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    • 5. 发明授权
    • Method and apparatus for laser ablation of a target material
    • 目标材料激光烧蚀的方法和装置
    • US06717101B2
    • 2004-04-06
    • US10264248
    • 2002-10-03
    • James H MorrisMichael PowersHarry Rieger
    • James H MorrisMichael PowersHarry Rieger
    • B23K2638
    • H01L21/67092B23K26/0624B23K26/0736B23K26/38B23K2101/40H01L21/4803Y10S438/94
    • A method and apparatus for laser cutting a target material is disclosed. The method includes the steps of generating laser pulses from a laser system and applying the laser pulses to the target material so that the laser pulses cut through the material. The laser pulses have an approximately ellipse shaped spot, have a temporal pulse width shorter than about 100 nanoseconds, and have an energy density from about 2 to about 20 times the ablation threshold energy of the target material. The laser pulses are applied to the material such that the major axis of the ellipse shaped spot moves parallel to the cutting direction. The spot has a leading edge and a trailing edge on the major axis, and the energy density of each laser pulse increases from zero to a maximum along the leading edge and decreases back to zero along the trailing edge. The apparatus is a laser system for cutting a target material that includes: a seed laser system for producing a first pulse laser beam; a laser amplifier for amplifying the first pulse laser beam to produce an amplified pulse laser beam; a harmonic generation system for converting the amplified pulse laser beam into a second pulse laser beam having a shorter wavelength; a focussing system for focussing the second pulse laser beam to an approximately ellipse shaped third pulse laser beam; and a motion control system for moving a target material contacted by the third pulse laser beam.
    • 公开了一种激光切割目标材料的方法和装置。 该方法包括以下步骤:从激光系统产生激光脉冲并将激光脉冲施加到目标材料,使得激光脉冲切穿材料。 激光脉冲具有近似椭圆形的点,具有短于约100纳秒的时间脉冲宽度,并且具有来自目标材料的消融阈值能量的约2至约20倍的能量密度。 激光脉冲施加到材料上,使得椭圆形点的长轴平行于切割方向移动。 该点在主轴上具有前缘和后缘,并且每个激光脉冲的能量密度沿着前沿从零增加到最大值,并沿着后沿逐渐减小到零。 该装置是用于切割目标材料的激光系统,其包括:种子激光系统,用于产生第一脉冲激光束; 激光放大器,用于放大第一脉冲激光束以产生放大的脉冲激光束; 用于将放大的脉冲激光束转换成具有较短波长的第二脉冲激光束的谐波发生系统; 用于将第二脉冲激光束聚焦到大致椭圆形的第三脉冲激光束的聚焦系统; 以及用于移动与第三脉冲激光束接触的目标材料的运动控制系统。
    • 6. 发明授权
    • Laser processing apparatus and method
    • 激光加工设备及方法
    • US06710289B2
    • 2004-03-23
    • US10418282
    • 2003-04-18
    • Keiji Iso
    • Keiji Iso
    • B23K2638
    • H05K3/0038B23K26/042B23K26/06B23K26/0604B23K26/0613B23K26/064B23K26/0643B23K26/0648H05K2203/108
    • A controller outputs a first event signal having a periodical waveform and a second event signal having a periodical waveform synchronizing with the first event signal. A first laser source radiates a first pulse laser beam having a wavelength in an ultraviolet range, synchronously with the first event signal. A second laser source radiates a second pulse laser beam having a wavelength in the ultraviolet range, synchronously with the second event signal. A converging optical system converges the first and second pulse laser beams at the same point. A holder holds a workpiece at a position where a pulse laser beam converged by the converging optical system is applied.
    • 控制器输出具有周期波形的第一事件信号和具有与第一事件信号同步的周期波形的第二事件信号。 第一激光源与第一事件信号同步地辐射具有紫外范围波长的第一脉冲激光束。 第二激光源与第二事件信号同步地辐射具有紫外范围波长的第二脉冲激光束。 会聚光学系统在同一点收敛第一和第二脉冲激光束。 保持器在由会聚光学系统会聚的脉冲激光束被施加的位置处保持工件。