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    • 6. 发明授权
    • Method for measuring carbon concentration in polycrystalline silicon
    • 多晶硅碳浓度测定方法
    • US08963070B2
    • 2015-02-24
    • US14110013
    • 2012-04-03
    • Junichi OkadaKouichi KobayashiFumitaka Kume
    • Junichi OkadaKouichi KobayashiFumitaka Kume
    • G01D18/00G12B13/00G01J3/42G01N21/3563G01N21/27
    • G01J3/42G01N21/274G01N21/3563
    • The present invention provides a method for making it possible to easily and simply measure approximate concentration of substitutional carbon impurities in a desired position in a polycrystalline silicon rod. A polycrystalline silicon plate is sliced out from a polycrystalline silicon rod and both surfaces of the polycrystalline silicon plate are mirror-polished to reduce the polycrystalline silicon plate to thickness of 2.12±0.01 mm. A calibration curve is created according to an infrared absorption spectroscopy and on the basis of a standard measurement method using a single crystal silicon standard sample having known substitutional carbon concentration and thickness of 2.00±0.01 mm, an infrared absorption spectrum in a frequency domain including an absorption zone peak of substitutional carbon of the polycrystalline silicon plate after the mirror polishing is calculated under conditions same as conditions during the calibration curve creation, and substitutional carbon concentration is calculated without performing thickness correction.
    • 本发明提供了一种使得可以容易且简单地测量多晶硅棒中期望位置中的取代碳杂质的近似浓度的方法。 将多晶硅板从多晶硅棒切出,并将多晶硅板的两个表面进行镜面抛光以将多晶硅板的厚度减小到2.12±0.01mm。 根据红外吸收光谱法和基于使用具有已知的取代碳浓度和厚度为2.00±0.01mm的单晶硅标准样品的标准测量方法产生校准曲线,在频域中的红外吸收光谱包括 在与校准曲线生成期间的条件相同的条件下计算镜面抛光后的多晶硅板的取代碳的吸收峰的峰值,并且计算替代碳浓度而不进行厚度校正。
    • 7. 发明授权
    • Calibration of gyroscopic systems with vibratory gyroscopes
    • 用振动陀螺仪校准陀螺仪系统
    • US08800349B2
    • 2014-08-12
    • US13125442
    • 2009-11-27
    • Jean-Michel Caron
    • Jean-Michel Caron
    • G12B13/00
    • G01C19/56G01C25/005
    • In a gyroscopic system comprising at least four vibratory gyroscopes, a first measurement is provided by said vibratory gyroscope to be calibrated, and a second measurement is provided by a combination of the measurements from the other vibratory gyroscopes of the system. At the level of the vibratory gyroscope to be calibrated, an initial command is applied in order to command a change in position from a first vibration position (θ1) to a second vibration position (θ2). A calibrated scale factor value of the vibratory gyroscope to be calibrated is then determined on the basis of a calculated value in relation to the change in position, based on the period of time during which the initial command is applied, the initial command, an angular difference between the first and second vibration positions measured according to the first measurement and an angular difference between the first and second vibration positions measured according to the second measurement.
    • 在包括至少四个振动陀螺仪的陀螺仪系统中,由要校准的所述振动陀螺仪提供第一测量,并且通过来自系统的其它振动陀螺仪的测量的组合来提供第二测量。 在要校准的振动陀螺仪的水平面上,施加初始命令,以便指令从第一振动位置(& t; 1)到第二振动位置(& thetas; 2)的位置变化。 然后基于相对于位置变化的计算值,基于施加初始命令的时间周期,初始命令,角度,角度来确定待校准的振动陀螺仪的校准比例因子值 根据第一测量测量的第一和第二振动位置之间的差异以及根据第二测量测量的第一和第二振动位置之间的角度差。