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1. 发明授权

US11313042B2 Dose-based end-pointing for low-kV FIB milling in TEM sample preparation 有权
公开(公告)号：US11313042B2
公开(公告)日：2022-04-26
申请号：US16566647
申请日：2019-09-10
申请人： FEI Company
发明人： Thomas G. Miller , Jason Arjavac , Michael Moriarty
IPC分类号： H01J37/00 , C23F1/04 , H01J37/302 , G01N1/32 , H01J37/305 , H01J37/304
摘要： A method, system, and computer-readable medium for forming transmission electron microscopy sample lamellae using a focused ion beam including directing a high energy focused ion beam toward a bulk volume of material; milling away the unwanted volume of material to produce an unfinished sample lamella with one or more exposed faces having a damage layer; characterizing the removal rate of the focused ion beam; subsequent to characterizing the removal rate, directing a low energy focused ion beam toward the unfinished sample lamella for a predetermined milling time to deliver a specified dose of ions per area from the low energy focused ion beam; and milling the unfinished sample lamella with the low energy focused ion beam to remove at least a portion of the damage layer to produce the finished sample lamella including at least a portion of the feature of interest.

2. 发明授权

US09581526B2 Method for S/TEM sample analysis 有权
标题翻译： S / TEM样品分析方法
公开(公告)号：US09581526B2
公开(公告)日：2017-02-28
申请号：US15047064
申请日：2016-02-18
申请人： FEI Company
发明人： Jason Arjavac , Pei Zou , David James Tasker , Maximus Theodorus Otten , Gerhard Daniel
IPC分类号： G01N1/28 , G01N1/06 , G01N1/08 , G01N23/04 , G01N1/32 , H01J37/305 , H01J37/26 , H01J37/06 , H01J37/18 , H01J37/20 , H01J37/28
CPC分类号： G01N1/28 , G01N1/06 , G01N1/08 , G01N1/32 , G01N23/04 , H01J37/06 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/3056 , H01J2237/063 , H01J2237/182 , H01J2237/204 , H01J2237/208 , H01J2237/2802 , H01J2237/31745 , H01J2237/31749
摘要： An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
摘要翻译：一种用于S / TEM样品制备和分析的改进方法和装置。本发明的优选实施例提供用于TEM样品制备的改进方法，特别是对于小几何（<100nm厚）TEM薄片。本发明的优选实施例还通过提供部分或全部自动化TEM样品制作的方法来提供在诸如集成电路或半导体晶片上制造的其它结构的物体上的基于S / TEM的测量的在线方法，以使得创建过程并分析TEM样品减少劳动密集度，并提高TEM分析的产量和再现性。

3. 发明授权

US09275831B2 Method for S/TEM sample analysis 有权
公开(公告)号：US09275831B2
公开(公告)日：2016-03-01
申请号：US14546244
申请日：2014-11-18
申请人： FEI Company
发明人： Jason Arjavac , Pei Zou , David James Tasker , Maximus Theodorus Otten , Gerhard Daniel
IPC分类号： H01J37/28 , H01J37/305 , G01N1/06 , G01N1/08 , G01N1/28 , G01N23/04 , G01N1/32 , H01J37/26 , H01J37/06 , H01J37/18 , H01J37/20
CPC分类号： G01N1/28 , G01N1/06 , G01N1/08 , G01N1/32 , G01N23/04 , H01J37/06 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/3056 , H01J2237/063 , H01J2237/182 , H01J2237/204 , H01J2237/208 , H01J2237/2802 , H01J2237/31745 , H01J2237/31749
摘要： An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

4. 发明申请

US20150206707A1 Method for S/TEM Sample Analysis 审中-公开
标题翻译： S / TEM样品分析方法
公开(公告)号：US20150206707A1
公开(公告)日：2015-07-23
申请号：US14546244
申请日：2014-11-18
申请人： FEI Company
发明人： Jason Arjavac , Pei Zou , David James Tasker , Maximus Theodorus Otten , Gerhard Daniel
IPC分类号： H01J37/28 , H01J37/06 , H01J37/18 , H01J37/20
CPC分类号： G01N1/28 , G01N1/06 , G01N1/08 , G01N1/32 , G01N23/04 , H01J37/06 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/3056 , H01J2237/063 , H01J2237/182 , H01J2237/204 , H01J2237/208 , H01J2237/2802 , H01J2237/31745 , H01J2237/31749
摘要： An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
摘要翻译：一种用于S / TEM样品制备和分析的改进方法和装置。本发明的优选实施例提供用于TEM样品制备的改进方法，特别是对于小几何（<100nm厚）TEM薄片。本发明的优选实施例还通过提供部分或全部自动化TEM样品制作的方法来提供在诸如集成电路或半导体晶片上制造的其它结构的物体上的基于S / TEM的测量的在线方法，以使得创建过程并分析TEM样品减少劳动密集度，并提高TEM分析的产量和再现性。

5. 发明授权

US08890064B2 Method for S/TEM sample analysis 有权
标题翻译： S / TEM样品分析方法
公开(公告)号：US08890064B2
公开(公告)日：2014-11-18
申请号：US13777018
申请日：2013-02-26
申请人： FEI Company
发明人： Jason Arjavac , Pei Zou , David James Tasker , Maximus Theodorus Otten , Gerhard Daniel
IPC分类号： H01J37/26 , H01J37/305 , G01N1/32 , G01N1/28
CPC分类号： G01N1/28 , G01N1/06 , G01N1/08 , G01N1/32 , G01N23/04 , H01J37/06 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/3056 , H01J2237/063 , H01J2237/182 , H01J2237/204 , H01J2237/208 , H01J2237/2802 , H01J2237/31745 , H01J2237/31749
摘要： An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
摘要翻译：一种用于S / TEM样品制备和分析的改进方法和装置。本发明的优选实施例提供用于TEM样品制备的改进方法，特别是对于小几何（<100nm厚）TEM薄片。本发明的优选实施例还通过提供部分或全部自动化TEM样品制作的方法来提供在诸如集成电路或半导体晶片上制造的其它结构的物体上的基于S / TEM的测量的在线方法，以使得创建过程并分析TEM样品减少劳动密集度，并提高TEM分析的产量和再现性。

6. 发明申请

US20170062178A1 CAD-ASSISTED TEM PREP RECIPE CREATION 有权
标题翻译： CAD辅助型TEM PREP RECIPE CREATION
公开(公告)号：US20170062178A1
公开(公告)日：2017-03-02
申请号：US14868056
申请日：2015-09-28
申请人： FEI Company
发明人： Jason Arjavac , Matthew P. Knowles
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , G01N1/28 , G01N1/32 , G01N2001/282 , H01J37/3023 , H01J37/3045 , H01J2237/28 , H01J2237/2802 , H01J2237/2826 , H01J2237/31732 , H01J2237/31745
摘要： An improved process workflow and apparatus for S/TEM sample preparation and analysis is provided. Preferred embodiments provide improved methods for an automated recipe TEM sample creation, especially for small geometry TEM lamellae, employing CAD data to automatically align various stages of sample preparation. The process automatically verifies and aligns the position of FIB-created fiducials by masking off portions of acquired images, and then comparing them to synthesized images from CAD data. SEM beam positions are verified by comparison to images synthesized from CAD data. FIB beam position is also verified by comparison to already-aligned SEM images, or by synthesizing an FIB image from CAD using techniques for simulating FIB images. The automatic alignment techniques herein allow creation of sample lamellas at specified locations without operator intervention.
摘要翻译：提供了一种用于S / TEM样品制备和分析的改进的工艺流程和设备。优选实施例提供了用于自动配方TEM样品创建的改进方法，特别是对于小几何TEM薄片，采用CAD数据来自动对准样品制备的各个阶段。该过程通过遮蔽所获取图像的部分，然后将其与CAD数据的合成图像进行比较，自动验证并对齐FIB创建的基准点的位置。通过与从CAD数据合成的图像进行比较来验证SEM束位置。 FIB光束位置也通过与已对准的SEM图像进行比较，或通过使用用于模拟FIB图像的技术从CAD合成FIB图像来验证。这里的自动对准技术允许在指定位置创建样品薄片，而无需操作员干预。

7. 发明授权

US09349570B2 Method and apparatus for sample extraction and handling 有权
公开(公告)号：US09349570B2
公开(公告)日：2016-05-24
申请号：US14674840
申请日：2015-03-31
申请人： FEI Company
发明人： Enrique Agorio , James Edgar Hudson , Gerhard Daniel , Michael Tanguay , Jason Arjavac
IPC分类号： H01J37/20 , G01N1/28 , G01N1/32 , H01J37/26 , H01J37/28 , H01J37/31 , H01J37/285 , G01R31/28
CPC分类号： H01J37/20 , G01N1/286 , G01N1/32 , G01N2001/2873 , G01N2001/2886 , G01R31/2893 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/31 , H01J2237/202 , H01J2237/2802 , H01J2237/2812 , H01J2237/3109 , H01J2237/3114 , H01J2237/31745
摘要： An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

8. 发明申请

US20150311034A1 Method and Apparatus for Sample Extraction and Handling 审中-公开
标题翻译：样品提取和处理方法和装置
公开(公告)号：US20150311034A1
公开(公告)日：2015-10-29
申请号：US14674840
申请日：2015-03-31
申请人： FEI Company
发明人： Enrique Agorio , James Edgar Hudson , Gerhard Daniel , Michael Tanguay , Jason Arjavac
IPC分类号： H01J37/20 , G01N1/28 , H01J37/285
CPC分类号： H01J37/20 , G01N1/286 , G01N1/32 , G01N2001/2873 , G01N2001/2886 , G01R31/2893 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/31 , H01J2237/202 , H01J2237/2802 , H01J2237/2812 , H01J2237/3109 , H01J2237/3114 , H01J2237/31745
摘要： An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.
摘要翻译：一种用于提取和处理样品用于S / TEM分析的改进方法和装置。本发明的优选实施例利用显微操纵器和使用真空压力的中空微探针探针将微针尖附着到样品上。通过通过微针尖向薄片施加小的真空压力，可以比通过单独使用静电力更牢固地保持薄片并且其布置更准确。通过使用具有倾斜尖端并且也可围绕其长轴旋转的探针，所提取的样品可以平放放置在样品架上。这样可以精确控制样品放置和取向，从而大大提高分析和产量的可预测性。

9. 发明申请

US20140131572A1 Automated Sample Oreintation 有权
标题翻译：自动样品氧化
公开(公告)号：US20140131572A1
公开(公告)日：2014-05-15
申请号：US13677940
申请日：2012-11-15
申请人： FEI Company
发明人： Jason Arjavac
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J37/26 , H01J37/265 , H01J2237/20292 , H01J2237/31749
摘要： A method for aligning a sample that is placed in the vacuum chamber so that the sample is oriented normal to the focused ion beam is disclosed. The locations of different spots on the sample surface are determined using a focusing routine. The locations of the different spots are used to create an image line or an image plane that determines the proper calibrations that are needed. The image line or image plane is then used to calibrate the sample stage so that the sample is aligned substantially normal to the focused ion beam.
摘要翻译：公开了一种将放置在真空室中的样品对准以使样品垂直于聚焦离子束的方法。使用聚焦程序确定样品表面上不同斑点的位置。不同点的位置用于创建确定所需的适当校准的图像线或图像平面。然后将图像线或图像平面用于校准样品台，使得样品基本上垂直于聚焦离子束排列。

10. 发明申请

US20140084157A1 System and Method for Ex Situ Analysis of a Substrate 有权
标题翻译：基体原位分析系统与方法
公开(公告)号：US20140084157A1
公开(公告)日：2014-03-27
申请号：US13626193
申请日：2012-09-25
申请人： FEI COMPANY
发明人： Thomas G. Miller , Jason Arjavac , Damon Heer , Michael Strauss , Gerardus Nicolaas Anne van Veen
IPC分类号： G01N1/28 , H01J37/02
CPC分类号： G01N1/28 , G01N1/32 , H01J37/02 , H01J37/20 , H01J37/3023 , H01J37/3056 , H01J2237/31745
摘要： A method and system for creating an asymmetrical lamella for use in an ex situ TEM, SEM, or STEM procedure is disclosed. The shape of the lamella provides for easy orientation such that a region of interest in the lamella can be placed over a hole in a carbon film providing minimal optical and spectral interference from the carbon film during TEM, SEM, or STEM procedure of chemical analysis.
摘要翻译：公开了一种用于创建用于非原位TEM，SEM或STEM程序的不对称薄片的方法和系统。薄片的形状提供容易的取向，使得薄片中的感兴趣区域可以放置在碳膜上的孔上，从而在化学分析的TEM，SEM或STEM过程期间从碳膜提供最小的光学和光谱干扰。

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