会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明申请
    • Megasonic cleaning using supersaturated cleaning solution
    • 超声波清洗使用过饱和清洗液
    • US20050161059A1
    • 2005-07-28
    • US10864929
    • 2004-06-10
    • Cole FranklinYi WuBrian Fraser
    • Cole FranklinYi WuBrian Fraser
    • B08B3/00B08B7/00
    • B08B3/12H01L21/67051Y10S438/906
    • A method and system for the megasonic cleaning of one or more substrates that reduces damage to the substrate(s) resulting from the megasonic energy. The substrates are supported in a process chamber and contacted with a cleaning solution comprising a cleaning liquid having carbon dioxide gas dissolved in the cleaning liquid in such amounts that the carbon dioxide gas is at a supersaturated concentration for the conditions within the process chamber. Megasonic energy is then transmitted to the substrate. The cleaning solution provides protection from damage resulting from the application of megasonic/acoustical energy. In another aspect, the invention is a system for carrying out the method. The invention is not limited to carbon dioxide but can be used in conjunction with any gas that, when so dissolved in a cleaning liquid, protects substrates from being damaged by the application of megasonic/acoustical energy.
    • 用于超声波清洗一个或多个基板的方法和系统,其减少由兆声波能量引起的对基板的损坏。 基板被支撑在处理室中,并与包括清洁液体的清洁溶液接触,所述清洗溶液包含溶解在清洗液体中的二氧化碳气体的清洗液体,其量使二氧化碳气体处于处理室内的条件的过饱和浓度。 然后将兆声波能量传输到基板。 清洁液可以防止因应用超声波/声能造成的损坏。 另一方面,本发明是一种执行该方法的系统。 本发明不限于二氧化碳,而是可以与任何气体一起使用,当这些气体溶解在清洁液体中时,可以保护基材免受应用兆声/声能的损害。
    • 3. 发明授权
    • Megasonic cleaning using supersaturated cleaning solution
    • 超声波清洗使用过饱和清洗液
    • US07156111B2
    • 2007-01-02
    • US10864929
    • 2004-06-10
    • Cole S. FranklinYi WuBrian Fraser
    • Cole S. FranklinYi WuBrian Fraser
    • B08B3/00
    • B08B3/12H01L21/67051Y10S438/906
    • A method and system for the megasonic cleaning of one or more substrates that reduces damage to the substrate(s) resulting from the megasonic energy. The substrates are supported in a process chamber and contacted with a cleaning solution comprising a cleaning liquid having carbon dioxide gas dissolved in the cleaning liquid in such amounts that the carbon dioxide gas is at a supersaturated concentration for the conditions within the process chamber. Megasonic energy is then transmitted to the substrate. The cleaning solution provides protection from damage resulting from the application of megasonic/acoustical energy. In another aspect, the invention is a system for carrying out the method. The invention is not limited to carbon dioxide but can be used in conjunction with any gas that, when so dissolved in a cleaning liquid, protects substrates from being damaged by the application of megasonic/acoustical energy.
    • 用于超声波清洗一个或多个基板的方法和系统,其减少由兆声波能量引起的对基板的损坏。 基板被支撑在处理室中,并与包括清洁液体的清洁溶液接触,所述清洗溶液具有溶解在清洗液中的二氧化碳气体,其量使二氧化碳气体处于处理室内的条件的过饱和浓度。 然后将兆声波能量传输到基板。 清洁液可以防止因应用超声波/声能造成的损坏。 另一方面,本发明是一种执行该方法的系统。 本发明不限于二氧化碳,而是可以与任何气体一起使用,当这些气体溶解在清洁液体中时,可以保护基材免受应用兆声/声能的损害。
    • 4. 发明授权
    • Megasonic cleaning using supersaturated solution
    • 超声波清洗使用过饱和溶液
    • US07578302B2
    • 2009-08-25
    • US11595029
    • 2006-11-09
    • Cole S. FranklinYi WuBrian Fraser
    • Cole S. FranklinYi WuBrian Fraser
    • B08B3/00
    • B08B3/12H01L21/67051Y10S438/906
    • A method and system for the megasonic cleaning of one or more substrates that reduces damage to the substrate(s) resulting from the megasonic energy. The substrates are supported in a process chamber and contacted with a cleaning solution comprising a cleaning liquid having carbon dioxide gas dissolved in the cleaning liquid in such amounts that the carbon dioxide gas is at a supersaturated concentration for the conditions within the process chamber. Megasonic energy is then transmitted to the substrate. The cleaning solution provides protection from damage resulting from the application of megasonic/acoustical energy. The invention is not limited to carbon dioxide but can be used in conjunction with any gas that, when so dissolved in a cleaning liquid, protects substrates from being damaged by the application of megasonic/acoustical energy.
    • 用于超声波清洗一个或多个基板的方法和系统,其减少由兆声波能量引起的对基板的损坏。 基板被支撑在处理室中,并与包括清洁液体的清洁溶液接触,所述清洗溶液具有溶解在清洗液中的二氧化碳气体,其量使二氧化碳气体处于处理室内的条件的过饱和浓度。 然后将兆声波能量传输到基板。 清洁液可以防止因应用超声波/声能造成的损坏。 本发明不限于二氧化碳,而是可以与任何气体一起使用,当这些气体溶解在清洁液体中时,可以保护基材免受应用兆声/声能的损害。
    • 5. 发明申请
    • Megasonic cleaning using supersaturated solution
    • 超声波清洗使用过饱和溶液
    • US20070056605A1
    • 2007-03-15
    • US11595029
    • 2006-11-09
    • Cole FraklinYi WuBrian Fraser
    • Cole FraklinYi WuBrian Fraser
    • B08B3/12C23G1/00B08B6/00
    • B08B3/12H01L21/67051Y10S438/906
    • A method and system for the megasonic cleaning of one or more substrates that reduces damage to the substrate(s) resulting from the megasonic energy. The substrates are supported in a process chamber and contacted with a cleaning solution comprising a cleaning liquid having carbon dioxide gas dissolved in the cleaning liquid in such amounts that the carbon dioxide gas is at a supersaturated concentration for the conditions within the process chamber. Megasonic energy is then transmitted to the substrate. The cleaning solution provides protection from damage resulting from the application of megasonic/acoustical energy. The invention is not limited to carbon dioxide but can be used in conjunction with any gas that, when so dissolved in a cleaning liquid, protects substrates from being damaged by the application of megasonic/acoustical energy.
    • 用于超声波清洗一个或多个基板的方法和系统,其减少由兆声波能量引起的对基板的损坏。 基板被支撑在处理室中,并与包括清洁液体的清洁溶液接触,所述清洗溶液具有溶解在清洗液中的二氧化碳气体,其量使二氧化碳气体处于处理室内的条件的过饱和浓度。 然后将兆声波能量传输到基板。 清洁液可以防止因应用超声波/声能造成的损坏。 本发明不限于二氧化碳,而是可以与任何气体一起使用,当这些气体溶解在清洁液体中时,可以保护基材免受应用兆声/声能的损害。
    • 10. 发明授权
    • Method, network element and system for scheduling communication link
    • 方法,网元和系统调度通信链路
    • US09100980B2
    • 2015-08-04
    • US13583264
    • 2010-03-08
    • Yi WuHai Jiang
    • Yi WuHai Jiang
    • H04W72/12H04B7/26
    • H04W72/1263H04B7/2656H04W72/1257
    • Provided is a method for scheduling a communication link, wherein the communication link is adapted for connecting two network elements, wherein a first carrier and a second carrier are assigned to the communication link, wherein each carrier includes frames divided into timeslots, and a predefined number of timeslots is allocated for downlink communication and a predefined number of timeslots is allocated for uplink communication. The method includes scheduling the communication link for offsetting the start of the frames of the first carrier in respect to the start of the frames of the second carrier. Also provided are a network element adapted for carrying out the method and a system including the network element.
    • 提供了一种用于调度通信链路的方法,其中通信链路适于连接两个网络元件,其中第一载波和第二载波被分配给通信链路,其中每个载波包括划分为时隙的帧和预定义的数字 分配时隙用于下行链路通信,并且预定数量的时隙被分配用于上行链路通信。 该方法包括调度通信链路,以相对于第二载波的帧的开始来抵消第一载波的帧的开始。 还提供了适于执行该方法的网元和包括该网元的系统。