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1. 发明申请

US20160189929A1 RAPID TEM SAMPLE PREPARATION METHOD WITH BACKSIDE FIB MILLING 审中-公开
标题翻译：具有背面FIB铣削的快速TEM样品制备方法
公开(公告)号：US20160189929A1
公开(公告)日：2016-06-30
申请号：US14926648
申请日：2015-10-29
申请人： Omniprobe, Inc.
发明人： Matt Hammer , Michael Dawson , Cheryl Hartfield
IPC分类号： H01J37/305 , H01J37/285
CPC分类号： H01J37/3056 , G01N1/32 , H01J37/20 , H01J37/285 , H01J2237/202 , H01J2237/204 , H01J2237/31745 , H01J2237/31749
摘要： A method for TEM sample preparation with backside milling of a sample extracted from a workpiece in an energetic-beam instrument such as a FIB-SEM is disclosed. The method includes rotating a nanomanipulator probe tip holding an extracted sample by an angle calculated according to the geometry of the apparatus; moving the instrument stage to position a TEM grid in a fixed holder so that the plane of the TEM grid is substantially parallel to the required plane for the TEM sample; attaching the extracted sample to the TEM grid; and, tilting the stage by a stage-tilt angle, while maintaining the holder in the fixed orientation with respect to the stage, so that the axis of the ion beam is made substantially parallel to the required plane for the TEM sample; thereby placing the extracted sample into position for allowing backside milling to prepare a thinned cross-sectional sample for TEM viewing.
摘要翻译：公开了一种用于在诸如FIB-SEM的能量束仪器中从工件提取的样品的背面研磨的TEM样品制备方法。该方法包括使保持提取的样品的纳米操纵器探针尖端旋转根据装置的几何形状计算的角度; 移动仪器台以将TEM格栅定位在固定夹具中，使得TEM网格的平面基本上平行于TEM样品的所需平面; 将提取的样品连接到TEM网格; 并且使台架相对于台架保持固定姿态，同时使台架倾斜角度，使得离子束的轴线基本上平行于TEM样品的所需平面; 从而将提取的样品置于适当位置，以允许背面研磨以制备用于TEM观察的变薄的横截面样品。

2. 发明授权

US09281163B2 High capacity TEM grid 有权
标题翻译：大容量TEM网格
公开(公告)号：US09281163B2
公开(公告)日：2016-03-08
申请号：US14251739
申请日：2014-04-14
申请人： FEI Company
发明人： Brian Roberts Routh, Jr. , Valerie Brogden , Michael Schmidt
IPC分类号： H01J37/20 , H01J37/26 , G01N1/44
CPC分类号： H01J37/20 , G01N1/44 , H01J37/26 , H01J37/261 , H01J2237/08 , H01J2237/2007 , H01J2237/201 , H01J2237/204 , H01J2237/2602 , H01J2237/31745
摘要： A TEM grid provides posts having steps, the steps increasing the number of samples that can be attached to the grid. In some embodiments, each post includes a one sided stair step configuration. A method of extracting multiple samples includes extracting samples and attaching the samples to the different stair steps on the posts.
摘要翻译： TEM网格提供具有步骤的帖子，步骤增加可以附加到网格的样本数量。在一些实施例中，每个柱包括单面阶梯构造。提取多个样品的方法包括提取样品并将样品附着到柱上的不同阶梯台阶上。

3. 发明授权

US09275831B2 Method for S/TEM sample analysis 有权
公开(公告)号：US09275831B2
公开(公告)日：2016-03-01
申请号：US14546244
申请日：2014-11-18
申请人： FEI Company
发明人： Jason Arjavac , Pei Zou , David James Tasker , Maximus Theodorus Otten , Gerhard Daniel
IPC分类号： H01J37/28 , H01J37/305 , G01N1/06 , G01N1/08 , G01N1/28 , G01N23/04 , G01N1/32 , H01J37/26 , H01J37/06 , H01J37/18 , H01J37/20
CPC分类号： G01N1/28 , G01N1/06 , G01N1/08 , G01N1/32 , G01N23/04 , H01J37/06 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/3056 , H01J2237/063 , H01J2237/182 , H01J2237/204 , H01J2237/208 , H01J2237/2802 , H01J2237/31745 , H01J2237/31749
摘要： An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

4. 发明授权

US09245710B2 Charged particle beam device 有权
标题翻译：带电粒子束装置
公开(公告)号：US09245710B2
公开(公告)日：2016-01-26
申请号：US14379694
申请日：2013-02-20
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Kazuhiro Gunji , Yasushi Ebizuka , Yuta Asaga
IPC分类号： H01J37/18 , H01J37/16 , H01J37/20 , H01J37/28
CPC分类号： H01J37/18 , H01J37/185 , H01J37/28 , H01J2237/18 , H01J2237/204 , H01J2237/28 , H01J2237/2801
摘要： A charged particle beam device that appropriately maintains a throughput of the device for each of specimens different in a gas emission volume from each other is provided. A scanning electron microscope includes an electron source, a specimen stage, a specimen chamber, and an exchange chamber, and further includes a vacuum gauge that measures an internal pressure of the exchange chamber, a time counting unit that counts time taken when a measurement result by the vacuum gauge has reached a predetermined degree of vacuum, and an integral control unit that performs comparative calculation and determination based on a measurement result by the time counting unit and integral control based on a process flow. And, the integral control unit controls changing of a content of a subsequent process based on a shift of the degree of vacuum of the exchange chamber.
摘要翻译：提供了一种带电粒子束装置，其适当地保持每个气体排放量彼此不同的样本的装置的生产量。扫描电子显微镜包括电子源，试样台，试样室和交换室，还包括测量交换室的内部压力的真空计，计时单元，其计算测量结果所用的时间通过真空计已经达到预定的真空度，以及积分控制单元，其基于通过时间计数单元的测量结果和基于处理流程的积分控制进行比较计算和确定。并且，积分控制单元基于交换室的真空度的变化来控制后续处理的内容的变化。

5. 发明授权

US09236217B2 Inspection or observation apparatus and sample inspection or observation method 有权
标题翻译：检验或观察仪器和样品检查或观察方法
公开(公告)号：US09236217B2
公开(公告)日：2016-01-12
申请号：US14562260
申请日：2014-12-05
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Yusuke Ominami , Mami Konomi , Sukehiro Ito , Tomohisa Ohtaki , Shinsuke Kawanishi
IPC分类号： H01J37/00 , H01J37/18 , H01J37/16 , H01J37/22 , H01J37/28 , H01J37/20 , H01J37/26
CPC分类号： H01J37/18 , H01J37/16 , H01J37/20 , H01J37/22 , H01J37/226 , H01J37/261 , H01J37/28 , H01J2237/166 , H01J2237/182 , H01J2237/2007 , H01J2237/204 , H01J2237/2602 , H01J2237/2608
摘要： A sample observation method uses a charged particle beam apparatus comprising a charged particle optical column irradiating a charged particle beam, a vacuum chamber, and a sample chamber being capable of storing a sample. The method includes maintaining a pressure of the sample chamber higher than that of the vacuum chamber by a thin film which permits the charged particle beam to be transmitted, determining a relation between a height of a lower surface of the thin film and a height of a lower end of a lens barrel of an optical microscope, measuring a distance between the sample and the lens barrel, and setting a distance between the sample and thin film based on the relation and the distance.
摘要翻译：样品观察方法使用带电粒子束装置，其包括照射带电粒子束的带电粒子光学柱，真空室和能够存储样品的样品室。该方法包括通过允许带电粒子束透射的薄膜来保持样品室的压力高于真空室的压力，确定薄膜的下表面的高度与薄膜的高度之间的关系基于光学显微镜的镜筒的下端，测量样品和镜筒之间的距离，并根据关系和距离设定样品和薄膜之间的距离。

6. 发明申请

US20150206707A1 Method for S/TEM Sample Analysis 审中-公开
标题翻译： S / TEM样品分析方法
公开(公告)号：US20150206707A1
公开(公告)日：2015-07-23
申请号：US14546244
申请日：2014-11-18
申请人： FEI Company
发明人： Jason Arjavac , Pei Zou , David James Tasker , Maximus Theodorus Otten , Gerhard Daniel
IPC分类号： H01J37/28 , H01J37/06 , H01J37/18 , H01J37/20
CPC分类号： G01N1/28 , G01N1/06 , G01N1/08 , G01N1/32 , G01N23/04 , H01J37/06 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/3056 , H01J2237/063 , H01J2237/182 , H01J2237/204 , H01J2237/208 , H01J2237/2802 , H01J2237/31745 , H01J2237/31749
摘要： An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
摘要翻译：一种用于S / TEM样品制备和分析的改进方法和装置。本发明的优选实施例提供用于TEM样品制备的改进方法，特别是对于小几何（<100nm厚）TEM薄片。本发明的优选实施例还通过提供部分或全部自动化TEM样品制作的方法来提供在诸如集成电路或半导体晶片上制造的其它结构的物体上的基于S / TEM的测量的在线方法，以使得创建过程并分析TEM样品减少劳动密集度，并提高TEM分析的产量和再现性。

7. 发明授权

US09052272B2 Device for analising a radiating material using a microprobe 有权
标题翻译：使用微探针分析辐射材料的装置
公开(公告)号：US09052272B2
公开(公告)日：2015-06-09
申请号：US14356332
申请日：2012-11-15
申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
发明人： Jérôme Lamontagne , Thierry Blay , Philippe Benard
IPC分类号： G01Q10/04 , G01N23/22 , H01J37/18 , H01J37/252 , G01N23/225
CPC分类号： G01N23/2204 , G01N23/2252 , H01J37/185 , H01J37/252 , H01J2237/184 , H01J2237/204
摘要： The invention relates to an analysis device comprising a main enclosure fitted with a secondary enclosure, a microprobe placed inside the main enclosure and fitted with an airlock and with a motion object, and a movable sample support that is movable from the secondary enclosure to the airlock and from the airlock to the motion object. Each of the airlock and the motion object includes a respective guide member for guiding the movable sample support and a respective sensor for detecting the presence of the movable sample support.
摘要翻译：本发明涉及一种分析装置，其包括装配有次级外壳的主外壳，放置在主外壳内部并配有气闸和运动物体的微探针以及可移动的样品支架，该可移动样品支架可从第二外壳移动到气闸并从气闸到运动物体。气闸和运动物体中的每一个包括用于引导可移动样品支撑件的相应引导构件和用于检测可移动样品支架的存在的相应传感器。

8. 发明授权

US09010202B2 Cryogenic specimen holder 有权
标题翻译：低温试样架
公开(公告)号：US09010202B2
公开(公告)日：2015-04-21
申请号：US13560647
申请日：2012-07-27
申请人： Halina Stabacinskiene , Jeffrey J. Gronsky , Christine M. Thomas , Pushkarraj V. Deshmukh , Alan C. Robins , Paul E. Fischione
发明人： Halina Stabacinskiene , Jeffrey J. Gronsky , Christine M. Thomas , Pushkarraj V. Deshmukh , Alan C. Robins , Paul E. Fischione
IPC分类号： B01L3/00 , G01N21/00 , G01N23/20 , H01J37/20 , H01J37/26 , B01L7/00
CPC分类号： G01N23/20033 , B01L7/50 , G01N2223/612 , H01J37/20 , H01J37/26 , H01J2237/0216 , H01J2237/2001 , H01J2237/20207 , H01J2237/204
摘要： An improved cryogenic specimen holder for imaging and analysis facilitates imaging at very high tilt angles with a large field of view. A retractable specimen holder tip protects the specimen during transport. An optimized Dewar design is positioned at a fixed, tilted angle with respect to the axis of the holder, providing a means of continuously cooling the specimen irrespective of the high tilt angle and amount of liquid nitrogen present in the vessel. The Dewar neck design reduces entrapment of nitrogen gas bubbles and its shape prevents the spilling of liquid nitrogen at high tilt angles. The specimen holder has a retractable tip that completely encapsulates the specimen within a shielded environment internal to the specimen holder body. The cooling and specimen transfer mechanisms reduce thermal drift and the detrimental effects of vibrations generated by both the evaporation of liquid nitrogen present in the Dewar and other environmental effects.
摘要翻译：用于成像和分析的改进的低温试样保持器便于在具有大视场的非常高的倾斜角下进行成像。可伸缩的样品架头在运输过程中保护样品。优化的杜瓦设计相对于保持器的轴线定位成固定的倾斜角度，提供连续冷却样品的手段，而不管存在于容器中的高的倾斜角和液氮量。杜瓦瓶颈设计减少了氮气气泡的夹带，其形状可以防止液氮在高倾角下溢出。样品架具有可收缩的尖端，其将样品完全包封在样品保持体内部的屏蔽环境内。冷却和样品转移机制降低了热漂移和由杜瓦瓶中存在的液氮蒸发和其他环境影响产生的振动的不利影响。

9. 发明授权

US08933400B2 Inspection or observation apparatus and sample inspection or observation method 有权
标题翻译：检验或观察仪器和样品检查或观察方法
公开(公告)号：US08933400B2
公开(公告)日：2015-01-13
申请号：US14349630
申请日：2012-09-03
申请人： Yusuke Ominami , Mami Konomi , Sukehiro Ito , Tomohisa Ohtaki , Shinsuke Kawanishi
发明人： Yusuke Ominami , Mami Konomi , Sukehiro Ito , Tomohisa Ohtaki , Shinsuke Kawanishi
IPC分类号： H01J37/30 , H01J37/20 , H01J37/244 , H01J37/26 , H01J37/16 , H01J37/18 , H01J37/22 , H01J37/28
CPC分类号： H01J37/18 , H01J37/16 , H01J37/20 , H01J37/22 , H01J37/226 , H01J37/261 , H01J37/28 , H01J2237/166 , H01J2237/182 , H01J2237/2007 , H01J2237/204 , H01J2237/2602 , H01J2237/2608
摘要： Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at least part of a region through which a primary charged-particle beam emitted from a charged-particle irradiation section reaches a sample, the first space capable of being maintained in a vacuum state; a second casing provided on the first casing to form at least part of a second space capable of storing the sample therein; a partition wall section for partitioning the first space and the second space from each other, the partition wall section disposed so as to be coaxial with the charged-particle irradiation section when the sample is irradiated with the primary charged-particle beam from the charged-particle irradiation section; and an optical observation section for casting light onto the sample and detecting light from the sample from the same direction as the charged-particle irradiation section.
摘要翻译：提供了使用带电粒子技术和光学技术，以易于使用的方式对样品进行适当的检查或观察的检查装置或观察装置。具体地，提供一种检查或观察装置，包括：第一壳体，其形成构成从带电粒子照射部分发射的初级带电粒子束到达样品的区域的至少一部分的至少一部分的第一空间，能够保持在真空状态的第一空间; 设置在所述第一壳体上以形成能够将所述样品存储在其中的至少一部分第二空间的第二壳体; 用于将第一空间和第二空间彼此分隔开的分隔壁部分，当从带电粒子束照射样品的初级带电粒子束时，分隔壁部分设置成与带电粒子照射部分同轴，粒子照射部; 以及光学观察部，用于将光线投射到样品上，并从与带电粒子照射部相同的方向检测来自样品的光。

10. 发明授权

US08890064B2 Method for S/TEM sample analysis 有权
标题翻译： S / TEM样品分析方法
公开(公告)号：US08890064B2
公开(公告)日：2014-11-18
申请号：US13777018
申请日：2013-02-26
申请人： FEI Company
发明人： Jason Arjavac , Pei Zou , David James Tasker , Maximus Theodorus Otten , Gerhard Daniel
IPC分类号： H01J37/26 , H01J37/305 , G01N1/32 , G01N1/28
CPC分类号： G01N1/28 , G01N1/06 , G01N1/08 , G01N1/32 , G01N23/04 , H01J37/06 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/3056 , H01J2237/063 , H01J2237/182 , H01J2237/204 , H01J2237/208 , H01J2237/2802 , H01J2237/31745 , H01J2237/31749
摘要： An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
摘要翻译：一种用于S / TEM样品制备和分析的改进方法和装置。本发明的优选实施例提供用于TEM样品制备的改进方法，特别是对于小几何（<100nm厚）TEM薄片。本发明的优选实施例还通过提供部分或全部自动化TEM样品制作的方法来提供在诸如集成电路或半导体晶片上制造的其它结构的物体上的基于S / TEM的测量的在线方法，以使得创建过程并分析TEM样品减少劳动密集度，并提高TEM分析的产量和再现性。

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