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    • 5. 发明申请
    • Aberration-correcting cathode lens microscopy instrument
    • 畸变校正阴极透镜显微镜仪器
    • US20070200070A1
    • 2007-08-30
    • US11364299
    • 2006-02-28
    • Rudolf Tromp
    • Rudolf Tromp
    • H01J37/153G01N23/225G01N23/227H01J37/05H01J37/26H01J49/46
    • H01J37/153H01J37/05H01J37/252H01J37/295H01J2237/055H01J2237/1534H01J2237/2538H01J2237/2544
    • An aberration-correcting microscopy instrument is provided. The instrument has a first magnetic deflector disposed for reception of a first non-dispersed electron diffraction pattern. The first magnetic deflector is also configured for projection of a first energy dispersed electron diffraction pattern in an exit plane of the first magnetic deflector. The instrument also has an electrostatic lens disposed in the exit plane of a first magnetic deflector, as well as a second magnetic deflector substantially identical to the first magnetic deflector. The second magnetic deflector is disposed for reception of the first energy dispersed electron diffraction pattern from the electrostatic lens. The second magnetic deflector is also configured for projection of a second non-dispersed electron diffraction pattern in a first exit plane of the second magnetic deflector. The instrument also has an electron mirror configured for correction of one or more aberrations in the second non-dispersed electron diffraction pattern. The electron mirror is disposed for reflection of the second non-dispersed electron diffraction pattern to the second magnetic deflector for projection of a second energy dispersed electron diffraction pattern in a second exit plane of the second magnetic deflector.
    • 提供了一种像差校正显微镜仪器。 仪器具有设置用于接收第一非分散电子衍射图案的第一磁偏转器。 第一磁偏转器还被配置用于在第一磁偏转器的出射平面中投射第一能量分散电子衍射图案。 仪器还具有设置在第一磁偏转器的出射平面中的静电透镜以及与第一磁偏转器基本相同的第二磁偏转器。 第二磁偏转器被设置用于从静电透镜接收第一能量分散电子衍射图案。 第二磁偏转器还被配置用于在第二磁偏转器的第一出射平面中投射第二非分散电子衍射图案。 仪器还具有配置用于校正第二非分散电子衍射图案中的一个或多个像差的电子反射镜。 电子反射镜被设置用于将第二非分散电子衍射图案反射到第二磁偏转器,用于在第二磁偏转器的第二出射平面中投射第二能量分散电子衍射图案。
    • 6. 发明授权
    • Energy filter, particularly for an electron microscope
    • 能量过滤器,特别适用于电子显微镜
    • US6040576A
    • 2000-03-21
    • US145397
    • 1998-09-01
    • Gerd Benner
    • Gerd Benner
    • G01Q30/02H01J37/05H01J49/46H01J37/26
    • H01J37/05H01J2237/28
    • An energy filter, particularly for electron microscopes, in which the setting of different energy bandwidths takes place electron-optically. For this purpose, one or more deflecting systems and one or more transfer lenses are provided at the filter exit. A diaphragm arrangement is arranged in the dispersion plane and has an opening with a stepped edge region. Slit diaphragms with different slit lengths can be simulated by deflection of the electron beam. The deflection of the electron beam effected by the dispersion system(s) perpendicularly to the dispersive direction of the filter is compensated again by a succeeding transfer lens or a further deflecting system, so that an image displacement is also compensated. In a second embodiment, a respective slit edge is arranged in two mutually conjugate spectrum planes. A deflecting system preceding each slit edge, different spectrum portions are filtered out by the two slit edges, according to the excitation of the deflecting systems. The energy bandwidth can be varied continuously in this embodiment.
    • 特别是用于电子显微镜的能量过滤器,其中不同能量带宽的设定以电子光学方式进行。 为此,在过滤器出口处设置一个或多个偏转系统和一个或多个传递透镜。 隔膜装置布置在分散平面中并且具有带有台阶边缘区域的开口。 可以通过电子束的偏转来模拟具有不同狭缝长度的狭缝膜片。 由分散系统垂直于滤色器的色散方向影响的电子束的偏转由后续的转印透镜或另外的偏转系统再次补偿,使得图像位移也被补偿。 在第二实施例中,相应的狭缝边缘被布置在两个相互共轭的光谱平面中。 根据偏转系统的激发,在每个狭缝边缘之前的偏转系统,不同的光谱部分被两个狭缝边缘滤出。 在本实施例中,能量带宽可以连续变化。
    • 7. 发明授权
    • Omega-type energy filter
    • 欧米茄型能量过滤器
    • US5955732A
    • 1999-09-21
    • US32569
    • 1998-02-27
    • Katsushige Tsuno
    • Katsushige Tsuno
    • H01J49/48H01J49/46
    • H01J49/48
    • There is disclosed a small-sized omega-type energy filter having reduced drift lengths and an increased merit function. Four magnetic fields M.sub.1, M.sub.2, M.sub.3, and M.sub.4 deflect the electron beam into an .OMEGA.-shaped orbit from the entrance window plane to the slit plane. The distance L.sub.4 from the exit end surface of the third field M.sub.3 to the entrance end surface of the fourth field M.sub.4 is set no greater than 50 .sqroot.U*/.sqroot.U*(200) mm. The deflection angle .PHI. is set to a range of from 120.degree.-50.degree. to 120.degree.+5.degree.. The distance L.sub.3 from the central plane between the second field M.sub.2 and the third field M.sub.3 to the entrance end surface of the third field M.sub.3 is set such that 20 .sqroot.U*/.sqroot.U*(200) mm .gtoreq.10.sqroot.U*/.sqroot.U*(200) mm. The distance L.sub.5 from the exit end surface of the fourth field M.sub.4 to the slit plane is set such that 30 .sqroot.U*/.sqroot.U*(200) mm.ltoreq.L.sub.5 .ltoreq.50 .sqroot.U*/.sqroot.U*(200) mm.
    • 公开了一种具有减小的漂移长度和增加的功能功能的小尺寸的ω-型能量过滤器。 四个磁场M1,M2,M3和M4将电子束从入射窗平面偏转到欧米茄形轨道到狭缝平面。 从第三场M3的出射端面到第四场M4的入射端面的距离L4被设定为不大于50 2ROOT + E,rad U * + EE / 2ROOT + E,rad U *(200)+ EE mm。 偏转角PHI设定在120°-50°至120°±5°的范围内。 从第二场M2和第三场M3之间的中心平面到第三场M3的入射端面的距离L3被设置为使得20 2ROOT + E,rad U * + EE / 2ROOT + E,rad U *( 200)+ EE mm> / = 10 2ROOT + E,rad U * + EE / 2ROOT + E,rad U *(200)+ EE mm。 将从第四场M4的出射端面到狭缝平面的距离L5设定为使得30 2ROOT + E,rad U * + EE / 2ROOT + E,rad U *(200)+ EE mm < / = 50 2ROOT + E,rad U * + EE / 2ROOT + E,rad U *(200)+ EE mm。
    • 8. 发明授权
    • High throughput electron energy analyzer
    • 高通量电子能量分析仪
    • US5583336A
    • 1996-12-10
    • US550164
    • 1995-10-30
    • Michael A. Kelly
    • Michael A. Kelly
    • H01J49/46
    • H01J49/46
    • A charged particle energy analyzer having higher sensitivity than conventional analyzers inserts a substantially parallel beam of charged particles into a uniform magnetic field at an angle to the field direction. The charged particles travel along the field direction and rotate perpendicular to it, forming helical trajectories. After traveling a given distance in the field direction, the total rotation each charged particle has undergone is measured. Because the total rotation is uniquely related to the energy of the particle, a spectrum showing the energy distribution of all the particles in the beam can be derived from these measurements. The enhanced sensitivity of this analyzer results from its ability to simultaneously analyze all the particles in a beam having a large energy spread.
    • 具有比常规分析器更高灵敏度的带电粒子能量分析器将大致平行的带电粒子束以与场方向成一定角度的均匀磁场插入。 带电粒子沿场方向移动并垂直于其旋转,形成螺旋轨迹。 在场方向行驶给定距离之后,测量每个带电粒子已经经过的总旋转。 由于总旋转与颗粒的能量唯一相关,所以可以从这些测量中导出显示光束中所有颗粒的能量分布的光谱。 该分析仪的增强灵敏度来自于其能够同时分析具有大能量扩展的光束中的所有粒子的能力。