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    • 7. 发明专利
    • Original plate of metal printed circuit board, and method of manufacturing original plate
    • 金属印刷电路板原始印版及制作原版的方法
    • JP2009253274A
    • 2009-10-29
    • JP2009000848
    • 2009-01-06
    • Xi Max Co Ltdケイアイザャイマックス カンパニー リミテッド
    • KIM KAB SEOGKIM YONG MO
    • H05K3/44H01L23/12H05K1/09H05K3/14
    • H05K1/09H05K1/0306H05K3/16H05K3/388H05K3/4629H05K2201/0317H05K2201/0338
    • PROBLEM TO BE SOLVED: To provide an original plate of a metal printed circuit board which has superior heat dissipation characteristics and electric characteristics by forming an insulating layer and a thick electric conductive layer of high density on a metal board by a sputtering method for physical vapor deposition, and to provide a method of manufacturing the original plate.
      SOLUTION: The method of manufacturing the original plate includes a step of forming the insulating layer on the metal board by the sputtering method for physical vapor deposition, a step of vapor-depositing a first thin film made of a conductive metal and having compressive residual stress on the insulating layer by the sputtering method, a step of vapor-depositing a second thin film made of a conductive metal and having tensile residual stress on the first thin film by the sputtering method, and a step of repeating the steps of vapor-depositing the first thin film and second thin film to vapor-deposit the electric conductive layer of a thick film such that the total residual stress is controlled within a preset range.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:通过溅射法在金属板上形成绝缘层和高密度的厚导电层,提供具有优异的散热特性和电特性的金属印刷电路板的原版 用于物理气相沉积,并提供制造原版的方法。 解决方案:制造原版的方法包括通过用于物理气相沉积的溅射方法在金属板上形成绝缘层的步骤,气相沉积由导电金属制成的第一薄膜的步骤,并且具有 通过溅射法在绝缘层上的压缩残余应力,通过溅射法在第一薄膜上气相沉积由导电金属制成的第二薄膜并具有拉伸残余应力的步骤,以及重复步骤 气相沉积第一薄膜和第二薄膜以使厚膜的导电层气相沉积,使得总残余应力被控制在预设范围内。 版权所有(C)2010,JPO&INPIT