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    • 6. 发明授权
    • Method for forming thin film, spheroid coated with thin film, light bulb using the spheroid and equipment for film formation
    • 薄膜形成方法,涂有薄膜的球体,使用球体的灯泡和用于成膜的设备
    • US06726816B2
    • 2004-04-27
    • US10238092
    • 2002-09-09
    • Yuuji OmataNaotaka HashimotoMasahide YokoyamaToshiyuki SuemitsuTakahiro Kitai
    • Yuuji OmataNaotaka HashimotoMasahide YokoyamaToshiyuki SuemitsuTakahiro Kitai
    • C25D1728
    • C23C14/505H01J9/20H01K3/005Y10T428/131Y10T428/2991Y10T428/8305
    • The present invention provides a method for forming thin films, wherein thin films with a uniform thickness can be formed on substrates as objects such as spheroids, even when the films are formed by conventional film-formation methods using an incident particle beam coming from a specific direction (e.g., evaporation and sputtering). In the method, thin films are formed on substrates such as spheroids with an incident particle beam coming from a particle source located in a specific direction by performing a spin motion together with a swing motion. The spin motion is a rotation of the substrate at a constant angular velocity about the spheroidal axis. The swing motion is a rotational oscillation of the same substrate for rotationally oscillating the axis at a constant cycle in one surface, where the center of the rotational oscillation is in the vicinity of the midpoint between two focal points on the axis of the spheroid. As a result, thin films with a uniform thickness in both the peripheral direction of the substrate and in the rotational axis direction of the spin motion can be formed even on substrates including spheroids.
    • 本发明提供了一种形成薄膜的方法,其中,即使当使用来自特定的粒子束的入射粒子束的常规成膜方法形成膜时,也可以在诸如球体的物体的基板上形成具有均匀厚度的薄膜 方向(如蒸发和溅射)。 在该方法中,通过与摆动运动一起执行旋转运动,在具有来自位于特定方向的粒子源的入射粒子束的基底上形成薄膜,例如球体。 旋转运动是围绕球球轴以恒定角速度旋转基底。 摆动是同一基板的旋转振动,用于在一个表面中以恒定周期旋转轴的旋转振动,其中旋转振荡的中心在球体的轴线上的两个焦点之间的中点附近。 结果,即使在包括球体的基板上也可以形成在基板的圆周方向上和旋转轴的旋转轴方向上具有均匀厚度的薄膜。