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1. 发明授权

US10890895B2 Position or velocity control system and method 有权
公开(公告)号：US10890895B2
公开(公告)日：2021-01-12
申请号：US15841575
申请日：2017-12-14
申请人： Texas Instruments Incorporated
发明人： Rajan Lakshmi Narasimha , David Patrick Magee
IPC分类号： G05B19/416 , G05B19/29 , H02K29/10 , G05B19/414 , G02B26/00 , G05B19/39 , H02P27/08 , H02P6/16 , H02P6/15 , G05B19/25 , H02P6/182 , G05B19/23
摘要： In described examples of methods and control systems to control a position and/or velocity of a machine, control circuitry is coupled to receive and dither a control signal, and to compute a control output value according to the dithered control signal and a control function. An inverter is coupled to the control circuitry, to control the position and/or velocity according to the control output value.

2. 发明授权

US10044303B2 Hybrid controller for brushless DC motor 有权
公开(公告)号：US10044303B2
公开(公告)日：2018-08-07
申请号：US15177752
申请日：2016-06-09
申请人： Texas Instruments Incorporated
发明人： Yisong Lu , Ruochen Zhang , Wei Zuo
IPC分类号： H02P6/18 , G05B19/39 , H02P6/20 , H02P6/182 , H02P6/185 , H02P31/00
摘要： A circuit includes a processor that analyzes a pulse width modulated (PWM) signal feedback from a brushless DC motor to determine a transition between a mutual inductance zero crossing condition and a Back Electro Motive Force (BEMF) zero crossing condition of the brushless DC motor. A mutual inductance controller is executed by the processor to commutate the brushless DC motor at startup of the motor when the mutual inductance zero crossing condition is detected by the processor. A BEMF controller is executed by the processor to commutate the brushless DC motor after startup of the motor when the BEMF zero crossing condition is detected by the processor.

3. 发明授权

US07992217B2 Shape changing material 有权
标题翻译：形状变化的材料
公开(公告)号：US07992217B2
公开(公告)日：2011-08-09
申请号：US12387481
申请日：2009-04-30
申请人： Roderick A. Hyde , Muriel Y. Ishikawa , Jordin T. Kare , Lowell L. Wood, Jr.
发明人： Roderick A. Hyde , Muriel Y. Ishikawa , Jordin T. Kare , Lowell L. Wood, Jr.
IPC分类号： G05B19/21 , G05B19/39 , A63B26/00
CPC分类号： A61B5/1077 , A41D1/002 , A41D13/065 , A61B5/1116 , A61B5/4528 , A61B5/6804 , A61F5/0109 , A61F13/08 , A63B69/38 , A63B2102/02 , A63B2220/51 , A63B2220/53 , A63B2220/80 , A63B2220/833 , A63B2225/50 , H01L23/5387 , H01L2924/0002 , H01L2924/3011 , Y10S2/905 , Y10T428/249921 , H01L2924/00
摘要： An apparatus is configured with one or more sensors arranged to detect a first shape-related parameter, one or more control elements arranged to provide a force, and circuitry operably connected to the one or more sensors and the one or more control elements to determine the force provided to the one or more control elements.
摘要翻译：一种装置配置有一个或多个传感器，其布置成检测第一形状相关参数，被布置成提供力的一个或多个控制元件和可操作地连接到一个或多个传感器和一个或多个控制元件的电路，以确定提供给一个或多个控制元件的力。

4. 发明授权

US07529599B1 Systems and methods for coordination motion instructions 有权
标题翻译：协调运动指令的系统和方法
公开(公告)号：US07529599B1
公开(公告)日：2009-05-05
申请号：US10853674
申请日：2004-05-25
申请人： Jatin P. Bhatt , Jacob S. Baker , David R. Mowry , Stephen L. Steh , William C Schwarz
发明人： Jatin P. Bhatt , Jacob S. Baker , David R. Mowry , Stephen L. Steh , William C Schwarz
IPC分类号： B25J9/04 , G05B19/39 , G05B19/23 , G05B19/18
CPC分类号： B25J9/1664 , G05B19/19 , G05B2219/34095 , G05B2219/34177 , G05B2219/35585 , G05B2219/40395
摘要： The invention provides systems and methods that integrate and/or control motion of a plurality of axes in a motion control environment. Grouped axes can be linked (e.g., via a tag) to provide desired multi-axis coordinated motion as well as provide control for corresponding aspects of motion such as acceleration, velocity, etc. Such axes can be integrated with other control functionality such as process and/or machine control to provide the user with a comprehensive control. The foregoing can provide simple mechanisms for moving devices in multiple axes of a coordinate system in a coordinated fashion. Such coordinated move functionality can provide a user-friendly interface for linear and circular moves in multi-dimensional space. The algorithm employed for path planning can provide fast execution and dynamic parameter changes (e.g., maximum velocity, acceleration and deceleration) along a desired path of motion. In this manner, such instructions can provide smooth transitions from one coordinated move to the next.
摘要翻译：本发明提供在运动控制环境中整合和/或控制多个轴的运动的系统和方法。分组轴可以链接（例如，通过标签）以提供所需的多轴协调运动，以及为运动的相应方面（例如加速度，速度等）提供控制。这样的轴可以与其他控制功能集成，例如过程和/或机器控制，以向用户提供综合控制。上述可以提供用于以协调的方式在坐标系的多个轴中移动装置的简单机构。这种协调的移动功能可以为多维空间中的线性和圆形移动提供用户友好的界面。用于路径规划的算法可以沿着期望的运动路径提供快速执行和动态参数改变（例如，最大速度，加速和减速）。以这种方式，这样的指令可以提供从一个协调移动到下一个协调移动的平滑过渡。

5. 发明申请

US20050116676A1 Device and method for apportioning a movement of a machine element along a drive axis of a machine tool or production machine 有权
标题翻译：用于分配机器元件沿着机床或生产机器的驱动轴线的运动的装置和方法
公开(公告)号：US20050116676A1
公开(公告)日：2005-06-02
申请号：US10999197
申请日：2004-11-29
申请人： Klaus Geissdorfer , Carsten Hamm , Wolfgang Papiernik
发明人： Klaus Geissdorfer , Carsten Hamm , Wolfgang Papiernik
IPC分类号： B23K26/08 , G05B19/19 , G05B19/25 , G05B19/39
CPC分类号： G05B19/39 , B23K26/0876 , B23Q1/445 , G05B2219/42209 , G05B2219/42219
摘要： A device and method for apportioning a movement of a machine element driven by at least two drives for movement along a drive axis of a machine tool or production machine are described. A low-pass filter filters predetermined desired drive axis values to generate filtered desired drive axis values, with a first controller receiving the filtered desired drive axis values as control input value for controlling a first of the at least two drives. A delay unit with a constant group delay time temporally delays the desired drive axis values and generates delayed desired drive axis values, whereafter a subtracter determines a difference between the filtered desired drive axis values and the delayed desired drive axis values. A second controller receives the determined difference and provides, based on the determined difference, a second control input value for controlling a second of the at least two drives. With these features according to the invention, a movement of a machine element along a drive axis of a machine tool or production machine can be optimally apportioned between two or more drives.
摘要翻译：描述了用于分配由至少两个驱动器驱动的机器元件的运动的装置和方法，用于沿着机床或生产机器的驱动轴线移动。低通滤波器滤除预定的期望的驱动轴值以产生滤波的期望的驱动轴值，第一控制器接收滤波的期望驱动轴值作为用于控制至少两个驱动器中的第一个的控制输入值。具有恒定组延迟时间的延迟单元在时间上延迟期望的驱动轴值并产生延迟的期望驱动轴值，之后减法器确定滤波的所需驱动轴值与延迟的期望驱动轴值之间的差。第二控制器接收所确定的差异，并且基于所确定的差异提供用于控制所述至少两个驱动器中的第二驱动器的第二控制输入值。利用根据本发明的这些特征，机器元件沿着机床或生产机器的驱动轴线的运动可以在两个或更多个驱动器之间最佳地分配。

6. 发明授权

US6025689A Positioning system 有权
公开(公告)号：US6025689A
公开(公告)日：2000-02-15
申请号：US203253
申请日：1998-12-01
申请人： Thomas C. Prentice , Brian P. Prescott
发明人： Thomas C. Prentice , Brian P. Prescott
IPC分类号： F16H25/20 , B23Q1/48 , B23Q1/56 , B23Q1/60 , B23Q1/62 , F16H25/02 , G05B19/39 , G05D3/00 , G05B19/18 , B23Q3/18 , G05D3/12
CPC分类号： F16H25/02 , B23Q1/4852 , B23Q1/56 , B23Q1/601 , B23Q1/621 , G05B19/39 , G05B2219/37297 , G05B2219/37314 , G05B2219/42074 , G05B2219/49288 , Y10T74/20201
摘要： A positioning system for moving a device over an xy-plane has a drive mechanism with pivotable arms for moving a carriage over the xy-plane by driving it from one side. This drive mechanism allows the system to be made narrow along the other side.

7. 发明授权

US5986422A Control mode changing over method for servo control system 失效
标题翻译：伺服控制系统控制方式切换方式
公开(公告)号：US5986422A
公开(公告)日：1999-11-16
申请号：US836427
申请日：1997-04-29
申请人： Yasusuke Iwashita , Tadashi Okita
发明人： Yasusuke Iwashita , Tadashi Okita
IPC分类号： G05B11/36 , G05B19/39 , G05D3/12 , G05B19/10
CPC分类号： G05B19/39 , G05B2219/42008 , G05B2219/42011 , G05B2219/42123 , G05B2219/42126
摘要： A control mode changing over method for a servo control system, which is capable of reducing a shock occurring in changing over a control mode from a torque control mode to a position/velocity control mode. In the torque control mode, a value of an integrator in a velocity loop for the position/velocity control mode is rewritten into a torque command value for torque control so that the value of the integrator is always set to the same value as the torque command. When a control mode is changed over from the torque control mode to the position/velocity control mode, a torque command value for a servo motor is obtained based on the value of the integrator rewritten in the torque control mode. Thus, a continuous torque command value is given to the servo motor in changing over the control mode.
摘要翻译： PCT No.PCT / JP96 / 02471 Sec。 371日期1997年04月29日 102（e）日期1997年4月29日PCT 1996年9月2日PCT公布。第WO97 / 08599号公报日期1997年3月6日用于伺服控制系统的控制模式切换方法，其能够减少在将转矩控制模式切换到位置/速度控制模式时发生的冲击。在转矩控制模式中，用于位置/速度控制模式的速度环中的积分器的值被重写为用于转矩控制的转矩指令值，使得积分器的值总是被设置为与转矩指令相同的值。当控制模式从转矩控制模式转换到位置/速度控制模式时，基于在转矩控制模式中重写的积分器的值来获得用于伺服电动机的转矩指令值。因此，在切换控制模式时，向伺服电动机提供连续的转矩指令值。

8. 发明授权

US5903125A Positioning system 失效
公开(公告)号：US5903125A
公开(公告)日：1999-05-11
申请号：US796236
申请日：1997-02-06
申请人： Thomas C. Prentice , Brian P. Prescott
发明人： Thomas C. Prentice , Brian P. Prescott
IPC分类号： B23Q1/48 , B23Q1/56 , B23Q1/60 , B23Q1/62 , F16H25/02 , G05B19/39 , B23Q3/18 , G05D3/12
CPC分类号： F16H25/02 , B23Q1/4852 , B23Q1/56 , B23Q1/601 , B23Q1/621 , G05B19/39 , G05B2219/37297 , G05B2219/37314 , G05B2219/42074 , G05B2219/49288 , Y10T74/20201
摘要： A positioning system for moving a device over an xy-plane has a drive mechanism with pivotable arms for moving a carriage over the xy-plane by driving it from one side. This drive mechanism allows the system to be made narrow along the other side.

9. 发明授权

US5900707A Stage-drive control apparatus and method, and scan-projection type exposure apparatus 失效
标题翻译：阶段驱动控制装置和方法以及扫描投影型曝光装置
公开(公告)号：US5900707A
公开(公告)日：1999-05-04
申请号：US876754
申请日：1997-06-16
申请人： Shinji Wakui
发明人： Shinji Wakui
IPC分类号： G03F9/00 , G03F7/20 , G05B19/39 , G05D3/12 , H01L21/027 , H01L21/68 , G05B11/32
CPC分类号： G03F7/70358 , G03F7/70725 , G05B19/39
摘要： A scan-projection type exposure apparatus quickly suppresses disturbance in synchronization between a wafer stage and a reticle stage, and enables high-precision pattern exposure. This apparatus employs a master-slave control with a wafer-stage side as the master with a reticle-stage side as the slave, so as to correct a target value of a position control system of a rough-motion stage or that of a position control system of the reticle stage by using motion-mode errors e.sub.g, e.theta..sub.x and e.theta..sub.y in a one-to-one correspondence with a disturbance occurring to the rough-motion stage of the wafer stage due to movement of a fine-motion stage of the wafer stage.
摘要翻译：扫描投影型曝光装置可快速抑制晶片台与标线片台之间的同步干扰，能够实现高精度图案曝光。该装置采用具有晶片级侧的主从控制作为主机，其中标线片一侧作为从机，以便校正粗略运动级的位置控制系统或位置控制系统的目标值通过使用运动模式误差例如eθx和eθy与由晶片台的粗略运动阶段发生的干扰一一对应，由于精细位移的运动，控制系统，晶圆台的运动阶段。

10. 发明授权

US5847960A Multi-tool positioning system 失效
标题翻译：多功能定位系统
公开(公告)号：US5847960A
公开(公告)日：1998-12-08
申请号：US728619
申请日：1996-10-10
申请人： Donald R. Cutler , Robert M. Pailthorp , Mark A. Unrath , Thomas W. Richardson , Alan J. Cable
发明人： Donald R. Cutler , Robert M. Pailthorp , Mark A. Unrath , Thomas W. Richardson , Alan J. Cable
IPC分类号： B23K26/02 , B23K26/08 , G05B19/39 , G05D3/12 , H05K3/00 , G06F19/00 , G06G7/64 , G06G7/66
CPC分类号： B23K26/08 , B23K26/082 , B23K26/083 , B23K26/0853 , G05B19/39 , H05K3/0038 , G05B2219/34047 , G05B2219/34391 , G05B2219/36029 , G05B2219/41331 , G05B2219/42209 , G05B2219/42219 , G05B2219/45041 , G05B2219/45139 , H05K2203/0165 , H05K2203/108 , H05K3/0008 , H05K3/0017
摘要： A multi-rate, multi-head positioner (150) receives and processes unpanelized positioning commands to actuate slow stages (56, 58) and multiple fast stages (154) that are mounted on one of the slow stages to simultaneously position multiple tools (156) relative to target locations (162) on multiple associated workpieces (152). Each of the fast stages is coupled to a fast stage signal processor (172) that provides corrected position data to each fast stage positioner to compensate for fast stage nonlinearities and workpiece placement, offset, rotation, and dimensional variations among the multiple workpieces. When cutting blind via holes in etched circuit boards (ECBs), improved throughput and process yield are achieved by making half of the tools ultraviolet ("UV") lasers, which readily cut conductor and dielectric layers, and making the other half of the tools are infrared ("IR") lasers, which readily cut only dielectric layers. The UV lasers are controlled to cut an upper conductor layer and a portion of an underlying dielectric layer, and the IR lasers are controlled to cut the remaining dielectric layer without cutting through or damaging a second underlying conductor layer. The throughput is increased by cutting conductor layers in unprocessed ECBs while concurrently cutting dielectric layers in ECBs that have already had their conductor layer cut. The process yield is increased by performing a workpiece calibration prior to each cutting step to account for any ECB placement, offset, rotation, and dimensional variations.
摘要翻译：多速率多头定位器（150）接收和处理未通用的定位命令以致动缓慢级（56,58）和多个快速级（154），所述缓慢级（56,58）和多级快速级（154）安装在所述慢速级中的一级以同时定位多个工具）相对于多个相关工件（152）上的目标位置（162）。每个快速级耦合到快速级信号处理器（172），其向每个快速定位器提供校正的位置数据，以补偿多个工件之间的快速阶段非线性和工件放置，偏移，旋转和尺寸变化。在蚀刻电路板（ECB）中通过盲孔切割盲孔时，通过制造一半的工具紫外线（“UV”）激光器可以实现提高的吞吐量和工艺产量，这些激光器易于切割导体和介电层，并使另一半的工具是红外线（“IR”）激光器，其易于切割电介质层。控制UV激光器以切割上导体层和底层电介质层的一部分，并且IR激光器被控制以切割剩余的电介质层而不切割或损坏第二下面的导体层。通过在未加工的ECB中切割导体层，同时切割已经具有导体层切割的ECB中的电介质层，从而提高了生产量。通过在每个切割步骤之前执行工件校准以考虑任何ECB放置，偏移，旋转和尺寸变化来增加工艺屈服。

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