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11. 发明申请

US20010029436A1 Semiconductor electrical characteristics evaluation apparatus and semiconductor electrical characteristics evaluation method 审中-公开
标题翻译：半导体电气特性评估装置及半导体电气特性评估方法
公开(公告)号：US20010029436A1
公开(公告)日：2001-10-11
申请号：US09816085
申请日：2001-03-26
申请人： TOCHIGI NIKON CORPORATION, NIKON CORPORATION
发明人： Ryoichi Fukasawa
IPC分类号： G06F019/00 , G01R027/28 , G01R031/00 , G01R031/14
CPC分类号： G01N21/3581 , G01N21/3563 , G01R31/2831 , G01R31/311
摘要： An electrical characteristics evaluation apparatus comprises a terahertz pulse light source that irradiates terahertz pulse light onto a semiconductor material, a light detector that detects pulse light having been transmitted through or having been reflected by the semiconductor material, a measurement device that obtains a spectral transmittance or a spectral reflectance by using a time-series waveform of the electric field intensity of the transmitted pulse light or the reflected pulse light and an arithmetic operation unit that calculates an electrical characteristics parameter of the semiconductor material based upon the spectral transmittance or the spectral reflectance. By adopting this electrical characteristics evaluation apparatus and the corresponding electrical characteristics evaluation method, the electrical material quantities (such as the carrier density, the mobility, the resistivity and the electrical conductivity) of the measurement target, i.e.,the semiconductor material, can be measured and inspected without contaminating or damaging the semiconductor material.
摘要翻译：电特性评估装置包括将太赫兹脉冲光照射到半导体材料上的太赫兹脉冲光源，检测已被透过或被半导体材料反射的脉冲光的光检测器，获得光谱透射率的测量装置或通过使用发射脉冲光或反射脉冲光的电场强度的时间序列波形的光谱反射率和基于光谱透射率或光谱反射率计算半导体材料的电特性参数的算术运算单元。通过采用该电特性评价装置和相应的电特性评价方法，可以测量测量对象（即，半导体材料）的电气材料量（诸如载流子密度，迁移率，电阻率和电导率）并且在不污染或损坏半导体材料的情况下检查。

12. 发明授权

US07847931B2 Measuring equipment 有权
标题翻译：测量设备
公开(公告)号：US07847931B2
公开(公告)日：2010-12-07
申请号：US11666078
申请日：2005-11-01
申请人： Naoki Tsumura , Kazushiro Fukushima
发明人： Naoki Tsumura , Kazushiro Fukushima
IPC分类号： G01J3/00
CPC分类号： G01N21/3581
摘要： A measuring equipment utilizing terahertz pulse light, includes: a terahertz light generator that generates terahertz pulse light; a terahertz light detector that detects terahertz pulse light; a first condensing optical system that condenses the terahertz pulse light generated by the terahertz light generator; and a second condensing optical system that condenses the terahertz pulse light diverging after being condensed by the first condensing optical system, onto the terahertz light detector. A sample is arranged in a vicinity of a position of condensing the terahertz pulse light by the first condensing optical system; and at least one of the first and the second condensing optical systems includes at least one optical device having a positive or negative refractive power. The measuring equipment further includes: a position adjusting mechanism that adjusts a position of the at least one optical device on an optical axis when the terahertz light detector detects the terahertz pulse light having transmitted through the sample; and a controlling unit that controls the position adjusting mechanism.
摘要翻译：利用太赫兹脉冲光的测量设备包括：产生太赫兹脉冲光的太赫兹光发生器; 检测太赫兹脉冲光的太赫兹光检测器; 第一聚光光学系统，其冷凝由太赫兹光发生器产生的太赫脉冲光; 以及第二聚光光学系统，其将由第一聚光光学系统聚集后的太赫兹脉冲光发散到太赫兹光检测器上。将样品配置在通过第一聚光光学系统凝结太赫兹脉冲光的位置附近; 并且第一和第二聚光光学系统中的至少一个包括具有正或负折射光焦度的至少一个光学器件。测量设备还包括：位置调节机构，当太赫兹光检测器检测到穿过样本的太赫兹脉冲光时，调节至少一个光学器件在光轴上的位置; 以及控制单元，其控制位置调整机构。

13. 发明授权

US07332709B2 Photoelectric encoder 有权
标题翻译：光电编码器
公开(公告)号：US07332709B2
公开(公告)日：2008-02-19
申请号：US11598733
申请日：2006-11-14
申请人： Toru Imai
发明人： Toru Imai
IPC分类号： G01D5/34
CPC分类号： G01D5/34715 , G01D5/38
摘要： A photoelectric encoder includes a light source of an illumination light beam. The encoder also includes a movable grating which has grating lines and which is displaceable in a direction intersecting the grating lines. An index grating serves as a reference for displacement of the movable grating. A light-receiver receives the illumination light beam via the movable grating and the index grating. A modulator periodically changes a light beam outgoing from the index grating. A displacement detector detects the displacement of the movable grating based on the illumination light beam received by the light-receiver. Accordingly, a signal representing the displacement of a movable body can be accurately generated even when fluctuation of the attitude of the grating occurs.
摘要翻译：光电编码器包括照明光束的光源。编码器还包括具有光栅线的可移动光栅，其可沿与光栅线交叉的方向移位。索引光栅用作可移动光栅的位移的参考。光接收器通过可移动光栅和索引光栅接收照明光束。调制器周期性地改变从折射光栅出射的光束。位移检测器基于由光接收器接收的照明光束检测可移动光栅的位移。因此，即使发生光栅的姿态的波动，也能够精确地生成表示可动体的位移的信号。

14. 发明申请

US20070057168A1 Photoelectric encoder 有权
标题翻译：光电编码器
公开(公告)号：US20070057168A1
公开(公告)日：2007-03-15
申请号：US11598733
申请日：2006-11-14
申请人： Toru Imai
发明人： Toru Imai
IPC分类号： G01D5/34
CPC分类号： G01D5/34715 , G01D5/38
摘要： A photoelectric encoder includes a light source of an illumination light beam; a movable grating which has grating lines and which is displaceable in a direction intersecting the grating lines; an index grating which serves as a reference for displacement of the movable grating; a light-receiver which receives the illumination light beam via the movable grating and the index grating; a modulator which periodically changes a light beam outgoing from the index grating; and a displacement detector which detects the displacement of the movable grating based on the illumination light beam received by the light-receiver. Accordingly, a signal representing the displacement of a movable body can be accurately generated even when the attitude of the grating occurs.
摘要翻译：光电编码器包括照明光束的光源; 可移动光栅，其具有光栅线，并且可沿与光栅线相交的方向移位; 用作可移动光栅位移参考的索引光栅; 接收经由可移动光栅和折射光栅的照明光束的光接收器; 周期性地改变从折射光栅出射的光束的调制器; 以及位移检测器，其基于由光接收器接收的照明光束来检测可移动光栅的位移。因此，即使当光栅的姿态出现时，也能够精确地生成表示可动体的位移的信号。

15. 发明申请

US20040223132A1 Mask exchanging method and exposure apparatus 失效
标题翻译：面膜交换方法和曝光装置
公开(公告)号：US20040223132A1
公开(公告)日：2004-11-11
申请号：US10781661
申请日：2004-02-20
申请人： Nikon Corporation , Sendai Nikon Corporation
发明人： Kenji Nishi , Katsunobu Ogura , Hidekazu Kikuchi
IPC分类号： G03B027/00
CPC分类号： G03F7/70733 , G03F7/70741
摘要： When a reticle stage capable of moving while holding a reticle is at a predetermined unloading position, an unloading arm performs unloading of a reticle. Also, the instant or immediately after the reticle is separated from the reticle stage by the unloading arm, the reticle stage is moved to a predetermined loading position where a reticle is loaded onto the reticle stage by a loading arm. This allows the reticle to be loaded onto the reticle stage before the unloading arm completely withdraws from the unloading position, which reduces the downtime between the retile unloading and the reticle loading. Accordingly, the throughput of the exposure apparatus can be improved, since the time required for reticle exchange is reduced.
摘要翻译：当保持掩模版时能够移动的标线片台处于预定的卸载位置时，卸载臂执行掩模版的卸载。此外，在通过卸载臂将掩模版与刻划台分隔开之后或之后，通过装载臂将标线片载物台移动到预定的装载位置，在该装载位置将掩模版装载到标线片台上。这样就可以在卸载臂从卸载位置完全退出之前，将掩模版加载到标线片台上，从而减少了沉淀物卸载与掩模版加载之间的停机时间。因此，由于减少了掩模版交换所需的时间，因此能够提高曝光装置的生产量。

16. 发明申请

US20230134254A1 BLADE, PROCESSING SYSTEM AND PROCESSING METHOD 有权
公开(公告)号：US20230134254A1
公开(公告)日：2023-05-04
申请号：US17918440
申请日：2020-04-22
申请人： NIKON CORPORATION
发明人： Shinji SATO
IPC分类号： F01D5/14 , B23K26/38
摘要： A blade (BL) is a blade that is used in fluid and includes : a base member (BM); and a coat layer (TBC) that is formed on the base member, a plurality of first grooves (9) and a plurality of second grooves (7) are formed on a surface of the coat layer, a pitch (P9) of the plurality of first grooves is different from a pitch (P7) of the plurality of second grooves.

17. 发明授权

US11639904B2 Inspection device, inspection method, and method for producing object to be inspected 有权
公开(公告)号：US11639904B2
公开(公告)日：2023-05-02
申请号：US16607657
申请日：2017-04-26
申请人： NIKON CORPORATION
发明人： Takeshi Ohbayashi , Masayuki Zaike , Takahiro Michimoto
IPC分类号： G01N23/046 , G01N23/083
摘要： An inspection device includes a ray source that irradiates an object to be inspected with energy rays, a detection unit that detects energy rays that have passed through the object to be inspected, a displacement mechanism that sets a relative position of the object to be inspected and the ray source by displacing at least one of the object to be inspected and the ray source in relation to the other, an internal image generation unit that generates an internal image of the object to be inspected based on a detection amount distribution of the energy rays detected by the detection unit, and a control unit that controls the displacement mechanism based on the detection amount distribution of the energy rays detected by the detection unit.

18. 发明申请

US20230126104A1 IMAGE CAPTURING DEVICE AND IMAGE CAPTURING APPARATUS 有权
公开(公告)号：US20230126104A1
公开(公告)日：2023-04-27
申请号：US17800433
申请日：2021-02-17
申请人： NIKON CORPORATION
发明人： Sota NAKANISHI , Shigeru MATSUMOTO , Tomoki HIRATA
IPC分类号： H04N25/771 , H01L27/146 , H04N25/50
摘要： An image capturing device including a pixel chip having pixel blocks each including one or more pixels; and a signal processing chip having a first control block including a first converting unit for converting a signal from a pixel in at least a first pixel block into a digital signal, and a first storage unit storing the digital signal, and a second control block next to the first control block in a column direction and including a second converting unit for converting a signal from a pixel included in at least a second pixel block into a digital signal, and a second storage unit storing the digital signal, wherein the second converting unit and the second storage unit in the second control block are reversed vertically to the first converting unit and the first storage unit in the first control block.

19. 发明授权

US11635603B2 Variable power optical system, optical apparatus and manufacturing method for variable power optical system 有权
公开(公告)号：US11635603B2
公开(公告)日：2023-04-25
申请号：US16995196
申请日：2020-08-17
申请人： Nikon Corporation
发明人： Atsushi Shibayama , Kosuke Machida
IPC分类号： G02B15/14 , G02B15/22 , G02B15/173 , G02B13/00
摘要： Provided is a variable power optical system (ZL) used for an optical apparatus such as a camera (1). The variable power optical system (ZL) includes, in order from an object: a first lens group having positive refractive power; a second lens group having negative refractive power; a third lens group having negative refractive power; a fourth lens group having positive refractive power; and a fifth lens group. Upon zooming from a wide-angle end state to a telephoto end state, a distance between each of the lens groups changes, and upon focusing from an object at infinity to an object at a close distance, the third lens group moves in the optical axis direction.

20. 发明授权

US11628468B2 Mist generator, mist film formation method and mist film formation apparatus 有权
公开(公告)号：US11628468B2
公开(公告)日：2023-04-18
申请号：US17162609
申请日：2021-01-29
申请人： NIKON CORPORATION
发明人： Yasutaka Nishi
IPC分类号： B05C9/10 , B05C9/14 , B05B7/22 , B05D3/06 , B05D1/12 , H01L21/67
摘要： A mist generating apparatus sprays a surface of an object (P) to be treated with a carrier gas (CGS) of mist (Mst) of a solution containing fine particles or molecules of a material substance, so that a layer of the material substance is deposited on the surface of the object (P) to be treated. The mist generating device includes a mist generator (14) for atomizing the solution to feed the carrier gas (CGS) containing the mist (Mst), and an ultraviolet irradiator (20B) for applying ultraviolet rays having a wavelength of 400 nm or lower to the mist (Mst) floating in the carrier gas (CGS) in a flow path extending from the mist generator (14) until the carrier gas (CGS) is sprayed on the surface of the object (P) to be treated.

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