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11. 发明授权

US08544314B2 Carbon dioxide sensor with functionalized resonating beams 有权
标题翻译：具有功能化谐振梁的二氧化碳传感器
公开(公告)号：US08544314B2
公开(公告)日：2013-10-01
申请号：US12962170
申请日：2010-12-07
申请人： Bogdan Catalin Serban , Cornel P. Cobianu , Mihai N. Mihaila , Viorel Georgel Dumitru
发明人： Bogdan Catalin Serban , Cornel P. Cobianu , Mihai N. Mihaila , Viorel Georgel Dumitru
IPC分类号： G01N30/96 , G01N29/036
CPC分类号： G01N33/004 , G01N29/022 , G01N29/036 , G01N2291/021 , G01N2291/0256 , G01N2291/02809 , G01N2291/0427 , Y02A50/244
摘要： A carbon dioxide sensor comprising a first beam that includes a functionalized surface and a second beam that includes a functionalized surface such that reduced-drift differential sensing of carbon dioxide may be performed by monitoring changes in the resonant frequency of the first beam relative to the resonant frequency of second beam.
摘要翻译：一种二氧化碳传感器，包括包括官能化表面的第一光束和包括官能化表面的第二光束，使得可以通过监测第一光束相对于谐振的谐振频率的变化来执行二氧化碳的减小漂移差分感测第二光束的频率。

12. 发明申请

US20110143448A1 SO2 DETECTION USING DIFFERENTIAL NANO-RESONATORS AND METHODS RELATED THERETO 有权
标题翻译：使用差分纳米共振器的SO2检测及其相关方法
公开(公告)号：US20110143448A1
公开(公告)日：2011-06-16
申请号：US12962301
申请日：2010-12-07
申请人： Bogdan Catalin Serban , Cornel P. Cobianu , Mihai N. Mihaila , Viorel Georgel Dumitru
发明人： Bogdan Catalin Serban , Cornel P. Cobianu , Mihai N. Mihaila , Viorel Georgel Dumitru
IPC分类号： G01N29/036 , B05D1/36 , H05K13/00
CPC分类号： G01N29/022 , G01N29/036 , G01N29/30 , G01N2291/0255 , G01N2291/0256 , G01N2291/0427 , Y10T29/49117 , Y10T436/18 , Y10T436/186
摘要： A sulfur dioxide sensor comprising a first beam having a functionalized sensing surface capable of sensing sulfur dioxide, the first beam capable of producing a first resonant frequency; and a second beam having a functionalized reference surface not capable of sensing sulfur dioxide, the second beam capable of producing a second resonant frequency, wherein differential sensing of sulfur dioxide may be performed, further wherein the first beam is functionalized with a liquid phase of a first polymeric compound and the second beam is functionalized with a liquid phase of a second polymeric compound is provided. In one embodiment, the sensor is a nano-sensor capable of low drift accurately detecting sulfur dioxide levels at the zeptograms level. Methods of making and using a sulfur dioxide sensor are also provided.
摘要翻译：二氧化硫传感器包括具有能够感测二氧化硫的功能化感测表面的第一光束，所述第一光束能够产生第一谐振频率; 以及具有不能感测二氧化硫的功能化参考表面的第二光束，所述第二光束能够产生第二共振频率，其中可执行二氧化硫的差分感测，其中所述第一光束用液相第一聚合物化合物和第二束用第二聚合物的液相进行功能化。在一个实施例中，传感器是能够低漂移的纳米传感器，准确地检测符号水平的二氧化硫水平。还提供了制造和使用二氧化硫传感器的方法。

13. 发明授权

US07784344B2 Integrated MEMS 3D multi-sensor 有权
标题翻译：集成MEMS三维多传感器
公开(公告)号：US07784344B2
公开(公告)日：2010-08-31
申请号：US11947603
申请日：2007-11-29
申请人： Ioan Pavelescu , Ion Georgescu , Dana Elena Guran , Cornel P. Cobianu
发明人： Ioan Pavelescu , Ion Georgescu , Dana Elena Guran , Cornel P. Cobianu
IPC分类号： G01P15/125 , G01P15/08
CPC分类号： G01P15/125 , G01D21/02 , G01P15/18 , G01P2015/082
摘要： Apparatus, methods, and systems for sensing acceleration and magnetic fields in all three axes from a first capacitive bridge sensor having a first proof mass; and a second capacitive bridge sensor having a second proof mass located within the first proof mass. The second proof mass is coupled to the first proof mass by springs that permit movement in the second axis. Sensing of the remaining axis of interest may be done by a third and fourth capacitive bridge configured similar to that of the first and second capacitive bridge sensors. The third and fourth capacitive bridge sensors may be oriented 90 degrees off of the first and second capacitive bridge. An alternative is to locate a third capacitive bridge within the second proof mass.
摘要翻译：用于感测来自具有第一检测质量的第一电容桥式传感器的所有三个轴上的加速度和磁场的装置，方法和系统; 以及第二电容桥式传感器，其具有位于所述第一检验质量块内的第二检验质量块。第二检测质量体通过允许在第二轴线上移动的弹簧联接到第一检验质量块。感兴趣的剩余轴可以通过配置成类似于第一和第二电容桥式传感器的第三和第四电容性桥接来实现。第三和第四电容桥式传感器可以取向于第一和第二电容桥90度。另一种选择是在第二个检测质量块内定位第三个电容桥。

14. 发明申请

US20090280031A1 METHODS FOR USE OF A SENSITIVE LAYER FOR HYDROGEN SULPHIDE DETECTION WITH SAW/BAW DEVICES 有权
标题翻译：敏感层用SAW / BAW器件进行硫化氢检测的方法
公开(公告)号：US20090280031A1
公开(公告)日：2009-11-12
申请号：US12116778
申请日：2008-05-07
申请人： Bogdan-Catalin Serban , Viorel-Georgel Dumitru , Cornel P. Cobianu , Stefan-Dan Costea , Nicolae Varachiu , Stefan I. Voicu
发明人： Bogdan-Catalin Serban , Viorel-Georgel Dumitru , Cornel P. Cobianu , Stefan-Dan Costea , Nicolae Varachiu , Stefan I. Voicu
IPC分类号： G01N27/416 , B05D5/12
CPC分类号： G01N33/0044 , G01N29/022 , G01N2291/014 , G01N2291/0255 , G01N2291/0423 , G01N2291/0426
摘要： Methods can be adapted for design of a sensitive monolayer for detection of hydrogen sulphide at room temperature with SAW/BAW devices. The sensitive monolayer can be synthesized based on chemical compounds, which belongs to a class of thiacalix[n]arenas, mercapto halides, mercapto alcohols and chloromethylated thiacalix[n]arenas. The sensitive monolayer can be directly immobilized or anchored at the surface of a piezoelectric quartz substrate in a covalently bonded manner by means of direct printing process. The piezoelectric quartz substrate can be activated in basic medium or in acid medium before the immobilization of the sensitive monolayer in order to increase the population of OH groups. Thus, the synthesized sensitive monolayer exhibits a high site density, fast response and long-term stability for H2S sensing.
摘要翻译：可以使用SAW / BAW器件在室温下设计用于检测硫化氢的敏感单层的方法。敏感单层可以基于化学化合物合成，该化合物属于一类thiacalix [n]，巯基卤化物，巯基醇和氯甲基化硫化钠[n]场。敏感单层可以通过直接印刷方法以共价键合的方式直接固定或锚定在压电石英基板的表面。在敏感单层固定之前，压电石英衬底可以在碱性介质中或在酸性介质中活化，以增加OH基团的数量。因此，合成的敏感单层表现出高的位置密度，快速响应和H2S感测的长期稳定性。

15. 发明申请

US20090139330A1 INTEGRATED MEMS 3D MULTI-SENSOR 有权
标题翻译：集成MEMS 3D多传感器
公开(公告)号：US20090139330A1
公开(公告)日：2009-06-04
申请号：US11947603
申请日：2007-11-29
申请人： Ioan Pavelescu , Ion Georgescu , Dana Elena Guran , Cornel P. Cobianu
发明人： Ioan Pavelescu , Ion Georgescu , Dana Elena Guran , Cornel P. Cobianu
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01D21/02 , G01P15/18 , G01P2015/082
摘要： Apparatus, methods, and systems for sensing acceleration and magnetic fields in all three axes from a first capacitive bridge sensor having a first proof mass; and a second capacitive bridge sensor having a second proof mass located within the first proof mass. The second proof mass is coupled to the first proof mass by springs that permit movement in the second axis. The of sense the remaining axis of interest may be done by a third and fourth capacitive bridge configured similar to that of the first and second capacitive bridge sensors. The third and fourth capacitive bridge sensors may be oriented 90 degrees off of the first and second capacitive bridge. An alternative is to locate a third capacitive bridge within the second proof mass.
摘要翻译：用于感测来自具有第一检测质量的第一电容桥式传感器的所有三个轴上的加速度和磁场的装置，方法和系统; 以及第二电容桥式传感器，其具有位于所述第一检验质量块内的第二检验质量块。第二检测质量体通过允许在第二轴线上移动的弹簧联接到第一检验质量块。感测的剩余轴可以由配置为类似于第一和第二电容桥式传感器的第三和第四电容性桥接来实现。第三和第四电容桥式传感器可以取向于第一和第二电容桥90度。另一种选择是在第二个检测质量块内定位第三个电容桥。

16. 发明授权

US07401525B2 Micro-machined pressure sensor with polymer diaphragm 有权
标题翻译：具有聚合物隔膜的微加工压力传感器
公开(公告)号：US07401525B2
公开(公告)日：2008-07-22
申请号：US10907176
申请日：2005-03-23
申请人： Cornel P. Cobianu , Mihai Gologanu , Ioan Pavelescu , Bogdan Catalin Serban
发明人： Cornel P. Cobianu , Mihai Gologanu , Ioan Pavelescu , Bogdan Catalin Serban
IPC分类号： G01L9/00 , H01L51/40
CPC分类号： G01L1/18 , G01L1/2287 , G01L9/0052
摘要： A piezoresistive pressure and/or strain sensor micro-machined primarily from plastic and/or glass. In one illustrative embodiment, the piezoresistive pressure sensor is formed on a polymer substrate. A first selectively implanted region is provided in the polymer substrate to create a piezoresistive region in the polymer substrate. A second selectively implanted region is then provided in at least part of the first selectively implanted region to modulate the electrical conductivity of the first selectively implanted region. The illustrative sensor may be selectively implanted with, for example, nitrogen to create the piezoresistive region, and boron to modulate the electrical conductivity of the piezoresistive region. Phosphorus or any other suitable material may also be used to modulate the electrical conductivity of the piezoresistive region, as desired. The piezoresistive pressure/strain sensor may be formed from a single substrate, or two or more substrates, and the resulting pressure/strain sensor may be mounted in a plastic package, if desired.
摘要翻译：主要由塑料和/或玻璃微加工的压阻压力和/或应变传感器。在一个说明性实施例中，压阻式压力传感器形成在聚合物基板上。在聚合物衬底中提供第一选择性注入区域，以在聚合物衬底中产生压阻区域。然后在第一选择性注入区域的至少一部分中提供第二选择注入区域，以调制第一选择性注入区域的电导率。说明性传感器可以选择性地植入例如氮气以产生压阻区域和硼以调节压阻区域的导电性。根据需要，磷或任何其它合适的材料也可用于调节压阻区域的导电性。压阻压力/应变传感器可以由单个基板或两个或更多个基板形成，并且如果需要，所得到的压力/应变传感器可以安装在塑料封装中。

17. 发明授权

US07198981B2 Vacuum sealed surface acoustic wave pressure sensor 有权
标题翻译：真空密封声表面波压力传感器
公开(公告)号：US07198981B2
公开(公告)日：2007-04-03
申请号：US10971140
申请日：2004-10-21
申请人： Viorel V. Avramescu , Cornel P. Cobianu , Ioan Pavelescu
发明人： Viorel V. Avramescu , Cornel P. Cobianu , Ioan Pavelescu
IPC分类号： H01L21/44 , H01L21/48 , H01L21/50
CPC分类号： G01L9/0025 , H01L2224/48091 , H01L2224/48247 , H01L2924/15151 , H01L2924/181 , H01L2924/1815 , Y10T29/49 , Y10T29/49007 , H01L2924/00014 , H01L2924/00012
摘要： A vacuum sealed SAW pressure sensor is disclosed herein, which includes a sensing element configured as a SAW device (e.g., SAW resonator or SAW delay line) supported by a thin diaphragm. The substrate material can be implemented as a quartz wafer (i.e., a “base” wafer). The SAW device can be configured on one side of the wafer and the diaphragm etched on the opposite side. A quartz micromachined pressure sensor can thus be realized, which operates based on a variation of the surface wave velocity of a SAW device situated on the thin diaphragm. The SAW sensor is generally sealed in a vacuum and diaphragm sustains the sensor, thereby implementing a sensor on a wafer scale while allowing for a cost reduction per chip.
摘要翻译：本文公开了一种真空密封的SAW压力传感器，其包括被配置为由薄隔膜支撑的SAW器件（例如，SAW谐振器或SAW延迟线）的感测元件。衬底材料可以实现为石英晶片（即，“基底”晶片）。 SAW器件可以配置在晶片的一侧，并且隔膜在相对侧蚀刻。因此可以实现基于位于薄隔膜上的SAW器件的表面波速度的变化而操作的石英微加工压力传感器。 SAW传感器通常在真空中密封并且隔膜维持传感器，从而在晶片秤上实现传感器，同时允许每个芯片的成本降低。

18. 发明授权

US08563319B2 Differential resonators for NO2 detection and methods related thereto 有权
标题翻译：用于NO2检测的差分谐振器及其相关方法
公开(公告)号：US08563319B2
公开(公告)日：2013-10-22
申请号：US12962067
申请日：2010-12-07
申请人： Bogdan Catalin Serban , Cornel P. Cobianu , Mihai N. Mihaila , Viorel Georgel Dumitru , Octavian Buiu
发明人： Bogdan Catalin Serban , Cornel P. Cobianu , Mihai N. Mihaila , Viorel Georgel Dumitru , Octavian Buiu
IPC分类号： G01N33/00 , G01N29/36
CPC分类号： G01N33/0037 , G01N29/022 , G01N2291/021 , G01N2291/0427 , Y02A50/245
摘要： A nitrogen dioxide sensor comprising a first beam having a first functionalized sensing surface capable of sensing nitrogen dioxide, the first beam capable of producing a first resonant frequency; and a second beam having a second functionalized reference surface not capable of sensing nitrogen dioxide, the second beam capable of producing a second resonant frequency, wherein differential sensing of nitrogen dioxide may be performed, further wherein the first beam and the second beam are each functionalized with one or more soft bases having comparable viscoelastic properties is provided. In one embodiment, the sensor is a nano-sensor capable of low drift and accurate detection of nitrogen dioxide levels at the zeptogram level. Methods of making and using a nitrogen dioxide sensor are also provided.
摘要翻译：一种二氧化氮传感器，包括具有能够感测二氧化氮的第一功能化感测表面的第一光束，所述第一光束能够产生第一谐振频率; 以及具有不能感测二氧化氮的第二功能化参考表面的第二光束，所述第二光束能够产生第二谐振频率，其中可以执行二氧化氮的差分感测，其中第一光束和第二光束均被功能化提供了一种或多种具有可比较的粘弹性的软碱。在一个实施例中，该传感器是能够低水准漂移并准确检测氧化氮水平的纳米传感器。还提供了制造和使用二氧化氮传感器的方法。

19. 发明授权

US07927906B2 Method for MEMS threshold sensor packaging 有权
标题翻译： MEMS阈值传感器封装方法
公开(公告)号：US07927906B2
公开(公告)日：2011-04-19
申请号：US12025517
申请日：2008-02-04
申请人： Cornel P. Cobianu , Viorel-Georgel Dumitru , Ion Georgescu
发明人： Cornel P. Cobianu , Viorel-Georgel Dumitru , Ion Georgescu
IPC分类号： H01L21/00
CPC分类号： G01L9/0098 , B81C1/00333 , B81C1/00873 , B81C2203/0118 , G01K1/08 , G01P1/023 , G01P15/0802 , G01P15/0891 , G01P15/124 , H01L23/10 , H01L29/513 , H01L29/515 , H01L29/78 , H01L2924/0002 , H01L2924/01079 , H01L2924/13091 , H01L2924/00
摘要： Apparatus, methods, and systems for bonding a cover wafer to a MEMS threshold sensors located on a silicon disc. The cover wafer is trenched to form a region when bonded to the silicon wafer that produces a gap over the contact bond pads of the MEMS threshold sensor. The method includes a series of cuts that remove part of the cover wafer over the trenches to permit additional cuts that may avoid the contact bond pads of the MEMS threshold sensor. In addition the glass frit provides for isolation of the sensor with a hermetic seal. The cavity between the MEMS threshold sensor and the cover wafer may be injected with a gas such as nitrogen to influence the properties of the MEMS threshold sensor. The MEMS threshold sensor may be utilized to sense a threshold for pressure, temperature or acceleration.
摘要翻译：用于将覆盖晶片接合到位于硅盘上的MEMS阈值传感器的装置，方法和系统。覆盖晶片被沟槽化以在与硅晶片接合时形成区域，该区域在MEMS阈值传感器的接触焊盘上产生间隙。该方法包括一系列切口，其移除沟槽上的覆盖晶片的一部分以允许可避免MEMS阈值传感器的接触焊盘的额外切口。此外，玻璃料提供具有气密密封的传感器的隔离。 MEMS阈值传感器和盖晶片之间的空腔可以注入诸如氮气的气体以影响MEMS阈值传感器的性质。可以使用MEMS阈值传感器来感测压力，温度或加速度的阈值。

20. 发明授权

US07723961B2 MEMS based battery monitoring technical field 有权
标题翻译：基于MEMS的电池监控技术领域
公开(公告)号：US07723961B2
公开(公告)日：2010-05-25
申请号：US11890570
申请日：2007-08-07
申请人： Cornel P. Cobianu , Viorel-Georgel Dumitru , Ion Georgescu , Mihai Gologanu , Stefan D. Costea
发明人： Cornel P. Cobianu , Viorel-Georgel Dumitru , Ion Georgescu , Mihai Gologanu , Stefan D. Costea
IPC分类号： H02J7/00 , H02J7/04 , H02H7/18 , H02H3/20 , H02H3/24 , H02H3/00 , H02H5/04
CPC分类号： H02J7/0031 , H02J2007/0037
摘要： A battery protection and monitoring system includes a plurality of MAFET (Mechanically Actuated Field Effect Transistor) switches, wherein each MAFET switch among the MAFET switches is capable of switching from an open switch condition to a closed switch condition or vice versa, such that the plurality of MAFET switches are connectable to a battery. Such a system further includes one or more transistors associated with and which communicate electrically with at least one MAFET switch among the MAFET switches. A PPTC (Polymeric Positive Temperature Coefficient) device is also associated with the transistors and the MAFET switches, such that the PPTC device, the MAFET switches and the transistors operate in association with one another and the open switch condition or the closed switch condition of the plurality of MAFET switches to identify, monitor and thus prevent at least one dangerous condition associated with the battery.
摘要翻译：电池保护和监测系统包括多个MAFET（机械致动场效应晶体管）开关，其中MAFET开关中的每个MAFET开关能够从开路开关状态切换到闭合开关状态，反之亦然，使得多个的MAFET开关可连接到电池。这样的系统还包括与MAFET开关中的至少一个MAFET开关相关联并与其通信的一个或多个晶体管。 PPTC（聚合正温度系数）器件还与晶体管和MAFET开关相关联，使得PPTC器件，MAFET开关和晶体管彼此相关联地操作，并且开路开关条件或闭合开关条件多个MAFET开关来识别，监控并因此防止与电池相关联的至少一个危险状况。

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