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    • 7. 发明申请
    • DISTANCE MEASURING APPARATUS, DISTANCE MEASURING METHOD, AND CONTROL PROGRAM
    • 距离测量装置,距离测量方法和控制程序
    • US20150025843A1
    • 2015-01-22
    • US14365087
    • 2013-01-28
    • Kabushiki Kaisha Toshiba
    • Shota Takemura
    • G01B11/14H01L27/148
    • G01B11/14G01B11/026G01B11/2518G01S17/48H01L27/14868
    • According to an embodiment, a distance measuring apparatus includes a multi laser beam emitting unit, an irradiating position changing unit, an image acquiring unit, and a distance calculating unit. The multi laser beam emitting unit irradiates a surface of a measurement target object with a plurality of elliptical laser beams provided in line in a minor axis direction. The irradiating position changing unit reciprocally moves irradiating positions of the laser beams all together along a major axis of the laser beams. The image acquiring unit receives reflected lights of the laser beams, and acquires an image of a bright and dark pattern of the reflected lights of the laser beams formed on an image acquiring face. The distance calculating unit calculates a distance to the measurement target object based on the bright and dark pattern of the reflected lights on the image acquiring face.
    • 根据实施例,距离测量装置包括多个激光束发射单元,照射位置改变单元,图像获取单元和距离计算单元。 多个激光束发射单元用短轴方向设置的多个椭圆形激光束照射测量对象物体的表面。 照射位置改变单元沿着激光束的长轴将激光束的照射位置一起往复移动。 图像获取单元接收激光束的反射光,并且获取形成在图像获取面上的激光束的反射光的明暗图案的图像。 距离计算单元基于图像获取面上的反射光的明暗图案计算到测量对象物体的距离。