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1. 发明授权

US07104268B2 Megasonic cleaning system with buffered cavitation method 有权
标题翻译：具有缓冲空化法的超声波清洗系统
公开(公告)号：US07104268B2
公开(公告)日：2006-09-12
申请号：US10341425
申请日：2003-01-10
申请人： Yi Wu , Cole S. Franklin , Brian Fraser , Thomas Nicolosi
发明人： Yi Wu , Cole S. Franklin , Brian Fraser , Thomas Nicolosi
IPC分类号： B08B6/00
CPC分类号： B08B3/12 , Y10S438/906
摘要： A wafer cleaning method and system including a combined high frequency signal, a low frequency signal, and in one embodiment a biased voltage signal, allows cleaning particles and impurities off of fine-structured wafers, through application of an acoustic field to the wafer through a cleaning liquid which fosters micro-bubble formation for effective cleaning while buffering micro-bubble growth which would otherwise damage the wafer.
摘要翻译：一种晶片清洗方法和系统，包括组合的高频信号，低频信号，在一个实施例中为偏置电压信号，允许通过将声场施加到晶片通过一个清洁液体，其促进微气泡形成以有效清洁，同时缓冲微气泡生长，否则会损坏晶片。

2. 发明授权

US07156111B2 Megasonic cleaning using supersaturated cleaning solution 有权
标题翻译：超声波清洗使用过饱和清洗液
公开(公告)号：US07156111B2
公开(公告)日：2007-01-02
申请号：US10864929
申请日：2004-06-10
申请人： Cole S. Franklin , Yi Wu , Brian Fraser
发明人： Cole S. Franklin , Yi Wu , Brian Fraser
IPC分类号： B08B3/00
CPC分类号： B08B3/12 , H01L21/67051 , Y10S438/906
摘要： A method and system for the megasonic cleaning of one or more substrates that reduces damage to the substrate(s) resulting from the megasonic energy. The substrates are supported in a process chamber and contacted with a cleaning solution comprising a cleaning liquid having carbon dioxide gas dissolved in the cleaning liquid in such amounts that the carbon dioxide gas is at a supersaturated concentration for the conditions within the process chamber. Megasonic energy is then transmitted to the substrate. The cleaning solution provides protection from damage resulting from the application of megasonic/acoustical energy. In another aspect, the invention is a system for carrying out the method. The invention is not limited to carbon dioxide but can be used in conjunction with any gas that, when so dissolved in a cleaning liquid, protects substrates from being damaged by the application of megasonic/acoustical energy.
摘要翻译：用于超声波清洗一个或多个基板的方法和系统，其减少由兆声波能量引起的对基板的损坏。基板被支撑在处理室中，并与包括清洁液体的清洁溶液接触，所述清洗溶液具有溶解在清洗液中的二氧化碳气体，其量使二氧化碳气体处于处理室内的条件的过饱和浓度。然后将兆声波能量传输到基板。清洁液可以防止因应用超声波/声能造成的损坏。另一方面，本发明是一种执行该方法的系统。本发明不限于二氧化碳，而是可以与任何气体一起使用，当这些气体溶解在清洁液体中时，可以保护基材免受应用兆声/声能的损害。

3. 发明授权

US07578302B2 Megasonic cleaning using supersaturated solution 有权
标题翻译：超声波清洗使用过饱和溶液
公开(公告)号：US07578302B2
公开(公告)日：2009-08-25
申请号：US11595029
申请日：2006-11-09
申请人： Cole S. Franklin , Yi Wu , Brian Fraser
发明人： Cole S. Franklin , Yi Wu , Brian Fraser
IPC分类号： B08B3/00
CPC分类号： B08B3/12 , H01L21/67051 , Y10S438/906
摘要： A method and system for the megasonic cleaning of one or more substrates that reduces damage to the substrate(s) resulting from the megasonic energy. The substrates are supported in a process chamber and contacted with a cleaning solution comprising a cleaning liquid having carbon dioxide gas dissolved in the cleaning liquid in such amounts that the carbon dioxide gas is at a supersaturated concentration for the conditions within the process chamber. Megasonic energy is then transmitted to the substrate. The cleaning solution provides protection from damage resulting from the application of megasonic/acoustical energy. The invention is not limited to carbon dioxide but can be used in conjunction with any gas that, when so dissolved in a cleaning liquid, protects substrates from being damaged by the application of megasonic/acoustical energy.
摘要翻译：用于超声波清洗一个或多个基板的方法和系统，其减少由兆声波能量引起的对基板的损坏。基板被支撑在处理室中，并与包括清洁液体的清洁溶液接触，所述清洗溶液具有溶解在清洗液中的二氧化碳气体，其量使二氧化碳气体处于处理室内的条件的过饱和浓度。然后将兆声波能量传输到基板。清洁液可以防止因应用超声波/声能造成的损坏。本发明不限于二氧化碳，而是可以与任何气体一起使用，当这些气体溶解在清洁液体中时，可以保护基材免受应用兆声/声能的损害。

4. 发明申请

US20060260641A1 Megasonic cleaning system with buffered cavitation method 审中-公开
标题翻译：具有缓冲空化法的超声波清洗系统
公开(公告)号：US20060260641A1
公开(公告)日：2006-11-23
申请号：US11489059
申请日：2006-07-18
申请人： Yi Wu , Cole Franklin , Brian Fraser , Thomas Nicolosi
发明人： Yi Wu , Cole Franklin , Brian Fraser , Thomas Nicolosi
IPC分类号： B08B3/12
CPC分类号： B08B3/12 , Y10S438/906
摘要： An acoustic energy cleaning system and method which fosters micro-bubble formation for effective cleaning while buffering micro-bubble growth which would otherwise damage the wafer. In one embodiment, the invention includes combining a first frequency signal and a second frequency signal having a positive amplitude bias component so as to form a combined signal. The combined signal, which has a positive amplitude offset, is applied to a transducer system that converts the combined signal into acoustic waves. The acoustic waves can be applied to the object to be cleaned in a cleaning fluid.
摘要翻译：一种声能清洁系统和方法，其促进微气泡形成以有效清洁，同时缓冲微气泡生长，否则会破坏晶片。在一个实施例中，本发明包括组合第一频率信号和具有正振幅偏置分量的第二频率信号以形成组合信号。具有正振幅偏移的组合信号被施加到将组合信号转换成声波的换能器系统。声波可以在清洗液中施加到待清洁的物体上。

5. 发明申请

US20050087209A1 Megasonic processing system with gasified fluid 审中-公开
标题翻译：具有气化流体的超声波处理系统
公开(公告)号：US20050087209A1
公开(公告)日：2005-04-28
申请号：US10931457
申请日：2004-09-01
申请人： Thomas Nicolosi , Yi Wu , Ismail Kaskkoush
发明人： Thomas Nicolosi , Yi Wu , Ismail Kaskkoush
IPC分类号： B08B3/12 , H01L21/00
CPC分类号： H01L21/67051 , B08B3/12 , B08B2203/005 , G03F7/42 , G03F7/425 , G03F7/428 , H01L21/02052
摘要： An apparatus and method for substrate processing, specifically including cleaning and/or photoresist stripping, in non-immersion type megasonic processing tools. In one embodiment, the invention utilizes the concept of dissolving a gas into a liquid at or near the point of use with a gasifier, such as a membrane contactor, during the processing of the substrate, thus eliminating the need for pre-made liquid/gas processing mixtures that are typically stored in auxiliary tanks. In one aspect, the invention is an apparatus comprising: a process chamber having a support for supporting a substrate; a source of liquid; a supply line coupling said source of liquid to said process chamber; a gasifier operatively coupled to said supply line, said gasifier causing a gas to be dissolved into said liquid to form a mixture of said liquid and said gas; means for applying a film of said mixture to one side of said substrate while on said support, said first means being in fluid association with said supply line; and a transmitter configured to apply sonic energy to said substrate. The method comprises, in one aspect: supporting a substrate in a process chamber; supplying a liquid to said process chamber from a source of said liquid via a supply line; dissolving a gas into said liquid with a gasifer operatively coupled to said supply line to form a mixture of said liquid and said gas; applying a film of said mixture to one side of said substrate; and applying sonic energy to said substrate while said mixture is being applied. When used to remove photoresist from substrates, the fluid will preferably be deionized water and the gas will be ozone gas.
摘要翻译：一种用于非浸没式兆声处理工具中的衬底处理的装置和方法，具体包括清洗和/或光刻胶剥离。在一个实施方案中，本发明利用在基材处理期间将气体溶解到与使用点处或附近的液体的概念，例如膜接触器，因此不需要预制的液体/ 通常储存在辅助罐中的气体处理混合物。一方面，本发明是一种装置，包括：处理室，具有用于支撑基板的支撑件; 液体来源; 将所述液体源连接到所述处理室的供应管线; 气化器，其可操作地耦合到所述供应管线，所述气化器引起气体溶解到所述液体中以形成所述液体和所述气体的混合物; 用于在所述支撑件上将所述混合物的膜施加到所述衬底的一侧上的装置，所述第一装置与所述供应管线流体相连; 以及发射机，被配置为向所述基底施加声能。该方法在一个方面包括：在处理室中支撑衬底; 通过供应管线从所述液体源向所述处理室供应液体; 将气体溶解到所述液体中，其中气体可操作地连接到所述供应管线以形成所述液体和所述气体的混合物; 将所述混合物的膜施加到所述基底的一侧; 以及在施加所述混合物时将声能施加到所述衬底。当用于从基底去除光致抗蚀剂时，流体优选是去离子水，气体将是臭氧气体。

6. 发明申请

US20050161059A1 Megasonic cleaning using supersaturated cleaning solution 有权
标题翻译：超声波清洗使用过饱和清洗液
公开(公告)号：US20050161059A1
公开(公告)日：2005-07-28
申请号：US10864929
申请日：2004-06-10
申请人： Cole Franklin , Yi Wu , Brian Fraser
发明人： Cole Franklin , Yi Wu , Brian Fraser
IPC分类号： B08B3/00 , B08B7/00
CPC分类号： B08B3/12 , H01L21/67051 , Y10S438/906
摘要： A method and system for the megasonic cleaning of one or more substrates that reduces damage to the substrate(s) resulting from the megasonic energy. The substrates are supported in a process chamber and contacted with a cleaning solution comprising a cleaning liquid having carbon dioxide gas dissolved in the cleaning liquid in such amounts that the carbon dioxide gas is at a supersaturated concentration for the conditions within the process chamber. Megasonic energy is then transmitted to the substrate. The cleaning solution provides protection from damage resulting from the application of megasonic/acoustical energy. In another aspect, the invention is a system for carrying out the method. The invention is not limited to carbon dioxide but can be used in conjunction with any gas that, when so dissolved in a cleaning liquid, protects substrates from being damaged by the application of megasonic/acoustical energy.
摘要翻译：用于超声波清洗一个或多个基板的方法和系统，其减少由兆声波能量引起的对基板的损坏。基板被支撑在处理室中，并与包括清洁液体的清洁溶液接触，所述清洗溶液包含溶解在清洗液体中的二氧化碳气体的清洗液体，其量使二氧化碳气体处于处理室内的条件的过饱和浓度。然后将兆声波能量传输到基板。清洁液可以防止因应用超声波/声能造成的损坏。另一方面，本发明是一种执行该方法的系统。本发明不限于二氧化碳，而是可以与任何气体一起使用，当这些气体溶解在清洁液体中时，可以保护基材免受应用兆声/声能的损害。

7. 发明申请

US20070056605A1 Megasonic cleaning using supersaturated solution 有权
标题翻译：超声波清洗使用过饱和溶液
公开(公告)号：US20070056605A1
公开(公告)日：2007-03-15
申请号：US11595029
申请日：2006-11-09
申请人： Cole Fraklin , Yi Wu , Brian Fraser
发明人： Cole Fraklin , Yi Wu , Brian Fraser
IPC分类号： B08B3/12 , C23G1/00 , B08B6/00
CPC分类号： B08B3/12 , H01L21/67051 , Y10S438/906
摘要： A method and system for the megasonic cleaning of one or more substrates that reduces damage to the substrate(s) resulting from the megasonic energy. The substrates are supported in a process chamber and contacted with a cleaning solution comprising a cleaning liquid having carbon dioxide gas dissolved in the cleaning liquid in such amounts that the carbon dioxide gas is at a supersaturated concentration for the conditions within the process chamber. Megasonic energy is then transmitted to the substrate. The cleaning solution provides protection from damage resulting from the application of megasonic/acoustical energy. The invention is not limited to carbon dioxide but can be used in conjunction with any gas that, when so dissolved in a cleaning liquid, protects substrates from being damaged by the application of megasonic/acoustical energy.
摘要翻译：用于超声波清洗一个或多个基板的方法和系统，其减少由兆声波能量引起的对基板的损坏。基板被支撑在处理室中，并与包括清洁液体的清洁溶液接触，所述清洗溶液具有溶解在清洗液中的二氧化碳气体，其量使二氧化碳气体处于处理室内的条件的过饱和浓度。然后将兆声波能量传输到基板。清洁液可以防止因应用超声波/声能造成的损坏。本发明不限于二氧化碳，而是可以与任何气体一起使用，当这些气体溶解在清洁液体中时，可以保护基材免受应用兆声/声能的损害。

8. 发明授权

US09716826B2 Guided image capture 有权
公开(公告)号：US09716826B2
公开(公告)日：2017-07-25
申请号：US13997990
申请日：2011-12-07
申请人： Yi Wu , Maha El Choubassi , Igor V. Kozintsev , Richard T. Beckwith , Kenneth T. Anderson , Maria Bezaitis
发明人： Yi Wu , Maha El Choubassi , Igor V. Kozintsev , Richard T. Beckwith , Kenneth T. Anderson , Maria Bezaitis
IPC分类号： H04N7/00 , H04N5/232 , H04N13/02
CPC分类号： H04N5/23222 , H04N5/23206 , H04N5/23238 , H04N13/211 , H04N13/296
摘要： Examples are disclosed for determining a suggested camera pose or suggested camera settings for a user to capture one or more images. In some examples, the suggested camera pose or suggested camera settings may be based on an indication of the user's interest and gathered information associated with the user's interests. The user may be guided to adjust an actual camera pose or actual camera settings to match the suggested camera pose or suggested camera settings.

9. 发明授权

US09418438B2 Networked capture and 3D display of localized, segmented images 有权
标题翻译：网络捕获和3D显示本地化，分段图像
公开(公告)号：US09418438B2
公开(公告)日：2016-08-16
申请号：US13977339
申请日：2011-09-12
申请人： Joshua Ratcliff , Yi Wu , Maha El Choubassi , Yoram Gat , Wei Sun , Kalpana Seshadrinathan , Igor V. Kozintsev
发明人： Joshua Ratcliff , Yi Wu , Maha El Choubassi , Yoram Gat , Wei Sun , Kalpana Seshadrinathan , Igor V. Kozintsev
IPC分类号： G06T7/00 , G06T19/20 , G06K9/34 , G06K9/00
CPC分类号： G06T7/0081 , G06K9/00228 , G06K9/342 , G06T7/11 , G06T7/174 , G06T7/194 , G06T7/74 , G06T19/20 , G06T2207/10012 , G06T2207/10024 , G06T2207/20221 , G06T2207/20224 , G06T2207/30196 , G06T2207/30201 , G06T2207/30244
摘要： Systems, devices and methods are described including receiving a source image having a foreground portion and a background portion, where the background portion includes image content of a three-dimensional (3D) environment. A camera pose of the source image may be determined by comparing features of the source image to image features of target images of the 3D environment and using the camera pose to segment the foreground portion from the background portion may generate a segmented source image. The resulting segmented source image and the associated camera pose may be stored in a networked database. The camera pose and segmented source image may be used to provide a simulation of the foreground portion in a virtual 3D environment.
摘要翻译：描述了系统，设备和方法，其包括接收具有前景部分和背景部分的源图像，其中背景部分包括三维（3D）环境的图像内容。源图像的相机姿态可以通过将源图像的特征与3D环境的目标图像的图像特征进行比较来确定，并且使用相机姿态来从背景部分分割前景部分可以生成分割的源图像。所产生的分割的源图像和相关联的摄像机姿态可以存储在联网的数据库中。相机姿态和分割的源图像可以用于在虚拟3D环境中提供前景部分的模拟。

10. 发明授权

US09106908B2 Video communication with three dimensional perception 有权
标题翻译：视频通信与三维感知
公开(公告)号：US09106908B2
公开(公告)日：2015-08-11
申请号：US13561131
申请日：2012-07-30
申请人： Yi Wu , Wei Sun , Michael M. Chu , Ermal Dreshaj , Philip Muse , Lucas B. Ainsworth , Garth Shoemaker , Igor V. Kozintsev
发明人： Yi Wu , Wei Sun , Michael M. Chu , Ermal Dreshaj , Philip Muse , Lucas B. Ainsworth , Garth Shoemaker , Igor V. Kozintsev
IPC分类号： H04N15/00 , H04N13/00 , H04N13/04 , H04N5/222 , H04N5/232
CPC分类号： H04N13/376 , G06T7/11 , G06T7/194 , G06T2207/10028 , H04N5/2226 , H04N5/23219 , H04N7/147 , H04N13/156 , H04N13/161 , H04N13/194 , H04N13/20 , H04N13/30 , H04N2013/0092 , H04N2213/006
摘要： Generally, this disclosure provides methods and systems for real-time video communication with three dimensional perception image rendering through generated parallax effects based on identification, segmentation and tracking of foreground and background layers of an image. The system may include an image segmentation module configured to segment a current local video frame into a local foreground layer and a local background layer and to generate a local foreground mask based on an estimated boundary between the local foreground layer and the local background layer; a face tracking module configured to track a position of a local user's face; a background layer estimation module configured to estimate a remote background layer; and an image rendering module configured to render a 3D perception image based on the estimated remote background layer, the current remote video frame and the remote foreground mask.
摘要翻译：通常，本公开提供了通过基于图像的前景和背景层的识别，分割和跟踪的生成的视差效应来实现具有三维感知图像呈现的实时视频通信的方法和系统。该系统可以包括图像分割模块，其被配置为将当前局部视频帧分割成本地前景层和本地背景层，并且基于本地前景层和本地背景层之间的估计边界来生成本地前景屏蔽; 面部跟踪模块，被配置为跟踪本地用户的脸部的位置; 配置为估计远程背景层的背景层估计模块; 以及图像渲染模块，被配置为基于估计的远程背景层，当前远程视频帧和远程前景掩码来渲染3D感知图像。

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