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    • 83. 发明专利
    • Skid washing method of surface roughness testing machine
    • 表面粗糙度测试机的滑移洗涤方法
    • JP2012026736A
    • 2012-02-09
    • JP2010162437
    • 2010-07-20
    • Mitsutoyo Corp株式会社ミツトヨ
    • MATSUMIYA SADAYUKIHAMA NOBUYUKI
    • G01B5/28
    • G01B5/28B08B1/00B08B3/12B08B5/04
    • PROBLEM TO BE SOLVED: To provide a skid washing method of a surface roughness testing machine capable of preventing fixation of a foreign matter at a gap between a hole part of a skid and a stylus.SOLUTION: The surface roughness testing machine includes the skid provided with a through hole part and a vertically movable stylus disposed at the hole part of the skid and measures the surface roughness of an object to be measured by moving the skid along the surface of the object to be measured. The skid washing method of the surface roughness testing machine includes a removal step (S1) of removing foreign matters at a gap between the hole part and the stylus by prescribed foreign matter removal means after measurement is completed.
    • 要解决的问题:提供一种能够防止在滑块的孔部和触针之间的间隙处异物固定的表面粗糙度测试机的滑动洗涤方法。 解决方案:表面粗糙度测试机包括设置有通孔部分的滑动件和设置在滑动件的孔部分的可垂直移动的触针,并且通过沿着表面移动滑板来测量被测量物体的表面粗糙度 的待测物体。 表面粗糙度测试机的滑动洗涤方法包括在测量完成之后通过规定的异物去除装置去除在孔部分和触笔之间的间隙处的异物的去除步骤(S1)。 版权所有(C)2012,JPO&INPIT
    • 85. 发明专利
    • Surface shape measuring device
    • 表面形状测量装置
    • JP2009036699A
    • 2009-02-19
    • JP2007202687
    • 2007-08-03
    • Mitsutoyo Corp株式会社ミツトヨ
    • KIYOTANI SHINGO
    • G01B5/20G01B5/012
    • G01B5/008G01B5/28
    • PROBLEM TO BE SOLVED: To provide a surface shape measuring device capable of performing copying measurement at a high speed, as well as, with high accuracy.
      SOLUTION: This surface shape measuring device is equipped with a movement estimating unit 300 for calculating estimated movement state quantity, while estimating a movement state of a drive mechanism based on a copying vector command issued from a copying vector commanding unit 220, and a correction computing unit 400 for correcting and computing the detected value of a drive sensor in accordance with the estimated movement state quantity calculated by the movement estimating unit 300. The movement estimating unit 300 includes a nominal model setting unit 311, in which a nominal model having a signal transfer characteristic from, the issue of the copying vector command until it is reflected to a moving position of a copying probe, is set, and the correction computing unit 400 includes a correction amount calculating unit 420 for calculating the correction amount for correcting measurement errors generated by deformation of the drive mechanism during the driving, based on the estimated movement state quantity, and a measurement data combining unit 430 for combining the detection value by the drive sensor and a detection sensor, with the correction amount calculated by the correction amount calculating unit 420 to form measurement data.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种能够以高速,高精度进行复印测量的表面形状测量装置。 解决方案:该表面形状测量装置配备有用于计算估计的移动状态量的运动估计单元300,同时基于从复印矢量指令单元220发出的复印矢量指令来估计驱动机构的移动状态,以及 校正计算单元400,用于根据由移动估计单元300计算的估计的移动状态量校正和计算驱动传感器的检测值。移动估计单元300包括标称模型设置单元311,其中标称模型 具有从复制矢量指令的发出直到其被复制到复制探针的移动位置的信号传递特性,并且校正计算单元400包括用于计算用于校正的校正量的校正量计算单元420 基于估计,驾驶过程中驱动机构变形产生的测量误差 以及测量数据组合单元430,用于将由驱动传感器和检测传感器的检测值与由校正量计算单元420计算的校正量组合以形成测量数据。 版权所有(C)2009,JPO&INPIT
    • 89. 发明专利
    • Surface roughness/contour shape measuring system
    • 表面粗糙度/轮廓形状测量系统
    • JP2006300823A
    • 2006-11-02
    • JP2005125174
    • 2005-04-22
    • Tokyo Seimitsu Co Ltd株式会社東京精密
    • YANAI NOBUYUKIKUBOTA KAZUHIRO
    • G01B5/28G01B5/20
    • G01B5/20G01B5/28
    • PROBLEM TO BE SOLVED: To easily measure surface roughness and contour shape of the bottom part of a workpiece having a step having a bank part and the bottom part in a surface roughness/contour shape measuring device for measuring the surface shape of a measuring face by moving a probe supported on a cantilever as it contacts the measuring face of the workpiece and detecting a deformation amount generated in the probe. SOLUTION: The surface roughness/contour shape measuring device 1 comprises a moving means 8 for relatively moving the workpiece and the probe 9 in a direction (X) orthogonal to both of a longitudinal direction (Z) of the probe 9 and a longitudinal direction (Y) of the cantilever 7. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了容易地测量在具有堤部分和底部的台阶的工件的底部的表面粗糙度和轮廓形状,用于测量表面粗糙度/轮廓形状测量装置 通过移动支撑在悬臂上的探头,当它接触到工件的测量面并检测探头中产生的变形量时,测量面。 表面粗糙度/轮廓形状测量装置1包括用于使工件和探针9沿与探针9的纵向方向(Z)正交的方向(X)相对移动的移动装置8和 悬臂7的纵向(Y)。版权所有(C)2007,JPO&INPIT