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    • 1. 发明授权
    • Method of forming small geometry patterns on piezoelectric membrane films
    • 在压电薄膜上形成小几何图案的方法
    • US5403701A
    • 1995-04-04
    • US085848
    • 1993-06-30
    • Paul LumBelinda J. KendleMichael Greenstein
    • Paul LumBelinda J. KendleMichael Greenstein
    • G03F7/26G03F7/00G03F7/38H01L41/22H01L41/26H05K3/04
    • G03F7/38G03F7/00H01L41/29H05K3/048
    • A method of patterning interconnect lines on a flexible membrane film of piezoelectric material includes securing the membrane film to a temporary support structure to allow direct patterning of the interconnect lines. A barrier plane is deposited onto the membrane film. A photoresist then coats the barrier plane. In a subsequent step of photolithographically exposing the photoresist, the barrier plane acts as a screen to prevent radiation from reaching the membrane film. The barrier film is also used as a focusing and alignment structure during photolithographic exposure. Optionally, the resulting structure is soaked in chlorobenzene, with the barrier plane functioning to prevent diffusion of the chlorobenzene through the back side of the porous membrane film to form undesired development-retarding regions of the photoresist. Openings are formed in the photoresist during a development step. A metallic interconnect layer is then deposited. A portion of the interconnect layer enters the openings in the photoresist for deposit onto the barrier plane. The barrier plane ensures proper adhesion of the interconnect layer. Lift-off techniques remove the photoresist and unwanted portions of the interconnect layer. The remaining portions of the interconnect layer provide an etch mask for patterning the barrier plane.
    • 在压电材料的柔性膜膜上构图互连线的方法包括将膜膜固定到临时支撑结构以允许互连线的直接图案化。 屏障平面沉积在膜膜上。 然后,光致抗蚀剂涂覆屏障平面。 在光刻曝光光刻胶的后续步骤中,屏障平面用作屏幕以防止辐射到达膜膜。 在光刻曝光期间,阻挡膜也用作聚焦和对准结构。 任选地,将所得结构浸泡在氯苯中,其中屏障平面用于防止氯苯通过多孔膜膜的背面扩散以形成光致抗蚀剂的不期望的显影延迟区域。 在显影步骤中在光致抗蚀剂中形成开口。 然后沉积金属互连层。 互连层的一部分进入光致抗蚀剂中的开口以沉积到屏障平面上。 屏障平面确保互连层的适当粘附。 剥离技术去除了光致抗蚀剂和互连层的不想要的部分。 互连层的其余部分提供用于图案化屏障平面的蚀刻掩模。
    • 10. 发明授权
    • Thermometric vapor sensor with evaporation surface having micropores
    • 具有蒸发表面的微孔蒸气传感器具有微孔
    • US06202480B1
    • 2001-03-20
    • US09054852
    • 1998-04-02
    • Ganapati R. MauzeMichael GreensteinPaul LumHewlett E. Melton, Jr.
    • Ganapati R. MauzeMichael GreensteinPaul LumHewlett E. Melton, Jr.
    • G01N2562
    • G01N25/64
    • A sensor for sensing in a gas stream a vapor of a liquid. The sensor includes a micropore and a wet temperature sensor. The micropore has an evaporation end and has a lumen to conduct liquid from a supply of the liquid for evaporation at the evaporation end. The wet temperature sensor has a heat sensitive part in contact with the liquid in the micropore. The heat sensitive part circumscribes the micropore and forms part of the lumen. Heat loss due to evaporation of the liquid when the wet temperature sensor wet with the liquid is placed in the gas stream will result in the temperature sensed by the wet temperature sensor being lower than the non-evaporative temperature of the gas stream. This lowering in temperature can be measured to determine the concentration of the vapor in the gas stream. An example of such a sensor has a thermocouple junction having micropores passing through the thermocouple junction.
    • 一种传感器,用于在气流中检测液体的蒸汽。 该传感器包括微孔和湿温度传感器。 微孔具有蒸发端,并且具有内腔以在蒸发端从用于蒸发的液体供应源输送液体。 湿式温度传感器具有与微孔中的液体接触的热敏部分。 热敏部分围绕微孔并形成管腔的一部分。 将潮湿的温度传感器用液体湿润时液体的蒸发导致的热损失被放置在气流中将导致由湿式温度传感器感测到的温度低于气流的非蒸发温度。 可以测量这种温度降低以确定气流中的蒸气的浓度。 这种传感器的示例具有热电偶结,其具有穿过热电偶结的微孔。