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    • 6. 发明授权
    • Planar magnetic inductor and method for manufacturing the same
    • 平面磁感应器及其制造方法
    • US07480980B2
    • 2009-01-27
    • US11724211
    • 2007-03-15
    • Hyung Mi JungJin Seok MoonSeok BaeMano Yasuhiko
    • Hyung Mi JungJin Seok MoonSeok BaeMano Yasuhiko
    • H01F7/06
    • H01F17/0006H01F41/046H01F41/26H05K1/0306H05K1/165H05K3/108Y10T29/4902
    • A planar magnetic inductor and a method for manufacturing the same are provided. The planar magnetic inductor comprises an insulating oxide magnetic layer formed on a substrate, a conductive coil separated from a lower surface of the insulating oxide magnetic layer while being completely embedded in the insulating oxide magnetic layer, and a cover layer formed on the insulating oxide magnetic layer for protecting the insulating oxide magnetic layer. The insulating oxide magnetic layer comprises a lower insulating oxide magnetic layer, and an upper insulating oxide magnetic layer formed on the lower insulating oxide magnetic layer, such that the conductive coil is completely embedded in the upper insulating oxide magnetic layer. The planar magnetic inductor can realize excellent high frequency characteristics and high inductance with a reduced scale.
    • 提供一种平面磁感应器及其制造方法。 平面磁感应器包括形成在基板上的绝缘氧化物磁性层,在绝缘氧化物磁性层完全嵌入绝缘氧化物磁性层的下表面分离的导电线圈,以及形成在绝缘氧化物磁性层上的覆盖层 用于保护绝缘氧化物磁性层的层。 绝缘氧化物磁性层包括下绝缘氧化物磁性层和形成在下绝缘氧化物磁性层上的上绝缘氧化物磁性层,使得导电线圈完全嵌入上绝缘氧化物磁性层中。 平面磁感应器可以实现优异的高频特性和较小的电感。