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1. 发明申请

WO2012177663A2 AUTOFOCUS SYSTEM WITH REFERENCE CONFIGURATION 审中-公开
标题翻译：具有参考配置的自动对焦系统
公开(公告)号：WO2012177663A2
公开(公告)日：2012-12-27
申请号：PCT/US2012043186
申请日：2012-06-19
申请人： NIPPON KOGAKU KK , SOGARD MICHAEL R , SMITH DANIEL GENE , GOODWIN ERIC PETER
发明人： SOGARD MICHAEL R , SMITH DANIEL GENE , GOODWIN ERIC PETER
IPC分类号： G06T7/20
CPC分类号： G01B11/026 , G01B11/00 , G03F9/7026 , G06T7/70 , G06T2207/30148 , H04N5/23212
摘要： A system (222) for measuring the position of a work piece (200) includes a redirector assembly (244), a light source assembly (240), a detector assembly (242), and a control system (224). The redirector assembly (244) is positioned near and spaced apart from the working surface (200A). The light source assembly (240) directs a measurement beam (246A) and a reference beam (246B) at the redirector assembly (244). The detector assembly (242) detects the measurement beam (246A) reflected off of the work piece (200) and generates a measurement signal, and detects the reference beam (246B) reflected off of the redirector assembly (244) and generates a reference signal. The control system (24) uses the measurement signal and the reference signal to determine the position of the work piece (200).
摘要翻译：用于测量工件（200）的位置的系统（222）包括重定向器组件（244），光源组件（240），检测器组件（242）和控制系统（224）。重定向器组件（244）位于工作表面（200A）附近和间隔开的位置。光源组件（240）在重定向器组件（244）处引导测量光束（246A）和参考光束（246B）。检测器组件（242）检测从工件（200）反射的测量光束（246A），并产生测量信号，并检测从转向器组件（244）反射的参考光束（246B），并产生参考信号。控制系统（24）使用测量信号和参考信号来确定工件（200）的位置。

2. 发明申请

WO2012061163A2 APPARATUS, OPTICAL ASSEMBLY, METHOD FOR INSPECTION OR MEASUREMENT OF AN OBJECT AND METHOD FOR MANUFACTURING A STRUCTURE 审中-公开
标题翻译：装置，光学组件，检查或测量物体的方法以及制造结构的方法
公开(公告)号：WO2012061163A2
公开(公告)日：2012-05-10
申请号：PCT/US2011057758
申请日：2011-10-25
申请人： NIPPON KOGAKU KK , GOODWIN ERIC PETER , WILLIAMSON DAVID MICHAEL , SMITH DANIEL GENE , PHARAND MICHEL , COOPER ALEXANDER , ROBERTSON ALEC , STAMPER BRIAN L
发明人： GOODWIN ERIC PETER , WILLIAMSON DAVID MICHAEL , SMITH DANIEL GENE , PHARAND MICHEL , COOPER ALEXANDER , ROBERTSON ALEC , STAMPER BRIAN L
IPC分类号： G06T7/40
CPC分类号： G01N21/01 , G01B11/026 , G01N2021/1793 , G01S7/4814 , G01S7/4817 , G01S7/4818
摘要： An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.
摘要翻译：提供了一种用于检查或测量物体的系统的光学组件，该系统被配置为当系统指向目标时作为一个单元与系统一起移动，并且不需要大型扫描（指向）反射镜相对于系统的其他部分可移动。该光学组件包括反射折射型光学器件，该反射折射型光学器件被构造成折叠正被引导通过系统的出口的指向光束和测量光束的光路，以压缩光学组件的尺寸。

3. 发明申请

WO2013093633A3 ENHANCEMENTS TO INTEGRATED OPTICAL ASSEMBLY 审中-公开
标题翻译：增强集成光学组件
公开(公告)号：WO2013093633A3
公开(公告)日：2013-11-07
申请号：PCT/IB2012003023
申请日：2012-12-23
申请人： NIPPON KOGAKU KK
发明人： SMITH DANIEL GENE
IPC分类号： G02B26/10 , G02B26/12
CPC分类号： G01B11/24 , G01S7/481 , G01S7/4972 , G02B5/122 , G02B26/10
摘要： An integrated optical assembly is provided, with enhancements that are particularly useful when the integrated optical assembly forms part of a laser radar system. The integrated optical assembly produces a reference beam that is related to the optical characteristics of a scanning reflector, or to changes in position or orientation of the scanning reflector relative to a source. Thus, if the scanning reflector orientation were to shift from its intended orientation (due e.g. to thermal expansion) or if characteristics of the scanning reflector (e.g. the index of refraction of the scanning reflector) were to change on account of temperature changes, the reference beam can be used to provide data that can be used to account for such changes. In addition, if the scanning reflector were to be positioned in an orientation other than the orientation desired, the reference beam can be used in identifying and correcting that positioning.
摘要翻译：提供集成光学组件，其增强特性在集成光学组件形成激光雷达系统的一部分时特别有用。集成光学组件产生参考光束，该参考光束与扫描反射器的光学特性相关或者改变扫描反射器相对于源的位置或方向。因此，如果扫描反射器取向从其预期取向（例如由于热膨胀引起）偏移或者如果扫描反射器的特性（例如，扫描反射器的折射率）由于温度变化而改变，则参考光束可用于提供可用于说明这些变化的数据。另外，如果扫描反射器的定位方向不同于所需的定向，则参考光束可用于识别和校正该定位。

4. 发明申请

WO2015031858A3 EIGHT WAVE CORNER CUBE RETARDER FOR LASER RADAR 审中-公开
标题翻译：用于激光雷达的EIGHT WAVE CORNER CUBE延迟器
公开(公告)号：WO2015031858A3
公开(公告)日：2015-04-23
申请号：PCT/US2014053585
申请日：2014-08-29
申请人： NIPPON KOGAKU KK
发明人： SMITH DANIEL GENE
IPC分类号： G02B5/122
CPC分类号： G01S7/4812 , G01S7/4813 , G01S7/4818 , G01S7/499 , G01S17/08 , G01S17/42 , G01S17/66 , G02B5/04
摘要： Laser radar systems include focusing optical systems having a retroreflector such as a comer cube that is translatable with respect to an objective lens. The retroreflector provides a selected retardance to an interrogation optical beam that is directed to a target as well as to a returned portion of the interrogation optical beam that is directed to a detection system. Typically, an input linearly polarized interrogation beam is returned by the retroreflector as a circularly polarized beam that is directed to the target. Returned beam portions from the target are coupled by the retroreflector to a detection system in a linear polarization that is orthogonal to that of the input linearly polarized optical beam.
摘要翻译：激光雷达系统包括具有回射器的聚焦光学系统，诸如可相对于物镜平移的角立方体。后向反射器向询问光束提供选择的延迟，其被引导到目标以及被引导到检测系统的询问光束的返回部分。通常，输入线性偏振询问光束由回射器作为被引导到目标的圆偏振光束返回。来自目标的返回光束部分由后向反射器耦合到与输入的线偏振光束的线偏振正交的线性偏振的检测系统。

5. 发明申请

WO2014081043A3 OPTICAL POINTING SYSTEM 审中-公开
标题翻译：光点指示系统
公开(公告)号：WO2014081043A3
公开(公告)日：2014-07-17
申请号：PCT/JP2013081827
申请日：2013-11-20
申请人： NIPPON KOGAKU KK , NIKON METROLOGY NV
发明人： GOODWIN ERIC PETER , SMITH DANIEL GENE , COOPER ALEXANDER , REZK MINA , SLOTWINSKI ANTHONY , HEDGES THOMAS
IPC分类号： G01S7/481 , G01S7/491 , G01S17/32
CPC分类号： G01S17/102 , G01S7/4812 , G01S7/4817 , G01S7/4818 , G01S7/4917 , G01S17/325 , G01S17/66 , G02B26/101 , G02B26/108
摘要： Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
摘要翻译：激光雷达系统包括配置成相对于目标表面扫描测量光束的五棱镜。聚焦光学组件包括用于调节测量光束聚焦的角立方体。基于返回波束和本地振荡器波束之间的外差频率来估计目标距离。本地振荡器束配置成在与返回光束混合之前传播到聚焦光学组件和/或从聚焦光学组件传播。在一些示例中，使用具有固定到铝硅酸锂玻璃 - 陶瓷管的镜子的法布里 - 珀罗干涉仪来校准相对于目标距离的外差频率。

6. 发明公开

EP2633364A4 APPARATUS, OPTICAL ASSEMBLY, METHOD FOR INSPECTION OR MEASUREMENT OF AN OBJECT AND METHOD FOR MANUFACTURING A STRUCTURE 审中-公开
标题翻译：设备，光学布置，其方法为讯问或测量物体及其制造方法的结构
公开(公告)号：EP2633364A4
公开(公告)日：2014-07-02
申请号：EP11838550
申请日：2011-10-25
申请人： NIPPON KOGAKU KK
发明人： GOODWIN ERIC PETER , WILLIAMSON DAVID MICHAEL , SMITH DANIEL GENE , PHARAND MICHEL , COOPER ALEXANDER , ROBERTSON ALEC , STAMPER BRIAN L
IPC分类号： G01S7/481 , G01B11/02 , G01N21/01 , G02B19/00 , G02B26/10
CPC分类号： G01N21/01 , G01B11/026 , G01N2021/1793 , G01S7/4814 , G01S7/4817 , G01S7/4818
摘要： An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.

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