时间上延迟期望的驱动轴值并产生延迟的期望驱动轴值，之后减法器确定滤波的所需驱动轴值与延迟的期望驱动轴值之间的差。第二控制器接收所确定的差异，并且基于所确定的差异提供用于控制所述至少两个驱动器中的第二驱动器的第二控制输入值。利用根据本发明的这些特征，机器元件沿着机床或生产机器的驱动轴线的运动可以在两个或更多个驱动器之间最佳地分配。

3. 发明申请

US20050116676A1 Device and method for apportioning a movement of a machine element along a drive axis of a machine tool or production machine 有权
标题翻译：用于分配机器元件沿着机床或生产机器的驱动轴线的运动的装置和方法
公开(公告)号：US20050116676A1
公开(公告)日：2005-06-02
申请号：US10999197
申请日：2004-11-29
申请人： Klaus Geissdorfer , Carsten Hamm , Wolfgang Papiernik
发明人： Klaus Geissdorfer , Carsten Hamm , Wolfgang Papiernik
IPC分类号： B23K26/08 , G05B19/19 , G05B19/25 , G05B19/39
CPC分类号： G05B19/39 , B23K26/0876 , B23Q1/445 , G05B2219/42209 , G05B2219/42219
摘要： A device and method for apportioning a movement of a machine element driven by at least two drives for movement along a drive axis of a machine tool or production machine are described. A low-pass filter filters predetermined desired drive axis values to generate filtered desired drive axis values, with a first controller receiving the filtered desired drive axis values as control input value for controlling a first of the at least two drives. A delay unit with a constant group delay time temporally delays the desired drive axis values and generates delayed desired drive axis values, whereafter a subtracter determines a difference between the filtered desired drive axis values and the delayed desired drive axis values. A second controller receives the determined difference and provides, based on the determined difference, a second control input value for controlling a second of the at least two drives. With these features according to the invention, a movement of a machine element along a drive axis of a machine tool or production machine can be optimally apportioned between two or more drives.
摘要翻译：描述了用于分配由至少两个驱动器驱动的机器元件的运动的装置和方法，用于沿着机床或生产机器的驱动轴线移动。低通滤波器滤除预定的期望的驱动轴值以产生滤波的期望的驱动轴值，第一控制器接收滤波的期望驱动轴值作为用于控制至少两个驱动器中的第一个的控制输入值。具有恒定组延迟时间的延迟单元在时间上延迟期望的驱动轴值并产生延迟的期望驱动轴值，之后减法器确定滤波的所需驱动轴值与延迟的期望驱动轴值之间的差。第二控制器接收所确定的差异，并且基于所确定的差异提供用于控制所述至少两个驱动器中的第二驱动器的第二控制输入值。利用根据本发明的这些特征，机器元件沿着机床或生产机器的驱动轴线的运动可以在两个或更多个驱动器之间最佳地分配。

4. 发明授权

US06314631B1 Vision target based assembly 失效
标题翻译：基于视觉目标的装配
公开(公告)号：US06314631B1
公开(公告)日：2001-11-13
申请号：US08465257
申请日：1995-06-05
申请人： Timothy R. Pryor
发明人： Timothy R. Pryor
IPC分类号： B23Q1700
CPC分类号： B23P19/10 , A01B69/008 , B25J9/1684 , B25J9/1692 , B25J9/1697 , B25J13/088 , B25J18/002 , B25J19/021 , B25J19/022 , B25J19/023 , B62D1/28 , G01B11/00 , G01B11/002 , G05B19/39 , G05B19/401 , G05B2219/34033 , G05B2219/36417 , G05B2219/36439 , G05B2219/37572 , G05B2219/39057 , G05B2219/39393 , G05B2219/45064 , G05B2219/45083 , Y10T29/49764 , Y10T29/49769 , Y10T29/4978 , Y10T29/53004 , Y10T29/53009 , Y10T29/53087 , Y10T29/53091
摘要： Methods for assembling, handling, and fabricating are disclosed in which targets used on objects are located. The targets can be specifically applied to the object, or can be an otherwise normal feature of the object. Conveniently, the targets are removable from the object or covered by another object during an assembling process. One or more robots and imaging devices for the targets, especially for infrared radiation, are used. The robots can be used to handle or assemble a part, or a fixture may be used in conjunction with the robots. Conveniently, the CAD design system is used in designing the targets as well as for the assembly process using the targets. A plurality of targets can also be used to monitor and inspect a forming process such as on a sheet panel.
摘要翻译：公开了用于组装，处理和制造的方法，其中定位在物体上使用的目标。目标可以专门应用于对象，或者可以是对象的其他正常特征。方便地，在组装过程中，目标物可从物体上移除或被另一物体覆盖。使用一个或多个用于目标的机器人和成像装置，特别是用于红外辐射。机器人可用于处理或组装零件，或者可以将机具与机器人结合使用。方便的是，CAD设计系统用于设计目标以及使用目标的装配过程。还可以使用多个目标来监视和检查诸如在片材板上的成形过程。

5. 发明授权

US06167607A Vision target based assembly 失效
标题翻译：基于视觉目标的装配
公开(公告)号：US06167607A
公开(公告)日：2001-01-02
申请号：US08487211
申请日：1995-06-07
申请人： Timothy R. Pryor
发明人： Timothy R. Pryor
IPC分类号： B23Q1700
CPC分类号： B23P19/10 , A01B69/008 , B25J9/1684 , B25J9/1692 , B25J9/1697 , B25J13/088 , B25J18/002 , B25J19/021 , B25J19/022 , B25J19/023 , B62D1/28 , G01B11/00 , G01B11/002 , G05B19/39 , G05B19/401 , G05B2219/34033 , G05B2219/36417 , G05B2219/36439 , G05B2219/37572 , G05B2219/39057 , G05B2219/39393 , G05B2219/45064 , G05B2219/45083 , Y10T29/49764 , Y10T29/49769 , Y10T29/4978 , Y10T29/53004 , Y10T29/53009 , Y10T29/53087 , Y10T29/53091
摘要： Methods and apparatuses for assemblying, handling, and fabrication are disclosed in which targets are used on objects. The targets can be specifically applied to the object, or can be an otherwise normal feature of the object. Conveniently, the targets are removable from the object or covered by another object during an assemblying process. One or more robots and imaging devices for the targets are used. The robots can be used to handle or assemble a part, or a fixture may be used in conjunction with the robots. Conveniently, the CAD design system is used in designing the targets as well as for the assembly process using the targets. A plurality of targets can also be used to monitor and inspect a forming process such as on a sheet panel.
摘要翻译：公开了用于组装，处理和制造的方法和装置，其中在对象上使用目标。目标可以专门应用于对象，或者可以是对象的其他正常特征。方便地，在组装过程中，目标物可从物体上移除或被另一物体覆盖。使用一个或多个用于目标的机器人和成像设备。机器人可用于处理或组装零件，或者可以将机具与机器人结合使用。方便的是，CAD设计系统用于设计目标以及使用目标的装配过程。还可以使用多个目标来监视和检查诸如在片材板上的成形过程。

6. 发明授权

US6025689A Positioning system 有权
公开(公告)号：US6025689A
公开(公告)日：2000-02-15
申请号：US203253
申请日：1998-12-01
申请人： Thomas C. Prentice , Brian P. Prescott
发明人： Thomas C. Prentice , Brian P. Prescott
IPC分类号： F16H25/20 , B23Q1/48 , B23Q1/56 , B23Q1/60 , B23Q1/62 , F16H25/02 , G05B19/39 , G05D3/00 , G05B19/18 , B23Q3/18 , G05D3/12
CPC分类号： F16H25/02 , B23Q1/4852 , B23Q1/56 , B23Q1/601 , B23Q1/621 , G05B19/39 , G05B2219/37297 , G05B2219/37314 , G05B2219/42074 , G05B2219/49288 , Y10T74/20201
摘要： A positioning system for moving a device over an xy-plane has a drive mechanism with pivotable arms for moving a carriage over the xy-plane by driving it from one side. This drive mechanism allows the system to be made narrow along the other side.

7. 发明授权

US5986422A Control mode changing over method for servo control system 失效
标题翻译：伺服控制系统控制方式切换方式
公开(公告)号：US5986422A
公开(公告)日：1999-11-16
申请号：US836427
申请日：1997-04-29
申请人： Yasusuke Iwashita , Tadashi Okita
发明人： Yasusuke Iwashita , Tadashi Okita
IPC分类号： G05B11/36 , G05B19/39 , G05D3/12 , G05B19/10
CPC分类号： G05B19/39 , G05B2219/42008 , G05B2219/42011 , G05B2219/42123 , G05B2219/42126
摘要： A control mode changing over method for a servo control system, which is capable of reducing a shock occurring in changing over a control mode from a torque control mode to a position/velocity control mode. In the torque control mode, a value of an integrator in a velocity loop for the position/velocity control mode is rewritten into a torque command value for torque control so that the value of the integrator is always set to the same value as the torque command. When a control mode is changed over from the torque control mode to the position/velocity control mode, a torque command value for a servo motor is obtained based on the value of the integrator rewritten in the torque control mode. Thus, a continuous torque command value is given to the servo motor in changing over the control mode.
摘要翻译： PCT No.PCT / JP96 / 02471 Sec。 371日期1997年04月29日 102（e）日期1997年4月29日PCT 1996年9月2日PCT公布。第WO97 / 08599号公报日期1997年3月6日用于伺服控制系统的控制模式切换方法，其能够减少在将转矩控制模式切换到位置/速度控制模式时发生的冲击。在转矩控制模式中，用于位置/速度控制模式的速度环中的积分器的值被重写为用于转矩控制的转矩指令值，使得积分器的值总是被设置为与转矩指令相同的值。当控制模式从转矩控制模式转换到位置/速度控制模式时，基于在转矩控制模式中重写的积分器的值来获得用于伺服电动机的转矩指令值。因此，在切换控制模式时，向伺服电动机提供连续的转矩指令值。

8. 发明授权

US5903125A Positioning system 失效
公开(公告)号：US5903125A
公开(公告)日：1999-05-11
申请号：US796236
申请日：1997-02-06
申请人： Thomas C. Prentice , Brian P. Prescott
发明人： Thomas C. Prentice , Brian P. Prescott
IPC分类号： B23Q1/48 , B23Q1/56 , B23Q1/60 , B23Q1/62 , F16H25/02 , G05B19/39 , B23Q3/18 , G05D3/12
CPC分类号： F16H25/02 , B23Q1/4852 , B23Q1/56 , B23Q1/601 , B23Q1/621 , G05B19/39 , G05B2219/37297 , G05B2219/37314 , G05B2219/42074 , G05B2219/49288 , Y10T74/20201
摘要： A positioning system for moving a device over an xy-plane has a drive mechanism with pivotable arms for moving a carriage over the xy-plane by driving it from one side. This drive mechanism allows the system to be made narrow along the other side.

9. 发明授权

US5900707A Stage-drive control apparatus and method, and scan-projection type exposure apparatus 失效
标题翻译：阶段驱动控制装置和方法以及扫描投影型曝光装置
公开(公告)号：US5900707A
公开(公告)日：1999-05-04
申请号：US876754
申请日：1997-06-16
申请人： Shinji Wakui
发明人： Shinji Wakui
IPC分类号： G03F9/00 , G03F7/20 , G05B19/39 , G05D3/12 , H01L21/027 , H01L21/68 , G05B11/32
CPC分类号： G03F7/70358 , G03F7/70725 , G05B19/39
摘要： A scan-projection type exposure apparatus quickly suppresses disturbance in synchronization between a wafer stage and a reticle stage, and enables high-precision pattern exposure. This apparatus employs a master-slave control with a wafer-stage side as the master with a reticle-stage side as the slave, so as to correct a target value of a position control system of a rough-motion stage or that of a position control system of the reticle stage by using motion-mode errors e.sub.g, e.theta..sub.x and e.theta..sub.y in a one-to-one correspondence with a disturbance occurring to the rough-motion stage of the wafer stage due to movement of a fine-motion stage of the wafer stage.
摘要翻译：扫描投影型曝光装置可快速抑制晶片台与标线片台之间的同步干扰，能够实现高精度图案曝光。该装置采用具有晶片级侧的主从控制作为主机，其中标线片一侧作为从机，以便校正粗略运动级的位置控制系统或位置控制系统的目标值通过使用运动模式误差例如eθx和eθy与由晶片台的粗略运动阶段发生的干扰一一对应，由于精细位移的运动，控制系统，晶圆台的运动阶段。

10. 发明授权

US5847960A Multi-tool positioning system 失效
标题翻译：多功能定位系统
公开(公告)号：US5847960A
公开(公告)日：1998-12-08
申请号：US728619
申请日：1996-10-10
申请人： Donald R. Cutler , Robert M. Pailthorp , Mark A. Unrath , Thomas W. Richardson , Alan J. Cable
发明人： Donald R. Cutler , Robert M. Pailthorp , Mark A. Unrath , Thomas W. Richardson , Alan J. Cable
IPC分类号： B23K26/02 , B23K26/08 , G05B19/39 , G05D3/12 , H05K3/00 , G06F19/00 , G06G7/64 , G06G7/66
CPC分类号： B23K26/08 , B23K26/082 , B23K26/083 , B23K26/0853 , G05B19/39 , H05K3/0038 , G05B2219/34047 , G05B2219/34391 , G05B2219/36029 , G05B2219/41331 , G05B2219/42209 , G05B2219/42219 , G05B2219/45041 , G05B2219/45139 , H05K2203/0165 , H05K2203/108 , H05K3/0008 , H05K3/0017
摘要： A multi-rate, multi-head positioner (150) receives and processes unpanelized positioning commands to actuate slow stages (56, 58) and multiple fast stages (154) that are mounted on one of the slow stages to simultaneously position multiple tools (156) relative to target locations (162) on multiple associated workpieces (152). Each of the fast stages is coupled to a fast stage signal processor (172) that provides corrected position data to each fast stage positioner to compensate for fast stage nonlinearities and workpiece placement, offset, rotation, and dimensional variations among the multiple workpieces. When cutting blind via holes in etched circuit boards (ECBs), improved throughput and process yield are achieved by making half of the tools ultraviolet ("UV") lasers, which readily cut conductor and dielectric layers, and making the other half of the tools are infrared ("IR") lasers, which readily cut only dielectric layers. The UV lasers are controlled to cut an upper conductor layer and a portion of an underlying dielectric layer, and the IR lasers are controlled to cut the remaining dielectric layer without cutting through or damaging a second underlying conductor layer. The throughput is increased by cutting conductor layers in unprocessed ECBs while concurrently cutting dielectric layers in ECBs that have already had their conductor layer cut. The process yield is increased by performing a workpiece calibration prior to each cutting step to account for any ECB placement, offset, rotation, and dimensional variations.
摘要翻译：多速率多头定位器（150）接收和处理未通用的定位命令以致动缓慢级（56,58）和多个快速级（154），所述缓慢级（56,58）和多级快速级（154）安装在所述慢速级中的一级以同时定位多个工具）相对于多个相关工件（152）上的目标位置（162）。每个快速级耦合到快速级信号处理器（172），其向每个快速定位器提供校正的位置数据，以补偿多个工件之间的快速阶段非线性和工件放置，偏移，旋转和尺寸变化。在蚀刻电路板（ECB）中通过盲孔切割盲孔时，通过制造一半的工具紫外线（“UV”）激光器可以实现提高的吞吐量和工艺产量，这些激光器易于切割导体和介电层，并使另一半的工具是红外线（“IR”）激光器，其易于切割电介质层。控制UV激光器以切割上导体层和底层电介质层的一部分，并且IR激光器被控制以切割剩余的电介质层而不切割或损坏第二下面的导体层。通过在未加工的ECB中切割导体层，同时切割已经具有导体层切割的ECB中的电介质层，从而提高了生产量。通过在每个切割步骤之前执行工件校准以考虑任何ECB放置，偏移，旋转和尺寸变化来增加工艺屈服。

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