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    • 7. 发明授权
    • Method for making polymer-based rare earth-doped waveguide
    • 制备聚合物稀土掺杂波导的方法
    • US06875561B2
    • 2005-04-05
    • US10138741
    • 2002-05-03
    • Charles LeuGa-Lane Chen
    • Charles LeuGa-Lane Chen
    • G02B6/12G02B6/138H01S3/16H01S3/17G02B6/10
    • G02B6/132G02B6/138G02B2006/1215H01S3/0637H01S3/1608H01S3/178
    • A method for making a polymer-based rare earth-doped waveguide includes the steps of: providing a substrate (11); spin coating a polymer bottom cladding layer (12) on the substrate; spin coating a core layer (13) comprising a polymer and complex rare earth metal ions, which can be excited to produce a laser, on the bottom cladding layer; using a channel patterning technique with masking and ultraviolet (UV) radiation followed by etching to form at least one channel waveguide (14); and spin coating a polymer top cladding layer (15) over the at least one channel waveguide and exposed portions of the bottom cladding layer. The method includes improving the solubility of rare earth metal ions in a polymer matrix, by forming a complex of each rare earth metal ion with an organic compound. These complexes have higher solubility in a fluorinated polymer, compared with pure rare earth metal ions.
    • 制造基于聚合物的稀土掺杂波导的方法包括以下步骤:提供基板(11); 在基底上旋涂聚合物底部包层(12); 在下包层上旋涂包含能够被激发以产生激光的聚合物和复合稀土金属离子的芯层(13); 使用具有掩蔽和紫外(UV)辐射的通道图案化技术,随后蚀刻以形成至少一个通道波导(14); 以及在所述至少一个通道波导和所述底部包层的暴露部分上旋涂聚合物顶部包覆层(15)。 该方法包括通过形成每种稀土金属离子与有机化合物的络合物来提高稀土金属离子在聚合物基质中的溶解度。 与纯稀土金属离子相比,这些络合物在氟化聚合物中的溶解度更高。