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    • 2. 发明申请
    • PROBE UNIT SUBSTRATE
    • 探测单元基板
    • US20090128175A1
    • 2009-05-21
    • US12353813
    • 2009-01-14
    • Yoshiyuki FUKAMI
    • Yoshiyuki FUKAMI
    • G01R1/067
    • G01R1/0735G01R1/06727
    • A ceramic substrate has, on its surface, a multilayer wiring division, on which micro cantilever type probes are fixed. The multilayer wiring division has the first conductor layer, which includes through-hole junction pads, flatness improvement rings surrounding the through-hole junction pads and a grounding region further surrounding the flatness improvement rings. Since the flatness improvement rings are located around the through-hole junction pads, the surface of the first insulating layer, which is located above the first conductor layer, is free from severe undulation even near the through-hole junction pads. Accordingly, the multilayer wiring division has less irregularity in shape as a whole, and thus the probe mounting pads on the surface of the second insulating layer do not slope but keep almost horizontal. The probe unit substrate according to the invention has an advantage of less surface undulation and having non-sloping probe mounting pads without using a complicated manufacturing process.
    • 陶瓷基板在其表面上具有固定有微悬臂型探针的多层布线部。 多层布线部分具有第一导体层,其包括通孔连接垫,围绕通孔结垫的平坦度改善环和进一步围绕平坦度改进环的接地区。 由于平坦度改善环位于通孔结垫周围,所以位于第一导体层之上的第一绝缘层的表面即使在通孔结垫附近也没有严重的起伏。 因此,多层布线部的整体形状不均匀性较差,因此第二绝缘层表面上的探针安装焊盘不倾斜但保持几乎水平。 根据本发明的探针单元基板具有表面波动较小的优点,并且不使用复杂的制造工艺而具有非倾斜的探针安装垫。